Imashini yo gusiga irangi rya Ion Beam kuri safiro SiC Si

Imashini yo gusiga irangi ya Ion Beam kuri safiro SiC Si Ishusho yagaragaye

Ibisobanuro bigufi:

Imashini ipima no gukosora imirasire ya Ion ishingiye ku ihame ryo gusohora iyoni. Mu cyumba gifite umwuka mwinshi, isoko ya iyoni ikora plasma, yihutishwa ikajyamo umurasire wa iyoni ufite ingufu nyinshi. Uyu murasire utera hejuru y'igice cy'urumuri, ugakuramo ibintu ku gipimo cya atome kugira ngo hakosorwe neza kandi hasozwe neza.

Ohereza imeri kuri twe

Ibiranga

Ishusho irambuye

Imashini yo gusiga Ion Beam Polishing Machine1

Incamake y'ibicuruzwa bya Ion Beam Polishing Machine

Kubera ko idakora ku buryo bworoshye, gusiga imirasire ya ion bikuraho stress ya mekanike kandi birinda kwangirika kw'ubutaka, bigatuma biba byiza mu gukora optique nziza cyane ikoreshwa mu by'inyenyeri, mu by'ikirere, mu by'imiti iciriritse, no mu bushakashatsi buhanitse.

Ihame ry'imikorere rya Ion Beam Polishing Machine

Igisekuru cya Ion
Gazi idakora (urugero, argon) yinjizwa mu cyumba cy’umwuka uvamo umwuka hanyuma igashyirwamo iyoni binyuze mu muyoboro w’amashanyarazi kugira ngo habeho plasma.

Kwihutisha no Gutunganya Imirasire
Iyoni zihuta cyane kugeza kuri volti magana cyangwa ibihumbi by'amashanyarazi (eV) kandi zigahinduka ahantu hahamye kandi hahamye.

Gukuraho ibikoresho
Umurabyo wa iyoni usohora atome mu buryo bw'umubiri uvuye hejuru y'ubutaka nta gikorwa cy'ubutabire.

Gutahura amakosa no gutegura inzira
Itandukaniro ry'imibare y'ubuso ripimwa hakoreshejwe interferometry. Imikorere yo gukuraho ikoreshwa kugira ngo hamenyekane igihe cyo gutura no gutanga inzira nziza z'ibikoresho.

Gukosora Umuyoboro Ufunze
Imikorere isubiramo yo gutunganya no gupima irakomeza kugeza igihe intego z’ubuziranenge bwa RMS/PV zigerweho.

Ibintu by'ingenzi bya Ion Beam Polishing Machine

Guhuza Ubuso Busanzwe– Itunganya ubuso burambuye, buzunguruka, buzunguruka, n'ubuso budafite imiterere

Igipimo cyo gukuraho gihamye cyane– Ifasha gukosora ishusho ya sub-nanometer

Gutunganya nta byangiritse– Nta busembwa cyangwa impinduka mu miterere y'imiterere y'ubutaka

Imikorere ihoraho- Ikora neza ku bikoresho bifite ubukana butandukanye

Gukosora inshuro nke/ziri hagati- Ikuraho amakosa idakoze ibintu bifatika bikoreshwa hagati/hafi cyane

Ibisabwa byo kubungabunga bike- Umurimo uhoraho kandi uhoraho igihe gito

Ibisobanuro by'ingenzi bya tekiniki by'imashini itunganya imirasire ya Ion Beam

Ikintu	Ibisobanuro
Uburyo bwo Gutunganya	Iyoni irimo guturika ahantu hari umwuka mwinshi
Ubwoko bwo Gutunganya	Gupima no gusiga irangi ku buso budakora ku kintu kimwe
Ingano ntarengwa y'ibikoresho by'akazi	Φ4000 mm
Imishike yo mu muhanda	Imirongo itatu / umurongo 5
Guhagarara neza mu gukuraho	≥95%
Ubuziranenge bw'ubuso	PV < 10 nm; RMS ≤ 0.5 nm (RMS isanzwe < 1 nm; PV < 15 nm)
Ubushobozi bwo gukosora inshuro nyinshi	Ikuraho amakosa y'impinduka zo hasi cyangwa ziciriritse idashyizemo amakosa y'impinduka zo hagati/zo hejuru
Igikorwa gihoraho	Ibyumweru 3-5 nta gusukura ibikoresho bivamo umwuka
Ikiguzi cyo kubungabunga	Hasi

