Isuku itose (Wet Clean) nimwe muntambwe zingenzi mubikorwa byo gukora semiconductor, bigamije kuvanaho umwanda utandukanye hejuru ya wafer kugirango harebwe ko intambwe ikurikiraho ishobora gukorwa hejuru yisuku.
Mugihe ingano yibikoresho bya semiconductor ikomeje kugabanuka kandi ibisabwa byuzuye byiyongera, ibyifuzo bya tekiniki yuburyo bwo gukora isuku wafer byarushijeho gukomera. Ndetse nuduce duto duto, ibikoresho kama, ioni yicyuma, cyangwa ibisigisigi bya okiside hejuru ya wafer birashobora kugira ingaruka zikomeye kumikorere yibikoresho, bityo bikagira ingaruka kumusaruro no kwizerwa byibikoresho bya semiconductor.
Amahame remezo yo kweza Wafer
Intandaro yo gukora isuku ya wafer iri mukurandura neza umwanda utandukanye hejuru ya wafer ukoresheje umubiri, imiti, nubundi buryo kugirango umenye ko wafer ifite ubuso bwiza bukwiye gutunganywa nyuma.
Ubwoko bwanduye
Ingaruka Nkuru Kubiranga Ibikoresho
| Ingingo Yanduye | Inenge
Inenge yo gushiramo Ion
Gukingira firime gusenya
| |
| Kwanduza Ibyuma | Ibyuma bya Alkali | MOS tristoriste idahungabana
Irembo rya oxide firime gusenyuka / gutesha agaciro
|
| Ibyuma biremereye | Kwiyongera kwa PN ihuza ihindagurika
Irembo rya oxyde ya firime yamenetse
Gutwara abantu bake ubuzima bwabo bwose
Oxide ishimishije igabanya inenge
| |
| Kwanduza imiti | Ibikoresho kama | Irembo rya oxyde ya firime yamenetse
CVD itandukanye ya firime (ibihe byubushakashatsi)
Ubushyuhe bwa firime ya Thermal oxyde itandukanye (okiside yihuse)
Ibibaho (wafer, lens, indorerwamo, mask, reticle)
|
| Dopants idasanzwe (B, P) | MOS transistor Vth ihinduka
Si substrate hamwe nimbaraga nyinshi zo kurwanya poly-silicon impapuro zo guhangana
| |
| Ibidafite umubiri (amine, ammonia) & Acide (SOx) | Gutesha agaciro imyanzuro yimiti yongerewe imbaraga
Kubaho kwanduza uduce nu gihu kubera kubyara umunyu
| |
| Filime kavukire na chimique Oxide kubera ubushuhe, umwuka | Kongera imbaraga zo guhangana
Irembo rya oxide firime gusenyuka / gutesha agaciro
| |
By'umwihariko, intego zogusukura wafer zirimo:
Gukuraho Ibice: Gukoresha uburyo bwumubiri cyangwa imiti kugirango ukureho uduce duto twometse hejuru ya wafer. Utuntu duto duto biragoye kuyikuramo kubera imbaraga zikomeye za electrostatike hagati yazo nubuso bwa wafer, bisaba kuvurwa bidasanzwe.
Kurandura ibikoresho kama: Ibihumanya kama nkibisigazwa byamavuta nibisigazwa byamafoto bishobora gukomera kubutaka bwa wafer. Ibyo bihumanya mubisanzwe bivanwaho hakoreshejwe imbaraga zikomeye za okiside cyangwa umusemburo.
Gukuraho Ibyuma Ion: Ibisigisigi bya ion bisigaye hejuru ya wafer birashobora gutesha agaciro amashanyarazi ndetse bikagira ingaruka kubikorwa byo gutunganya. Kubwibyo, ibisubizo byihariye bya chimique bikoreshwa mugukuraho ion.
Gukuraho Oxide: Inzira zimwe zisaba ubuso bwa wafer kutagira ibice bya oxyde, nka okiside ya silicon. Mu bihe nk'ibi, ibice bisanzwe bya okiside bigomba gukurwaho mugihe runaka cyo gukora isuku.
