Kuva mu myaka ya 1980, ubucucike bw'imiyoboro y'amashanyarazi bwakomeje kwiyongera ku gipimo cya 1.5× cyangwa vuba buri mwaka. Guhuza cyane bituma habaho ubucucike bw'amashanyarazi bwinshi no gutanga ubushyuhe mu gihe cy'imikorere.Iyo ubushyuhe budakoreshejwe neza, bushobora gutuma ubushyuhe buhagarara kandi bukagabanya igihe cy'ubuzima bw'ibikoresho by'ikoranabuhanga.
Kugira ngo habeho izamuka ry’ibikenewe mu gucunga ubushyuhe, ibikoresho bipfunyikamo ibikoresho by’ikoranabuhanga bigezweho bifite ubushobozi bwo gutwara ubushyuhe buri hejuru birimo gukorwaho ubushakashatsi bwimbitse no kunozwa.
Ibikoresho by'umuringa/Diyama
01 Diyama n'umuringa
Ibikoresho gakondo byo gupfunyika birimo ibumba, pulasitiki, ibyuma, n'ibindi bikoresho byabyo. Ibumba nka BeO na AlN zigaragaza CTE zihuye na semiconductors, zihamye neza, kandi zitwara ubushyuhe buri ku rugero. Ariko, gutunganya kwazo bigoye, bihendutse cyane (cyane cyane BeO ifite uburozi), no kudakora neza bigabanya ikoreshwa ryabyo. Gupfunyika kwa pulasitiki bitanga ikiguzi gito, uburemere bworoheje, n'ubushyuhe ariko bikagira ingaruka mbi ku bushyuhe no kudahinduka kw'ubushyuhe bwinshi. Ibyuma by'umwimerere (Cu, Ag, Al) bifite ubushyuhe bwinshi ariko CTE irenze urugero, mu gihe alloys (Cu-W, Cu-Mo) zibangamira imikorere y'ubushyuhe. Bityo, ibikoresho bishya byo gupfunyika bihuza ubushyuhe bwinshi na CTE nziza birakenewe byihutirwa.
| Gukomeza ibikorwa | Ubushobozi bwo gutwara ubushyuhe (W/(m·K)) | CTE (×10⁻⁶/℃) | Ubucucike (g/cm³) |
| Diyama | 700–2000 | 0.9–1.7 | 3.52 |
| Uduce twa BeO | 300 | 4.1 | 3.01 |
| Uduce twa AlN | 150–250 | 2.69 | 3.26 |
| Uduce twa SiC | 80–200 | 4.0 | 3.21 |
| Uduce twa B₄C | 29–67 | 4.4 | 2.52 |
| Fibre ya boroni | 40 | ~5.0 | 2.6 |
| Uduce twa TiC | 40 | 7.4 | 4.92 |
| Uduce twa Al₂O₃ | 20–40 | 4.4 | 3.98 |
| Utwana twa SiC | 32 | 3.4 | – |
| Uduce twa Si₃N₄ | 28 | 1.44 | 3.18 |
| Uduce twa TiB₂ | 25 | 4.6 | 4.5 |
| Uduce twa SiO₂ | 1.4 | <1.0 | 2.65 |
Diyama, ibikoresho bisanzwe bizwi cyane (Mohs 10), bifite kandi umwiharikouburyo bwo gutwara ubushyuhe (200–2200 W/(m·K)).
Ifu nto ya diyama
Umuringa, hamwe na ubushyuhe bwinshi/amashanyarazi atwara umuvuduko mwinshi (401 W/(m·K)), ubushobozi bwo gukora ibintu mu buryo bworoshye, no gukoresha neza ikiguzi, bikoreshwa cyane muri IC.
Guhuza iyi miterere,diyama / umuringa (Dia / Cu) igizwe— hamwe na Cu nk'umubumbe na diyama nk'imbaraga—biri kugaragara nk'ibikoresho byo gucunga ubushyuhe byo mu gisekuru gitaha.
