Wafer ya Safiro ya santimetero 12 yo gukora ibikoresho bya semiconductor bifite ubwinshi

Ishusho ya Sapphire Wafer ya santimetero 12 yo gukora ibikoresho bya semiconductor bifite ubwinshi

Ibisobanuro bigufi:

Iyi wafer ya santimetero 12 yakozwe kugira ngo ihuze n'ubukene buri kwiyongera bw'inganda nini, zikora ibikoresho bya semiconductor na optoelectronic. Uko imiterere y'ibikoresho ikomeza kwaguka n'imirongo y'umusaruro igana ku miterere minini ya wafer, substrates za sappire zifite umurambararo munini cyane zitanga inyungu zigaragara mu musaruro, kunoza umusaruro, no kugenzura ikiguzi.

Ohereza imeri kuri twe

Ibiranga

Ishusho irambuye

Intangiriro ya wafer ya safiro ya santimetero 12

Yakozwe muri Al₂O₃ ifite icyuma gishyushye cyane, ikoresheje santimetero 12 za safiro, ihuza imbaraga nziza za mekanike, ubushyuhe buhamye, n'ubwiza bw'ubuso. Binyuze mu gukura neza kwa kristu no gutunganya neza wafer, izi substrates zitanga imikorere yizewe ku bijyanye na LED, GaN, n'ibikoresho byihariye bya semiconductor.

Ibiranga Ibikoresho

Safiro (okiside ya aluminiyumu imwe, Al₂O₃) izwi cyane kubera imiterere yayo idasanzwe y’umubiri n’imiti. Udupira twa santimetero 12 twa safiro turaga ibyiza byose by’ibikoresho bya safiro mu gihe dutanga ubuso bunini bushobora gukoreshwa.

Ibiranga ibikoresho by'ingenzi birimo:

Ubukomere bwinshi cyane no kudashira kw'ingufu
Ubushyuhe buhamye cyane kandi bugashonga cyane
Ubudahangarwa bukomeye bw'ibinyabutabire kuri aside na alkali
Umucyo mwinshi w'urumuri kuva kuri UV kugeza kuri IR
Imiterere myiza cyane yo gukingira amashanyarazi

Ibi biranga bituma wafers za safiro za santimetero 12 zikoreshwa mu gutunganya ahantu hakomeye no mu gukora ibikoresho bya semiconductor bishyuha cyane.

Uburyo bwo gukora

Gukora wafers za safiro zifite santimetero 12 bisaba gukura neza mu buryo bwa kristale no gutunganya neza cyane. Uburyo busanzwe bwo gukora bukubiyemo:

Gukura kwa kristu imwe
Amabuye ya safiro afite isuku nyinshi ahingwa hakoreshejwe uburyo bugezweho nka KY cyangwa ubundi buryo bwo gukura bwa kristu bunini, butuma kristu yerekera hamwe kandi ikagira stress nke imbere.
Gushushanya no Gukata Kristali
Ingot ya safiro ifite imiterere ikwiye kandi ikagabanywamo uduce twa santimetero 12 hakoreshejwe ibikoresho byo gukata neza cyane kugira ngo igabanye kwangirika kw'ubutaka.
Guteranya no Gusukura
Uburyo bwo gusimbuza ibintu mu buryo bwa "multi-step lapping" no gusiga irangi ry'imiti (CMP) bukoreshwa kugira ngo ubuso bube bumeze neza, bube bungana, kandi bube bungana.
Isuku n'igenzura
Buri wafer ya safiro ifite santimetero 12 ikorerwa isuku yitonze kandi igenzurwa neza, harimo ubwiza bw'ubuso, TTV, bow, warp, no gusesengura inenge.

Porogaramu

Udupira twa safiro twa santimetero 12 dukoreshwa cyane mu ikoranabuhanga rigezweho kandi ririmo:

Ibyuma bya LED bifite imbaraga nyinshi kandi birabagirana cyane
Ibikoresho by'amashanyarazi n'ibikoresho bya RF bishingiye kuri GaN
Ibikoresho bitwara ibikoresho bya semiconductor n'ibikoresho bikingira ubushyuhe
Amadirishya y'urumuri n'ibice binini by'urumuri
Gupakira ibintu bya semiconductor bigezweho n'ibikoresho byihariye byo gutwara ibintu

Ubunini bw'umurambararo butuma umusaruro wiyongera kandi bugatuma umusaruro urushaho kuba mwiza.

