Ibintu by'ingenzi bigomba kwitabwaho mu gutegura Silicon Carbide Single Crystal nziza cyane

Uburyo bw'ingenzi bwo gutegura silicon imwe mu kristalo burimo: Gutwara umwuka ushyushye (PVT), Gukura kw'ibikomoka ku mbuto (TSSG), no Gushyira umwuka ushyushye mu bushyuhe bwinshi (HT-CVD). Muri ubwo buryo, uburyo bwa PVT bukoreshwa cyane mu nganda bitewe n'ibikoresho byoroshye, uburyo bworoshye bwo kugenzura, hamwe n'ikiguzi gito cy'ibikoresho n'imikorere.

Ingingo z'ingenzi za tekiniki ku ikura rya PVT rya Silicon Carbide Crystals

Mu gihe cyo guhinga kristu za silicon carbide hakoreshejwe uburyo bwa Physical Vapor Transport (PVT), ingingo zikurikira za tekiniki zigomba kwitabwaho:

1. Ubuziranenge bw'ibikoresho bya Graphite mu cyumba cyo gukuramo: Ingano y'umwanda mu bice bya graphite igomba kuba iri munsi ya 5 × 10⁻⁶, mu gihe ingano y'umwanda mu byuma bikingira igomba kuba iri munsi ya 10 × 10⁻⁶. Ibintu nka B na Al bigomba kubikwa munsi ya 0.1 × 10⁻⁶.
2. Guhitamo neza imbuto za kristu: Ubushakashatsi bwakozwe ku buryo bw'ibanze bwerekana ko isura ya C (0001) ikwiriye guhinga kristu za 4H-SiC, mu gihe isura ya Si (0001) ikoreshwa mu guhinga kristu za 6H-SiC.
3. Gukoresha kristu z'imbuto zidafite umurongo umwe: kristu z'imbuto zidafite umurongo umwe zishobora guhindura uburinganire bw'imikurire ya kristu, bigagabanya inenge muri kristu.
4. Uburyo bwo guhuza imbuto mu buryo bwiza cyane.
5. Kubungabunga Ihindagurika ry'Uburyo bwo Gukura bwa Crystal mu Gihe cy'Iterambere.

Ikoranabuhanga ry'ingenzi mu gukura kwa Silicon Carbide Crystal

1. Ikoranabuhanga ryo gukoresha imiti igabanya ubukana bw'ifu ya Silicon Carbide
   Gutera Ce ifu ya silicon carbide ihagije bishobora gutuma kristu imwe ya 4H-SiC ikura neza. Ibisubizo by'ingirakamaro bigaragaza ko Ce doping ishobora:

• Ongera umuvuduko wo gukura kwa kristu za silikoni.
• Genzura icyerekezo cy'imikurire ya kristu, bigatuma irushaho kuba imwe kandi ihoraho.
• Kurandura imyanda, kugabanya inenge no koroshya ikorwa rya kristu imwe n'iy'ubuziranenge.
• Kubuza kwangirika kw'ikirahure inyuma no kongera umusaruro wacyo wa kristale imwe.

• Ikoranabuhanga ryo kugenzura ubushyuhe bw'imirongo n'imirongo
  Ubushyuhe bw'axial bugira ingaruka ku bwoko bw'ubushyuhe n'imikorere ya kristu. Ubushyuhe buke cyane bushobora gutuma habaho imiterere ya polycrystalline no kugabanya umuvuduko w'ubushyuhe. Ubushyuhe bw'axial n'ubushyuhe bw'axial butuma kristu ikura vuba mu buryo burambye ariko bugakomeza kugira ubwiza buhamye.
• Ikoranabuhanga ryo kugenzura imiterere y'ikirere (BPD)
  Ubusembwa bwa BPD bukunze kubaho iyo stress yo gukaraba mu gikoresho cya kristu irenze stress ikomeye ya SiC, bigatuma sisitemu zo gukaraba zikora neza. Kubera ko BPD ziba zigororotse ku cyerekezo cy’ikura rya kristu, zibaho cyane cyane mu gihe cy’ikura rya kristu no gukonja.
• Ikoranabuhanga ryo Guhindura Igipimo cy'Ingano y'Umwotsi mu Gice
  Kongera igipimo cya karuboni-kuri-silicon mu mikurire ni uburyo bwiza bwo gushimangira imikurire ya kristale imwe. Igipimo cyo hejuru cya karuboni-kuri-silicon kigabanya guterana kw'intambwe nini, bikabungabunga amakuru y'imikurire y'imbuto, kandi bigabanya iremwa rya politike.
• Ikoranabuhanga ryo Kugenzura Imihangayiko Mike
  Imihangayiko mu gihe cy’ikura rya kristu ishobora gutera imiterere ya kristu igoramye, bigatuma kristu itagira ubuziranenge cyangwa ikameneka. Imihangayiko myinshi yongera kandi kwimuka kw’imirongo y’imbere y’urukuta, ibyo bikaba byagira ingaruka mbi ku bwiza bw’urwego rwa epitaxial n’imikorere y’igikoresho.

