Gutera urwego rw'inyongera rwa atome za silicon kuri substrate ya silicon wafer bifite ibyiza byinshi:
Mu mikorere ya silikoni ya CMOS, gukura kwa epitaxial (EPI) kuri substrate ya wafer ni intambwe y'ingenzi.
1. Kunoza ubwiza bwa kristale
Inenge n'imyanda bya mbere bya substrate: Mu gihe cyo gukora, substrate ya wafer ishobora kugira inenge n'imyanda imwe n'imwe. Ikura ry'urwego rwa epitaxial rishobora gutanga urwego rwa siliconi rwo mu rwego rwo hejuru rufite inenge nke n'imyanda kuri substrate, ibyo bikaba ari ingenzi mu gukora ibikoresho bikurikira.
Imiterere ya kristu imwe: Gukura kwa epitaxial bituma kristu iba imwe, bigabanya ingaruka z'imipaka y'ibinyampeke n'inenge mu bikoresho bya substrate, bityo bikanoza ubwiza bwa kristu muri rusange.
2, kunoza imikorere y'amashanyarazi.
Gutunganya imiterere y'igikoresho: Mu gukura urwego rwa epitaxial ku gice cy'ubutaka, ingano ya doping n'ubwoko bwa silikoni bishobora kugenzurwa neza, bigatuma amashanyarazi y'igikoresho arushaho kuba meza. Urugero, doping y'urwego rwa epitaxial ishobora guhindurwa neza kugira ngo igenzure voltage ya MOSFET n'ibindi bipimo by'amashanyarazi.
Kugabanya umuvuduko w'amazi usohoka: Urukuta rwo hejuru rwa epitaxial rufite ubucucike buke, bifasha kugabanya umuvuduko w'amazi usohoka mu bikoresho, bityo bikanoza imikorere n'ubwizigirwa bw'igikoresho.
3, kunoza imikorere y'amashanyarazi.
Kugabanya Ingano y'Ibikoresho: Mu duce duto tw'imikorere (nk'urugero rwa 7nm, 5nm), ingano y'ibikoresho ikomeza kugabanuka, bigasaba ibikoresho binonosoye kandi byiza. Ikoranabuhanga ryo gukura rya Epitaxial rishobora guhaza ibyo byifuzo, rigashyigikira gukora imiyoboro ikora neza kandi ifite ubucucike bwinshi.
Kongera Voltage yo Gucika: Epitaxial layers zishobora gushushanywa zifite voltage nyinshi zo gucika, ibyo bikaba ari ingenzi mu gukora ibikoresho bifite ingufu nyinshi n'amashanyarazi menshi. Urugero, mu bikoresho bifite ingufu, epitaxial layers zishobora kongera voltage yo gucika kw'igikoresho, bikongera urwego rw'imikorere rutekanye.
4, Uburyo bwo guhuza ibikorwa n'imiterere y'ibice byinshi
Imiterere y'Ibice Bitandukanye: Ikoranabuhanga ryo gukura rya Epitaxial ryemerera gukura kw'imiterere y'ibice byinshi ku bice, hamwe n'ibice bitandukanye bifite ingano n'ubwoko butandukanye bwa doping. Ibi ni ingirakamaro cyane mu gukora ibikoresho bigoye bya CMOS no gutuma habaho guhuza kw'ibice bitatu.
Guhuza: Uburyo bwo gukura kwa epitaxial bujyanye cyane n'uburyo busanzwe bwo gukora CMOS, bigatuma byoroha kwinjira mu buryo bugezweho bwo gukora hatabayeho impinduka zikomeye ku mirongo y'imikorere.
Incamake: Ikoreshwa ry'izamuka rya epitaxial mu mikorere ya silikoni ya CMOS rigamije cyane cyane kongera ubwiza bwa kristale ya wafer, kunoza imikorere y'amashanyarazi y'ibikoresho, gushyigikira node zigezweho, no guhaza ibyifuzo by'inganda zikora imiyoboro y'amashanyarazi ifite imikorere myiza kandi ifite ubucucike bwinshi. Ikoranabuhanga ryo gukura rya epitaxial ryemerera kugenzura neza imiterere n'uburyo ibikoresho bikoreshwa mu gupima no gutunganya ibikoresho, kunoza imikorere rusange n'ubwizerwe bw'ibikoresho.
Igihe cyo kohereza: Ukwakira 16-2024