Ubushobozi bwo gutunganya imashini itunganya imirasire ya Ion Beam

Ubwoko bw'ubuso bushyigikiwe

Byoroshye: Ifite uburebure, uruziga, prism

Ihuriro: Asphere ingana/idafite imiterere ingana, Asphere idafatanye, Cylindrical

Idasanzwe: Optike nto cyane, optike ya slat, optike ya hemispherical, optike ijyanye n'imiterere y'urumuri, plaque za phase, ubuso budafite imiterere

Ibikoresho Bishyigikiwe

Ikirahure cy'urumuri: Quartz, microcrystalline, K9, n'ibindi.

Ibikoresho bya infrared: Silicon, germanium, nibindi.

Ibyuma: Aluminiyumu, icyuma kitagira umuze, aloyi ya titaniyumu, nibindi.

Amabuye y'agaciro: YAG, karubide ya silikoni imwe, n'ibindi.

Ibikoresho bikomeye/bidakomeye: Karubide ya silicon, nibindi.

Ubwiza bw'Ubuso / Ubuziranenge

PV < 10 nm

RMS ≤ 0.5 nm

Gutunganya Inyigo z'Imashini Itunganya Ion Beam

Agasanduku ka 1 - Indorerwamo Isanzwe Igororotse

Igikoresho: D630 mm quartz ifite uburebure

Ibisubizo: PV 46.4 nm; RMS 4.63 nm

Agasanduku ka 2 - Indorerwamo Igaragaza Ishusho ya X-ray

Igikoresho: 150 × 30 mm silikoni irambuye

Ibisubizo: PV 8.3 nm; RMS 0.379 nm; Umusozi 0.13 µrad

Urubanza rwa 3 - Indorerwamo itari ku ruhande rw'umurongo

Igikoresho: Indorerwamo yo hasi ya D326 mm idakora neza

Ibisubizo: PV 35.9 nm; RMS 3.9 nm

Ibibazo Bikunze Kubazwa ku Indorerwamo za Quartz

Ibibazo Bikunze Kubazwa - Imashini Itunganya Ion Beam

Q1: Gusukura imirasire ya ion ni iki?
A1:Gusukura imirasire ya Ion ni inzira idahuza ikoresha imirasire ya ion (nk'iy'argon) kugira ngo ikureho ibikoresho ku buso bw'ibikoresho. Ion zihuta kandi zerekeza ku buso, bigatuma ibikoresho bikurwaho ku rwego rwa atome, bigatuma ibintu birangira neza cyane. Iyi nzira ikuraho stress ya mekanike n'iyangirika ry'ubuso, bigatuma iba nziza ku bice by'urumuri bitanga umusaruro.

Q2: Ni ubuhe bwoko bw'ubuso Imashini Itunganya Imirasire ya Ion ishobora gutunganya?
A2:ItsindaImashini yo gusiga irangi rya Ion Beamishobora gutunganya ubuso butandukanye, harimo n'ibice byoroshye by'urumuri nkaibitanda, imiterere, na prism, kimwe n'imiterere y'ijometri igoye nkaaspheres, aspheres zitari ku murongo, naubuso budafite ishushoIgira akamaro cyane cyane ku bikoresho nk'ikirahure cy'urumuri, infrared optique, ibyuma, n'ibikoresho bikomeye/bidakomeye.

Q3: Ni ibihe bikoresho Imashini Ikoresha mu Gusukura Ion Beam?
A3:ItsindaImashini yo gusiga irangi rya Ion Beamishobora gusiga ibikoresho bitandukanye, harimo:

Ikirahure cy'urumuri: Quartz, microcrystalline, K9, n'ibindi.
Ibikoresho bya infrared: Silikoni, germanium, n'ibindi.
Ibyuma: Aluminium, icyuma kitagira umuze, aloyi ya titaniyumu, nibindi.
Ibikoresho bya kristu: YAG, karubide ya silikoni imwe, n'ibindi.
Ibindi bikoresho bikomeye/bidakomeye: Karubide ya silikoni, n'ibindi.

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.