Ishusho yo gupima SiC wafer ya santimetero 6

Uburyo bwo kugabanya stress muri kristu:

• Hindura uburyo ubushyuhe bukwirakwira mu murima n'ibipimo byawo kugira ngo kristu imwe ya SiC ikure hafi y'ubugari.
• Ongera imiterere y'icyuma gikoreshwa mu gutwika kugira ngo gikure neza nta mbogamizi nyinshi.
• Hindura uburyo bwo gufata kristu y'imbuto kugira ngo ugabanye ubushyuhe hagati ya kristu y'imbuto n'ikiyiko cya grafiti. Uburyo busanzwe ni ugusiga icyuho cya mm 2 hagati ya kristu y'imbuto n'ikiyiko cya grafiti.
• Kunoza inzira zo gupfunyika ukoresheje uburyo bwo gupfunyika mu ifuru, uhindura ubushyuhe n'igihe bimara kugira ngo ukureho burundu stress imbere.

Ibyerekezo by'ejo hazaza mu ikoranabuhanga ryo gukura kwa Silicon Carbide Crystal

Urebye imbere, ikoranabuhanga ryo gutegura SiC single crystal nziza rizatera imbere muri ibi bikurikira:

1. Iterambere Rinini
   Ubugari bwa kristu imwe ya silikoni ya carbide bwavuye kuri milimetero nke bugera kuri santimetero 6, santimetero 8, ndetse na santimetero nini 12. kristu nini za SiC zituma umusaruro urushaho kuba mwiza, zigabanya ikiguzi, kandi zigahaza ibyifuzo by'ibikoresho bikoresha ingufu nyinshi.
2. Iterambere ry'Ireme Rihanitse
   Uduce duto twa SiC two mu rwego rwo hejuru ni ingenzi ku bikoresho bikora neza cyane. Nubwo hari intambwe ikomeye yatewe, hari inenge nka micropipes, dislocations, n'imyanda, bigira ingaruka ku mikorere n'uburyo igikoresho cyizewe.
3. Kugabanya Ikiguzi
   Ikiguzi kinini cyo gutegura SiC crystal kigabanya ikoreshwa ryayo mu nzego zimwe na zimwe. Kunoza inzira zo gukura, kunoza imikorere myiza y'umusaruro, no kugabanya ikiguzi cy'ibikoresho fatizo bishobora gufasha kugabanya ikiguzi cy'umusaruro.
4. Iterambere ry'ubwenge
   Hamwe n'iterambere mu buhanga bwa AI na big data, ikoranabuhanga ryo gukura kwa kristale ya SiC rizarushaho gukoresha ibisubizo by'ubwenge. Gukurikirana no kugenzura mu buryo bufatika hakoreshejwe sensors na sisitemu zikora bizamura umutekano w'imikorere no kugenzura. Byongeye kandi, gusesengura amakuru menshi bishobora kunoza ibipimo by'iterambere, kunoza ubwiza bwa kristale no gukora neza.

Ikoranabuhanga ryo gutegura karuboni imwe ya silikoni nziza ni ingenzi mu bushakashatsi ku bikoresho bya semiconductor. Uko ikoranabuhanga rigenda ritera imbere, ubuhanga bwo gukura kwa kristu ya SiC buzakomeza gutera imbere, butanga urufatiro rukomeye rw'ikoreshwa mu bintu bishyuha cyane, bikunze gukoreshwa inshuro nyinshi, n'ibikoresha ingufu nyinshi.