Gusobanukirwa Byimbitse Sisitemu ya SPC mubikorwa bya Wafer

1. Incamake ya sisitemu ya SPC

SPC nuburyo bukoresha tekinike y'ibarurishamibare mugukurikirana no kugenzura imikorere yinganda. Igikorwa cyacyo nyamukuru ni ukumenya ibintu bidasanzwe mubikorwa byo gukusanya no gukusanya no gusesengura amakuru nyayo, gufasha injeniyeri guhindura no gufata ibyemezo mugihe. Intego ya SPC ni ukugabanya itandukaniro mubikorwa byumusaruro, kwemeza ko ibicuruzwa bikomeza kuba bihamye kandi byujuje ibisobanuro.

SPC ikoreshwa muburyo bwo gutereta kuri:

Kurikirana ibipimo by'ibikoresho bikomeye (urugero, igipimo cya etch, ingufu za RF, umuvuduko wa chambre, ubushyuhe, nibindi)

Gisesengura ibipimo ngenderwaho byingenzi byibicuruzwa (urugero, umurongo, uburebure bwa etch, ubugari bwuruhande, nibindi)

Mugukurikirana ibipimo, injeniyeri zirashobora kumenya imigendekere yerekana imikorere yibikoresho byangiritse cyangwa gutandukana mubikorwa byumusaruro, bityo bikagabanya igipimo cyibisigazwa.

2. Ibice shingiro bya sisitemu ya SPC

Sisitemu ya SPC igizwe nuburyo bwinshi bwingenzi:

Ikusanyamakuru ryamakuru: Ikusanya amakuru nyayo kuva mubikoresho no gutembera (urugero, binyuze muri FDC, sisitemu ya EES) kandi ikandika ibipimo byingenzi nibisubizo byakozwe.

Imbonerahamwe yo Kugenzura Module: Koresha imbonerahamwe yo kugenzura ibarurishamibare (urugero, imbonerahamwe ya X-Bar, imbonerahamwe ya R, imbonerahamwe ya Cp / Cpk) kugira ngo ugaragaze neza uko ibintu bigenda bihinduka kandi bifashe kumenya niba inzira igenzurwa.

Sisitemu yo kumenyesha: Imbarutso itabaza mugihe ibipimo bikomeye birenze imipaka yo kugenzura cyangwa kwerekana impinduka zigenda, bigatuma abajenjeri bafata ingamba.

Isesengura na Raporo Module: Gusesengura intandaro yo kudashingira ku mbonerahamwe ya SPC kandi buri gihe itanga raporo yimikorere kubikorwa nibikoresho.

3. Ibisobanuro birambuye by'imbonerahamwe yo kugenzura muri SPC

Imbonerahamwe igenzura ni kimwe mu bikoresho bikoreshwa cyane muri SPC, bifasha gutandukanya "itandukaniro risanzwe" (riterwa no gutandukana kwa kamere) na "itandukaniro ridasanzwe" (biterwa no kunanirwa kw'ibikoresho cyangwa gutandukana kw'ibikorwa). Imbonerahamwe rusange igenzura harimo:

Imbonerahamwe ya X-Bar na R: Byakoreshejwe mugukurikirana ikigereranyo hamwe nintera mubice byibyakozwe kugirango turebe niba inzira ihagaze.

Ibipimo bya Cp na Cpk: Byakoreshejwe mugupima ubushobozi bwibikorwa, ni ukuvuga, niba umusaruro wibikorwa ushobora guhora wujuje ibisabwa. Cp ipima ubushobozi bushoboka, mugihe Cpk itekereza gutandukana kwikigo gitangirira kumipaka.

Kurugero, murwego rwo guswera, urashobora gukurikirana ibipimo nkibipimo bya etch hamwe nubuso bukabije. Niba igipimo cya etch cyibikoresho runaka kirenze igipimo cyo kugenzura, urashobora gukoresha imbonerahamwe yo kugenzura kugirango umenye niba ibyo ari ibintu bisanzwe cyangwa byerekana imikorere mibi yibikoresho.

4. Gukoresha SPC mubikoresho bya Etching

Muburyo bwo gutobora, kugenzura ibipimo byibikoresho birakomeye, kandi SPC ifasha kunoza imikorere ihamye muburyo bukurikira:

Igenzura ry'imiterere y'ibikoresho: Sisitemu nka FDC ikusanya amakuru nyayo ku bipimo by'ingenzi by'ibikoresho byo gutobora (urugero, ingufu za RF, umuvuduko wa gazi) hanyuma igahuza aya makuru n'imbonerahamwe igenzura SPC kugirango hamenyekane ibibazo by’ibikoresho bishobora kuba. Kurugero, niba ubona ko ingufu za RF ku mbonerahamwe igenzura igenda itandukana gahoro gahoro, urashobora gufata ingamba hakiri kare kugirango uhindurwe cyangwa ubungabunge kugirango wirinde kugira ingaruka kubicuruzwa.

