TTV, BOW, WARP, na TIR bisobanura iki muri Wafers?

Mugihe dusuzumye semiconductor silicon wafers cyangwa substrate ikozwe mubindi bikoresho, dukunze guhura nibipimo bya tekiniki nka: TTV, BOW, WARP, kandi birashoboka TIR, STIR, LTV, nibindi. Ni ibihe bipimo byerekana?

TTV - Gutandukana kwinshi
BOW - Umuheto
INTAMBARA - Intambara
TIR - Gusoma Byose Byerekanwe
STIR - Urubuga Byose Byerekanwe Gusoma
LTV - Gutandukana kwaho

1. Gutandukana kwubunini bwuzuye - TTV

Itandukaniro riri hagati yubunini ntarengwa nubunini bwa wafer ugereranije nindege yerekanwe iyo wafer ifatanye kandi muguhuza hafi. Mubisanzwe bigaragarira muri micrometero (μm), bikunze kugaragazwa nka: ≤15 μ m.

2. Umuheto - BOW

Gutandukana hagati yintera ntoya kandi ntarengwa kuva hagati hagati ya wafer hejuru yindege yerekanwe mugihe wafer iri mubuntu (budafunze). Ibi birimo ibice byombi (umuheto mubi) hamwe na convex (umuheto mwiza). Bikunze kugaragara muri micrometero (μm), bikunze kugaragazwa nka: ≤40 μ m.

3. Intambara - INTAMBARA

Gutandukana hagati yintera ntoya nini ntarengwa kuva hejuru ya wafer kugera kumurongo werekeza (mubisanzwe hejuru yinyuma ya wafer) mugihe wafer iri mubuntu (budafunze). Ibi birimo imanza zombi zifatika (negative warp) hamwe na convex (positif nziza). Mubisanzwe bigaragarira muri micrometero (μm), bikunze kugaragazwa nka: ≤30 μ m.

4. Gusoma Byose Byerekanwe - TIR

Iyo wafer ifatanye kandi muguhuza hafi, ukoresheje indege yerekanwe igabanya igiteranyo cyo guhagarika ingingo zose ziri mukarere keza cyangwa akarere kamwe kegeranye hejuru yubuso bwa wafer, TIR ni itandukaniro riri hagati yintera nini kandi ntoya kuva hejuru ya wafer kugera kuriyi ndege yerekanwe.

XKH ishingiye ku buhanga bwimbitse mu bikoresho bya semiconductor nka TTV, BOW, WARP, na TIR, XKH itanga serivisi zinoze zitunganijwe neza zijyanye na nganda zikomeye. Dutanga kandi dushyigikira ibintu byinshi byifashishwa cyane birimo safiro, karbide ya silicon (SiC), wafer ya silicon, SOI, na quartz, byemeza uburinganire budasanzwe, uburebure bwuzuye, hamwe nubuziranenge bwubuso bwa porogaramu zigezweho muri optoelectronics, ibikoresho byamashanyarazi, na MEMS. Twizere gutanga ibisubizo byizewe hamwe no gutunganya neza byujuje ibyangombwa bisabwa cyane.