Wafers za Silikoni Carbide SiC 8inch 200mm 4H-N 4H-N grade production grade 500um thickness

Ibisobanuro bigufi:

Shanghai Xinkehui Tech. Co., Ltd itanga amahitamo meza n'ibiciro byiza bya wafers za silicon carbide nziza n'ibikoresho bya substrates bifite umurambararo wa santimetero 8 bifite ubwoko bwa N- na semi-insulating. Ibigo bito n'ibinini by'ibikoresho bya semiconductor hamwe na laboratwari z'ubushakashatsi ku isi yose bikoresha kandi byishingikiriza kuri wafers zacu za silicon carbide.

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Ibiranga

Ibisobanuro bya 200mm 8inch SiC Substrate

Ingano: santimetero 8;

Ingano: 200mm±0.2;

Ubunini: 500um ± 25;

Icyerekezo cy'ubuso: 4 ugana kuri [11-20]±0.5°;

Icyerekezo cy'urukiramende: [1-100]±1°；

Ubujyakuzimu bw'akadomo: 1±0.25mm；

Umuyoboro muto: <1cm2;

Amasahani ya Hex: Nta na kimwe cyemewe;

Ubushobozi bwo guhangana n'ingufu: 0.015~0.028Ω;

EPD: <8000cm2;

TED: <6000cm2

BPD: <2000cm2

TSD: <1000cm2

SF: agace <1%

TTV≤15um；

Warp≤40um；

Umuheto≤25um ；

Uduce twa poly: ≤5%;

Gushishura: <5 n'uburebure buhuriweho < 1 Diameter ya Wafer;

Udupira/Ibice: Nta na kimwe cyemerera Ubugari n'Ubujyakuzimu bwa D>0.5mm;

Uduce: Nta na kimwe;

Ibara: Nta na rimwe

Inkombe y'umugati: Chamfer;

Isoza ry'ubuso: Ibara ry'urukiramende rw'uruhande rubiri, CMP y'ubuso bwa Si;

Gupakira: Kaseti ya wafer nyinshi cyangwa Igikoresho kimwe cya wafer;

Ingorane ziriho ubu mu gutegura kristu za 200mm 4H-SiC mainl

1) Gutegura utubumbe tw’imbuto twa 200mm 4H-SiC tw’ubuziranenge;

2) Kugenzura ubushyuhe bw'ahantu hanini hadakwiranye n'uburyo bwo kugenzura imikorere ya nucleation;

3) Uburyo bwo gutwara ibintu neza n'impinduka mu bice by'imyuka mu buryo bwo gukura kw'ibinure binini;

4) Gucikagurika kw'amasasu no kwiyongera kw'ibinure biterwa no kwiyongera k'ubushyuhe bunini.

Kugira ngo utsinde izi mbogamizi kandi ubone wafers nziza za 200mm SiC, hatanzwe ibisubizo bikurikira:

Ku bijyanye no gutegura kristu y'imbuto ya mm 200, urwego rw'ubushyuhe bukwiye, hamwe n'uburyo bwo kwaguka byizwe kandi byagenewe kwita ku bwiza bwa kristu n'ingano yo kwaguka; Guhera kuri kristu ya mm 150 SiC se:d, kora isubiramo rya kristu y'imbuto kugira ngo wongere buhoro buhoro kristu ya SiC kugeza igeze kuri mm 200; Binyuze mu gukura no gutunganya kristu nyinshi, buhoro buhoro wongere ubwiza bwa kristu mu gace ka kristu, kandi wongere ubwiza bwa kristu y'imbuto ya mm 200.

Ku bijyanye no gutegura kristu itwara amazi ya 200mm n'imashini zitunganya imiterere y'ubutaka, ubushakashatsi bwanogeje imiterere y'ubushyuhe n'umurima w'amazi kugira ngo kristu nini ikure, bukore kristu itwara amazi ya 200mm, kandi bugenzure uburyo bwo gukoresha imiti igabanya ubushyuhe. Nyuma yo gutunganya no gushushanya kristu, habonetse ingot ya 4H-SiC ifite umurambararo usanzwe ya santimetero 8. Nyuma yo gukata, gusya, gusiga, gutunganya kugira ngo haboneke wafer ya SiC 200mm ifite ubunini bwa 525um cyangwa irenga.