Karubide ya silikoni (SiC) si ikoranabuhanga ry'ingenzi mu kurinda igihugu gusa, ahubwo ni n'igikoresho cy'ingenzi ku nganda z'imodoka n'ingufu ku isi. Nk'intambwe ya mbere y'ingenzi mu gutunganya SiC ikoresheje kristale imwe, gukata wafer bigena neza ubwiza bw'isuku no gusiga irangi nyuma yaho. Uburyo gakondo bwo gukata akenshi butera imiyoboro yo hejuru n'iyo munsi y'ubutaka, byongera igipimo cyo kuvunika kwa wafer n'ikiguzi cyo kuyikora. Kubwibyo, kugenzura kwangirika kw'imiyoboro yo hejuru ni ingenzi mu guteza imbere ikorwa ry'ibikoresho bya SiC.
Muri iki gihe, SiC ingot scatting ihanganye n'imbogamizi ebyiri zikomeye:
- Igihombo kinini cy'ibikoresho mu gukata insinga gakondo:Ubukana bukabije bwa SiC n'ubudahangarwa bwayo bituma ishobora gucikagurika no kwangirika mu gihe cyo gukata, gusya no gusya. Dukurikije amakuru ya Infineon, gukata insinga nyinshi hakoreshejwe diyama bihuza diyama bikoresha diyama bikoresha 50% gusa mu gukata, igihombo cyose cya wafer imwe kigera kuri ~ 250 μm nyuma yo gusya, bigatuma ibikoresho bidashobora gukoreshwa biba bike cyane.
- Umusaruro muke kandi igihe kirekire cyo kuwukora:Imibare mpuzamahanga y’umusaruro igaragaza ko gukora wafer 10.000 hakoreshejwe uburyo bwo gukata insinga nyinshi buhora bukorwa amasaha 24 bifata iminsi 273. Ubu buryo busaba ibikoresho byinshi n’ibikoresho bikoreshwa mu gihe butanga ubukana bwinshi n’umwanda ku buso (umukungugu, amazi mabi).
Kugira ngo ibi bibazo bikemuke, itsinda rya Porofeseri Xiu Xiangqian muri Kaminuza ya Nanjing ryakoze ibikoresho byo gukata irangi neza cyane bya SiC, bikoresha ikoranabuhanga rya laser ryihuse cyane kugira ngo bigabanye inenge kandi byongere umusaruro. Ku gikoresho cya SiC cya mm 20, iri koranabuhanga rikubye kabiri umusaruro wa wafer ugereranije no gukata insinga gakondo. Byongeye kandi, wafers za laser zigaragaza imiterere idasanzwe ya geometrike, bigatuma ubugari bugabanuka kugeza kuri 200 μm kuri wafer kandi bikongera umusaruro.
Ibyiza by'ingenzi:
- Ubushakashatsi n'Iterambere byarangiye ku bikoresho binini bya prototype, byemejwe ko bishobora gukatwamo utubuto twa SiC twa santimetero 4–6 hamwe n'utubuto twa SiC twa santimetero 6.
- Gukata ingot ya santimetero 8 biri mu igenzura.
- Igihe gito cyane cyo gukata ingano, umusaruro mwinshi ku mwaka, no kongera umusaruro urenze 50%.
Igice cya XKH cya SiC cy'ubwoko bwa 4H-N
Isoko rishobora gushoboka:
Ibi bikoresho biteganijwe kuba igisubizo cy'ingenzi cyo gukata ingot ya SiC ya santimetero 8, ubu yiganjemo ibicuruzwa by'Abayapani bitumizwa mu mahanga bifite ibiciro biri hejuru kandi bifite imbogamizi zo kohereza mu mahanga. Ubusanzwe ibikoresho byo gukata/kugabanya imashini hakoreshejwe laser birenga 1.000, nyamara nta bundi buryo bwakozwe n'Abashinwa buhari. Ikoranabuhanga rya Kaminuza ya Nanjing rifite agaciro gakomeye ku isoko n'ubushobozi mu bukungu.
Uguhuza ibintu byinshi:
Uretse SiC, ibi bikoresho bifasha gutunganya gallium nitride (GaN), aluminiyumu oxyde (Al₂O₃), na diyama hakoreshejwe laser, bikongera imbaraga zabyo mu nganda.
Mu guhindura uburyo bwo gutunganya SiC wafer, ubu bushya bukemura ibibazo bikomeye mu nganda za semiconductor mu gihe bujyanye n'impinduka ku isi mu bijyanye n'ibikoresho bikora neza kandi bikoresha ingufu nke.
Umwanzuro
Nk'umuyobozi mu nganda mu gukora substrate za silicon carbide (SiC), XKH inzobere mu gutanga substrate za SiC za santimetero 2-12 (harimo 4H-N/SEMI-type, 4H/6H/3C-type) zigenewe inzego zikura cyane nka za energy vehicles nshya (NEVs), photovoltaic (PV) energy storage, na 5G communications. Dukoresheje ikoranabuhanga rya wafer rinini rigabanya igihombo gito hamwe n'ikoranabuhanga ryo gutunganya neza , twageze ku musaruro mwinshi wa substrate za santimetero 8 n'iterambere mu ikoranabuhanga rya SiC crystal growth technology rya santimetero 12, bigabanya cyane ikiguzi cya chip kuri buri unit. Dukomeje, tuzakomeza kunoza uburyo bwo gukata laser bwa laser mu rwego rwa ingot no kugenzura stress kugira ngo twongere umusaruro wa substrate wa santimetero 12 ku rwego rw'isi, duhe imbaraga inganda za SiC zo mu gihugu kugira ngo zisenye ubucuruzi mpuzamahanga kandi zihutishe ikoreshwa ryazo mu nzego zigezweho nka za chips zo mu rwego rw'imodoka na AI server power supply.
Igice cya XKH cya SiC cy'ubwoko bwa 4H-N
Igihe cyo kohereza: Kanama-15-2025