Gusobanukirwa byimbitse sisitemu ya SPC mu gukora Wafer

1. Incamake ya Sisitemu ya SPC

SPC ni uburyo bukoresha ubuhanga bw'ibarurishamibare mu gukurikirana no kugenzura inzira z'inganda. Inshingano yayo y'ingenzi ni ukumenya ibitagenda neza mu ikorwa ry'ibicuruzwa binyuze mu gukusanya no gusesengura amakuru aboneka mu gihe nyacyo, bigafasha abahanga mu by'imashini gukora impinduka n'ibyemezo ku gihe. Intego ya SPC ni ukugabanya ihindagurika mu ikorwa ry'ibicuruzwa, kugenzura ko ireme ry'ibicuruzwa rihoraho kandi rihuye n'ibisabwa.

SPC ikoreshwa mu gukata kugira ngo:

Kugenzura ibipimo by'ibikoresho by'ingenzi (urugero: igipimo cy'imashini, imbaraga za RF, umuvuduko w'icyumba, ubushyuhe, nibindi)

Sesengura ibipimo by'ingenzi by'ubuziranenge bw'ibicuruzwa (urugero: ubugari bw'umurongo, uburebure bw'ibishushanyo, ubugari bw'inkombe, nibindi)

Mu gukurikirana ibi bipimo, injeniyeri zishobora kubona imiterere igaragaza ko imikorere y'ibikoresho yangiritse cyangwa ko hari ibitagenda neza mu mikorere y'ibikoresho, bityo bikagabanya igipimo cy'ibisigazwa.

2. Ibice by'ibanze bya Sisitemu ya SPC

Sisitemu ya SPC igizwe n'ibice byinshi by'ingenzi:

Isomo ryo Gukusanya Amakuru: Gukusanya amakuru mu buryo bwihuse aturutse ku bikoresho n'imigendekere y'ibikorwa (urugero, binyuze muri sisitemu za FDC, EES) no kwandika ibipimo by'ingenzi n'umusaruro w'umusaruro.

Imbonerahamwe y'Igenzura: Ikoresha imbonerahamwe y'igenzura ry'ibar (urugero, imbonerahamwe ya X-Bar, imbonerahamwe ya R, imbonerahamwe ya Cp/Cpk) kugira ngo igaragaze uburyo ibintu bihagaze neza kandi ifashe kumenya niba inzira iri mu buyobozi.

Sisitemu y'Itangazo: Itera impamyabushobozi iyo ibipimo by'ingenzi birengeje imipaka y'igenzura cyangwa bigaragaza impinduka mu mikorere, bigatuma abahanga mu by'imashini bafata ingamba.

Isesengura n'Itangazo: Isesengura impamvu nyamukuru y'ibitagenda neza ishingiye ku mbonerahamwe za SPC kandi ikora raporo z'imikorere ku buryo buhoraho ku bijyanye n'imikorere n'ibikoresho.

3. Ibisobanuro birambuye by'imbonerahamwe z'igenzura muri SPC

Imbonerahamwe z’igenzura ni kimwe mu bikoresho bikunze gukoreshwa muri SPC, bifasha gutandukanya "impinduka zisanzwe" (ziterwa n'impinduka karemano z'imikorere) n' "impinduka zidasanzwe" (ziterwa n'impinduka z'ibikoresho cyangwa ihindagurika ry'imikorere). Imbonerahamwe zisanzwe z'igenzura zirimo:

Imbonerahamwe ya X-Bar na R: Ikoreshwa mu gukurikirana impuzandengo n'ingano y'umusaruro mu byiciro by'umusaruro kugira ngo harebwe niba inzira ihamye.

Ibipimo bya Cp na Cpk: Bikoreshwa mu gupima ubushobozi bw'imikorere, ni ukuvuga niba umusaruro w'imikorere ushobora kubahiriza ibisabwa. Cp ipima ubushobozi bw'ubushobozi, mu gihe Cp isuzuma itandukaniro ry'aho imikorere iherereye ugereranyije n'imipaka y'ibipimo.

Urugero, mu gikorwa cyo gukata, ushobora gukurikirana ibipimo nk'igipimo cyo gukata no gukara k'ubuso. Iyo igipimo cyo gukata cy'igikoresho runaka kirenze urugero rw'igenzura, ushobora gukoresha imbonerahamwe zo kugenzura kugira ngo umenye niba iri ari ihinduka risanzwe cyangwa ikimenyetso cy'uko ibikoresho bidakora neza.

4. Gukoresha SPC mu bikoresho byo gushushanya

Mu gikorwa cyo gukata, kugenzura ibipimo by'ibikoresho ni ingenzi cyane, kandi SPC ifasha kunoza uburyo ibintu bihagaze mu buryo bukurikira:

Gukurikirana Imiterere y'Ibikoresho: Sisitemu nka FDC zikusanya amakuru y'igihe nyacyo ku bipimo by'ingenzi by'ibikoresho byo gushushanya (urugero: ingufu za RF, urujya n'uruza rwa gazi) hanyuma zigahuza aya makuru n'imbonerahamwe zo kugenzura za SPC kugira ngo hamenyekane ibibazo bishobora kubaho ku bikoresho. Urugero, niba ubona ko imbaraga za RF ku mbonerahamwe yo kugenzura zigenda zitandukana buhoro buhoro n'agaciro kagenwe, ushobora gufata ingamba hakiri kare zo gukosora cyangwa kubungabunga kugira ngo wirinde kugira ingaruka ku bwiza bw'ibicuruzwa.

