Gusukura amazi (Wet Clean) ni imwe mu ntambwe z'ingenzi mu mikorere y'ibikoresho bya semiconductor, bigamije gukuraho imyanda itandukanye ku buso bwa wafer kugira ngo intambwe zikurikira zishobore gukorwa ku buso busukuye.
Uko ingano y'ibikoresho bya semiconductor ikomeza kugabanuka n'ibisabwa mu buryo bunonosoye byiyongera, ibisabwa mu buryo bwa tekiniki mu gusukura wafer byarushijeho gukomera. Ndetse n'uduce duto cyane, ibikoresho by'umwimerere, iyoni z'icyuma, cyangwa ibisigazwa bya okiside ku buso bwa wafer bishobora kugira ingaruka zikomeye ku mikorere y'igikoresho, bityo bigira ingaruka ku musaruro no kwizerwa kw'ibikoresho bya semiconductor.
Amahame y'ingenzi yo gusukura Wafer
Ishingiro ry'isukura rya wafer riri mu gukuraho neza imyanda itandukanye ku buso bwa wafer hakoreshejwe uburyo bufatika, imiti, n'ubundi buryo kugira ngo wafer ibe ifite ubuso busukuye bukwiriye gutunganywa nyuma.
Ubwoko bw'ubwandu
Ingaruka z'ingenzi ku miterere y'ibikoresho
| Kwanduza ingingo | Inenge mu miterere
Ubusembwa bwo gutera iyoni
Ubusembwa bwo kwangirika kwa firime irinda ubushyuhe
| |
| Kwanduza ibyuma | Ibyuma bya Alkali | Ubudahangarwa bwa transistor ya MOS
Gusenyuka/kwangirika kwa firime ya okiside y'irembo
|
| Ibyuma biremereye | Umuyoboro w'amazi usubira inyuma wa PN ukomeje kwiyongera
Ubusembwa bwa filime ya oxide yo mu irembo
Kwangirika k'ubuzima bw'abatwara imitungo mito
Gukora ubusembwa bw'urwego rwa okiside
| |
| Kwanduza imiti | Ibikoresho by'umwimerere | Ubusembwa bwa filime ya oxide yo mu irembo
Impinduka mu ifirime ya CVD (igihe cyo gutera akabariro)
Ihindagurika ry'ubugari bwa firime ya okiside y'ubushyuhe (okiside yihuta)
Kugaragara k'urubura (agafu, lenzi, indorerwamo, agapfukamunwa, agace k'inyuma)
|
| Inorganic dopants (B, P) | Transistor ya MOS Vth ihinduranya
Impinduka zo kurwanya icyuma cya Si-substrate n'uruhare rwo hejuru mu gupima icyuma cya poly-silicone
| |
| Ishingiro z’ibinyabutabire (amine, ammonia) na aside (SOx) | Kwangirika k'uburyo imiti irwanya imyuka yangiza ikirere
Kuba hari ubwandu bw'udukoko n'ibihu bituruka ku gukurura umunyu
| |
| Filimi za Okiside kavukire n'izikomoka ku binyabutabire bitewe n'ubushuhe, umwuka | Ubudahangarwa bw'umubiri burushaho kwiyongera
Gusenyuka/kwangirika kwa firime ya okiside y'irembo
| |
By'umwihariko, intego z'igikorwa cyo gusukura wafer zirimo:
Gukuraho uduce duto: Gukoresha uburyo bufatika cyangwa bwa shimi kugira ngo ukureho uduce duto dufatanye n'ubuso bwa wafer. Uduce duto turagoye cyane gukuraho bitewe n'imbaraga zikomeye z'amashanyarazi hagati yatwo n'ubuso bwa wafer, bikaba bisaba ubuvuzi bwihariye.
Gukuraho Ibikoresho by’Ubworozi: Ibisigazwa by’Ubworozi nk’amavuta n’ibisigazwa bya Photoresist bishobora gufata ku buso bwa wafer. Ibi bisigazwa bikunze gukurwaho hakoreshejwe ibintu bikomeye bigabanya ogisijeni cyangwa imiti isukura.
Gukuraho Iyoni z'icyuma: Ibisigazwa bya iyoni z'icyuma ku buso bwa wafer bishobora kwangiza imikorere y'amashanyarazi ndetse bikagira ingaruka ku ntambwe zikurikiraho zo gutunganya. Kubwibyo, imiti yihariye ikoreshwa mu gukuraho izo iyoni.