Kugenzura ubuziranenge bwibicuruzwa: Urashobora kandi kwinjiza ibipimo byingenzi byibicuruzwa (urugero, ubujyakuzimu bwa etch, linewidth) muri sisitemu ya SPC kugirango ukurikirane umutekano wabo. Niba bimwe mubicuruzwa byingenzi byerekana ibicuruzwa bitandukana buhoro buhoro intego yagaciro, sisitemu ya SPC izatanga impuruza, byerekana ko inzira ikenewe.

Kubungabunga Ibidukikije (PM): SPC irashobora gufasha muburyo bwiza bwo kubungabunga ibikoresho. Mugusesengura amakuru maremare kumikorere yibikoresho n'ibisubizo byakozwe, urashobora kumenya igihe cyiza cyo gufata neza ibikoresho. Kurugero, mugukurikirana ingufu za RF hamwe nubuzima bwa ESC, urashobora kumenya igihe hakenewe isuku cyangwa gusimbuza ibice, kugabanya igipimo cyo kunanirwa ibikoresho nigihe cyo gukora.

5. Inama zikoreshwa buri munsi kuri sisitemu ya SPC

Iyo ukoresheje sisitemu ya SPC mubikorwa bya buri munsi, intambwe zikurikira zirashobora gukurikizwa:

Sobanura ibipimo ngenderwaho byingenzi (KPI): Menya ibipimo byingenzi mubikorwa byumusaruro kandi ubishyire mugukurikirana SPC. Ibipimo bigomba kuba bifitanye isano rya hafi nibicuruzwa nibikorwa byimikorere.

Shiraho imipaka yo kugenzura no kumenyekanisha imipaka: Ukurikije amakuru yamateka nibisabwa mubikorwa, shiraho imipaka igenzura imipaka ntarengwa yo gutabaza kuri buri kintu. Imipaka yo kugenzura isanzwe ishyirwaho kuri ± 3σ (gutandukana bisanzwe), mugihe imipaka yo gutabaza ishingiye kumiterere yihariye yimikorere nibikoresho.

Gukomeza Gukurikirana no Gusesengura: Gusubiramo buri gihe imbonerahamwe igenzura SPC kugirango isesengure imigendekere yamakuru. Niba ibipimo bimwe birenze imipaka igenzurwa, harakenewe ibikorwa byihuse, nko guhindura ibikoresho cyangwa gukora ibikoresho.

Gukemura ibibazo bidasanzwe no gusesengura imizi: Iyo habaye ibintu bidasanzwe, sisitemu ya SPC yandika amakuru arambuye kubyabaye. Ugomba gukemura no gusesengura intandaro yubusanzwe ukurikije aya makuru. Birashoboka cyane guhuza amakuru ava muri sisitemu ya FDC, sisitemu ya EES, nibindi, kugirango dusesengure niba ikibazo cyatewe no kunanirwa kw'ibikoresho, gutandukana kw'ibikorwa, cyangwa ibidukikije bidukikije.

Gukomeza Gutezimbere: Ukoresheje amakuru yamateka yanditswe na sisitemu ya SPC, menya ingingo zintege nke mubikorwa kandi utange gahunda ziterambere. Kurugero, mugikorwa cyo gutondeka, gusesengura ingaruka zubuzima bwa ESC nuburyo bwo gukora isuku kumuzunguruko wibikoresho no guhora utezimbere ibikoresho bikora.

6. Urubanza rusanzwe

Nkurugero rufatika, tuvuge ko ufite inshingano zo gutunganya ibikoresho E-MAX, kandi cathode ya chambre irimo kwambara imburagihe, bigatuma kwiyongera kwa D0 (inenge ya BARC). Mugukurikirana ingufu za RF nigipimo cya etch binyuze muri sisitemu ya SPC, urabona icyerekezo aho ibyo bipimo bigenda bitandukana gahoro gahoro. Nyuma yo gutabaza kwa SPC, uhuza amakuru yo muri sisitemu ya FDC hanyuma ukamenya ko ikibazo giterwa no kugenzura ubushyuhe budahungabana imbere muri chambre. Noneho ushyira mubikorwa uburyo bushya bwo gukora isuku nuburyo bwo kubungabunga, amaherezo ugabanya agaciro ka D0 kuva kuri 4.3 ukagera kuri 2.4, bityo ukazamura ubuziranenge bwibicuruzwa.

7.Mu XINKEHUI urashobora kubona.

Kuri XINKEHUI, urashobora kugera kuri wafer nziza, yaba wafer ya silicon cyangwa wafer ya SiC. Dufite umwihariko wo gutanga waferi yo mu rwego rwo hejuru inganda zitandukanye, twibanda ku busobanuro n'imikorere.