TTV, BOW, WARP, na TIR bivuze iki muri Wafers?

Iyo dusuzuma utubumbe twa silikoni cyangwa substrate bikozwe mu bindi bikoresho, dukunze guhura n'ibipimo bya tekiniki nka: TTV, BOW, WARP, ndetse na TIR, STIR, LTV, n'ibindi. Ni ibihe bipimo bigaragazwa na byo?

TTV — Ihindagurika ry'Ubunini Rusange
UMUHETO — Umuheto
WARP — Warp
TIR — Igipimo cyose cyagaragajwe
STIR — Igiteranyo cy'ibyasomwe ku rubuga
LTV — Ihindagurika ry'Ubunini bw'aho uherereye

1. Ihindagurika ry'Ubunini Rusange — TTV

Itandukaniro riri hagati y'ubugari ntarengwa n'ubugari buke bw'umugozi ugereranije n'aho umugozi uherereye iyo umugozi uhambiriye kandi ufatanye. Muri rusange ugaragazwa muri mikorometero (μm), akenshi ugaragazwa nka: ≤15 μm.

2. Umuheto — Umuheto

Gutandukanya intera ntoya n'inyongera ntarengwa kuva hagati y'ubuso bwa wafer kugera ku gice cy'ifatizo iyo wafer iri mu mwanya wayo (udafunguye). Ibi birimo impande zombi (umuheto udafite aho uboheye) n'impande zombi (umuheto mwiza). Ubusanzwe igaragara muri mikorometero (μm), akenshi igaragazwa nka: ≤40 μm.

3. Warp — WARP

Gutandukanya intera ntoya n'inyongera ntarengwa uvuye ku buso bwa wafer ujya ku gice cy'inyuma cy'uwafer (ubusanzwe ni inyuma y'uwafer) iyo wafer iri mu buryo bworoshye (budafite ikirango). Ibi birimo impande zombi (negative warp) na convex (positive warp). Muri rusange igaragara muri mikorometero (μm), akenshi igaragazwa nka: ≤30 μm.

4. Igiteranyo cy'ibisobanuro byatanzwe — TIR

Iyo wafer ihambiriwe kandi ifatanye hafi, hakoreshejwe urwego rw'icyerekezo rugabanya umubare w'ingingo zose ziri mu gace k'ubuziranenge cyangwa agace runaka k'aho wafer iherereye, TIR ni ugutandukanya intera ntarengwa n'intera ntoya kuva ku rundi ruhande rw'icyerekezo kugera kuri urwo rwego rw'icyerekezo.

Ishingiye ku buhanga bwimbitse mu bijyanye n'ibikoresho bya semiconductor nka TTV, BOW, WARP, na TIR, XKH itanga serivisi zo gutunganya wafer neza zijyanye n'amahame agenga inganda. Dutanga kandi dushyigikira ibikoresho bitandukanye bikora neza birimo safiro, silicon carbide (SiC), silicon wafers, SOI, na quartz, tugenzura ko ubuso bugororotse, buhamye, kandi bufite ireme ku buryo buhanitse mu bikoresho bigezweho muri optoelectronics, amashanyarazi, na MEMS. Twizere ko tuzatanga ibisubizo byizewe by'ibikoresho no gutunganya neza bihuye n'ibyo ukeneye mu buryo bukenewe cyane mu gushushanya.