Ikibazo cyubuhanga bwogusukura wafer kiri mukurandura neza ibyanduye bitagize ingaruka mbi kubutaka bwa wafer, nko kwirinda gukomera, kwangirika, cyangwa kwangirika kwumubiri.
2. Gahunda yo Gusukura Wafer
Igikorwa cyo gusukura wafer mubisanzwe kirimo intambwe nyinshi kugirango harebwe burundu ibyanduye kandi bigere ku buso bwuzuye.
Igishushanyo: Kugereranya Hagati ya Batch-Ubwoko na Isuku imwe-Wafer
Uburyo busanzwe bwo gusukura wafer burimo intambwe zingenzi zikurikira:
1. Mbere yo kweza (Mbere-yoza)
Intego yo kubanza gukora isuku ni ugukuraho umwanda uhumanye hamwe nuduce twinshi hejuru yubutaka bwa wafer, ubusanzwe bigerwaho binyuze mumazi ya deionioni (DI Amazi) yoza no gusukura ultrasonic. Amazi ya deionised arashobora kubanza kuvanaho ibice hamwe n umwanda ushonga hejuru ya wafer, mugihe isuku ya ultrasonic ikoresha ingaruka za cavitation kugirango ihagarike isano iri hagati yuduce nubuso bwa wafer, byoroshye kubirukana.
2. Isuku ryimiti
Isuku yimiti nimwe muntambwe yibanze mugikorwa cyo gusukura wafer, ukoresheje ibisubizo byimiti kugirango ukureho ibintu kama, ioni yicyuma, na okiside hejuru ya wafer.
Kurandura ibikoresho kama: Mubisanzwe, acetone cyangwa ammonia / peroxide ivanze (SC-1) ikoreshwa mugushonga no guhumanya imyanda ihumanya. Ikigereranyo gisanzwe cya SC-1 igisubizo ni NH₄OH
₂O₂
₂O = 1: 1: 5, hamwe n'ubushyuhe bwo gukora bugera kuri 20 ° C.
Gukuraho Ibyuma Ion: Acide Nitric cyangwa hydrochloric aside / imvange ya peroxide (SC-2) ikoreshwa mugukuraho ioni yicyuma hejuru ya wafer. Ikigereranyo gisanzwe cya SC-2 igisubizo ni HCl
₂O₂
₂O = 1: 1: 6, hamwe n'ubushyuhe bwakomeje kugera kuri 80 ° C.
Kurandura Oxide: Mubikorwa bimwe na bimwe, hakenewe kuvanaho kavukire ya oxyde kavukire hejuru ya wafer, kugirango hakoreshwe aside hydrofluoric (HF). Ikigereranyo gisanzwe kubisubizo bya HF ni HF
₂O = 1:50, kandi irashobora gukoreshwa mubushyuhe bwicyumba.
3. Isuku rya nyuma
Nyuma yo gukora isuku yimiti, wafer isanzwe itera intambwe yanyuma yo gukora isuku kugirango hatagira ibisigazwa byimiti biguma hejuru. Isuku rya nyuma rikoresha cyane cyane amazi ya deionion kugirango yoge neza. Byongeye kandi, isuku y'amazi ya ozone (O₃ / H₂O) ikoreshwa mugukuraho ibyanduye byose bisigaye hejuru ya wafer.
4. Kuma
Waferi isukuye igomba gukama vuba kugirango birinde ibimenyetso byamazi cyangwa kongera gufatanya ibyanduye. Uburyo busanzwe bwo kumisha burimo gukanika spin hamwe na azote. Iyambere ikuraho ubuhehere hejuru ya wafer mukuzunguruka ku muvuduko mwinshi, mugihe iyanyuma yemeza ko yumye neza muguhumeka gaze ya azote yumye hejuru ya wafer.
