Incamake Yuburyo Bwiza bwo Kubika Filime Ntoya: MOCVD, Magnetron Sputtering, na PECVD

Mu gukora semiconductor, mugihe Photolithography hamwe na etching aribintu bikunze kuvugwa cyane, tekinike ya epitaxial cyangwa yoroheje yo gushira firime nayo irakomeye. Iyi ngingo itangiza uburyo bwinshi busanzwe bwo kubika firime ikoreshwa muguhimba chip, harimoMOCVD, magnetron, naPECVD.

Ni ukubera iki Ibikorwa bya firime bito ari ngombwa mugukora Chip?

Kugereranya, tekereza umugati usanzwe utetse. Kubwonyine, irashobora kuryoha bland. Ariko, iyo wogeje hejuru yisosi zitandukanye - nka paste y'ibishyimbo biryoshye cyangwa sirupu nziza ya malt - urashobora guhindura uburyohe bwayo. Iyi myenda yongerera uburyohe isa nafirimemuri semiconductor inzira, mugihe umutsima ubwayo uhagarariyesubstrate.

Mu guhimba chip, firime yoroheje ikora imirimo myinshi ikora - kubika, gutwara, gutambuka, kwinjiza urumuri, nibindi - kandi buri gikorwa gisaba tekinike yihariye yo kubitsa.

1. Kubika Ibyuma-Ibinyabuzima Byangiza Imyuka (MOCVD)

MOCVD nubuhanga buhanitse kandi busobanutse bukoreshwa mugutanga ibyuma byujuje ubuziranenge bwa semiconductor yoroheje na nanostructures. Ifite uruhare runini muguhimba ibikoresho nka LED, laseri, na electronics power.

Ibice byingenzi bigize sisitemu ya MOCVD:

• Sisitemu yo Gutanga Gazi
  Ushinzwe kwinjiza neza ibyakorewe mubyumba byerekana. Ibi birimo kugenzura imigendekere ya:

• Imyuka itwara

• Ibyuma-ngenga byabanjirije

• Imyuka ya Hydride
  Sisitemu igaragaramo inzira-nyinshi zo guhinduranya hagati yo gukura no gukuraho uburyo.

• Urugereko
  Umutima wa sisitemu aho gukura kwukuri kugaragara. Ibigize birimo:

  • Graphite susceptor (substrate holder)

  • Ubushyuhe n'ubushyuhe

  • Ibyambu byiza byo kugenzura aho biri

  • Amaboko ya robo yo gukoresha wafer yikora / gupakurura

• Sisitemu yo Kugenzura Gukura
  Igizwe na porogaramu zishobora gukoreshwa na mudasobwa yakira. Ibi byemeza kugenzura neza no gusubiramo muburyo bwo kubitsa.

• Gukurikirana
  Ibikoresho nka pyrometero na ecranometero bipima:

  • Ubunini bwa firime

  • Ubushyuhe bwo hejuru

  • Substrate curvature
    Ibi bishoboza gutanga ibitekerezo-byukuri no guhinduka.

• Sisitemu yo kuvura umunaniro
  Kuvura ibibyara uburozi ukoresheje kubora cyangwa kubitsa imiti kugirango umutekano urusheho kubahirizwa.

Ifunga-Ifatanye-Showerhead (CCS) Iboneza:

Muburyo bwa vertical MOCVD reaction, igishushanyo cya CCS cyemerera imyuka gutera inshinge imwe binyuze mumasimburano asimburana muburyo bwo kwiyuhagira. Ibi bigabanya reaction zidashyitse kandi byongera kuvanga kimwe.

• Uwitekakuzunguruka grafite susceptorirongera ifasha guhuza imipaka ya gaze, kuzamura uburinganire bwa firime hejuru ya wafer.

2. Gukwirakwiza Magnetron

Magnetron sputtering nuburyo bwo guhumeka imyuka yumubiri (PVD) ikoreshwa cyane mukubika firime zoroshye ndetse no gutwikira, cyane cyane mubikoresho bya elegitoroniki, optique, nubutaka.

