Ikoranabuhanga ryo gusukura Wafer mu gukora Semiconductors

Ikoranabuhanga ryo gusukura Wafer mu gukora Semiconductors

Gusukura wafer ni intambwe y'ingenzi mu gikorwa cyose cyo gukora semiconductor, ikaba ari imwe mu mpamvu z'ingenzi zigira ingaruka ku mikorere y'ibikoresho n'umusaruro wabyo. Mu gihe cyo gukora chips, nubwo byaba ari ubwandu buto cyane bishobora kwangiza imiterere y'ibikoresho cyangwa bigatuma binanirwa burundu. Kubera iyo mpamvu, ibikorwa byo gusukura bikoreshwa mbere na nyuma ya buri ntambwe yo gukora kugira ngo haveho imyanda ku buso no kugira ngo habeho isuku ya wafers. Gusukura ni nabyo bikorwa cyane mu gukora semiconductors, bigizwe n'ibice bigera kuri30% by'intambwe zose z'ibikorwa.

Bitewe no gupima imikorere y’inyongera ikomeje (VLSI), imikorere y’inyongera yateye imbere ku28 nm, 14 nm, no hejuru yayo, bituma ibikoresho byinshi birushaho kuba binini, ubugari bw'umurongo bugabanuka, kandi inzira zigenda zirushaho kuba zigoye. Uduce duto tw’ibikoresho tuba twibasirwa cyane n’umwanda, mu gihe ingano nto y’ibikoresho bituma isuku irushaho kugorana. Kubera iyo mpamvu, umubare w’intambwe zo gusukura ukomeje kwiyongera, kandi isuku yarushijeho kuba ingorabahizi, ikomeye, kandi igoye kurushaho. Urugero, chip ya 90 nam isanzwe ikenera hafiIntambwe 90 zo gusukura, mu gihe chip ya 20 nm isaba hafiIntambwe 215 zo gusukuraUko inganda zigenda zitera imbere zikagera kuri 14 nm, 10 nm, n'utudomo duto, umubare w'ibikorwa byo gusukura uzakomeza kwiyongera.

Mu by'ukuri,Gusukura wafer bivuga inzira zikoresha imiti, imyuka, cyangwa uburyo bufatika bwo gukuraho imyanda ku buso bwa wafer. Imyanda nk'uduce duto, ibyuma, ibisigazwa by'ibinyabuzima, na okiside karemano byose bishobora kugira ingaruka mbi ku mikorere y'igikoresho, uburyo kizigirwamo, n'umusaruro wacyo. Gusukura ni "ikiraro" hagati y'intambwe zikurikirana zo gukora—urugero, mbere yo gushyiramo no gushushanya, cyangwa nyuma yo gushushanya, CMP (gusukura ikoranabuhanga rya shimi), no gushyiramo iyoni. Muri rusange, gusukura wafer bishobora kugabanywamo ibice bibiri:gusukura amazinagusukura byumye.

Gusukura amazi

Gusukura amazi hakoreshejwe imiti isukura cyangwa amazi yakuwemo iy’iyoni (DIW) kugira ngo isukure ifu y’isukari. Uburyo bubiri bw’ingenzi bukoreshwa:

• Uburyo bwo kwibiza: wafers zijugunywa mu bigega byuzuyemo solvents cyangwa DIW. Ubu ni bwo buryo bukoreshwa cyane, cyane cyane ku nyubako z'ikoranabuhanga zikuze.

• Uburyo bwo gutera imiti: imiti isukura cyangwa DIW iterwa ku migozi izenguruka kugira ngo ikureho imyanda. Nubwo kwibiza bituma imigozi myinshi itunganywa, gusukura imigozi bikoresha umugozi umwe gusa kuri buri cyumba ariko bigatanga uburyo bwo kuyigenzura neza, bigatuma irushaho kugaragara mu duce twateye imbere.

Gusukura byumye

Nkuko izina ribigaragaza, gusukura byumye birinda ibintu bishongesha cyangwa DIW, ahubwo bigakoresha imyuka cyangwa plasma kugira ngo bikureho imyanda. Kubera ko isukura ryumye rikomeje kwiyongera bitewe nukoubuziranenge bwo hejurun'ubushobozi bwo kurwanya ibintu by'umwimerere, nitride, na okiside. Ariko, bisabaishoramari ryinshi ry'ibikoresho, imikorere igoye, no kugenzura ibikorwa bikomeyeIndi nyungu ni uko gusukura byumye bigabanya ubwinshi bw'amazi mabi aturuka mu buryo bwo gutose.

Uburyo Busanzwe bwo Gusukura mu Giti Gitose

1. Isuku ya DIW (Amazi Asukuye)

DIW ni yo isukura ikoreshwa cyane mu gusukura amazi. Bitandukanye n'amazi adasukuwe, DIW nta na kimwe igira mu gukwirakwiza ayoni, ikarinda ingese, ingaruka z'amashanyarazi, cyangwa kwangirika kw'ibikoresho. DIW ikoreshwa cyane mu buryo bubiri:

1. Gusukura ubuso bwa wafer mu buryo butaziguye– Akenshi bikorwa mu buryo bwa "single-wafer" hakoreshejwe "rollers", "brushes", cyangwa "spray nozzles" mu gihe cyo guhinduranya "wafer". Ikibazo ni ukwiyongera kw'amashanyarazi, bishobora gutera inenge. Kugira ngo ibi bigerweho, CO₂ (hamwe na rimwe na NH₃) ishongeshwa muri DIW kugira ngo yongere ubushobozi bwo gutwara ibintu mu buryo butanduje "wafer".

