Ingufu zo mu bwoko bwa SiC Composite Substrate ifite santimetero 6, ifite umurambararo wa 4H, 150mm Ra≤0.2nm, ifite uburebure bwa ≤35μm.

Ishusho ya SiC Composite ya santimetero 6 ifite umurambararo wa 4H 150mm Ra≤0.2nm Warp≤35μm

Ibisobanuro bigufi:

Bitewe n'inganda za semiconductor ziharanira imikorere myiza no kugabanuka kw'igiciro, substrate ya SiC ihuza amashanyarazi ya santimetero 6 yavutse. Binyuze mu ikoranabuhanga rishya rihuza ibikoresho, iyi wafer ya santimetero 6 igera kuri 85% by'imikorere ya wafer gakondo ya santimetero 8 mu gihe igura 60% gusa. Ibikoresho by'amashanyarazi mu bikorwa bya buri munsi nka sitasiyo nshya zo gushyushya imodoka, modules z'amashanyarazi za sitasiyo ya 5G, ndetse na disiki zihindura ingano mu bikoresho byo mu rugo by'igiciro kinini bishobora kuba bikoresha substrates nk'izi. Ikoranabuhanga ryacu ry'iterambere ry'imashini nyinshi ritanga uburenganzira bwo gukoresha interuro za atome ku rufatiro rwa SiC, hamwe n'ubucucike buri munsi ya 1 × 10¹¹ / cm²·eV - ibipimo byageze ku rwego rwo hejuru ku rwego mpuzamahanga.

Ohereza imeri kuri twe

Ibiranga

Ibipimo bya tekiniki

Ibintu	Umusarurourwego	Igishukourwego
Ingano	santimetero 6-8	santimetero 6-8
Ubunini	350/500±25.0 μm	350/500±25.0 μm
Ubwoko bwa polikopi	4H	4H
Ubushobozi bwo kwirinda	0.015-0.025 ohm·cm	0.015-0.025 ohm·cm
Televiziyo ya TV	≤5 μm	≤20 μm
Ifuro	≤35 μm	≤55 μm
Ubukana bw'imbere (Si-face)	Ra≤0.2 nm (5μm×5μm)	Ra≤0.2 nm (5μm×5μm)

Ibiranga by'ingenzi

1. Akamaro k'Ikiguzi: Substrate yacu ya SiC ya santimetero 6 ikoresha ikoranabuhanga rya "graded buffer layer" rituma ibikoresho bitunganywa neza kugira ngo bigabanye ikiguzi cy'ibikoresho fatizo ku kigero cya 38% mu gihe bikomeza gukora neza mu bijyanye n'amashanyarazi. Ibipimo nyabyo bigaragaza ko ibikoresho bya MOSFET bya 650V bikoresha iyi substrate bigabanya ikiguzi cya 42% kuri buri gice ugereranije n'ibisubizo bisanzwe, ibi bikaba ari ingenzi mu guteza imbere ikoreshwa ry'ibikoresho bya SiC mu bikoresho by'ikoranabuhanga bikoreshwa n'abantu.
2. Imiterere myiza cyane yo gutwara ibintu: Binyuze mu buryo bwo kugenzura neza ikoreshwa rya azote, substrate yacu ya SiC ikora ya santimetero 6 igera ku bushyuhe buke cyane bwa 0.012-0.022Ω·cm, hamwe n'impinduka zigenzurwa muri ± 5%. By'umwihariko, dukomeza kugira ubushyuhe buke ndetse no mu gace ka 5mm k'inkombe za wafer, tugakemura ikibazo cy'ingaruka z'inkombe zimaze igihe kirekire mu nganda.
3. Imikorere y'Ubushyuhe: Moduli ya 1200V/50A yakozwe hakoreshejwe substrate yacu igaragaza gusa ubwiyongere bw'ubushyuhe bwa 45℃ hejuru y'ikirere mu gihe cy'umurimo wuzuye - 65℃ munsi y'ibikoresho bya silikoni bisa. Ibi bishobozwa n'imiterere yacu ya "3D thermal channel" ihuza imiterere y'ubushyuhe bwo ku ruhande ikagera kuri 380W/m·K n'ubwiyongere bw'ubushyuhe bwo ku ruhande bukagera kuri 290W/m·K.
4. Guhuza ibikorwa: Ku bw'imiterere yihariye ya substrates za SiC zikora za santimetero 6, twakoze uburyo bwo gukata bwa laser bujyanye n'umuvuduko wo gukata wa 200mm/s mu gihe tugenzura ko impande zica munsi ya 0.3μm. Byongeye kandi, dutanga amahitamo ya substrate yashyizwemo nikeli atuma habaho guhuza icyuma mu buryo butaziguye, bigatuma abakiriya bakomeza intambwe ebyiri mu bikorwa.