Ihame ry'akazi:

1. Intego
   Ibikoresho byaturutse kubikwa - ibyuma, okiside, nitride, nibindi - bishyirwa kuri cathode.

2. Urugereko rwa Vacuum
   Inzira ikorwa munsi yumuvu mwinshi kugirango wirinde kwanduza.

3. Igisekuru
   Gazi ya inert, ubusanzwe argon, ioni kugirango ikore plasma.

4. Ikoreshwa rya Magnetique
   Umwanya wa magneti ufunga electron hafi yintego kugirango zongere imikorere ya ionisation.

5. Inzira yo Gusohora
   Ions itera ibisasu, ikuraho atome zinyura mucyumba zigashyira kuri substrate.

Ibyiza bya Magnetron Gusohora:

• Kubika Filime imwehirya no hino.

• Ubushobozi bwo kubitsa ibice bigoye, harimo ibishishwa hamwe nubutaka.

• Ihinduramiterere ryibipimokugenzura neza kubyimbye, ibihimbano, na microstructure.

• Ubwiza bwa Filime Yisumbuyehamwe no gukomera gukomeye hamwe nubukanishi.

• Guhuza Ibikoresho Byagutse, kuva mu byuma kugeza kuri okiside na nitride.

• Igikorwa cyo hasi-Ubushyuhe, bikwiranye n'ubushyuhe-bwimbitse.

3. Plasma-Yongerewe Imiti Yumuyaga (PECVD)

PECVD ikoreshwa cyane mugushira firime yoroheje nka nitride ya silicon (SiNx), dioxyde ya silicon (SiO₂), na silicon amorphous.

Ihame:

Muri sisitemu ya PECVD, imyuka ibanziriza iyinjizwa mu cyumba cya vacuum aho aglow gusohora plasmabyakozwe hakoreshejwe:

• Ibyishimo bya RF

• DC Umuvuduko mwinshi

• Microwave cyangwa isoko ya pulsed

Plasma ikora gazi-fonction reaction, ikabyara ubwoko bwibinyabuzima bubika kuri substrate kugirango bukore firime yoroheje.

Intambwe zo kubitsa:

1. Imiterere ya plasma
   Bashimishijwe numurima wa electromagnetic, gaze ya preursor ionize kugirango ikore radicals na ion.

2. Imyitwarire no gutwara abantu
   Ubu bwoko bugira ingaruka zinyongera mugihe zigenda zerekeza kuri substrate.

3. Ubuso
   Iyo bageze kuri substrate, bamenyekanisha, bakitwara, bagakora firime ikomeye. Ibicuruzwa bimwe na bimwe birekurwa nka gaze.

Inyungu za PECVD:

• Ubumwe buhebujemubihimbano bya firime nubunini.

• Kwizirika gukomeyendetse no ku bushyuhe buke ugereranije.

• Igipimo cyo kubitsa hejuru, gukora bikwiranye n’inganda zingana n’inganda.

4. Ubuhanga bwa firime Ntoya

Gusobanukirwa imiterere ya firime yoroheje ningirakamaro mugucunga ubuziranenge. Ubuhanga busanzwe burimo:

(1) Gutandukanya X-ray (XRD)

• Intego: Gisesengura imiterere ya kristu, imirongo ihagaze, hamwe nicyerekezo.

• Ihame: Ukurikije Amategeko ya Bragg, apima uburyo X-imirasire itandukana binyuze mubintu bya kristu.

• Porogaramu: Crystallography, isesengura ryicyiciro, gupima ibipimo, no gusuzuma firime yoroheje.

(2) Gusikana Microscopi ya Electron (SEM)

• Intego: Itegereze morphologie yo hejuru na microstructure.

• Ihame: Koresha urumuri rwa electron kugirango usuzume icyitegererezo hejuru. Ibimenyetso byamenyekanye (urugero, electroni ya kabiri na inyuma yinyuma) byerekana ibisobanuro birambuye.

• Porogaramu: Ibikoresho siyanse, nanotech, ibinyabuzima, no gusesengura kunanirwa.

(3) Microscopi yingufu za kirimbuzi (AFM)

• Intego: Ishusho igaragara kuri atomic cyangwa nanometero.

• Ihame: Iperereza rityaye risikana hejuru mugihe gikomeza imbaraga zikorana; guhagarikwa guhagaritse kubyara 3D topografiya.

• Porogaramu: Ubushakashatsi bwa Nanostructure, gupima uburinganire bwubutaka, ubushakashatsi bwibinyabuzima.