Umuyoboro w'ifuru utambitse wa Silicon Carbide (SiC)

Ibisobanuro bigufi:

Umuyoboro w’ifuru utambitse wa Silicon Carbide (SiC) ukora nk'icyumba cy’ingenzi cy’imikorere n’umupaka w’igitutu cy’ingufu zikoreshwa mu bushyuhe bwinshi hamwe no kuvura ubushyuhe bukoreshwa mu gukora semiconductor, gukora photovoltaic, no gutunganya ibikoresho bigezweho.

Ohereza imeri kuri twe

Ibiranga

Ishusho irambuye

Ishyirwa mu mwanya w'ibicuruzwa n'agaciro kabyo

Iyi tube yakozwe mu buryo bwa SiC ifite igice kimwe, ivanze n'urwego rwo kurinda CVD-SiC, itanga ubushobozi bwo gutwara ubushyuhe budasanzwe, umwanda muto, ubushobozi bukomeye bwo gukora, kandi irwanya uburozi cyane.
Igishushanyo cyayo gitanga ubushyuhe bungana cyane, serivisi ihoraho, kandi ikora neza igihe kirekire.

Ibyiza by'ingenzi

Yongera ubushyuhe bw'imikorere, isuku, n'imikorere myiza y'ibikoresho muri rusange (OEE).
Bigabanya igihe cyo gukora isuku kandi bikongera igihe cyo gusimbuza, bigabanura ikiguzi cyose cyo gutunga (TCO).
Itanga icyumba kiramba gishobora gukoramo imiti ikoreshwa mu bushyuhe bwinshi ikoresheje ogisijeni n'imiti ikungahaye kuri chlorine ariko ingaruka zikaba nke cyane.

Ibirere n'Idirishya ry'Ibikorwa Bikenewe

Imyuka ikora: ogisijeni (O₂) n'izindi mvange zivangavanga ogisijeni
Imyuka itwara imizigo/irinda: azote (N₂) n'imyuka idafite umwuka mwinshi
Ubwoko buhuye: imyuka itera chlorine (uburyo bwo kuyicunga no kuyikoresha mu gihe cyo kuyicunga bigenzurwa)

Inzira zisanzwe: okiside yumye/itose, annealing, gukwirakwira, LPCVD/CVD deposition, gukora ku buso, passivation ya photovoltaic, gukura kwa thin-film, carboneization, nitridation, n'ibindi.

Amabwiriza agenga imikorere

Ubushyuhe: ubushyuhe bw'icyumba kugeza kuri 1250 °C (reka 10–15% by'umutekano bitewe n'imiterere y'ubushyuhe na ΔT)
Igitutu: kuva ku gipimo cy'umuvuduko muke/LPCVD kugeza ku gitutu cyiza hafi y'ikirere (ibipimo bya nyuma kuri buri gitugu cyatanzwe)

Ibikoresho n'imiterere y'imiterere

Umubiri wa Monolithic SiC (Ukozwe mu nyongeramusaruro)

Ifite ubucucike bwinshi bwa β-SiC cyangwa SiC nyinshi, yubatswe nk'igice kimwe—nta ngingo cyangwa imigozi ifite icyuma gishobora kuva cyangwa guteza stress.
Ubushobozi bwo gutwara ubushyuhe bwinshi butuma ubushyuhe buhita kandi bukagira ubushyuhe bungana neza.
Ingano nto kandi ihamye yo kwaguka k'ubushyuhe (CTE) ituma habaho ubuziranenge buhamye kandi buhamye ku bushyuhe buri hejuru.

Ubwikorezi bw'imikorere bwa CVD SiC

Imyanda iri mu mwanya wayo, isukuye cyane (imyanda iri hejuru/ipfuka <5 ppm) kugira ngo ihagarike ikorwa ry'uduce duto n'isohoka rya iyoni mu byuma.
Ubuhanga buhebuje mu kurwanya imyuka itera ogisijeni n'iy'ifu ya chlorine, bikarinda ko inkuta zisubira gutera cyangwa kongera gushonga.
Ubunini bw'ahantu runaka kugira ngo buringanire uburyo bwo kurwanya ingese n'ubushyuhe.

Inyungu zihuriweho: umubiri ukomeye wa SiC utanga imbaraga z'imiterere n'uburyo ubushyuhe butangwa, mu gihe urwego rwa CVD rutanga isuku no kurwanya ingese kugira ngo bibe byizerwa kandi bigere ku musaruro mwinshi.

