Ibisobanuro:Twateje imbere 1550 nm ya insuliranteri ishingiye kuri lithium tantalate waveguide hamwe no gutakaza 0.28 dB / cm hamwe nubuziranenge bwimpeta ingana na miliyoni 1.1. Gushyira mu bikorwa χ (3) kutagira umurongo muri fotonike idafite umurongo byizwe. Ibyiza bya lithium niobate kuri insulator (LNoI), yerekana ibintu byiza cyane χ (2) na χ (3) bidafite umurongo hamwe no gufunga optique bitewe nuburyo bwa "insulator-on", byatumye habaho iterambere ryinshi mubuhanga bwa tekinoroji ya ultrafast modulator hamwe na fotonike idafite umurongo [1-3]. Usibye LN, lithium tantalate (LT) yanakozweho ubushakashatsi nkibikoresho bifotora bidafite umurongo. Ugereranije na LN, LT ifite urwego rwo hejuru rwangirika rwa optique hamwe nidirishya ryagutse rya optique ikorera mu mucyo [4, 5], nubwo ibipimo byayo byiza, nkibipimo byerekana imbaraga hamwe na coefficient idafite umurongo, bisa nibya LN [6, 7]. Rero, LToI igaragara nkikindi kintu gikomeye cyabakandida ibikoresho bya optique power optique idafite umurongo wa fotonike. Byongeye kandi, LToI ihinduka ibikoresho byibanze kubikoresho byo mu bwoko bwa acoustic wave (SAW) byungurura, bikoreshwa muburyo bwihuse bwihuta kandi bwikoranabuhanga. Ni muri urwo rwego, wafer ya LToI irashobora kuba ibikoresho bisanzwe mubikorwa bya fotonike. Nyamara, kugeza ubu, haravuzwe ibikoresho bike bya fotonike bishingiye kuri LToI, nka microdisk resonator [8] hamwe na feri ya electro-optique [9]. Muri iyi nyandiko, turerekana igihombo gito LToI waveguide hamwe nikoreshwa ryayo muri resonator. Byongeye kandi, dutanga χ (3) idafite umurongo uranga umurongo wa LToI.
Ingingo z'ingenzi:
• Gutanga santimetero 4 kugeza kuri santimetero 6 za LToI wafers, waferi yoroheje ya lithium tantalate wafers, hamwe nuburebure bwurwego rwo hejuru kuva kuri 100 nm kugeza kuri 1500 nm, ukoresheje tekinoroji yo murugo hamwe nibikorwa bikuze.
• SINOI: Ultra-nkeya igihombo silicon nitride yoroheje-ya wafer.
• SICI
• LTOI: Umunywanyi ukomeye kuri lithium niobate, yoroheje ya firime lithium tantalate wafers.
• LNOI: 8-santimetero LNOI ishyigikira umusaruro mwinshi wibicuruzwa binini binini bya lithium niobate.
Gukora kuri Waveguides ya Insulator:Muri ubu bushakashatsi, twifashishije wafers ya LToI-4. Hejuru ya LT ni ubucuruzi 42 ° buzunguruka Y-gukata LT substrate kubikoresho bya SAW, bihujwe neza na Si substrate hamwe na 3 µm yubushyuhe bwa oxyde oxyde, ikoresha uburyo bwo guca ubwenge. Igishushanyo 1 (a) cyerekana hejuru hejuru ya wafer ya LToI, hamwe nuburebure bwa LT hejuru ya 200 nm. Twasuzumye uburinganire bwurwego rwo hejuru rwa LT dukoresheje microscopi ya atome imbaraga (AFM).
Igishushanyo 1.. . Nkuko bigaragara ku gishushanyo cya 1 (b), uburinganire bwubuso buri munsi ya 1 nm, kandi nta murongo wo gushushanya wagaragaye. Twongeyeho, twasuzumye imiterere ya polarisiyasi yo hejuru ya LT dukoresheje microscopi yingufu za piezoelectric (PFM), nkuko bigaragara ku gishushanyo 1 (c). Twemeje ko polarisiyasi imwe yabungabunzwe na nyuma yuburyo bwo guhuza.
Twifashishije substrate ya LToI, twahimbye umurongo wa waveguide kuburyo bukurikira. Ubwa mbere, icyuma cya mask cyashyizwe kubutaka bwumye bwa LT. Hanyuma, amashanyarazi ya elegitoronike (EB) yakozwe kugirango asobanure icyerekezo cya waveguide hejuru yicyuma cya mask. Ibikurikira, twimuye EB irwanya icyitegererezo cyicyuma cya mask dukoresheje ibyuma byumye. Nyuma, intangiriro ya LToI waveguide yashizweho hakoreshejwe electron cyclotron resonance (ECR) plasma etching. Hanyuma, icyuma cya mask cyakuweho binyuze muburyo butose, hanyuma hashyirwaho umuringoti wa SiO2 ukoresheje plasma yongerewe imbaraga mumashanyarazi. Igishushanyo 1 (d) cyerekana igishushanyo mbonera cyambukiranya umurongo wa LToI. Uburebure bwibanze, uburebure bwa plaque, nubugari bwibanze ni 200 nm, 100 nm, na 1000 nm. Menya ko ubugari bwibanze bugera kuri 3 µm kuruhande rwa waveguide kumurongo wa fibre optique.