Umwanda
Izina ryuburyo bukoreshwa
Imvange yimiti Ibisobanuro
Imiti
| Ibice | Piranha (SPM) | Acide ya sulfure / hydrogen peroxide / DI amazi | H2SO4 / H2O2 / H2O 3-4: 1; 90 ° C. |
| SC-1 (APM) | Ammonium hydroxide / hydrogen peroxide / DI amazi | NH4OH / H2O2 / H2O 1: 4: 20; 80 ° C. | |
| Ibyuma (ntabwo ari umuringa) | SC-2 (HPM) | Hydrochloric aside / hydrogen peroxide / amazi ya DI | HCl / H2O2 / H2O1: 1: 6; 85 ° C. |
| Piranha (SPM) | Acide ya sulfure / hydrogen peroxide / DI amazi | H2SO4 / H2O2 / H2O3-4: 1; 90 ° C. | |
| DHF | Koresha hydrofluoric aside / DI amazi (ntibizakuraho umuringa) | HF / H2O1: 50 | |
| Ibinyabuzima | Piranha (SPM) | Acide ya sulfure / hydrogen peroxide / DI amazi | H2SO4 / H2O2 / H2O 3-4: 1; 90 ° C. |
| SC-1 (APM) | Ammonium hydroxide / hydrogen peroxide / DI amazi | NH4OH / H2O2 / H2O 1: 4: 20; 80 ° C. | |
| DIO3 | Ozone mumazi ya ionisiyoneri | O3 / H2O Imvange nziza | |
| Oxide kavukire | DHF | Koresha hydrofluoric aside / DI amazi | HF / H2O 1: 100 |
| BHF | Acide hydrofluoric aside | NH4F / HF / H2O |
3. Uburyo busanzwe bwo gusukura Wafer
1. Uburyo bwo kweza RCA
Uburyo bwo gukora isuku ya RCA ni bumwe mu buryo bwa kera bwo gusukura wafer mu nganda ziciriritse, bwakozwe na RCA Corporation mu myaka 40 ishize. Ubu buryo bukoreshwa cyane cyane mugukuraho umwanda wanduye hamwe nicyuma cya ion kandi birashobora kurangizwa mubyiciro bibiri: SC-1 (Isuku isanzwe 1) na SC-2 (Isuku isanzwe 2).
SC-1 Isuku: Iyi ntambwe ikoreshwa cyane cyane mugukuraho umwanda hamwe nuduce. Umuti ni uruvange rwa ammonia, hydrogène peroxide, namazi, bigizwe na silike ya silikoni yoroheje hejuru ya wafer.
SC-2 Isuku: Iyi ntambwe ikoreshwa cyane cyane mugukuraho ibyuma byangiza ion, hifashishijwe imvange ya aside hydrochloric, hydrogène peroxide, namazi. Irasiga igicucu cyoroshye hejuru ya wafer kugirango wirinde kwanduza.
2. Uburyo bwo Gusukura Piranha (Isuku ya Piranha)
Uburyo bwo gukora isuku ya Piranha nubuhanga bukomeye cyane bwo gukuraho ibikoresho kama, ukoresheje imvange ya acide sulfurike na hydrogen peroxide, mubisanzwe mubipimo bya 3: 1 cyangwa 4: 1. Bitewe nuburyo bukomeye bwa okiside yiki gisubizo, irashobora gukuraho ibintu byinshi kama kama nibihumanya byinangiye. Ubu buryo busaba kugenzura neza imiterere, cyane cyane mubijyanye nubushyuhe nubushyuhe, kugirango wirinde kwangiza wafer.
Isuku ya Ultrasonic ikoresha ingaruka ya cavitation iterwa numuvuduko mwinshi wamajwi mumazi kugirango akureho umwanda hejuru ya wafer. Ugereranije no gusukura ultrasonic gakondo, isuku ya megasonic ikora kumurongo mwinshi, ituma hakurwaho neza uduce duto duto duto duto duto tutiriwe twangiza hejuru ya wafer.