Uburyo bwo gukora ingenzi bwa 02
Uburyo busanzwe bwo gutegura diyama/umuringa burimo: ifu y'icyuma, uburyo bwo gukoresha ubushyuhe bwinshi n'umuvuduko mwinshi, uburyo bwo kwibiza mu mazi, uburyo bwo gusohora plasma, uburyo bwo gutera umuti mu buryo bukonje, n'ibindi.
Kugereranya uburyo butandukanye bwo gutegura, imikorere n'imiterere y'ibinyabutabire bya diyama/umuringa bifite ingano imwe
| Igipimo | Ubuhanga mu by'ibyuma | Gukoresha imashini ishyushye mu mashini | Spark Plasma Sintering (SPS) | Ubushyuhe bwinshi (HPHT) | Gutera Spray mu gihe cy'ubukonje | Kwinjira mu buryo bushongesha |
| Ubwoko bwa Diyama | MBD8 | HFD-D | MBD8 | MBD4 | PDA | MBD8/HHD |
| Matrix | Ifu ya Cu 99.8% | Ifu ya Cu ya electrolytic 99.9% | Ifu ya Cu 99.9% | Ifu ya Alloy/Cu pure | Ifu ya Cu yuzuye | Pure Cu bulk/inkoni |
| Guhindura uburyo bwo guhuza | – | – | – | B, Ti, Si, Cr, Zr, W, Mo | – | – |
| Ingano y'uduce (μm) | 100 | 106–125 | 100–400 | 20–200 | 35–200 | 50–400 |
| Igice cy'Ubwinshi (%) | 20–60 | 40–60 | 35–60 | 60–90 | 20–40 | 60–65 |
| Ubushyuhe (°C) | 900 | 800–1050 | 880–950 | 1100–1300 | 350 | 1100–1300 |
| Umuvuduko (MPa) | 110 | 70 | 40–50 | 8000 | 3 | 1–4 |
| Igihe (iminota) | 60 | 60–180 | 20 | 6–10 | – | 5–30 |
| Ubucucike bw'ibipimo (%) | 98.5 | 99.2–99.7 | – | – | – | 99.4–99.7 |
| Imikorere | ||||||
| Uburyo bwiza bwo gutwara ubushyuhe (W/(m·K)) | 305 | 536 | 687 | 907 | – | 943 |
Ubuhanga busanzwe bwa Dia / Cu bukubiyemo:
(1)Ubuhanga mu by'ibyuma
Ifu ya diyama ivanze na Cu iratsindagirwa kandi igashyirwamo ibintu bivanze. Nubwo bihendutse kandi byoroshye, ubu buryo butanga ubucucike buke, imiterere mito idahuye, n'ingano nto z'icyitegererezo.
Sishami rihuza
(1)Ubushyuhe bwinshi (HPHT)
Ikoresheje imashini zikoresha insinga nyinshi, Cu ishongeshejwe yinjira mu duce twa diyama mu bihe bikomeye cyane, igatanga ibintu byinshi bivanze. Ariko, HPHT isaba ibikoresho bihenze kandi ntibikwiriye gukorwa ku bwinshi.
Cimashini yo gusohora utuntu two mu mutwe
(1)Kwinjira mu buryo bushongesha
Ifu ya Molten Cu yinjira mu duce twa diyama binyuze mu kwinjira hakoreshejwe umuvuduko cyangwa mu mitsi. Ibice bivamo bigira ubushobozi bwo gutwara ubushyuhe bwa >446 W/(m·K).
(2)Spark Plasma Sintering (SPS)
Umuriro urimo guhumeka uhuha vuba cyane ifu ivanze iyo urimo gushyuha. Nubwo ukora neza, imikorere ya SPS iragabanuka ku bice bya diyama >65 vol%.