Intego z'ingenzi z'imikorere

Ubushyuhe bwo gukoresha buri gihe:≤ 1250 °C
Imyanda myinshi ikomoka ku butaka:< 300 ppm
Imyanda yo ku buso bwa CVD-SiC:< 5 ppm
Ubushobozi bwo kwihanganira ingano: OD ± 0.3–0.5 mm; coaxiality ≤ 0.3 mm/m (ifite ubushobozi bwo gufungana)
Ubukana bw'urukuta rw'imbere: Ra ≤ 0.8–1.6 µm (ibara risesuye cyangwa hafi y'indorerwamo ni ngombwa)
Igipimo cyo kuva kwa Heliyumu: ≤ 1 × 10⁻⁹ Pa·m³/s
Ubushobozi bwo kwihanganira ubushyuhe n'ihungabana: ikomeza kubaho ubushyuhe n'ubukonje inshuro nyinshi idacika cyangwa ngo ivunike
Guteranya icyumba cyo gusukura: ISO Class 5–6 ifite urwego rwemewe rw'ibisigazwa by'uduce/ibyuma-iyoni

Imiterere n'Amahitamo

Jewometiri: OD 50–400 mm (nini ukurikije isuzuma) hamwe n'inyubako ndende y'igice kimwe; ubugari bw'urukuta bwakozwe neza kugira ngo burusheho gukomera, uburemere, n'ubushyuhe.
Imiterere ya nyuma: flanges, bell-mouth, bayonet, locating rings, O-ring grooves, hamwe na pompe-out cyangwa pressure ports zihariye.
Imbuga zikora neza: uburyo bwo kunyuramo thermocouple, intebe z'ibirahuri, inzira za gaze zinjiramo—byose byakozwe kugira ngo bikoreshwe mu bushyuhe bwinshi kandi bidasohora amazi.
Gahunda zo gusiga: urukuta rw'imbere (rusanzweho), urukuta rw'inyuma, cyangwa igitwikirizo cyuzuye; ubwikingo bugamije cyangwa ubunini buhanitse ku bice bifite imbogamizi nyinshi.
Gusukura no gusukura ubuso: imiterere myinshi y'ubukana, gusukura hakoreshejwe ultrasound/DI, no gushushanya/kuma porotokoli zihariye.
Ibikoresho: ibyuma bifunga icyuma, ibyuma bifunga, aho ibikoresho bishyirwa, amaboko yo gufataho, n'aho kubika ibintu.

Kugereranya Imikorere

Igipimo	Umuyoboro wa SiC	Umuyoboro wa Quartz	Umuyoboro wa Alumina	Umuyoboro wa Graphite
Ubushobozi bwo gutwara ubushyuhe	Hejuru, impuzankano	Hasi	Hasi	Hejuru
Imbaraga/ubushyuhe bwinshi	Byiza cyane	Imurikagurisha	Byiza	Ni nziza (iterwa n'isuku y'amaraso)
Ihungabana ry'ubushyuhe	Byiza cyane	Intege nke	Iringaniye	Byiza cyane
Isuku / iyoni z'icyuma	Nibyiza cyane (hasi)	Iringaniye	Iringaniye	Umukene
Oxidation na Cl-chemistry	Byiza cyane	Imurikagurisha	Byiza	Bike (bitera ogisijeni)
Ikiguzi ugereranije n'igihe serivisi imara	Ubuzima buringaniye / burebure	Hasi / ngufi	Hagati / hagati	Hagati / ibidukikije bitoroshye

Ibibazo Bikunze Kubazwa (Ibibazo Bikunze Kubazwa)

Q1. Kuki wahitamo umubiri wa SiC wacapwe mu buryo bwa 3D?
A. Ikuraho imigozi n'amabati bishobora gusohora cyangwa gushyira imbaraga mu gipimo, kandi igashyigikira ubuhanga bugoye mu buryo buhamye.

Ikibazo cya 2. Ese SiC irwanya imyuka iterwa na chlorine?
A. Yego. CVD-SiC ntigira umwuka mwinshi mu gihe cy'ubushyuhe n'umuvuduko byagenwe. Ku bice bifite ingaruka nyinshi, ni byiza gukoresha irangi rinini ry'aho hantu hamwe n'uburyo bukomeye bwo gusukura no gusohora amazi.

Q3. Ni gute irusha imiyoboro ya quartz?
A. SiC itanga igihe kirekire cyo gukora, ubushyuhe bungana neza, umwanda muke w’uduce duto/iyoni z’icyuma, hamwe na TCO nziza—cyane cyane hejuru ya ~900 °C cyangwa mu kirere gishyuha cyangwa kirimo chlorine.

Q4. Ese umuyoboro ushobora guhangana n'ubushyuhe bwihuse?
A. Yego, iyo ΔT ntarengwa n'amabwiriza y'umuvuduko w'amashanyarazi yubahirizwa. Guhuza umubiri wa SiC ifite κ nyinshi n'urwego ruto rwa CVD bifasha impinduka zihuse z'ubushyuhe.

Q5. Ni ryari hakenewe gusimburwa?
A. Simbuza umuyoboro niba ubonye imiyoboro y'urukiramende cyangwa impande, aho gutwikira cyangwa kwangirika kw'amazi, kwiyongera kw'umuvuduko w'amazi, kwiyongera k'ubushyuhe, cyangwa ko utunyangingo tudasanzwe twangirika.

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.