Gukuraho ogisijeni: Hari inzira zimwe na zimwe zisaba ko ubuso bwa wafer butarimo ogisijeni, nka ogisijeni ya silikoni. Muri ibyo bihe, ogisijeni karemano igomba gukurwaho mu gihe cyo gusukura bimwe na bimwe.
Imbogamizi mu ikoranabuhanga ryo gusukura wafer ni ugukuraho neza imyanda idateye ingaruka mbi ku buso bwa wafer, nko gukumira ko ubuso buhinduka, ingese, cyangwa ibindi byangirika ku mubiri.
2. Uburyo bwo gusukura Wafer
Uburyo bwo gusukura wafer busanzwe busaba intambwe nyinshi kugira ngo habeho gukuraho burundu imyanda no kugira ubuso busukuye neza.
Igishushanyo: Kugereranya hagati yo gusukura ubwoko bw'itsinda n'isuku ya wafer imwe
Uburyo busanzwe bwo gusukura wafer bukubiyemo intambwe z'ingenzi zikurikira:
1. Gusukura mbere yo gusukura (mbere yo gusukura)
Intego yo gusukura mbere ni ugukuraho imyanda n'uduce duto ku buso bwa wafer, ibi bikaba bikunze kugerwaho binyuze mu koza amazi yakuwemo iion (DI Water) no gusukura hakoreshejwe ultrasound. Amazi yakuwemo iion ashobora gukuraho uduce n'imyanda yakuwemo ku buso bwa wafer, mu gihe gusukura hakoreshejwe ultrasound bikoresha ingaruka zo gucana kugira ngo bivane isano riri hagati y'uduce n'ubuso bwa wafer, bigatuma byoroha kubikuramo.
2. Gusukura imiti
Gusukura imiti ni imwe mu ntambwe z'ingenzi mu gikorwa cyo gusukura wafer, hakoreshejwe imiti ikoreshwa mu gukuraho ibikoresho by'umwimerere, iyoni z'ibyuma, na okiside ku buso bwa wafer.
Gukuraho ibintu by’umwimerere: Ubusanzwe, acetone cyangwa uruvange rwa ammonia/peroxide (SC-1) bikoreshwa mu gushonga no gukaranga imyanda y’umwimerere. Igipimo gisanzwe cy’umuti wa SC-1 ni NH₄OH
₂O₂
₂O = 1:1:5, hamwe n'ubushyuhe bwo gukora bwa dogere selisiyusi 20.
Gukuraho iyoni y'icyuma: Imvange ya aside nitriki cyangwa aside hydrochloric/peroxide (SC-2) ikoreshwa mu gukura iyoni y'icyuma ku buso bwa wafer. Igipimo gisanzwe cy'umuti wa SC-2 ni HCl
₂O₂
₂O = 1:1:6, ubushyuhe buguma kuri dogere selisiyusi zigera kuri 80.
Gukuraho ogiside: Mu buryo bumwe na bumwe, gukuraho urwego rwa ogiside kavukire ku buso bwa wafer birakenewe, aho umuti wa aside hydrofluoric (HF) ukoreshwa. Igipimo gisanzwe cy'umuti wa HF ni HF
₂O = 1:50, kandi ishobora gukoreshwa ku bushyuhe bw'icyumba.
3. Isuku ya nyuma
Nyuma yo gusukura hakoreshejwe imiti, wafers zisanzwe zikorerwa isuku ya nyuma kugira ngo hatagira ibisigazwa bya shimi bisigara hejuru y’ubutaka. Gusukura bwa nyuma ahanini bikoresha amazi yakuwemo iayoni kugira ngo yozwe neza. Byongeye kandi, gusukura amazi ya ozone (O₃/H₂O) bikoreshwa mu gukuraho imyanda yose isigaye ku buso bwa wafers.
4. Kumisha
Uduce twa wafer twasukuwe tugomba kumisha vuba kugira ngo hirindwe ko twangirika cyangwa kongera gushyirwaho umwanda. Uburyo busanzwe bwo kumisha burimo kumisha no gusohora azote. Uduce twa mbere dukura ubushuhe ku buso bwa wafer binyuze mu kuzunguruka ku muvuduko mwinshi, mu gihe utwo twa kabiri twuma burundu binyuze mu guhumeka umwuka wa azote wumye ku buso bwa wafer.
