Hamwe niterambere rikomeje ryiterambere rya tekinoroji ya semiconductor, munganda ziciriritse ndetse ninganda zifotora, ibisabwa kugirango ubuziranenge bwubuso bwa wafer substrate cyangwa urupapuro rwa epitaxial nabwo birakomeye. None, ni ibihe bisabwa byujuje ubuziranenge kuri wafer? Gufatasafis nkurugero, ni ibihe bipimo bishobora gukoreshwa mugusuzuma ubwiza bwubuso bwa wafer?
Nibihe bipimo byo gusuzuma wafers?
Ibipimo bitatu
Kuri waferi ya safiro, ibipimo byayo byo gusuzuma ni gutandukana kwuzuye (TTV), kugoreka (Umuheto) na Warp (Warp). Ibi bipimo bitatu hamwe byerekana uburinganire nuburinganire bwa silicon wafer, kandi birashobora gupima urugero rwa ripple ya wafer. Gukosora birashobora guhuzwa nuburinganire kugirango harebwe ubwiza bwubuso bwa wafer.
Niki TTV, BOW, Warp?
TTV (Gutandukana kwinshi)
TTV ni itandukaniro riri hagati yubunini ntarengwa nubunini bwa wafer. Iyi parameter ni indangagaciro yingenzi ikoreshwa mugupima uburebure bwa wafer. Mubikorwa bya semiconductor, ubunini bwa wafer bugomba kuba bumwe hejuru yubuso bwose. Ibipimo mubisanzwe bikorerwa ahantu hatanu kuri wafer kandi itandukaniro rirabarwa. Kurangiza, agaciro ni ishingiro ryingenzi ryo gusuzuma ubwiza bwa wafer.
Umuheto
Umuheto mubikorwa bya semiconductor bivuga kugoreka kwa wafer, kurekura intera iri hagati ya wafer idacometse hamwe nindege yerekanwe. Ijambo birashoboka ko riva mubisobanuro byuburyo bwikintu iyo cyunamye, nkuburyo bugoramye bwumuheto. Agaciro k'umuheto gasobanurwa no gupima gutandukana hagati no hagati ya silicon wafer. Agaciro ubusanzwe kagaragarira muri micrometero (µm).
Intambara
Warp numutungo wisi yose waferi ipima itandukaniro riri hagati yintera ntarengwa nuburebure hagati ya wafer yubusa idafite indege nindege yerekanwe. Yerekana intera iri hejuru yubuso bwa silicon wafer yindege.
Ni irihe tandukaniro riri hagati ya TTV, Umuheto, Intambara?
TTV yibanda ku mpinduka mubyimbye kandi ntabwo ihangayikishijwe no kugoreka cyangwa kugoreka wafer.
Umuheto wibanda kumurongo rusange, cyane cyane urebye kugoreka kumurongo wo hagati no kumpera.
Intambara irarenze, harimo kunama no kugoreka hejuru ya wafer yose.
Nubwo ibi bipimo bitatu bifitanye isano nuburyo bwa geometrike ya silicon wafer, barapimwe kandi bagasobanurwa ukundi, kandi ingaruka zabyo mubikorwa bya semiconductor no gutunganya wafer nazo ziratandukanye.
Gutoya ibipimo bitatu, nibyiza, kandi binini binini, niko ingaruka mbi ziterwa na semiconductor. Kubwibyo, nkumwitozo wa semiconductor, tugomba kumenya akamaro kerekana ibipimo bya wafer kumurongo wibikorwa byose, gukora inzira ya semiconductor, tugomba kwitondera amakuru arambuye.
Ens kugenzura）
Igihe cyo kohereza: Jun-24-2024