Ikoranabuhanga ryo gusukura Wafer n'inyandiko za tekiniki​

Ibikubiye muri iyi nyandiko

1. Intego z'ingenzi n'akamaro ko gusukura imigozi

2. Isuzuma ry'ubwandu n'ubuhanga buhanitse bwo gusesengura

3. Uburyo bwo gusukura bugezweho n'amahame ya tekiniki​

4. Ibyingenzi mu gushyira mu bikorwa tekiniki no kugenzura inzira

5. Inzira z'ejo hazaza n'icyerekezo gishya

6.​XKH Ibisubizo n'Urusobe rw'Ibidukikije kuva ku Munsi kugeza ku Munsi​

Gusukura wafer ni igikorwa cy'ingenzi mu gukora semiconductor, kuko n'imyanda yo ku rwego rwa atome ishobora kwangiza imikorere y'igikoresho cyangwa umusaruro wacyo. Ubusanzwe igikorwa cyo gusukura gikubiyemo intambwe nyinshi zo gukuraho imyanda itandukanye, nk'ibisigazwa by'ibinyabuzima, imyanda y'icyuma, uduce duto, na okiside karemano.

1. Intego zo gusukura Wafer

• Kuraho ibintu bihumanya ikirere (urugero: ibisigazwa bya photoresist, ibikumwe).
• Kuraho umwanda wibyuma (urugero, Fe, Cu, Ni).
• Kuraho ubwandu bw'udukoko (urugero: umukungugu, ibice bya silikoni).
• Kuraho okiside gakondo​ (urugero, ibice bya SiO₂ bibaho mu gihe cyo guhumeka n'umwuka).

2. Akamaro ko gusukura neza Wafer

• Bituma habaho umusaruro mwinshi mu mikorere n'imikorere myiza y'igikoresho.
• Igabanya inenge n'umuvuduko w'ibisigazwa by'ibishishwa bya wafer.
• Binoza ubwiza bw'ubuso n'uburyo buhamye.

Mbere yo gusukura cyane, ni ngombwa gusuzuma ubwandu buriho ku buso. Gusobanukirwa ubwoko, ingano, n'imiterere y'ibihumanya ku buso bwa wafer binoza isuku ya shimi n'ingufu zikoreshwa mu ikoranabuhanga.

3. Ubuhanga buhanitse bwo gusesengura ibizamini by’ubwandu

3.1 Isesengura ry'uduce tw'ubuso

• Ibikoresho byihariye byo kubara uduce duto bikoresha uburyo bwa laser scattering cyangwa mudasobwa vision kugira ngo bibare, binini, kandi bigaragaze ibisigazwa by'ubuso.
• Ubukana bw'urumuri rukwirakwira bufitanye isano n'ingano y'uduce duto nka nanometero icumi n'ubucucike buri hasi nka 0.1 particles / cm².
• Gupima ibikoresho hakoreshejwe amabwiriza bitanga icyizere cy’uko ibikoresho byifashishwa mu bikoresho byifashishwa. Gupima mbere na nyuma yo kubisukura byemeza imikorere myiza yo kubikuraho, bigatuma bigenda neza.

3.2 Isesengura ry'Ubuso bw'Ibice

• Ubuhanga bwo kwitabwaho n'ubuso bugaragaza imiterere y'ibice by'umubiri.
• Isuzuma rya X-ray Photoelectron Spectroscopy (XPS / ESCA): Isesengura imiterere y'ibinyabutabire byo ku buso binyuze mu gukaraba wafer hakoreshejwe X-rays no gupima electrons zisohoka.
• Isesengura ry’imiterere y’izuba ry’urumuri (GD-OES): Rikoresha imiterere y’ubuso buto cyane mu gihe risesengura imiterere y’izuba ry’urumuri kugira ngo rimenye imiterere y’izuba ry’urumuri.
• Imipaka yo gutahura igera ku bice kuri miliyoni (ppm), ibi bikaba ari byo biyobora mu guhitamo imiti isukura neza.