Icyanduza
Izina ry'Inzira yo Gusukura
Ibisobanuro by'uruvange rw'imiti
Ibinyabutabire
| Uduce duto | Piranha (SPM) | aside sulfuriki/peroxide ya hydrogen/amazi ya DI | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide/hydrogen peroxide/DI amazi | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| Ibyuma (atari umuringa) | SC-2 (HPM) | aside hydrochloric/hydrogen peroxide/DI amazi | HCl/H2O2/H2O1:1:6; 85°C |
| Piranha (SPM) | aside sulfuriki/peroxide ya hydrogen/amazi ya DI | H2SO4/H2O2/H2O3-4:1; 90°C | |
| DHF | Kuramo aside hydrofluoric / DI amazi (ntiyakuraho umuringa) | HF/H2O1:50 | |
| Ibikomoka ku binyabuzima (organic) | Piranha (SPM) | aside sulfuriki/peroxide ya hydrogen/amazi ya DI | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide/hydrogen peroxide/DI amazi | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| DIO3 | Ozone mu mazi yakuwemo ioni | Uruvange rwa O3/H2O rwatunganyijwe neza | |
| Oxide kavukire | DHF | Kuramo aside hydrofluoric / DI amazi | HF/H2O 1:100 |
| BHF | aside hydrofluoric ifite impumuro nziza | NH4F/HF/H2O |
3. Uburyo busanzwe bwo gusukura Wafer
1. Uburyo bwo gusukura bwa RCA
Uburyo bwo gusukura bwa RCA ni bumwe mu buryo busanzwe bwo gusukura wafer mu nganda za semiconductor, bwakozwe na RCA Corporation mu myaka irenga 40 ishize. Ubu buryo bukoreshwa cyane cyane mu gukuraho imyanda ya organic na ion y'icyuma kandi bushobora kurangizwa mu ntambwe ebyiri: SC-1 (Standard Clean 1) na SC-2 (Standard Clean 2).
SC-1 Gusukura: Iyi ntambwe ikoreshwa cyane cyane mu gukuraho imyanda n'uduce duto tw'ibinyabuzima. Umuti ni uruvange rwa ammonia, peroxide ya hydrogen, n'amazi, bigakora urwego rworoshye rwa silicon oxide ku buso bwa wafer.
Gusukura SC-2: Iyi ntambwe ikoreshwa cyane cyane mu gukuraho imyanda ya iyoni mu byuma, hakoreshejwe uruvange rwa aside hydrochloric, peroxide ya hydrogen, n'amazi. Isiga agace gato k'isuku ku buso bwa wafer kugira ngo hirindwe ko yangirika.
2. Uburyo bwo gusukura Piranha (Gusukura Piranha Etch)
Uburyo bwo gusukura Piranha ni uburyo bwiza cyane bwo gukuraho ibintu by’umwimerere, hakoreshejwe uruvange rwa aside sulfurike na peroxide ya hydrogen, ubusanzwe mu gipimo cya 3:1 cyangwa 4:1. Bitewe n’ubushobozi bukomeye cyane bw’ubu buryo bwo kugabanya ogisijeni, bushobora gukuraho ibintu byinshi by’umwimerere n’imyanda ikomeye. Ubu buryo busaba kugenzura neza imiterere y’ibintu, cyane cyane mu bijyanye n’ubushyuhe n’ubwinshi bw’ibice, kugira ngo hirindwe kwangiza wafer.
Gusukura hakoreshejwe ikoranabuhanga rigezweho (ultrasonic cleaner) bikoresha uburyo bwo gukaraba ibyuma biva mu majwi menshi mu mazi kugira ngo bikuremo imyanda ku buso bwa wafer. Ugereranyije no gusukura ikoranabuhanga rigezweho, gusukura ikoranabuhanga rigezweho (megasonic cleaning) bikora ku nshuro nyinshi, bigatuma utuntu duto duto duto dukurwaho neza nta kwangiza imiterere ya wafer.
