Optical-Grade Silicon Carbide Waveguide AR Ikirahure: Gutegura Sub-Substrates Yera-Yera cyane

Kuruhande rwimpinduramatwara ya AI, ibirahuri bya AR bigenda byinjira mubitekerezo rusange. Nka paradigima ihuza isi nukuri kandi nyayo, ibirahuri bya AR bitandukanye nibikoresho bya VR byemerera abakoresha kubona amashusho ateganijwe muburyo bwa digitale hamwe numucyo wibidukikije icyarimwe. Kugirango ugere kuriyi mikorere ibiri-yerekana amashusho ya microdisplay mumaso mugihe ukingira urumuri rwo hanze - optique-ya silicon carbide (SiC) ishingiye kuri AR ibirahuri bya AR ikoresha ibyuma byubaka (lightguide). Igishushanyo mbonera cyerekana imbere imbere kugirango wohereze amashusho, bisa no gukwirakwiza fibre optique, nkuko bigaragara ku gishushanyo mbonera.

Mubisanzwe, insimburangingo imwe ya santimetero 6-isukuye igice gishobora gutanga ibirahuri 2 byikirahure, mugihe 8-santimetero 8 yakira 3-4. Kwemeza ibikoresho bya SiC bitanga inyungu eshatu zingenzi:

1. Indanganturo idasanzwe yo kwanga (2.7): Gushoboza> 80 ° ibara ryuzuye-ryuzuye ryerekana (FOV) hamwe na lens layer imwe, ikuraho ibihangano byumukororombya bikunze kugaragara mubishushanyo bisanzwe bya AR.
2. Kwishyira hamwe kwa tri-ibara (RGB) umurongo wogusimbuza: Gusimbuza imirongo myinshi yumurongo wumurongo, kugabanya ubunini bwibikoresho nuburemere.
3. Ubushuhe buhebuje (490 W / m · K): Kugabanya ubushyuhe bwo gukusanya ubushyuhe buterwa no kwangirika kwa optique.

Izi nyungu zatumye isoko rikenera ibirahuri bya AR bishingiye kuri SiC. Urwego rwa optique-SiC ikoreshwa mubisanzwe igizwe na kirisiti yo hejuru-isukuye (HPSI) kristu, ibyifuzo byayo byateguwe bigira uruhare runini kubiciro biri hejuru. Kubwibyo, iterambere rya HPSI SiC substrates ningirakamaro.

1. Synthesis ya Semi-Ihinduranya Ifu ya SiC
Inganda nini-nganda ahanini ikoresha ubushyuhe bwo hejuru bwo gukwirakwiza sintezike (SHS), inzira isaba kugenzura neza:

• Ibikoresho bibisi: 99,999% ifu ya karubone / silicon ifu ifite ubunini bwa 10-100 mm.
• Ubuziranenge bukomeye: Ibice bya Graphite bigenda bisukurwa nubushyuhe bwo hejuru kugirango hagabanuke ikwirakwizwa ryumwanda.
• Kugenzura ikirere: 6N-isuku ya argon (hamwe nu murongo wo gutunganya umurongo) ihagarika kwinjiza azote; shakisha imyuka ya HCl / H₂ irashobora gutangizwa kugirango ihindagurika rya boron no kugabanya azote, nubwo kwibanda kwa H₂ bisaba gukora neza kugirango birinde ruswa.
• Ibipimo byibikoresho: Itanura rya Synthesis rigomba kugera kuri <10⁻⁴ Pa base vacuum, hamwe na protocole ikomeye.

2. Ingorane zo Gukura kwa Crystal
Iterambere rya HPSI SiC risangiye ibyangombwa bisukuye:

• Ibiryo: 6N + -ifu ya SiC ifu ya B / Al / N <10¹⁶ cm⁻³, Fe / Ti / O munsi yumupaka ntarengwa, hamwe nicyuma gito cya alkali (Na / K).
• Sisitemu ya gaze: 6N argon / hydrogen ivanze byongera imbaraga zo guhangana.
• Ibikoresho: pompe ya molekulari yemeza ko ultrahigh vacuum (<10⁻⁶ Pa); kubanza kubanza kuvurwa no gutunganya azote ni ngombwa.

Substrate Gutunganya udushya
Ugereranije na silikoni, SiC yamara igihe kinini cyo gukura hamwe no guhangayika (bitera gucamo / gukata) bisaba gutunganya neza:

• Gukata lazeri: Yongera umusaruro uva kuri wafer 30 (350 mkm, wabonye insinga) ukagera kuri> wafer 50 kuri 20 mm ya boule, ifite ubushobozi bwo kunanuka 200-mm. Igihe cyo gutunganya kigabanuka kuva muminsi 10-15 (wire wire) kugeza kuri <20 min / wafer kuri kristu-8.

3. Ubufatanye mu nganda

Itsinda rya Orion rya Meta ryatangije icyiciro cya optique cyo mu rwego rwa SiC waveguide, bituma ishoramari R&D. Ubufatanye bw'ingenzi burimo:

• TankeBlue & MUDI Micro: Iterambere rihuriweho na AR diffractive waveguide lens.
• Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Ihuriro ryibikorwa byo guhuza AI / AR.

Ibiteganijwe ku isoko bigereranya 500.000 ya AR-ishingiye kuri AR buri mwaka muri 2027, ikoresha 250.000 6-santimetero (cyangwa 125.000 8-santimetero). Iyi nzira irashimangira uruhare rwa SiC muguhindura ibisekuruza bizaza AR.

XKH kabuhariwe mu gutanga ubuziranenge bwo mu rwego rwo hejuru 4H-igice (4H-SEMI) SiC substrate hamwe na diametre yihariye ishobora kuva kuri santimetero 2 kugeza kuri santimetero 8, ikaba yujuje ibyangombwa bisabwa muri RF, ibikoresho bya elegitoroniki, na AR / VR optique. Imbaraga zacu zirimo gutanga amajwi yizewe, kugena neza (uburebure, icyerekezo, kurangiza hejuru), hamwe no gutunganya inzu yose kuva gukura kwa kirisiti kugeza kuri polishinge. Kurenga 4H-SEMI, turatanga kandi ubwoko bwa 4H-N, ubwoko bwa 4H / 6H-P, na 3C-SiC substrate, dushyigikira imashanyarazi itandukanye hamwe nudushya twa optoelectronic.