Igenzura ry’Ubuziranenge bw’Ibicuruzwa: Ushobora kandi gushyira ibipimo by’ingenzi by’ubuziranenge bw’ibicuruzwa (urugero, ubujyakuzimu bw’ibishushanyo, ubugari bw’umurongo) muri sisitemu ya SPC kugira ngo urebe uko bihagaze. Iyo ibimenyetso bimwe na bimwe by’ingenzi by’ibicuruzwa bigenda bitandukana buhoro buhoro n’agaciro k’intego, sisitemu ya SPC izatanga inzogera, igaragaza ko hakenewe impinduka mu mikorere.

Kubungabunga Ibikoresho (PM): SPC ishobora gufasha kunoza gahunda yo kubungabunga ibikoresho. Mu gusesengura amakuru y'igihe kirekire ku mikorere y'ibikoresho n'ibyavuye mu mikorere, ushobora kumenya igihe gikwiye cyo kubungabunga ibikoresho. Urugero, mu kugenzura ingufu za RF na ESC, ushobora kumenya igihe cyo gusukura cyangwa gusimbuza ibice byabyo, ukagabanya igipimo cyo kwangirika kw'ibikoresho no guhagarika gukora.

5. Inama ku ikoreshwa rya buri munsi rya sisitemu ya SPC

Mu gihe ukoresha sisitemu ya SPC mu bikorwa bya buri munsi, intambwe zikurikira zishobora gukurikizwa:

Sobanura Ibipimo by'ingenzi byo kugenzura (KPI): Garagaza ibipimo by'ingenzi cyane mu ikorwa ry'ibicuruzwa kandi ubyinjize mu igenzura rya SPC. Ibi bipimo bigomba kuba bifitanye isano rya hafi n'ubwiza bw'ibicuruzwa n'imikorere y'ibikoresho.

Shyiraho Imipaka yo Kugenzura n'Imipaka yo Kugaragaza Impuguke: Hashingiwe ku makuru y'amateka n'ibisabwa mu mikorere, shyiraho imipaka ikwiye yo kugenzura n'imipaka yo kugaragaza impuguke kuri buri gipimo. Imipaka yo kugenzura ikunze gushyirwa kuri ±3σ (impinduka zisanzwe), mu gihe imipaka yo kugaragaza impuguke ishingiye ku miterere yihariye y'imikorere n'ibikoresho.

Gukurikirana no Gusesengura Ibidahinduka: Suzuma imbonerahamwe za SPC buri gihe kugira ngo usesengure imiterere n'impinduka z'amakuru. Niba hari ibipimo birengeje imipaka y'igenzura, hakenewe ingamba zihuse, nko guhindura ibipimo by'ibikoresho cyangwa gukora isuku y'ibikoresho.

Gukemura Ibitagenda neza no Gusesengura Impamvu Zishingiye ku Bintu Bidasanzwe: Iyo habayeho ikibazo, sisitemu ya SPC yandika amakuru arambuye yerekeye icyo kibazo. Ugomba gukemura no gusesengura impamvu nyamukuru y’ikibazo hashingiwe kuri aya makuru. Akenshi birashoboka guhuza amakuru aturuka kuri sisitemu za FDC, sisitemu za EES, nibindi, kugira ngo usesengure niba ikibazo giterwa n’ibura ry’ibikoresho, ihindagurika ry’imikorere, cyangwa ibintu bikomoka ku bidukikije.

Gukomeza kunoza: Ukoresheje amakuru y’amateka yanditswe na sisitemu ya SPC, garagaza intege nke muri icyo gikorwa kandi utange gahunda zo kunoza. Urugero, mu gikorwa cyo gukata, sesengura ingaruka z’igihe ESC ikora n’uburyo bwo gusukura ku mikorere y’ibikoresho kandi ukomeze kunoza ibipimo by’imikorere y’ibikoresho.

6. Urubanza rw'ishyirwa mu bikorwa ry'amategeko

Urugero rufatika, tuvuge ko ari wowe ushinzwe ibikoresho byo gushushanya E-MAX, kandi cathode y'icyumba irimo kwangirika imburagihe, bigatuma agaciro ka D0 (BARC defect) kiyongera. Mu kugenzura imbaraga za RF n'umuvuduko wa etch unyuze muri sisitemu ya SPC, ubona aho ibi bipimo bigenda bitandukana buhoro buhoro n'agaciro kabyo. Nyuma y'uko inzogera ya SPC itangiye, uhuza amakuru aturuka muri sisitemu ya FDC maze ukamenya ko ikibazo giterwa no kugenzura ubushyuhe budahindagurika imbere muri icyo cyumba. Hanyuma ushyira mu bikorwa uburyo bushya bwo gusukura n'ingamba zo kubungabunga, amaherezo ukagabanya agaciro ka D0 kava kuri 4.3 kakagera kuri 2.4, bityo ukazamura ireme ry'ibicuruzwa.

7. Muri XINKEHUI ushobora kubona.

Muri XINKEHUI, ushobora kugera ku ifu ikwiye, yaba ifu ya silikoni cyangwa ifu ya SiC. Twibanda ku gutanga ifu nziza ku nganda zitandukanye, twibanda ku buhanga n'imikorere myiza.