Ni izihe nyungu za Through Glass Via (TGV) na Through Silicon Via, TSV (TSV) kurusha TGV?

Ibyiza byoUburyo bwo gukoresha ikirahure bunyura mu buryo bwa TGV (Blair Via)na Through Silicon Via (TSV) imikorere inyura kuri TGV ahanini ni:

(1) imiterere myiza y'amashanyarazi ikoresha frequency yo hejuru. Ibikoresho by'ikirahure ni ibikoresho bikingira, imiterere ya dielectric ni hafi 1/3 cy'ibikoresho bya silikoni, kandi igihombo kiri munsi y'ingano ya 2-3 y'ibikoresho bya silikoni, bituma igihombo n'ingaruka za parasitiki bigabanuka cyane kandi bigatuma ikimenyetso cyoherezwa kidahinduka;

(2)nini kandi ifite ikirahure gito cyanebiroroshye kubibona. Corning, Asahi na SCHOTT n'abandi bakora ibirahure bashobora gutanga ibirahure binini cyane (>2m × 2m) n'ibirahure bito cyane (<50µm) hamwe n'ibikoresho by'ibirahure byoroshye cyane.

3) Igiciro gito. Wungukira ku kubona byoroshye ikirahuri kinini kandi gito cyane, kandi ntibisaba gushyiramo ibice bikingira, ikiguzi cyo gukora plaque ya adaptateri y'ikirahure ni hafi 1/8 cy'plaque ya adaptateri ishingiye kuri silicon;

4) Uburyo bworoshye. Nta mpamvu yo gushyira urwego rwo gukingira ku buso bw'ubutaka n'urukuta rw'imbere rwa TGV, kandi nta gukata icyuma gisaba mu gice cy'icyuma gifunganye cyane;

(5) Gukomera cyane mu buryo bwa mekanike. Nubwo ubunini bwa plaque ya adaptateri buri munsi ya 100µm, warpage iba ikiri nto;

(6) Uburyo bwinshi bwo gukoresha, ni ikoranabuhanga rigezweho ryo guhuza ikoranabuhanga rikoreshwa mu bijyanye no gupakira ku rwego rwa wafer, kugira ngo harebwe intera ngufi hagati ya wafer na wafer, ubunini bw'aho ikoranabuhanga rihurira butanga inzira nshya y'ikoranabuhanga, rifite imiterere myiza y'amashanyarazi, ubushyuhe, imiterere ya mashini, muri chip ya RF, sensors za MEMS zo mu rwego rwo hejuru, guhuza sisitemu yo mu rwego rwo hejuru n'ibindi bice bifite ibyiza bidasanzwe, ni chip ya 3D yo mu cyiciro gikurikiraho ya 5G, 6G. Ni imwe mu mahitamo ya mbere yo gupakira chip ya 5G na 6G yo mu cyiciro gikurikiraho.

Uburyo bwo gushushanya TGV bukubiyemo ahanini gutwika umucanga, gucukura hakoreshejwe ikoranabuhanga, gucukura amazi mu mazi, gucukura ion mu buryo bwimbitse, gucukura hakoreshejwe ikoranabuhanga rigezweho, gucukura hakoreshejwe ikoranabuhanga rigezweho, gucukura hakoreshejwe ikoranabuhanga rigezweho, gucukura hakoreshejwe ikoranabuhanga rigezweho, no gucukura umwobo urimo gusohora amazi mu buryo bwimbitse.

Ubushakashatsi n'ibyavuye mu iterambere biherutse gukorwa bigaragaza ko ikoranabuhanga rishobora gutegura mu myobo n'imyobo idafite uburinzi ya 5:1 ifite igipimo cy'ubujyakuzimu n'ubugari cya 20:1, kandi ifite imiterere myiza. Uburyo bwo gukata bukoresheje laser, butuma ubuso buto bugoramye, ni bwo buryo bwizwe cyane muri iki gihe. Nk'uko bigaragara ku Ishusho ya 1, hari imyenge igaragara hafi y'ubucukuzi busanzwe bwa laser, mu gihe inkuta zikikije n'iz'impande zombi z'ubucukuzi bukoresheje laser zisukuye kandi zoroshye.

Uburyo bwo gutunganyaTGVInterposer igaragara ku Ishusho ya 2. Gahunda rusange ni ukubanza gucukura imyobo ku gice cy'ikirahure, hanyuma ugashyira urwego rw'inzitizi n'urwego rw'imbuto ku rukuta no hejuru y'uruhande. Uru rwego rw'inzitizi rubuza ko Cu ikwirakwira ku gice cy'ikirahure, mu gihe kongera gufatana kwabyo byombi, birumvikana ko mu bushakashatsi bumwe na bumwe byasanze urwego rw'inzitizi atari ngombwa. Hanyuma Cu ishyirwa hakoreshejwe electroplating, hanyuma ikanashyirwamo, hanyuma urwego rwa Cu rugakurwaho na CMP. Amaherezo, urwego rwo kongeramo ibyuma rwa RDL rutegurwa hakoreshejwe PVD coating lithography, hanyuma urwego rwo gusimbuka rukorwa nyuma yo gukuraho kole.

(a) Gutegura wafer, (b) gukora TGV, (c) electroplating ifite impande ebyiri – gushyiramo umuringa, (d) gusiga irangi ry’imiti n’imashini bya CMP, gukuraho urwego rw’umuringa wo hejuru, (e) gusiga PVD na lithography, (f) gushyiramo urwego rwa RDL rewiring, (g) gukuraho glue no gushushanya Cu/Ti, (h) gukora urwego rwa passivation.

Muri make,ikirahure kinyura mu mwobo (TGV)Ibyiza byo gukoresha ni bigari, kandi isoko ry’imbere mu gihugu riri kuzamuka, kuva ku bikoresho kugeza ku gushushanya ibicuruzwa ndetse n’umuvuduko w’ubushakashatsi n’iterambere uri hejuru ugereranije n’impuzandengo y’isi.

Niba hari icyaha, hamagara usiba