Carbide ya Silicon (SiC), nkubwoko bunini bwibikoresho bya semiconductor, bigira uruhare runini mugukoresha siyanse nubuhanga bugezweho. Carbide ya Silicon ifite ubushyuhe buhebuje, kwihanganira amashanyarazi menshi, kwihanganira nkana nibindi bintu byiza byumubiri na optique, kandi bikoreshwa cyane mubikoresho bya optoelectronic nibikoresho byizuba. Bitewe no kwiyongera kubikoresho bya elegitoroniki bikora neza kandi bihamye, kumenya ikoranabuhanga ryiterambere rya karubide ya silicon yabaye ahantu hashyushye.
None uzi bangahe kubyerekeye iterambere rya SiC?
Uyu munsi tuzaganira ku buhanga butatu bwingenzi bwo gukura kwa silikoni karbide imwe ya kirisiti imwe: gutwara imyuka yumubiri (PVT), epitaxy ya fase epitaxy (LPE), hamwe nubushyuhe bwo hejuru bwa chimique (HT-CVD).
Uburyo bwo kohereza imyuka yumubiri (PVT)
Uburyo bwo kohereza imyuka yumubiri nimwe muburyo bukoreshwa cyane muri silicon karbide yo gukura. Gukura kwa kariside ya silikoni imwe ya kariside biterwa ahanini no kugabanuka kwifu ya sic no guhindurwa kuri kristu yimbuto mugihe cy'ubushyuhe bwinshi. Muri grafite ifunze cyane, ifu ya karikide ya silicon ishyuha kugeza ku bushyuhe bwo hejuru, binyuze mu kugenzura ubushyuhe bwa gradient, silicon karbide yamashanyarazi hejuru yimbuto ya kirisiti, hanyuma ikura buhoro buhoro ikura nini nini ya kirisiti.
Umubare munini wa monocrystalline SiC dutanga ubu ikozwe murubu buryo bwo gukura. Ninzira nyamukuru inzira yinganda.
Icyiciro cya Liquid epitaxy (LPE)
Silicon karbide kristal yateguwe na epitaxy ya feri ikoresheje inzira yo gukura kwa kirisiti kuri interineti ikomeye. Muri ubu buryo, ifu ya karibide ya silicon ishonga mumuti wa silikoni-karubone mubushyuhe bwinshi, hanyuma ubushyuhe buragabanuka kuburyo karbide ya silikoni igwa mumuti hanyuma igakura kuri kristu yimbuto. Inyungu nyamukuru yuburyo bwa LPE nubushobozi bwo kubona kristu yo mu rwego rwo hejuru ku bushyuhe buke bwo gukura, igiciro ni gito, kandi gikwiriye kubyara umusaruro munini.
Ubushyuhe bwo hejuru Ububiko bwa Shimi (HT-CVD)
Mugutangiza gaze irimo silikoni na karubone mubyumba byubushyuhe hejuru yubushyuhe bwo hejuru, igice kimwe cya kirisiti ya kariside ya silikoni gishyirwa hejuru yubutaka bwa kirisiti yimbuto binyuze mumiti. Ibyiza byubu buryo nuko umuvuduko wogutwara nuburyo ibintu bya gaze bishobora kugenzurwa neza, kugirango ubone kariside ya kariside ya kariside ifite isuku nini kandi ifite inenge nke. Inzira ya HT-CVD irashobora kubyara silikoni karbide ya kristu ifite ibintu byiza cyane, bifite agaciro cyane kubisabwa aho bikenewe ibikoresho byiza cyane.
Iterambere ryimikorere ya silicon karbide nifatizo yo kuyikoresha no kwiteza imbere. Binyuze mu guhanga udushya mu ikoranabuhanga no gutezimbere, ubu buryo butatu bwo gukura bugira uruhare runini kugirango buhuze ibikenewe mu bihe bitandukanye, byemeze umwanya wa karibide ya silicon. Hamwe nogutezimbere ubushakashatsi niterambere ryikoranabuhanga, inzira yo gukura yibikoresho bya silicon karbide bizakomeza kunozwa, kandi imikorere yibikoresho bya elegitoronike bizarushaho kunozwa.
(censoring)
Igihe cyo kohereza: Jun-23-2024