Karubide ya Silicon (SiC), nk'ubwoko bw'ibikoresho bya semiconductor bifite umugozi munini, bigira uruhare runini mu ikoreshwa rya siyansi n'ikoranabuhanga rya none. Karubide ya Silicon ifite ubushobozi bwo gushyuha neza, kwihanganira amashanyarazi menshi, ikora neza mu buryo bugamije imikorere n'indi miterere myiza y'umubiri n'iy'urumuri, kandi ikoreshwa cyane mu bikoresho bya elegitoroniki bikoresha imirasire y'izuba n'ibikoresho by'amashanyarazi bikoresha imirasire y'izuba. Bitewe n'ubwiyongere bw'ubukene bw'ibikoresho bya elegitoroniki bikora neza kandi bihamye, kumenya ikoranabuhanga ryo gukura rya karubide ya silicon byabaye ahantu hakomeye.
None se uzi byinshi bite ku bijyanye n'iterambere rya SiC?
Uyu munsi turaganira ku buryo butatu bw'ingenzi bwo gukura kwa silicon carbide single crystals: physical vapor transport (PVT), liquid phase epitaxy (LPE), na high temperature chemical vapor deposition (HT-CVD).
Uburyo bwo kohereza umwuka ushyushye (PVT)
Uburyo bwo kohereza umwuka ukomoka ku mwuka ni bumwe mu buryo bukoreshwa cyane mu gukura kwa karubide ya silikoni. Gukura kwa karubide ya silikoni imwe bishingiye ahanini ku gusya ifu ya silikoni no kongera kuyishyira ku kristu y'imbuto mu gihe cy'ubushyuhe bwinshi. Mu gice gifunze cya grafiti, ifu ya silikoni ishyushywa kugeza ku bushyuhe bwinshi, binyuze mu kugenzura ubushyuhe, umwuka wa silikoni ugenda wiyongera ku buso bwa karubide y'imbuto, hanyuma buhoro buhoro ikamera nk'ikristu nini imwe.
Igice kinini cya monocrystalline SiC dutanga ubu gikozwe muri ubu buryo bwo gukura. Ni na bwo buryo bukoreshwa cyane mu nganda.
Epitaxy y'igice cy'amazi (LPE)
Uduce twa silicon carbide dutegurwa hakoreshejwe epitaxy y’amazi binyuze mu nzira yo gukura ya kristu ku gice cy’amazi gikomeye. Muri ubu buryo, ifu ya silicon carbide ishongeshwa mu gisubizo cya silicon-carbon ku bushyuhe bwinshi, hanyuma ubushyuhe bukagabanuka kugira ngo silicon carbide ivanwe mu gisubizo maze ikure ku duce twa kristu. Akamaro gakomeye k’uburyo bwa LPE ni ubushobozi bwo kubona kristu nziza ku bushyuhe buri hasi, igiciro ni gito, kandi ikwiriye gukorwa ku bwinshi.
Gushyira umwuka mu kirere mu bushyuhe bwinshi (HT-CVD)
Mu kwinjiza umwuka urimo silikoni na karuboni mu cyumba cy’imyitozo ku bushyuhe bwinshi, urwego rumwe rwa silikoni karubide rushyirwa ku buso bwa selikoni y’imbuto binyuze mu buryo bw’imiti. Akamaro k’ubu buryo ni uko umuvuduko w’amazi n’imiterere y’imikorere ya silikoni bishobora kugenzurwa neza, kugira ngo haboneke selikoni karubide ifite ubuziranenge bwinshi n’ubusembwa buke. Uburyo bwa HT-CVD bushobora gukora selikoni karubide ifite imiterere myiza, ikaba ari ingenzi cyane mu gukoreshwa aho ibikoresho byiza cyane bikenewe.
Uburyo bwo gukura kwa karubide ya silikoni ni inkingi y'ikoreshwa ryayo n'iterambere ryayo. Binyuze mu guhanga udushya mu ikoranabuhanga no kunoza imikorere, ubu buryo butatu bwo gukura bugira uruhare rwabwo mu guhaza ibyifuzo by'ibihe bitandukanye, butuma karubide ya silikoni ishyirwa mu mwanya w'ingenzi. Hamwe n'ubushakashatsi n'iterambere ry'ikoranabuhanga, uburyo bwo gukura kw'ibikoresho bya karubide ya silikoni buzakomeza kunozwa, kandi imikorere y'ibikoresho by'ikoranabuhanga izarushaho kunozwa.
(gusuzuma)
Igihe cyo kohereza: Kamena-23-2024