SiC Ceramic Fork Arm / End Effector - Uburyo bwo gucunga neza cyane mu gukora semiconductors

Ibisobanuro bigufi:

SiC Ceramic Fork Arm, ikunze kwitwa Ceramic End Effector, ni igice cyo gucunga neza cyane cyakorewe mu buryo bwihariye mu gutwara, guhuza no gushyira ibintu mu nganda zikora ikoranabuhanga rigezweho, cyane cyane mu gukora semiconductor na photovoltaic. Iki gice cyakozwe hakoreshejwe silicon carbide ceramics ifite pure cyane, gihuza imbaraga zidasanzwe za mekanike, kwaguka kw'ubushyuhe buke cyane, no kurwanya cyane umuyaga n'ingufu.

Ohereza imeri kuri twe

Ibiranga

Ishusho irambuye

Incamake y'ibicuruzwa

Bitandukanye n'ibikoresho bisanzwe bikozwe muri aluminiyumu, icyuma kidashonga, cyangwa se quartz, ibikoresho bya SiC ceramic effectors bitanga umusaruro udasanzwe mu byumba bisukura, mu byumba byo gusukura no mu bidukikije bikomeye, bigatuma biba igice cy'ingenzi cya robo zo mu gisekuru gitaha zikora wafer. Bitewe n'ubwiyongere bw'ibyifuzo by'umusaruro udafite umwanda no kwihanganira cyane mu gukora chips, ikoreshwa rya ceramic effectors riri kugenda riba ihame ry'inganda.

Ihame ry'Ubuhanga mu by'Umwuga

Ubuhanga bwaIngaruka za SiC Ceramic Endikubiyemo urukurikirane rw'ibikorwa bigezweho kandi bifite isuku nyinshi kandi byemeza imikorere n'uburambe. Ibikorwa bibiri by'ingenzi bikunze gukoreshwa:

Karubide ya Silicon ifite Reaction-Bond (RB-SiC)

Muri ubu buryo, imashini ikozwe mu ifu ya karuboni ya silikoni n'imashini ifata irashyirwamo silikoni ishongeshejwe ku bushyuhe bwinshi (~1500°C), igakorana na karuboni isigaye ikarema SiC-Si ivanze kandi ikomeye. Ubu buryo butanga uburyo bwiza bwo kugenzura imiterere kandi buhendutse ku musaruro munini.

Karubide ya Silikoni Idafite Umuvuduko (SSiC)

SSiC ikorwa hakoreshejwe ifu ya SiC nziza cyane kandi isukuye cyane ku bushyuhe bwinshi cyane (>2000°C) idakoresheje inyongera cyangwa uburyo bwo gufatanya. Ibi bituma habaho ibicuruzwa bifite ubucucike hafi 100% kandi bifite imiterere ya mekanike n'ubushyuhe bwinshi biboneka mu bikoresho bya SiC. Ni byiza cyane mu gukoresha wafer mu buryo buhambaye cyane.

Nyuma yo Gutunganya

Imashini za CNC zigezweho: Igera ku buryo bworoshye kandi bungana.
Kurangiza ubuso: Gusukura diyama bigabanya ubukana bw'ubuso kugeza kuri <0.02 µm.
Igenzura: Interferometry y'amaso, CMM, n'ibizamini bitangiza bikoreshwa kugira ngo harebwe buri gice.

Izi ntambwe zemeza koIngaruka za SiCitanga uburyo bwo gushyiramo wafer neza, uburyo ikoreshwa neza, kandi igatanga uduce duto cyane.

Ibintu by'ingenzi n'inyungu

Ikiranga	Ibisobanuro
Ubukomere buri hejuru cyane	Ubukana bwa Vickers > 2500 HV, burwanya kwangirika no gucikagurika.
Kwaguka guke k'ubushyuhe	CTE ~4.5×10⁻⁶/K, bituma habaho ubudahangarwa mu mikorere y'ubushyuhe.
Ubusembwa bw'ibinyabutabire	Irwanya HF, HCl, imyuka yo mu maraso, n'ibindi bintu bitera kwangirika.
Ubudahangarwa bwiza cyane bw'ihungabana ry'ubushyuhe	Bikwiriye gushyushya/gukonjesha vuba mu buryo bw'umwuka n'ibikoresho byo mu itanura.
Uburimbane n'Imbaraga nyinshi	Ishyigikira amaboko maremare afite ikanya nta guhindukira.
Ibyuka bike	Ni byiza cyane mu bidukikije bifite umwuka mwinshi cyane (UHV).
Icyumba cyo gusukura cya ISO Class 1 cyiteguye	Gukora nta bice by'ibumba bitanga ubushobozi bwo gukora neza.