Porogaramu z'ingenzi

Ibikoresho by'ingenzi bya Smart Grid:

Muri sisitemu zo kohereza umuriro w’amashanyarazi ukabije (UHVDC) zikora kuri ± 800kV, ibikoresho bya IGCT bikoresha substrate zacu za SiC zikora conductive za santimetero 6 bigaragaza ko imikorere yazo irushaho kuba myiza. Ibi bikoresho bigabanya igihombo cya 55% mu gihe cyo guhinduranya ibikoresho mu gihe cyo guhinduranya ibikoresho, mu gihe byongera imikorere myiza ya sisitemu kugeza ku kigero cya 99.2%. Uburyo buhanitse bwo kohereza ubushyuhe (380W/m·K) butuma imiterere y’ibikoresho bito bigabanya uburebure bwa sitasiyo ho 25% ugereranije n’ibisubizo bisanzwe bishingiye kuri silikoni.

Ingufu nshya z'ibinyabiziga bikoresha ingufu:

Sisitemu yo gutwara imodoka irimo substrate zacu za santimetero 6 zikora SiC igera ku bucucike budasanzwe bwa inverter bwa 45kW/L - iterambere rya 60% ugereranyije n'imiterere yayo ya 400V ishingiye kuri silikoni. Igitangaje kurushaho, sisitemu igumana imikorere myiza ya 98% mu bushyuhe bwose bwo gukora kuva kuri -40℃ kugeza kuri +175℃, ikemura ibibazo by'imikorere y'ikirere cy'ubukonje byabangamiye ikoreshwa rya EV mu turere two mu majyaruguru. Isuzuma ry'ibintu nyabyo rigaragaza ko imodoka zifite iri koranabuhanga ryiyongereyeho 7.5%.

Ingufu zihindura ubwinshi bw'amajwi mu nganda:

Gukoresha substrates zacu muri intelligent power modules (IPMs) kuri sisitemu za servo z'inganda biri guhindura uburyo bwo gukora ibintu bwikora. Mu bigo bikora imashini za CNC, izi modules zitanga igisubizo cyihuse cya moteri ku kigero cya 40% (bigabanya igihe cyo kwihutisha kuva kuri 50ms kugeza kuri 30ms) mu gihe bigabanya urusaku rwa electromagnetic ho 15dB rugera kuri 65dB (A).

Ikoranabuhanga rikoreshwa n'abaguzi:

Impinduka mu by'ikoranabuhanga rikoreshwa n'abaguzi irakomeje aho ibikoresho byacu bifasha charger zihuta za 65W GaN zo mu gisekuru gitaha. Izi adaptateri ntoya z'amashanyarazi zigabanya ingano ya 30% (kugeza kuri 45cm³) mu gihe zigumana ingufu zose, bitewe n'imiterere myiza y'ibishushanyo mbonera bishingiye kuri SiC. Ishusho y'ubushyuhe igaragaza ubushyuhe ntarengwa bwa 68°C gusa mu gihe cy'imikorere idahwema - ubukonje bwa 22°C ugereranije n'ibishushanyo bisanzwe - birushaho kunoza cyane igihe cyo kubaho n'umutekano w'ibicuruzwa.

Serivisi zo guhindura XKH

XKH itanga ubufasha bwuzuye bwo guhindura ibintu ku bikoresho bya SiC bya santimetero 6 bihuza amashanyarazi:

Guhindura Ubunini: Amahitamo arimo 200μm, 300μm, na 350μm
2. Kugenzura uburyo bwo kurwanya indwara: Ingano y’imiti ikoreshwa mu gupima ...

3. Icyerekezo cya Crystal: Inkunga y'icyerekezo cyinshi harimo (0001) kitari ku murongo wa 4° cyangwa 8°

4. Serivisi zo Gupima: Raporo yuzuye y'ibizamini by'urwego rwa wafer

Igihe dufite cyo gukora kuva mu gukora porogaramu kugeza ku gukora ibikoresho byinshi gishobora kuba gito cyane, nk'ibyumweru 8. Ku bakiriya bacu b'ingamba, dutanga serivisi zihariye zo guteza imbere ibikorwa kugira ngo duhuze neza n'ibikenewe mu bikoresho.