4. Isuku ya Ozone
Tekinoroji ya Ozone ikoresha imbaraga zikomeye za okiside ya ozone kugirango ibore kandi ikureho umwanda kama hejuru ya wafer, amaherezo ubihindure dioxyde de carbone itagira ingaruka. Ubu buryo ntibusaba gukoresha imiti ihenze yimiti kandi itera umwanda muke w’ibidukikije, bigatuma ikoranabuhanga rigaragara mubijyanye no gusukura wafer.
4. Ibikoresho byo gutunganya Wafer
Kugirango hamenyekane neza n'umutekano byogusukura wafer, ibikoresho bitandukanye byogusukura bikoreshwa mugukora semiconductor. Ubwoko nyamukuru burimo:
1. Ibikoresho byoza neza
Ibikoresho byoza amazi meza birimo ibigega bitandukanye byo kwibiza, ibigega byogusukura ultrasonic, hamwe na firime zumye. Ibi bikoresho bihuza imbaraga za mashini na reagent ya chimique kugirango ikureho umwanda hejuru ya wafer. Ibigega byo kwibiza mubisanzwe bifite sisitemu yo kugenzura ubushyuhe kugirango habeho ituze n’imikorere y ibisubizo byimiti.
2. Ibikoresho byumye
Ibikoresho byogusukura byumye birimo cyane cyane isuku ya plasma, ikoresha ingufu zingufu nyinshi muri plasma kugirango ikore kandi ikureho ibisigazwa hejuru ya wafer. Isuku ya plasma irakwiriye cyane cyane mubikorwa bisaba kugumana ubusugire bwubutaka bitinjije ibisigazwa byimiti.
3. Sisitemu Yogusukura Yikora
Hamwe nogukomeza kwagura umusaruro wa semiconductor, sisitemu yo gukora isuku yahindutse ihitamo ryogusukura nini nini. Izi sisitemu akenshi zirimo uburyo bwo kohereza bwikora, sisitemu yo gusukura tanki nyinshi, hamwe na sisitemu yo kugenzura neza kugirango habeho ibisubizo bihoraho kuri buri wafer.
5. Ibizaza
Mugihe ibikoresho bya semiconductor bikomeje kugabanuka, tekinoroji yo gusukura wafer igenda itera imbere kubisubizo byiza kandi bitangiza ibidukikije. Tekinoroji yo gusukura ejo hazaza izibanda kuri:
Gukuraho Sub-nanometero Ibice Gukuraho: Tekinoroji iriho irashobora gukora ibice bya nanometero nini, ariko hamwe no kugabanuka kwubunini bwibikoresho, gukuraho ibice bya nanometero bizaba ikibazo gishya.
Isuku ryatsi n’ibidukikije: Kugabanya ikoreshwa ry’imiti yangiza ibidukikije no guteza imbere uburyo bwogukora ibidukikije byangiza ibidukikije, nko gusukura ozone no gusukura megasonic, bizagenda biba ngombwa.
Urwego Rwisumbuye rwa Automation and Intelligence: Sisitemu yubwenge izafasha kugenzura-igihe no guhindura ibipimo bitandukanye mugihe cyogusukura, bikarushaho kunoza imikorere yisuku no gukora neza.
Ikoranabuhanga rya Wafer, nkintambwe yingenzi mubikorwa byo gukora igice cya kabiri, bigira uruhare runini mugutunganya isuku ya wafer kubikorwa bizakurikiraho. Guhuza uburyo butandukanye bwo gukora isuku bikuraho neza ibyanduye, bitanga ubuso bwubutaka busukuye kumuntambwe ikurikira. Uko ikoranabuhanga rigenda ritera imbere, inzira zogusukura zizakomeza kunozwa kugirango zuzuze ibisabwa kugirango habeho ibisobanuro bihanitse kandi biri hasi y’inenge mu nganda zikoreshwa mu gice cya kabiri.
Igihe cyo kohereza: Ukwakira-08-2024