Ibyiza by'udupira twa Safiro twa santimetero 12

Ahantu hanini hashobora gukoreshwa kugira ngo habeho umusaruro mwinshi kuri buri wafer
Uburyo bwo kunoza imikorere no guhuza
Ikiguzi cyagabanutse kuri buri gikoresho mu gukora ibikoresho byinshi
Ingufu nziza cyane za mekanike zo gutwara ibintu binini
Ibisobanuro bishobora guhindurwa ku buryo busanzwe ku bikorwa bitandukanye

Amahitamo yo Guhindura

Dutanga uburyo bworoshye bwo guhindura imiterere y'udupira twa safiro twa santimetero 12, harimo:

Icyerekezo cya kristu (C-plane, A-plane, R-plane, nibindi)
Ubunini n'ubugari bwo kwihanganira
Gusukura impande imwe cyangwa ebyiri
Imiterere y'inkombe n'igishushanyo mbonera cy'urukiramende
Ibisabwa ku buryo ubuso bugoramye n'ubugari

Igipimo	Ibisobanuro	Inyandiko
Ingano ya Wafer	Santimetero 300 (300 mm)	Agace gasanzwe k'umurambararo munini
Ibikoresho	Safira y'ikirahuri kimwe (Al₂O₃)	Ifite isuku nyinshi, ikoranabuhanga/ikoranabuhanga
Icyerekezo cya kristu	Indege ya C (0001), Indege ya A (11-20), Indege ya R (1-102)	Amahitamo yo guhitamo arahari
Ubunini	430–500 μm	Ubunini bwihariye buraboneka iyo ubisabye
Kwihanganira ubunini	± 10 μm	Ubushobozi bwo kwihanganira ibikoresho bigezweho
Ihindagurika ry'Ubunini Rusange (TTV)	≤10 μm	Bituma habaho gutunganya ibintu bimwe kuri wafer
Umuheto	≤50 μm	Yapimwe hejuru y'umugati wose
Ifuro	≤50 μm	Yapimwe hejuru y'umugati wose
Kurangiza ubuso	Ifunze ku ruhande rumwe (SSP) / Ifunze ku rundi ruhande (DSP)	Ubuso bwiza cyane bw'urumuri
Ubukana bw'ubuso (Ra)	≤0.5 nm (ikozwe mu irangi)	Uburyo bworoshye bwo gukura mu gice cya atome
Umwirondoro w'inkombe	Urutare / Inkombe y'uruziga	Kugira ngo wirinde gucikagurika mu gihe cyo gufata
Uburyo bwo Kwerekezamo Icyerekezo	± 0.5°	Bituma habaho gukura neza kw'urwego rwa epitaxial
Ubucucike bw'inenge	<10 cm⁻²	Bipimwe hakoreshejwe igenzura ry'amaso
Ubugari	≤2 μm / 100 mm	Bituma habaho uburyo bwo gukura kw'imitsi n'imitsi isanzwe
Isuku	Icyiciro cya 100 - Icyiciro cya 1000	Ijyanye n'icyumba cyo gusukura
Kohereza amakuru hakoreshejwe ikoranabuhanga	>85% (UV–IR)	Biterwa n'uburebure bw'umurambararo n'ubugari

Ibibazo Bikunze Kubazwa ku Gitambaro cya Safiro cya Saipure cya Saipure cya Saipure

Q1: Ubunini busanzwe bwa wafer ya safiro ya santimetero 12 bungana iki?
A: Ubunini busanzwe buri hagati ya 430 μm na 500 μm. Ubunini bwihariye bushobora kandi gukorwa hakurikijwe ibyo abakiriya bakeneye.

Q2: Ni iyihe miterere ya kristale iboneka ku macupa ya safiro ya santimetero 12?
A: Dutanga icyerekezo cya C-plane (0001), A-plane (11-20), na R-plane (1-102). Izindi cyerekezo zishobora guhindurwa hashingiwe ku bisabwa by'igikoresho cyihariye.

Q3: Ni ubuhe bunini bw'ubugari (TTV) bw'isukari?
A: Udupaki twacu twa safiro twa santimetero 12 ubusanzwe tuba dufite TTV ≤10 μm, bigatuma dufatana neza ku buso bwose bwa wafer kugira ngo dukore ibikoresho byiza.

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.