Ingot ya SiC ya 2inch Dia50.8mmx10mmt 4H-N monocrystal

Ishusho ya 2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

Ibisobanuro bigufi:

Ingot ya SiC (silicon carbide) ya santimetero 2 yerekeza kuri kristu imwe ya silicon carbide ifite ishusho ya cylindrical cyangwa block ifite umurambararo cyangwa uburebure bwa santimetero 2. Ingot za silicon carbide zikoreshwa nk'ibikoresho byo gutangira gukora ibikoresho bitandukanye bya semiconductor, nk'ibikoresho by'ikoranabuhanga bikoresha ingufu n'ibikoresho bya optoelectronic.

Ohereza imeri kuri twe

Ibiranga

Ikoranabuhanga ryo Guteza Imbere Crystal ya SiC

Imiterere ya SiC ituma bigorana guhinga kristu imwe. Ibi biterwa ahanini n'uko nta gice cy'amazi gihari gifite igipimo cya stoichiometric cya Si: C = 1: 1 ku muvuduko w'ikirere, kandi ntibishoboka guhinga SiC hakoreshejwe uburyo bwo gukura bukuze, nko gukoresha uburyo bwo gushushanya buziguye n'uburyo bwo kugwa, ari byo by'ingenzi mu nganda za semiconductor. Mu buryo bw'imitekerereze, igisubizo gifite igipimo cya stoichiometric cya Si: C = 1: 1 gishobora kuboneka gusa iyo umuvuduko urenze 10E5atm kandi ubushyuhe buri hejuru ya 3200℃. Ubu, uburyo busanzwe burimo uburyo bwa PVT, uburyo bwa liquid-phase, n'uburyo bwa vapor-phase chemical deposition.

Uduce twa SiC dutanga duhingwa ahanini hakoreshejwe uburyo bwo gutwara umwuka ushyushye (PVT), kandi ibi bikurikira ni incamake y'ingenzi kuri PVT:

Uburyo bwo gutwara umwuka ushyushye (PVT) bwaturutse ku buryo bwo gushyira umwuka mu gice cya gaze bwavumbuwe na Lely mu 1955, aho ifu ya SiC ishyirwa mu muyoboro wa grafiti hanyuma igashyuha kugeza ku bushyuhe bwinshi kugira ngo ifu ya SiC ibore kandi ihinduke, hanyuma umuyoboro wa grafiti ukonje, hanyuma ibice bya gaze-phase bya gaze bya SiC bishyirwa mu gice cya SiC mu gace gakikije umuyoboro wa grafiti. Nubwo ubu buryo bugoye kubona kristu nini za SiC imwe kandi inzira yo gushyiramo kristu mu muyoboro wa grafiti iragoye kugenzura, butanga ibitekerezo ku bashakashatsi bazakurikiraho.

YM Tairov n'abandi mu Burusiya batangije igitekerezo cya kristu y'imbuto kuri iki gitekerezo, cyakemuye ikibazo cy'imiterere ya kristu ya SiC idacungwa n'aho ishyirwa mu byiciro byayo. Abashakashatsi bakurikiyeho bakomeje kunoza ndetse amaherezo bateza imbere uburyo bwo kohereza umwuka usanzwe (PVT) bukoreshwa mu nganda muri iki gihe.

Nk’uburyo bwa mbere bwo gukuraho kristu za SiC, PVT ni bwo buryo bukoreshwa cyane mu gukuraho kristu za SiC. Ugereranyije n’ubundi buryo, ubu buryo bufite ibikoresho bike byo gukuraho, uburyo bworoshye bwo gukuraho, uburyo bwo kugenzura buhamye, iterambere ryimbitse n’ubushakashatsi, kandi bwamaze guterwa imbere mu nganda.