Udupira twa Silicone vs. Udupira tw'ikirahure: Ni iki mu by'ukuri dukora isuku? Kuva ku bintu by'ingenzi kugeza ku gusukura bishingiye ku buryo bugezweho

Nubwo silicon na wafer z'ibirahure byombi bihuriye ku ntego yo "gusukurwa", imbogamizi n'uburyo bwo gutsindwa bahura nabyo mu gihe cyo gusukura biratandukanye cyane. Iri tandukaniro rituruka ku miterere y'ibikoresho n'ibisabwa ku bipimo bya silicon n'ibirahure, ndetse na "filozofiya" yihariye yo gusukura bitewe n'ikoreshwa ryabyo rya nyuma.

Mbere na mbere, reka dusobanure neza: Ni iki mu by'ukuri turimo gusukura? Ni ibihe bintu bihumanya birimo?

Umwanda ushobora gushyirwa mu byiciro bine:

1. Udukoko twanduza uduce

   • Umukungugu, uduce tw'icyuma, uduce tw'umwimerere, uduce duto two gukurura (dukomoka ku mikorere ya CMP), n'ibindi.

   • Iyi myanda ishobora gutera inenge mu miterere, nko gupfuka imipira migufi cyangwa imirasire ifunguye.

2. Ibintu bihumanya ibidukikije

   • Harimo ibisigazwa bya photoresist, inyongera za resin, amavuta y'uruhu rw'umuntu, ibisigazwa by'umushongi, nibindi.

   • Udukoko tw’umwimerere dushobora gukora udupfukamunwa tubangamira gushisha cyangwa gutera iyoni no kugabanya gufatana kw’utundi duce duto.

3. Udukoko twa Ion mu byuma

   • Ubutare, umuringa, sodiyumu, potasiyumu, kalisiyumu, nibindi, bikomoka ahanini ku bikoresho, imiti, no ku gukorana n'abantu.

   • Mu byuma bikoresha ibyuma bihindura imiterere y’amashanyarazi, iyoni z’icyuma ni ibintu bihumanya ikirere, bigatera ingufu nyinshi mu gice kibujijwe, bikongera umuyoboro w’amazi usohoka, bikagabanya igihe cyo gutwara, kandi bikangiza cyane imiterere y’amashanyarazi. Mu kirahure, bishobora kugira ingaruka ku bwiza no gufatana kwa firime ntoya zikurikiraho.

4. Urupapuro rwa Okiside kavukire

   • Ku biti bya silikoni: Urusobe rworoheje rwa silikoni dioxyde (Native Oxide) rubaho ku buso buri mu kirere. Ubunini n'ubunini bw'uru rusobe rwa oxyde biragoye kubigenzura, kandi bigomba gukurwaho burundu mu gihe cyo gukora inyubako z'ingenzi nka gate oxyde.

   • Ku bicupa by'ikirahure: Ikirahure ubwacyo ni imiterere y'urusobe rwa silica, bityo nta kibazo cyo "gukuraho urwego rwa okiside gakondo." Ariko, ubuso bushobora kuba bwarahinduwe bitewe n'umwanda, kandi uru rwego rugomba gukurwaho.

I. Intego z'ingenzi: Itandukaniro riri hagati y'imikorere y'amashanyarazi n'ubuziranenge bw'umubiri

• Uduce twa Silicone

  • Intego nyamukuru yo gusukura ni ukureba imikorere y'amashanyarazi. Ibisobanuro bikunze kuba birimo umubare w'uduce duto n'ingano (urugero: uduce duto ≥0.1μm tugomba gukurwaho neza), ingano ya iyoni mu byuma (urugero: Fe, Cu igomba kugenzurwa kugeza kuri ≤10¹⁰ atome / cm² cyangwa munsi yayo), hamwe n'urugero rw'ibisigazwa by'ibinyabuzima. Ndetse n'ubwandu bwa mikorobe bushobora gutuma uruziga rudakora neza, amazi asohoka, cyangwa se ubwiza bwa okiside y'irembo bunanirwa.

• Amacupa y'ikirahure

  • Nk'ibikoresho byo mu bwoko bwa substrate, ibisabwa by'ingenzi ni imiterere myiza y'umubiri no kudahinduka kw'imiti. Ibisobanuro byibanda ku bintu byo ku rwego rwa macro nko kutagira iminkanyari, ibizinga bidakurwaho, no kubungabunga ubukana bw'ubuso bw'umwimerere n'imiterere yabwo. Intego yo gusukura ni ukureba neza no gufata neza ibikorwa bikurikira nko gusiga irangi.

II. Imiterere y'ibintu: Itandukaniro ry'ibanze hagati ya Crystalline na Amorphous

• Silikoli

  • Silikoni ni igikoresho cya kristu, kandi ubuso bwayo busanzwe bukuramo urwego rwa silika dioxyde (SiO₂) rudafite ishingiro. Uru rwego rwa oksidi rutera ingaruka ku mikorere y'amashanyarazi kandi rugomba gukurwaho neza kandi neza.

• Ikirahure

  • Ikirahure ni urusobe rwa silica rudafite ishusho. Ibikoresho byacyo byinshi bisa n'urwego rwa silicone oxide rwa silicone, bivuze ko gishobora gucibwa vuba na aside hydrofluoric (HF) kandi gishobora no kwangirika cyane kwa alkali, bigatuma ubuso burushaho kuba bubi cyangwa buhinduka. Iri tandukaniro ry'ibanze rigena ko gusukura silicon wafer bishobora kwihanganira gucibwaho koroheje, kugenzurwa kugira ngo bikureho imyanda, mu gihe gusukura glass wafer bigomba gukorwa witonze cyane kugira ngo hirindwe kwangiza ibikoresho by'ibanze.

