Uburyo bw'ingenzi bwo guhinga kristale imwe ya silicon carbide burimo gutwara umwuka ushyushye (PVT), gukuraho umuti ushyushye cyane (TSSG), na HT-CVD mu bushyuhe bwinshi.

Muri ibyo, uburyo bwa PVT bwabaye uburyo bw'ibanze mu gukora ibikoresho mu nganda bitewe n'uko bworoshye gushyiraho ibikoresho, koroshya imikorere no kubigenzura, ndetse n'ibiciro by'ibikoresho n'imikorere biragabanuka.

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Ingingo z'ingenzi za tekiniki zo gukura kwa SiC Crystal hakoreshejwe uburyo bwa PVT

Kugira ngo uhinge kristu za silikoni za karuboni hakoreshejwe uburyo bwa PVT, ibintu byinshi bya tekiniki bigomba kugenzurwa neza:

1. Ubuziranenge bw'ibikoresho bya Grafite mu rwego rw'ubushyuhe
   Ibikoresho bya grafiti bikoreshwa mu ishami rikoresha ubushyuhe bwa kristu bigomba kuzuza ibisabwa byose byo gutunganywa. Ingano y'umwanda mu bice bya grafiti igomba kuba munsi ya 5 × 10⁻⁶, naho ku byuma bikingira ubushyuhe bigomba kuba munsi ya 10 × 10⁻⁶. By'umwihariko, ibikubiye muri boron (B) na aluminiyumu (Al) bigomba kuba munsi ya 0.1 × 10⁻⁶.

2. Polarité Ikwiye ya Crystal y'imbuto
   Amakuru y’ubuhanga agaragaza ko C-face (0001) ikwiriye guhinga kristu za 4H-SiC, mu gihe Si-face (0001) ikwiriye guhinga kristu za 6H-SiC.

3. Gukoresha kristu z'imbuto zitari ku murongo
   Imbuto zitari ku murongo zishobora guhindura uburyo zikura, zikagabanya inenge za kristu, kandi zigatuma kristu iba nziza kurushaho.

4. Uburyo bwizewe bwo guhuza imbuto n'urutare
   Guhuza neza hagati y'ikimera cy'imbuto n'ikigifashe ni ingenzi kugira ngo kigire ubuzima bwiza mu gihe cyo gukura.

5. Kubungabunga Ihindagurika ry'Uburyo bwo Gukura
   Mu gihe cyose cy’ikura rya kristu, imiterere y’ikura igomba kuguma ihamye kugira ngo kristu irusheho gutera imbere neza.

 

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Ikoranabuhanga ry'ibanze mu iterambere rya SiC Crystal

1. Ikoranabuhanga ryo gukoresha imiti igabanya ubukana bw'ifu ya SiC

Gukoresha ifu ya SiC hamwe na cerium (Ce) bishobora gutuma ubwoko bumwe bwa polytype nka 4H-SiC butera imbere. Ubushakashatsi bwagaragaje ko gukoresha Ce doping bishobora:

• Ongera umuvuduko wo gukura kwa kristu za SiC;

• Kunoza icyerekezo cya kristalo kugira ngo ikure neza kandi ibe mu cyerekezo kimwe;

• Kugabanya imyanda n'ubusembwa;

• Kubuza kwangirika kw'inyuma kwa kristu;

• Ongera igipimo cy'umusaruro wa kristale imwe.

2. Kugenzura ubushyuhe bw'imirongo n'imirongo y'ubushyuhe

Imiterere y'ubushyuhe bw'axial igira ingaruka ku bwoko bwa kristu bwa polytype n'umuvuduko wo gukura. Imiterere y'ubushyuhe buto cyane ishobora gutuma ubwoko bwa polytype bushyirwamo ndetse ikagabanya uburyo bwo gutwara ibintu mu gihe cy'umwuka. Gukoresha neza imiterere y'ubushyuhe bw'axial n'ubushyuhe bw'axial ni ingenzi kugira ngo kristu ikure vuba kandi ihamye kandi igire ubuziranenge buhamye.

3. Ikoranabuhanga ryo kugenzura imiterere y'ikirere (BPD)

BPD zibaho ahanini bitewe n’umuvuduko ukabije urenze urugero rw’ingenzi rwa kristu za SiC, bigatuma sisitemu zo gucika zikora. Kubera ko BPD ziba zigororotse ku cyerekezo cy’iterambere, akenshi zivuka mu gihe cy’ikura rya kristu no gukonja. Kugabanya umuvuduko w’imbere mu mubiri bishobora kugabanya cyane ubucucike bwa BPD.