Igishushanyo 1 (e) cyerekana ubukana bwa optique bwabazwe bwo gukwirakwiza amashanyarazi yibanze (TE) kuri 1550 nm. Igishushanyo 1 (f) cyerekana scanning electron microscope (SEM) ishusho ya LToI waveguide yibanze mbere yo gushira hejuru ya SiO2.
Ibiranga Waveguide:Twabanje gusuzuma umurongo utakaza umurongo dushyiramo urumuri rwa TE-polarize kuva kuri 1550 nm yumurambararo wongerewe imbaraga ziva mu kirere muri LToI umurongo wuburebure butandukanye. Igihombo cyo gukwirakwiza cyabonetse kumurongo wubusabane hagati yuburebure bwumurongo no kwanduza kuri buri burebure. Igihombo cyo gukwirakwizwa cyapimwe ni 0.32, 0.28, na 0.26 dB / cm kuri 1530, 1550, na 1570 nm, nkuko bigaragara ku gishushanyo cya 2 (a). Umuyoboro wa LToI wahimbwe werekanye ibikorwa bigereranywa no gutakaza igihombo gike na kijyambere igezweho ya LNoI.
Ibikurikira, twasuzumye χ (3) kutanyuranya binyuze muburebure bwumurongo watewe no kuvanga imirongo ine. Twinjiza urumuri ruhoraho rwa pompe kuri 1550.0 nm nurumuri rwikimenyetso kuri 1550,6 nm mumurongo wa mm 12 z'uburebure. Nkuko bigaragara ku gishushanyo cya 2 (b), icyiciro-conjugate (idler) urumuri rwerekana urumuri rwiyongereye hamwe no kongera imbaraga zo kwinjiza. Ibyinjijwe mu gishushanyo cya 2 (b) byerekana ibintu bisanzwe bisohoka byerekana imirongo ine ivanze. Duhereye ku isano iri hagati yo kwinjiza imbaraga no guhindura imikorere, twagereranije ibipimo bitari umurongo (γ) hafi 11 W ^ -1m.
Igishushanyo 3.(a) Ishusho ya Microscope yerekana impeta yahimbwe. (b) Ikwirakwizwa ryerekana impeta ya resonator ifite ibipimo bitandukanye. .
Ibikurikira, twahimbye impeta ya LToI impeta hanyuma dusuzuma ibiranga. Igishushanyo 3 (a) cyerekana microscope optique ishusho yimpimbano yahimbwe. Impeta ya resonator igaragaramo iboneza rya "racetrack", igizwe n'akarere kagoramye gafite radiyo 100 µm n'akarere kagororotse ka 100 µm z'uburebure. Ubugari bwikinyuranyo hagati yimpeta na bisi ya bisi ya bisi iratandukanye mukwiyongera kwa 200 nm, cyane cyane kuri 800, 1000, na 1200 nm. Igishushanyo cya 3 (b) cyerekana uburyo bwo kohereza kuri buri cyuho, byerekana ko igipimo cyo kuzimangana gihinduka hamwe nubunini. Duhereye kuri ibi bice, twahisemo ko icyuho cya nm 1000 gitanga hafi yingingo zifatika, kuko kigaragaza igipimo kinini cyo kuzimangana -26 dB.
Twifashishije resonator ihujwe cyane, twagereranije ibintu bifite ireme (Q factor) duhuza umurongo wohereza umurongo hamwe nu murongo wa Lorentzian, tubona Q imbere yimbere ya miliyoni 1.1, nkuko bigaragara ku gishushanyo cya 3 (c). Ku bumenyi bwacu, iyi niyo myiyerekano yambere yerekana umurongo wa LToI impeta ya resonator. Ikigaragara ni uko Q ibintu byagaciro twagezeho biruta cyane ibya fibre ifatanije na LToI microdisk resonator [9].
Umwanzuro:Twateje imbere umurongo wa LToI ufite igihombo cya 0.28 dB / cm kuri 1550 nm hamwe nimpeta ya resonator Q ya miliyoni 1.1. Imikorere yabonetse iragereranywa nubwa-buhanga-buke-gutakaza LNoI umurongo. Twongeyeho, twasesenguye χ (3) kutagira umurongo wa LToI wakozwe na firime ya chip idafite umurongo.
Igihe cyo kohereza: Ugushyingo-20-2024