Silicon Wafers na Glass Wafers: Mubyukuri dusukura iki? Kuva Mubintu Byibanze Kuri Gahunda-Yogusukura Ibisubizo

Nubwo silikoni n'ibirahuri byombi bisangiye intego imwe yo "gusukurwa," ibibazo hamwe nuburyo bwo gutsindwa bahura nabyo mugihe cyo gukora isuku biratandukanye cyane. Uku kunyuranya guturuka kumiterere yibintu byihariye nibisabwa bya silikoni nikirahure, hamwe na "filozofiya" itandukanye yo gukora isuku itwarwa nibikorwa byabo byanyuma.

Ubwa mbere, reka tubisobanure: Niki mubyukuri turimo gukora isuku? Ni ibihe bihumanya birimo?

Abanduye barashobora gushirwa mubice bine:

1. Ibice byanduye

   • Umukungugu, ibyuma, ibice kama, ibice byangiza (biva mubikorwa bya CMP), nibindi

   • Ibi bihumanya birashobora gutera inenge, nk'ikabutura cyangwa imiyoboro ifunguye.

2. Umwanda

   • Harimo ibisigazwa bya Photoresist, inyongeramusaruro, amavuta yuruhu rwumuntu, ibisigazwa bya solvent, nibindi.

   • Umwanda wanduye urashobora gukora masike ibuza guterwa cyangwa gutera ion no kugabanya gufatana nizindi firime zoroshye.

3. Ibyuma byangiza Ion

   • Icyuma, umuringa, sodium, potasiyumu, calcium, nibindi, biva cyane cyane mubikoresho, imiti, no guhura kwabantu.

   • Muri semiconductor, ion zicyuma ni "umwicanyi", zinjiza urwego rwingufu mumurongo wabujijwe, byongera imiyoboro yameneka, bigabanya ubuzima bwabatwara ubuzima, kandi byangiza cyane amashanyarazi. Mu kirahure, birashobora kugira ingaruka kumiterere no gufatana na firime yoroheje.

4. Igice cya Oxide kavukire

   • Kuri wafer ya silicon: Igice cyoroshye cya dioxyde de silicon (Native Oxide) isanzwe igaragara hejuru yikirere. Ubunini nuburinganire bwurwego rwa oxyde biragoye kubigenzura, kandi bigomba kuvaho burundu mugihe cyo guhimba ibintu byingenzi nka oxyde de gate.

   • Kubirahuri by'ibirahure: Ikirahuri ubwacyo ni imiterere y'urusobe rwa silika, bityo rero ntakibazo cyo "gukuraho urwego rwa kavukire." Nyamara, ubuso bushobora kuba bwarahinduwe kubera kwanduza, kandi iki gice kigomba kuvaho.

I. Intego nyamukuru: Itandukaniro hagati yimikorere yamashanyarazi no gutunganirwa kumubiri

• Silicon Wafers

  • Intego yibanze yo gukora isuku nukureba amashanyarazi. Ibisobanuro mubisanzwe birimo ibice bitagira ingano nubunini (urugero, ibice ≥0.1μm bigomba kuvaho neza), ibyuma bya ion (urugero, Fe, Cu bigomba kugenzurwa kugeza kuri ≤10¹⁰ atom / cm² cyangwa munsi), hamwe nurwego rwibisigisigi kama. Ndetse na microscopique yanduye irashobora kuganisha ku ikabutura y'umuzunguruko, imigezi itemba, cyangwa kunanirwa kw'irembo rya oxyde.

• Ikirahure

  • Nka substrate, ibyingenzi bisabwa ni ugutungana kumubiri no gutuza imiti. Ibisobanuro byibanda kuri macro-urwego nko kubura ibishushanyo, ibidakurwaho, hamwe no kubungabunga ubuso bwambere bubi na geometrie. Intego yo gukora isuku ni ukureba mbere na mbere kugira isuku igaragara no gufatira hamwe inzira zikurikira nko gutwikira.

II. Kamere yibintu: Itandukaniro ryibanze hagati ya Crystalline na Amorphous

• Silicon

  • Silicon ni ibintu bya kristu, kandi ubuso bwayo busanzwe bukura dioxyde de silicon idasanzwe (SiO₂). Igice cya oxyde gitera ingaruka kumikorere yamashanyarazi kandi kigomba kuvaho neza kandi kimwe.

• Ikirahure

  • Ikirahure numuyoboro wa amorphous silica. Ibikoresho byinshi bisa nibigize ibice bya silicon oxyde ya silicon, bivuze ko ishobora guhita yomekwa na acide hydrofluoric (HF) kandi ikaba ishobora no kwandura isuri ikomeye ya alkali, bigatuma kwiyongera k'ubuso cyangwa guhindagurika. Iri tandukaniro ryibanze ritegeka ko isuku ya wafer ya silicon ishobora kwihanganira urumuri, kugenzurwa kugirango ikureho umwanda, mugihe isuku ya wafer yikirahure igomba gukorwa ubwitonzi bukabije kugirango wirinde kwangiza ibikoresho fatizo.