Imbonerahamwe y'icyitegererezo cy'uburyo bwo gusohora plasma
(5) Gushyiramo spray ikonje
Ifu yihuta kandi igashyirwa ku byuma bito. Ubu buryo bushya buhura n'imbogamizi mu kugenzura irangi ry'ubuso no kugenzura imikorere y'ubushyuhe.
03 Guhindura Interineti
Mu gutegura ibikoresho bivanze, kunywesha hagati y’ibice ni ngombwa kugira ngo inzira y’ibivanze ibe ikenewe kandi ni ikintu cy’ingenzi bigira ingaruka ku miterere y’ibihuza n’imiterere y’ibihuza. Kuba diyama na Cu bitanywesha bihuza diyama bituma habaho ubushyuhe bwinshi cyane. Kubwibyo, ni ngombwa cyane gukora ubushakashatsi ku mikorere y’ibihuza byombi binyuze mu buryo butandukanye bwa tekiniki. Muri iki gihe, hari uburyo bubiri bwo kunoza ikibazo cy’imikoreshereze y’ibihuza hagati ya diyama na Cu: (1) Gutunganya diyama mu buryo bwo guhindura ubuso; (2) Gutunganya umuringa mu buryo bwo gushushanya.
Imbonerahamwe y'impinduka: (a) Gushyira diyama mu buryo butaziguye ku buso bwayo; (b) Guteranya matrix
(1) Guhindura ubuso bwa diyama
Gushyiramo ibintu bikora nka Mo, Ti, W na Cr ku buso bw'igice cyo gushimangira bishobora kunoza imiterere y'ubuso bwa diyama, bityo bikongera imikorere yayo y'ubushyuhe. Gutunganya bishobora gutuma ibintu byavuzwe haruguru bishobora gukorana na karuboni ku buso bw'ifu ya diyama kugira ngo bikore urwego rw'impinduka za karuboni. Ibi binoza imiterere y'ubutose hagati ya diyama n'icyuma, kandi irangi rishobora kubuza imiterere ya diyama guhinduka iyo ubushyuhe bwinshi bukabije.
(2) Guteranya umuringa mu gice cy'umuringa
Mbere yo gutunganya ibikoresho bivanze, hakorwa isuku mbere yo gukoresha umuringa w’icyuma, ushobora gukora ibikoresho bivanze bifite ubushyuhe bwinshi. Gukoresha ibintu bivanze muri matrix y’umuringa ntibishobora gusa kugabanya neza inguni iri hagati ya diyama n’umuringa, ahubwo binatanga urwego rwa karubide rushobora gushonga neza muri matrix y’umuringa ku gice cya diyama / Cu nyuma yo gukora. Muri ubu buryo, icyuho kinini kiri ku gice cy’ibikoresho kirahindurwa kandi cyuzuzwa, bityo bikanoza uburyo ubushyuhe butwara.
04 Umwanzuro
Ibikoresho bisanzwe byo gupfunyikamo ntibihagije mu gucunga ubushyuhe buturuka ku binyabutabire bigezweho. Ibinyabutabire bya Dia/Cu, bifite CTE ishobora guhindurwa hamwe n'ubushyuhe bwinshi cyane, ni igisubizo gihindura imikorere y'ibikoresho by'ikoranabuhanga byo mu gisekuru gitaha.
Nk'ikigo gikoresha ikoranabuhanga rihanitse gihuza inganda n'ubucuruzi, XKH yibanda ku bushakashatsi no guteza imbere no gukora diyama/umuringa hamwe n'ibikoresho by'icyuma bigezweho nka SiC/Al na Gr/Cu, bitanga ibisubizo bishya byo gucunga ubushyuhe bifite ubushobozi bwo gutwara ubushyuhe burenze 900W/(m·K) mu bijyanye no gupakira ibikoresho by'ikoranabuhanga, module z'amashanyarazi n'ikirere.
XKH'Ibikoresho bya laminate bikozwe mu muringa wa diyama:
Igihe cyo kohereza: Gicurasi-12-2025