Porogaramu

SiC Ceramic Fork Arm / End Effector ikoreshwa cyane mu nganda zisaba ubushishozi buhanitse, isuku, no kudakoresha imiti. Ingero z'ingenzi zikoreshwa zirimo:

Gukora ibikoresho bya semiconductor

Gupakira/gupakurura ifu mu buryo bwo gushyiramo (CVD, PVD), gukata (RIE, DRIE), n'uburyo bwo gusukura.
Itwarwa rya robotike hagati ya FOUPs, kaseti, n'ibikoresho byo gutunganya.
Gukoresha ubushyuhe bwinshi mu gihe cyo gutunganya cyangwa gufunga ubushyuhe.

Gukora uturemangingo tw’ingufu zikomoka kuri photovoltaic

Gutwara neza utubumbe twa silikoni tworoshye cyangwa uduce duto tw’izuba mu miyoboro ikora ku buryo bwikora.

Inganda zikora imurikagurisha ry’amabara arambuye (FPD)

Kwimura ibirahuri binini cyangwa substrates mu bikorerwamo OLED/LCD.

Semiconductor ihuriweho / MEMS

Ikoreshwa mu miyoboro ya GaN, SiC, na MEMS aho kugenzura ubwandu no gushyira neza aho ibintu biherereye ari ingenzi cyane.

Uruhare rwayo mu gutuma ibintu bihinduka ni ingenzi cyane mu gutuma ibintu bifatwa neza kandi bihoraho mu gihe cy’ibikorwa by’ubuhanga.

Ubushobozi bwo Guhindura Ibintu

Dutanga uburyo bwo guhindura ibintu mu buryo bwagutse kugira ngo duhuze n'ibisabwa mu bikoresho bitandukanye n'uburyo bwo kubitunganya:

Igishushanyo mbonera cy'iforogo: Imiterere y'ibice bibiri, intoki nyinshi, cyangwa urwego rugabanyijemo ibice.
Ingano ya Wafer ihuye: Kuva ku dusanduku twa santimetero 2 kugeza kuri santimetero 12.
Ahantu ho Gushyiramo: Ihuye n'amaboko ya roboti ya OEM.
Ubunini n'Ubwihangane ku Buso: Ubugari bwo ku rwego rwa micron n'ubugari bwo kuzenguruka impande birahari.
Ibintu Birwanya Gutembera: Imiterere cyangwa irangi ry'ubuso rishobora gukoreshwa kugira ngo rifate neza.

Buri kimweigikoresho cyo kurangira cya keramikyateguwe hamwe n'abakiriya kugira ngo ihuzwe neza kandi igire impinduka nke mu mikoreshereze y'ibikoresho.

Ibibazo Bikunze Kubazwa (Ibibazo Bikunze Kubazwa)

Q1: Ni gute SiC irusha quartz gukoresha ibikoresho bya nyuma?
A1:Nubwo quartz ikunze gukoreshwa kubera ubuziranenge bwayo, ntabwo ikomera mu buryo bw'ikoranabuhanga kandi ikunze kwangirika iyo ishyizwe mu biremereye cyangwa ishyushye. SiC itanga imbaraga nyinshi, idashira, kandi ntigira ubushyuhe bwinshi, bigabanya cyane ibyago byo kudakora neza no kwangirika kwa wafer.

Q2: Ese iyi mashini ikoreshwa mu gukata ikoresheje ceramic irahuye n'ibikoresho byose bya roboti bikoresha wafer?
A2:Yego, ibikoresho byacu bya ceramic effectors bihuye na sisitemu nyinshi zikomeye zo gufata wafer kandi bishobora guhindurwa hakurikijwe moderi zawe za roboti hamwe n'ibishushanyo nyabyo by'ubuhanga.

Q3: Ese ishobora gufata wafers za mm 300 idahindagurika?
A3:Yego rwose. Uburemere bwinshi bwa SiC butuma n'amaboko maremare kandi mato ashobora gufata neza utubati twa mm 300 tudatemba cyangwa ngo duhindukire mu gihe cyo kugenda.

Q4: Ni iyihe nshuro isanzwe y'imikorere y'igikoresho cya SiC ceramic end effector?
A4:Iyo ikoreshejwe neza, SiC end effector ishobora kumara igihe kirekire inshuro 5 kugeza ku 10 ugereranyije na quartz cyangwa aluminiyumu gakondo, bitewe nuko irwanya ubushyuhe n'imbaraga za mekanike.

Q5: Ese mutanga serivisi zo gusimbuza cyangwa serivisi zo gushushanya byihuse?
A5:Yego, dushyigikira gukora ingero zihuse kandi dutanga serivisi zo gusimbuza hashingiwe ku bishushanyo bya CAD cyangwa ibice byahinduwe mu buryo bwa reverse-engineered bivuye ku bikoresho bihari.

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.