2. Gusukura nyuma yo gusukura imiti– DIW ikuraho ibisigazwa by'isuku bishobora kwangiza wafer cyangwa kwangiza imikorere y'igikoresho mu gihe bisigaye hejuru.

2. Gusukura HF (aside hydrofluoric)

HF ni yo miti ikoreshwa cyane mu gukurahoibice bya okiside gakondo (SiO₂)ku mavuta ya silikoni kandi ni iya kabiri nyuma ya DIW mu gaciro. Inashongesha ibyuma bifatanye kandi ikagabanya ogisijeni. Ariko, gusya HF bishobora kwangiza ubuso bwa wafer no kwibasira ibyuma bimwe na bimwe mu buryo butari ngombwa. Kugira ngo ibyo bibazo bikemuke, uburyo bunoze bwongera HF, kongeramo ogisijeni, surfactants, cyangwa complexing agents kugira ngo byongere ubushobozi bwo guhitamo no kugabanya ubwandu.

3. Isuku ya SC1 (Isuku isanzwe ya 1: NH₄OH + H₂O₂ + H₂O)

SC1 ni uburyo buhendutse kandi bunoze cyane bwo gukurahoibisigazwa by'ibinyabuzima, uduce duto, n'ibindi byuma bimwe na bimwe. Iyi mikorere ihuza uburyo H₂O₂ ikora ogisijeni n'ingaruka za NH₄OH zo gushonga. Irwanya kandi uduce duto binyuze mu mbaraga z'amashanyarazi, kandi ubufasha bwa ultrasound/megasonic burushaho kunoza imikorere. Ariko, SC1 ishobora kwangiza ubuso bwa wafer, isaba gukoresha neza ikigereranyo cya shimi, kugenzura imbaraga z'ubuso (binyuze muri surfactants), n'ibintu bigabanya ubushyuhe kugira ngo bihagarike ihinduka ry'icyuma.

4. Isuku ya SC2 (Isuku isanzwe ya 2: HCl + H₂O₂ + H₂O)

SC2 yuzuzanya na SC1 ikurahoibintu bihumanya icyumaUbushobozi bwayo bukomeye bwo guhindura ibyuma bya oxidized mo imyunyu cyangwa complexes, bikanyuzwamo amazi. Nubwo SC1 igira akamaro ku bintu by’umwimerere n’uduce duto, SC2 ifite akamaro kanini mu gukumira kwinjizwa kw’ibyuma no kwirinda kwanduza ibyuma.

5. Isuku ya O₃ (Ozone)

Gusukura ozone bikoreshwa cyane cyane mugukuraho ibintu by'umwimererenakwica udukoko muri DIWO₃ ikora nk'umusemburo ukomeye wa ogisijeni, ariko ishobora gutuma yongera guhindurwa, bityo akenshi ihuzwa na HF. Gutunganya ubushyuhe ni ingenzi cyane kuko O₃ gushonga mu mazi bigabanuka iyo ubushyuhe buri hejuru. Bitandukanye n'imiti yica udukoko ishingiye kuri chlorine (ntiyemerwa mu bikoresho bya semiconductor), O₃ ibora ikaba ogisijeni idahumanya sisitemu za DIW.

6. Gusukura ibikoresho by'ingufu bikomoka ku bimera

Mu buryo bumwe na bumwe bwihariye, imiti ihumanya ikirere ikoreshwa aho uburyo busanzwe bwo gusukura budahagije cyangwa butabereye (urugero, igihe hagomba kwirindwa ikorwa rya okiside).

Umwanzuro

Gusukura umugati ni byointambwe ikunze kugaruka kenshimu nganda za semiconductor kandi bigira ingaruka zitaziguye ku musaruro no ku bwizerwe bw'ibikoresho. Hamwe n'intambwe igana kuwafer nini n'imiterere y'ibikoresho bito, ibisabwa kugira ngo habeho isuku ku buso bwa wafer, imiterere ya shimi, ubukana, n'ubugari bwa okiside birimo kugenda birushaho gukomera.

Iyi nkuru yasuzumye ikoranabuhanga ryo gusukura wafer rigezweho n’irigezweho, harimo DIW, HF, SC1, SC2, O₃, n’uburyo bwo gusuka ibintu mu buryo bw’umwimerere, hamwe n’uburyo bwabyo, ibyiza n’imbogamizi zabyo. Muri zombi, harimo uburyo bwo gusukura wafer bugezweho n’ubugezweho.ibitekerezo by'ubukungu n'ibidukikije, kunoza ikoranabuhanga ryo gusukura wafer ni ingenzi kugira ngo habeho ibyifuzo by’inganda zikora ibikoresho bya semiconductor bigezweho.