4. Gusukura ozone
Ikoranabuhanga ryo gusukura ozone rikoresha ubushobozi bukomeye bwo kongerera ogisijeni ozone mu kubora no gukuraho imyanda y’umwimerere ku buso bwa wafer, amaherezo ikabihinduramo dioxyde de carbone n’amazi bitagize ingaruka mbi. Ubu buryo ntibusaba ikoreshwa ry’ibinyabutabire bihenze kandi butera umwanda muke ku bidukikije, bigatuma biba ikoranabuhanga rigezweho mu rwego rwo gusukura wafer.
4. Ibikoresho byo gusukura Wafer
Kugira ngo habeho imikorere myiza n'umutekano mu gutunganya isuku ya wafer, ibikoresho bitandukanye byo gusukura bigezweho bikoreshwa mu gukora semiconductor. Ubwoko bw'ingenzi burimo:
1. Ibikoresho byo gusukura amazi
Ibikoresho byo gusukura amazi birimo ibigega bitandukanye byo kwibiza, ibigega byo gusukura hakoreshejwe ikoranabuhanga, n'ibyuma byumisha amazi. Ibi bikoresho bihuza imbaraga za mekanike n'ibinyabutabire kugira ngo bikuremo imyanda ku buso bwa wafer. Ibigega byo kwibiza amazi akenshi bifite uburyo bwo kugenzura ubushyuhe kugira ngo bigenzure neza kandi bigire akamaro.
2. Ibikoresho byo gusukura byumye
Ibikoresho byo gusukura byumye ahanini birimo imashini zisukura plasma, zikoresha uduce duto tw’ingufu nyinshi muri plasma kugira ngo zihuze kandi zikureho ibisigazwa ku buso bwa wafer. Gusukura plasma birakwiriye cyane cyane mu bikorwa bisaba kubungabunga ubusugire bw’ubuso hatabayeho gushyiramo ibisigazwa bya shimi.
3. Sisitemu zo gusukura zikoresha ikoranabuhanga
Kubera ko umusaruro wa semiconductor ukomeza kwaguka, sisitemu zo gusukura zikoresha ikoranabuhanga rya "otomatiki" zabaye amahitamo meza yo gusukura wafer mu buryo bunini. Izi sisitemu zikunze kuba zirimo uburyo bwo kwimura ikoranabuhanga, sisitemu zo gusukura za tanki nyinshi, na sisitemu zo kugenzura neza kugira ngo habeho umusaruro uhoraho wo gusukura wafer kuri buri wafer.
5. Ingendo z'ejo hazaza
Uko ibikoresho bya semiconductor bikomeje kugabanuka, ikoranabuhanga ryo gusukura wafer ririmo gutera imbere rigana ku bisubizo byiza kandi bitangiza ibidukikije. Ikoranabuhanga ryo gusukura mu gihe kizaza rizibanda kuri ibi bikurikira:
Gukuraho uduce duto twa sub-nanometer: Ikoranabuhanga risanzweho ryo gusukura rishobora guhangana n'uduce duto twa nanometer, ariko hamwe no kugabanuka k'ingano y'igikoresho, gukuraho uduce duto twa sub-nanometer bizaba ikibazo gishya.
Isuku y’icyatsi kibisi kandi irinda ibidukikije: Kugabanya ikoreshwa ry’imiti yangiza ibidukikije no guteza imbere uburyo bwo gusukura butangiza ibidukikije, nko gusukura ozone no gusukura megasonic, bizarushaho kuba ingenzi.
Urwego rwo hejuru rw’ikoranabuhanga n’ubuhanga: Sisitemu z’ubwenge zizatuma habaho gukurikirana no guhindura ibipimo bitandukanye mu gihe cyo gusukura, birusheho kunoza imikorere y’isuku n’umusaruro.
Ikoranabuhanga ryo gusukura Wafer, nk'intambwe y'ingenzi mu gukora semiconductor, rigira uruhare runini mu kwemeza ko ubuso bwa wafer budahumanye mu bikorwa bikurikira. Guhuza uburyo butandukanye bwo gusukura bikuraho neza imyanda, bigatanga ubuso busukuye ku ntambwe zikurikiraho. Uko ikoranabuhanga rigenda ritera imbere, ibikorwa byo gusukura bizakomeza kunozwa kugira ngo bihuze n'ibikenewe kugira ngo habeho ubushishozi bwinshi no kugabanya ubusembwa mu gukora semiconductor.
Igihe cyo kohereza: Ukwakira-08-2024