Incamake:Twakoze uburyo bwa litiyumu tantalate bukoresha insulator bwa 1550 nm bufite igihombo cya 0.28 dB/cm n'ubwiza bwa resonator ya ring ya miliyoni 1.1. Ikoreshwa rya χ (3) ritari linearity muri fotoniki zidafite linear ryakoreweho ubushakashatsi. Ibyiza bya litiyumu niobate kuri insulator (LNoI), igaragaza imiterere myiza ya χ (2) na χ (3) idafite linear hamwe n'uburyo bukomeye bwo gufungana bitewe n'imiterere yayo ya "insulator-on", byatumye habaho iterambere rikomeye mu ikoranabuhanga rya waveguide ku bikoresho byihuta cyane na fotoniki zidafite linear [1-3]. Uretse LN, litiyumu tantalate (LT) nayo yakoreweho ubushakashatsi nk'ibikoresho bya fotoniki bidafite linear. Ugereranyije na LN, LT ifite urwego rwo hejuru rw'ibyangiritse bya optique n'idirishya rinini ry'urumuri rw'urumuri [4, 5], nubwo ibipimo byayo bya optique, nka refractive index na nonlinear coefficients, bisa n'ibya LN [6, 7]. Bityo, LToI igaragara nk'ikindi gikoresho gikomeye cyakoreshwa mu gukoresha ingufu nyinshi za optique nonlinear photonic. Byongeye kandi, LToI irimo kuba ibikoresho by'ibanze mu bikoresho bya filtering surface acoustic wave (SAW), bikoreshwa mu ikoranabuhanga rigezweho rya telefoni na wireless. Muri uru rwego, LToI wafers zishobora kuba ibikoresho bikunze gukoreshwa mu gukoresha fotonic. Ariko, kugeza ubu, ni ibikoresho bike gusa bya fotonic bishingiye kuri LToI byagaragaye, nka microdisk resonators [8] na electro-optic phase shifters [9]. Muri iyi nyandiko, turagaragaza LToI waveguide idakomeye n'ikoreshwa ryayo muri ring resonator. Byongeye kandi, dutanga χ (3) imiterere idasobanutse ya LToI waveguide.
Ingingo z'ingenzi:
• Itanga wafer za LToI za santimetero 4 kugeza kuri santimetero 6, wafer za lithium tantalate zifite ubugari buri hagati ya nanometero 100 na 1500, hakoreshejwe ikoranabuhanga ryo mu rugo n'uburyo bugezweho.
• SINOI: Udupira twa silikoni nitride duto cyane kandi tudakomeye.
• SICOI: Ibyuma bya silikoni bya karubide y'ubushyuhe bwinshi bifite ubwiza buhanitse bwo gushyiramo ibyuma bya silikoni bya karubide y'ubushyuhe.
• LTOI: Irushanwa rikomeye na litiyumu niobate, litiyumu tantalate wafers.
• LNOI: LNOI ya santimetero 8 ifasha mu gukora ku bwinshi ibicuruzwa bya lithium niobate binini bya thin-film.
Gukora ku mashusho ya Insulator Waveguides:Muri ubu bushakashatsi, twakoresheje utubati twa LToI twa santimetero 4. Uruti rwo hejuru rwa LT ni utwuma twa LT twa Y-cut twagurishijwe ku gipimo cya 42° dukoreshwa mu bikoresho bya SAW, dufatanye neza na substrate ya Si ifite uruti rwa 3 µm rw'ubugari bwa thermal oxide, dukoresha uburyo bwo gukata neza. Ishusho ya 1(a) igaragaza ishusho yo hejuru ya wafer ya LToI, ifite ubugari bwa 200 nm. Twasuzumye ubukana bw'uruti rwo hejuru rwa LT dukoresheje mikorosikopi ya atome (AFM).
Ishusho ya 1.(a) Ishusho yo hejuru ya LToI wafer, (b) Ishusho ya AFM y'ubuso bw'urwego rwo hejuru rwa LT, (c) Ishusho ya PFM y'ubuso bw'urwego rwo hejuru rwa LT, (d) Igice cy'ishusho cya LToI waveguide, (e) Imiterere y'ibanze ya TE mode yabazwe, na (f) Ishusho ya SEM y'inkingi ya LToI waveguide mbere yo gushyirwaho kwa SiO2. Nkuko bigaragara ku Ishusho ya 1 (b), ubukana bw'ubuso buri munsi ya nm 1, kandi nta mirongo y'ibara yagaragaye. Byongeye kandi, twasuzumye imiterere ya polarization y'urwego rwo hejuru rwa LT dukoresheje mikorosikopi ya piezoelectric response force (PFM), nk'uko bigaragara ku Ishusho ya 1 (c). Twemeza ko polarization ingana yagumyeho ndetse na nyuma yo guhuza.