III. Kugereranya ibisubizo byo gusukura

Hashingiwe ku ntego zavuzwe haruguru n'imiterere y'ibikoresho, ibisubizo byo gusukura bya silicon na wafer z'ibirahure biratandukanye:

• Uburyo bwo gusukura ikirahure cya Wafer

  • Muri iki gihe, inganda nyinshi zitunganya ibirahuri zikoresha uburyo bwo gusukura bushingiye ku miterere y'ibirahuri, zishingiye cyane cyane ku bikoresho byo gusukura bifite alkaline nke.

  • Ibiranga umukozi ushinzwe isuku:Izi miti yihariye yo gusukura ubusanzwe iba ifite alkaline nkeya, ifite pH iri hagati ya 8-9. Ubusanzwe iba irimo imiti ikoreshwa mu gusukura (urugero: alkyl polyoxyethylene ether), imiti ikoreshwa mu gusukura ibyuma (urugero: HEDP), n'ibikoresho byo gusukura organic, byagenewe gukurura no kubora imyanda nk'amavuta n'ibiganza, mu gihe bitangiza cyane ikirahure.

  • Urugendo rw'Inzira:Uburyo busanzwe bwo gusukura bukubiyemo gukoresha icyiciro runaka cy'ibintu bisukura bya alkaline ku bushyuhe buri hagati y'ubushyuhe bw'icyumba na dogere selisiyusi 60, hamwe no gusukura hakoreshejwe ikoranabuhanga. Nyuma yo gusukura, imashini zisukura inshuro nyinshi zikoresheje amazi meza kandi zikanumisha buhoro buhoro (urugero: guterura buhoro cyangwa gukamisha umwuka wa IPA). Ubu buryo bwujuje ibisabwa ku imashini zisukura mu kirahuri kugira ngo isuku igaragare neza kandi isuku rusange igaragare neza.

• Uburyo bwo gusukura Silicon Wafer

  • Ku bijyanye no gutunganya ibikoresho bya semiconductor, silicon wafers zisanzwe zikorerwa isuku isanzwe ya RCA, ikaba ari uburyo bwiza cyane bwo gusukura bushobora gukemura ibibazo byose byanduza, bugatuma ibisabwa mu mikorere y'amashanyarazi ku bikoresho bya semiconductor byuzuzwa.

IV. Iyo Ikirahure cyujuje amahame yo “gusukura” yo hejuru

Iyo uduce tw’ikirahure dukoreshwa mu bikorwa bisaba kubara cyane uduce tw’ibumba n’urugero rwa iyoni z’icyuma (urugero, nk’uduce duto mu mikorere ya semiconductor cyangwa ku buso bwiza bwo gushyiramo firime nto), uburyo bwo gusukura bushobora kuba butagihagije. Muri iki gihe, amahame yo gusukura semiconductor ashobora gukoreshwa, hagashyirwaho ingamba za RCA zo gusukura zavuguruwe.

Intego nyamukuru y'iyi ngamba ni ukugabanya no kunoza ibipimo bisanzwe bya RCA kugira ngo bihuze n'imiterere y'ibirahure:

• Gukuraho umwanda ukomoka ku bimera:Ibikoresho bya SPM cyangwa amazi ya ozone yoroshye bishobora gukoreshwa mu gushonga imyanda y’ibinyabuzima binyuze mu gushonga cyane.

• Gukuraho uduce duto:Umuti wa SC1 uvanze cyane ukoreshwa mu bushyuhe buke no mu gihe gito cyo kuwuvura kugira ngo ukoreshe imbaraga zawo zo kwirukana amashanyarazi no gutwika uduce duto tw’ibirahure, mu gihe bigabanya ingese ku kirahure.

• Gukuraho Iyoni y'icyuma:Umuti wa SC2 uvanze cyangwa umuti wa aside hydrochloric/aside nitrique uvanze ukoreshwa mu gukuraho imyanda y'icyuma binyuze muri chelation.

• Ibibujijwe bikomeye:DHF (di-ammonium fluoride) igomba kwirindwa burundu kugira ngo hirindwe kwangirika kw'ikirahure.

Muri gahunda yose yahinduwe, guhuza ikoranabuhanga rya megasonic byongera cyane ubushobozi bwo gukuraho uduce duto duto kandi birushaho koroshya ubuso.

Umwanzuro

Uburyo bwo gusukura silicon na wafer z'ibirahure ni umusaruro udashobora kwirindwa wo guhindura imiterere y'ibikoresho bitewe n'ibyo zikenera mu ikoreshwa ryazo rya nyuma, imiterere y'ibikoresho, n'imiterere y'umubiri n'imiti. Gusukura silicon wafer bigamije "isuku yo ku rwego rwa atome" kugira ngo amashanyarazi akore neza, mu gihe gusukura glass wafer byibanda ku kugera ku buso "butunganye kandi butangiritse". Uko wafer z'ibirahure zikoreshwa cyane mu bikorwa bya semiconductor, uburyo bwo gusukura bwazo buzahinduka nta kabuza uretse gusukura alkaline gasanzwe, bugateza imbere ibisubizo binonosoye kandi byihariye nka RCA yavuguruwe kugira ngo yuzuze amahame y'isuku yo hejuru.