III. Kugereranya ibisubizo byogusukura

Ukurikije intego zavuzwe haruguru nibiranga ibintu, ibisubizo byogusukura silicon na wafers yikirahure biratandukanye:

• Igikorwa cyo Gusukura Ikirahure

  • Kugeza ubu, inganda nyinshi zitunganya ibirahuri zikoresha uburyo bwo gukora isuku zishingiye ku bintu biranga ibirahure, zishingiye cyane cyane ku bikoresho byangiza alkaline.

  • Isuku y'abakozi Ibiranga:Ibi bikoresho byihariye byo gukora isuku mubisanzwe ni alkaline nkeya, hamwe na pH hafi 8-9. Mubisanzwe birimo surfactants (urugero, alkyl polyoxyethylene ether), ibikoresho byo gutekesha ibyuma (urugero, HEDP), hamwe nibikoresho bifasha isuku kama, bigenewe kwigana no kubora umwanda kama nkamavuta nintoki, mugihe byangirika cyane kuri matrix yikirahure.

  • Inzira igenda:Igikorwa gisanzwe cyo gukora isuku gikubiyemo gukoresha imbaraga zidasanzwe zogusukura alkaline mubushyuhe buri hagati yubushyuhe bwicyumba kugeza kuri 60 ° C, hamwe nogusukura ultrasonic. Nyuma yo gukora isuku, wafer ikora intambwe nyinshi zo koza hamwe namazi meza no gukama byoroheje (urugero, guterura buhoro cyangwa gukama umwuka wa IPA). Iyi nzira yujuje neza ibyangombwa bya wafer ibisabwa kugirango isuku igaragara hamwe nisuku rusange.

• Gahunda yo Gusukura Silicon

  • Mugutunganya igice cya semiconductor, wafer ya silicon mubisanzwe ikorerwa isuku ya RCA isanzwe, nuburyo bwiza cyane bwo gukora isuku bushobora gukemura muburyo bwubwoko bwose bwanduye, byemeza ko ingufu zamashanyarazi zikoreshwa mubikoresho bya semiconductor byujujwe.

IV. Iyo Ikirahure gihuye nubuziranenge "Isuku"

Iyo ibirahuri by'ibirahuri bikoreshwa mubisabwa bisaba kubara ibice bito hamwe nurwego rwa ion (urugero, nka substrate mugikorwa cya semiconductor cyangwa kubutaka bwiza cyane bwa firime), inzira yo gukora isuku ntishobora kuba ihagije. Muri iki gihe, amahame yisuku ya semiconductor arashobora gukoreshwa, atangiza ingamba zahinduwe za RCA.

Intandaro yiyi ngamba ni uguhindura no kunoza ibipimo bisanzwe bya RCA kugirango ihuze imiterere yikirahure:

• Kurandura Ibinyabuzima:Ibisubizo bya SPM cyangwa amazi ya ozone yoroheje birashobora gukoreshwa mu kubora umwanda ukomoka kuri okiside ikomeye.

• Gukuraho Ibice:Igisubizo cyinshi cyane cya SC1 gikoreshwa mubushyuhe bwo hasi no mugihe gito cyo kuvura kugirango ukoreshe imbaraga za electrostatike hamwe ningaruka za micro-etching kugirango ukureho uduce, mugihe hagabanijwe kwangirika kwikirahure.

• Gukuraho Ibyuma Ion:Igisubizo cya SC2 cyoroshye cyangwa acide hydrochloric acide / acide nitric acide ikoreshwa mugukuraho ibyuma byanduye hakoreshejwe chelation.

• Ibibujijwe bikaze:DHF (fluoride di-ammonium) igomba kwirindwa rwose kugirango irinde kwangirika kwikirahure.

Mubikorwa byose byahinduwe, guhuza tekinoroji ya megasonic byongera cyane uburyo bwo kuvanaho ibice bya nano bingana kandi byoroheje hejuru.

Umwanzuro

Uburyo bwo gukora isuku ya silicon hamwe nikirahure cyibirahure nigisubizo byanze bikunze byubuhanga bushingiye kubisabwa byanyuma, ibintu bifatika, nibiranga umubiri na chimique. Isuku ya wafer ya Silicon ishakisha "isuku yo ku rwego rwa atome" kugirango ikore amashanyarazi, mugihe isuku ya wafer yibanda ku kugera ku "mubiri, utarangiritse". Nkuko ibirahuri byikirahure bikoreshwa cyane mubikorwa bya semiconductor, uburyo bwabo bwo gukora isuku byanze bikunze bizagenda bihinduka birenze isuku ya alkaline gakondo, bitezimbere ibisubizo binonosoye, byabigenewe nkibikorwa bya RCA byahinduwe kugirango byuzuze ubuziranenge bwisuku.