Dukoresheje iyi substrate ya LToI, twakoze waveguide ku buryo bukurikira. Ubwa mbere, hashyizweho urwego rwa mask y'icyuma kugira ngo hakorwe LT yumye. Hanyuma, hakozwe lithography ya electron beam (EB) kugira ngo hamenyekane imiterere y'ishingiro ry'impande hejuru y'urwego rwa mask y'icyuma. Hanyuma, twimuriye imiterere ya EB resist kuri urwo rwego rwa mask y'icyuma binyuze mu gukoza icyuma. Nyuma yaho, LToI waveguide core yakozwe hakoreshejwe electron cyclotron resonance plasma (ECR). Amaherezo, urwego rwa mask y'icyuma rwakuweho binyuze mu nzira y'amazi, maze urwego rwa SiO2 rushyirwa hakoreshejwe plasma-enhanced chemical vapor deposition. Ishusho ya 1 (d) igaragaza igice cya schematic cya waveguide ya LToI. Uburebure bwose bw'ishingiro, uburebure bwa plate, n'ubugari bw'ishingiro ni 200 nm, 100 nm, na 1000 nm, uko bikurikirana. Menya ko ubugari bw'ishingiro bugera kuri 3 µm ku nkengero z'impande kugira ngo hahuzwe fibre optique.
Ishusho ya 1 (e) igaragaza ikwirakwizwa ry'imbaraga z'urumuri ryabazwe ry'uburyo bw'amashanyarazi bwa transverse (TE) kuri 1550 nm. Ishusho ya 1 (f) igaragaza ishusho ya mikorosikopi ya scanning electron (SEM) y'inkingi ya LToI waveguide mbere yo gushyiramo SiO2 overlayer.
Ibiranga umurongo ngenderwaho w'amaza:Twabanje gusuzuma imiterere y'igihombo cya linear twifashishije urumuri rwa TE-polarized ruturutse ku isoko y'ubunini bwa 1550 nm rwazamuwe mu miyoboro ya LToI ifite uburebure butandukanye. Igihombo cyo gukwirakwiza cyabonetse mu gice cy'isano iri hagati y'uburebure bw'umuyoboro n'ihererekanya kuri buri muyoboro. Igihombo cyo gukwirakwiza cyapimwe cyari 0.32, 0.28, na 0.26 dB/cm kuri 1530, 1550, na 1570 nm, uko bikurikirana, nk'uko bigaragara ku Ishusho ya 2 (a). Imiyoboro ya LToI yakozwe yagaragaje imikorere yo gutakaza bike nk'imiyoboro ya LNoI igezweho [10].
Hanyuma, twasuzumye ubusumbane bwa χ(3) binyuze mu guhindura ubunini bw'umuraba bukorwa n'uburyo bwo kuvanga imiraba ine. Twinjiza urumuri rwa pompe y'umuraba ikomeza kuri 1550.0 nm n'urumuri rw'ikimenyetso kuri 1550.6 nm mu gipimo cy'uburebure bwa mm 12. Nkuko bigaragara ku Ishusho ya 2 (b), imbaraga z'urumuri rw'umuraba w'urumuri rwa phase-conjugate (idler) ziyongereye uko imbaraga z'injira ziyongera. Igice kiri ku Ishusho ya 2 (b) kigaragaza imiterere isanzwe y'imvange y'imiraba ine. Dukurikije isano iri hagati y'imbaraga z'injira n'ubushobozi bwo guhindura, twagereranije ko parametre idahuza (γ) ari hafi 11 W^-1m.
Ishusho ya 3.(a) Ishusho ya mikorosikopi ya resonator y'impeta yakozwe. (b) Spektara yo kohereza ya resonator y'impeta ifite ibipimo bitandukanye by'icyuho. (c) Spektara yo kohereza ya resonator y'impeta yapimwe kandi ishyirwa muri Lorentzian ifite icyuho cya 1000 nm.
Hanyuma, twakoze resonator ya LToI ring tunasuzuma imiterere yayo. Ishusho ya 3 (a) yerekana ishusho ya mikorosikopi y'urumuri rw'urumuri rw'urumuri rwakozwe. Resonator ya ring ifite imiterere ya "racetrack", igizwe n'akarere gafite umurambararo wa µm 100 n'akarere kagororotse ka µm 100. Ubugari bw'icyuho kiri hagati y'impeta n'inkingi ya bus waveguide buratandukanye mu nyongera za 200 nm, cyane cyane kuri 800, 1000, na 1200 nm. Ishusho ya 3 (b) igaragaza spectra yo kohereza kuri buri cyuho, yerekana ko igipimo cyo kuzimira gihinduka bitewe n'ingano y'icyuho. Duhereye kuri izi spectra, twasanze icyuho cya 1000 nm gitanga ibintu bikomeye byo guhuza, kuko kigaragaza igipimo cyo kuzimira kinini cya -26 dB.
Dukoresheje resonator ihujwe cyane, twapimye ubwiza bw'ikintu (Q factor) dushyira spectrum ya transmission ya linear hamwe na curve ya Lorentzian, tubona Q factor y'imbere ya miliyoni 1.1, nk'uko bigaragara ku Ishusho ya 3 (c). Uko tubizi, iki ni cyo kimenyetso cya mbere cy'ishusho ya LToI ring resonator ihujwe na waveguide. Ikigaragara ni uko agaciro ka Q factor twagezeho kari hejuru cyane ugereranyije n'ako ihujwe na fiber LToI microdisk resonators [9].
Umwanzuro:Twakoze LToI waveguide ifite igihombo cya 0.28 dB/cm kuri 1550 nm na ring resonator Q factor ya miliyoni 1.1. Imikorere yabonetse igereranywa n'iya LNoI waveguide zigezweho zidafite igihombo kinini. Byongeye kandi, twasesenguye χ(3) nonlinearity ya LToI waveguide yakozwe kuri on-chip nonlinear applications.
Igihe cyo kohereza: Ugushyingo-20-2024