3.3 Isesengura ry'ubwandu mu miterere​

• Gupima Electron Microscopy (SEM): Ifata amashusho afite ubushobozi bwo kugaragaza imiterere n'ibipimo by'ibintu byanduye, bigaragaza uburyo bwo gufatana (cyangwa uburyo bwo gukoresha imiti).
• Mikorosikopi y'Ingufu za Atomiki (AFM): Ikarita y'imiterere y'ubutaka bwa nanoscale kugira ngo imenye uburebure bw'uduce duto n'imiterere ya mekanike.
• Mikroskopi ya Ion Beam (FIB) yo gusya no kohereza electron (TEM): Itanga ishusho y'imbere y'imyanda itwikiriwe.

4. Uburyo bwo gusukura buhanitse

Nubwo gusukura ibintu bihumanya bikuraho neza ibintu bihumanya ikirere, hakenewe ubundi buryo buhanitse ku bice bidafite umwimerere, ibisigazwa by'icyuma, n'ibintu bihumanya ikirere:

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4.1 Gusukura RCA​

• Ubu buryo bwakozwe na RCA Laboratories, bukoresha uburyo bwo kwiyuhagira mu mazi kugira ngo bukureho imyanda iri mu mazi.
• SC-1 (Isuku Isanzwe-1): Ikuraho imyanda n'uduce tw'ibinyabuzima hakoreshejwe uruvange rwa NH₄OH, H₂O₂, na H₂O​ (urugero, igipimo cya 1:1:5 kuri ~20°C). Ikora urwego rworoshye rwa silicon dioxide.
• SC-2 (Isuku Isanzwe-2): Ikuraho imyanda y'icyuma ikoresheje HCl, H₂O₂, na H₂O​ (urugero, igipimo cya 1:1:6 kuri ~80°C). Isiga ubuso budafite umwuka.
• Isuku irangana no kurinda ubuso.

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4.2 Gutunganya ozone​​

• Ishyira wafer mu mazi yuzuye ozone (O₃/H₂O).
• Ikuraho ogisijeni neza kandi ikavanaho ibintu by’umwimerere idakoresheje wafer, igasiga ubuso budafite imiti.

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4.3 Gusukura Megasonic?

• Ikoresha ingufu za ultrasonic zikoresha frequency yo hejuru (ubusanzwe 750–900 kHz) hamwe n'ibisubizo byo gusukura.
• Ikora uduce tw’ibitunguru bikuramo imyanda. Yinjira mu bumenyi bw’imiterere y’ubutaka mu buryo bugoye ariko ikagabanya kwangirika kw’inyubako zoroshye.

4.4 Isuku y'ibicurane

• Ikonjesha vuba amafunguro ya wafer kugeza ku bushyuhe bukabije, ikagabanya imyanda.
• Gusukura cyangwa gusukura buhoro buhoro bikuraho uduce twacitse. Birinda ko amazi yangirika cyangwa gukwirakwira mu buso.
• Uburyo bwihuse kandi bwumutse kandi bukoresha imiti mike cyane.

Umwanzuro:
Nk'ikigo gikomeye gitanga ibisubizo bya semiconductor mu buryo bwuzuye, XKH iyobowe n'udushya mu ikoranabuhanga kandi abakiriya bakeneye gutanga serivisi nziza zirimo gutanga ibikoresho byo mu rwego rwo hejuru, gukora wafer, no gusukura neza. Ntabwo dutanga gusa ibikoresho bya semiconductor bizwi ku rwego mpuzamahanga (urugero, imashini zikora lithography, sisitemu zo gushushanya) hamwe n'ibisubizo byabugenewe, ahubwo tunatanga ikoranabuhanga ryihariye - harimo gusukura RCA, gutunganya ozone, no gusukura megasonic - kugira ngo dukomeze isuku mu rwego rwa atomiki mu gukora wafer, twongere umusaruro n'umusaruro w'abakiriya. Dukoresheje amatsinda y'abakira vuba mu gace runaka n'imiyoboro ya serivisi z'ubwenge, dutanga ubufasha bwuzuye kuva mu gushyiraho ibikoresho no kunoza imikorere kugeza ku kubungabunga ibintu mbere y'igihe, duha abakiriya ubushobozi bwo gutsinda imbogamizi za tekiniki no gutera imbere mu iterambere rya semiconductor rirambye kandi rinoze. Duhitemo kugira ngo duhuze ubumenyi mu bya tekiniki n'agaciro k'ubucuruzi.