4. Kugenzura Igipimo cy'Imiterere y'Umwotsi mu Gice

Kongera ikigereranyo cya karuboni-kuri-silicon mu cyiciro cy'umwuka ni uburyo bwizewe bwo guteza imbere gukura kwa polytype imwe. Igipimo cyo hejuru cya C/Si kigabanya gukurura kwa macrostep kandi kikagumana umurage w'ubuso buva kuri kristu y'imbuto, bityo bigahagarika iremwa rya polytype zitifuzwa.

5. Uburyo bwo gukura mu buryo buciriritse

Guhangayika mu gihe cy'ikura rya kristu bishobora gutera imiyoboro y'urukiramende igoramye, imiturire, n'ubucucike bwa BPD buri hejuru. Izi nenge zishobora kuzamuka zikagera mu bice bya epitaxial kandi zigira ingaruka mbi ku mikorere y'igikoresho.

Ingamba nyinshi zo kugabanya umuvuduko w’imbere mu cyuma zirimo:

• Guhindura uburyo ubushyuhe bukwirakwira n'ibipimo by'imikorere kugira ngo biteze imbere iterambere ry'ubushyuhe;

• Gutunganya imiterere y'icyuma gikoreshwa mu gutwika kugira ngo kristu ikure neza nta mbogamizi za mekanike;

• Kunoza imiterere y'aho imbuto zibikwa kugira ngo bigabanye ubushyuhe hagati y'imbuto na grafiti mu gihe cyo gushyushya, akenshi hagasigara icyuho cya mm 2 hagati y'imbuto n'aho zibikwa;

• Gutunganya inzira zo gukurura, gutuma kristalo ikonja n'itanura, no guhindura ubushyuhe n'igihe bimara kugira ngo bigabanye burundu stress imbere mu mubiri.

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Impinduka mu ikoranabuhanga ryo gukura kwa SiC Crystal

1. Ingano nini za kristu
Uduce twa SiC single crystal diameter twiyongereye kuva kuri milimetero nke gusa kugera kuri wafers za santimetero 6, santimetero 8, ndetse na santimetero 12. Wafers nini zongerera umusaruro umusaruro kandi zigabanya ikiguzi, mu gihe zihura n'ibikenewe mu bikoresho bikoresha ingufu nyinshi.

2. Ubwiza bwa Crystal buri hejuru
Amakristu yo mu bwoko bwa SiC meza ni ingenzi ku bikoresho bikora neza. Nubwo hari impinduka zikomeye, amakristu aracyagaragaza inenge nk'imiyoboro mito, kwimuka kw'ibikoresho, n'imyanda, byose bishobora kwangiza imikorere n'ubwizigirwa bw'ibikoresho.

3. Kugabanya Ikiguzi
Umusaruro wa kristu ya SiC uracyahenze cyane, bigatuma habaho kugabanya ikoreshwa ryawo mu buryo bwagutse. Kugabanya ikiguzi binyuze mu nzira nziza zo gukura, kongera umusaruro, no kugabanya ikiguzi cy'ibikoresho fatizo ni ingenzi mu kwagura ikoreshwa ry'isoko.

4. Inganda zikora ibintu mu buryo bw'ubwenge
Bitewe n'iterambere mu bwenge bw'ubukorano n'ikoranabuhanga rinini ry'amakuru, iterambere rya kristale ya SiC riri kugenda rigana ku mikorere y'ubwenge kandi yikora. Ibikoresho byo kugenzura bishobora gukurikirana no guhindura imiterere y'imikurire mu gihe nyacyo, bikongera umurava w'imikurire n'uburyo bwo guteganya igihe. Isesengura ry'amakuru rishobora kunoza cyane ibipimo by'imikurire n'ubwiza bwa kristale.

Iterambere ry'ikoranabuhanga ryo gukuraho kristale imwe nziza ya SiC ni ikintu cy'ingenzi mu bushakashatsi ku bikoresho bya semiconductor. Uko ikoranabuhanga ritera imbere, uburyo bwo gukuraho kristale buzakomeza gutera imbere no kunoza, bitanga urufatiro rukomeye rw'ikoreshwa rya SiC mu bikoresho by'ikoranabuhanga bikoresha ubushyuhe bwinshi, inshuro nyinshi, n'imbaraga nyinshi.