Wafer ya santimetero 12 ya 4H-SiC ikoreshwa mu birahuri bya AR

Ibisobanuro bigufi:

ItsindaSubstrate ya santimetero 12 itwara amashanyarazi ya 4H-SiC (silicon carbide)ni wafer nini cyane ya semiconductor yakozwe kugira ngo ikoreshwe mu gisekuru gitaha.ingufu nyinshi, inshuro nyinshi, n'ubushyuhe bwinshigukora ibikoresho by'ikoranabuhanga bikoresha ingufu. Gukoresha ibyiza bya SiC—nk'ibiamashanyarazi akomeye cyane, umuvuduko mwinshi wa electron yuzuye, ubwiyongere bw'ubushyuhe, naubushobozi bwo kugumana imiti neza cyane—iyi substrate ishyirwa nk'igikoresho cy'ibanze cy'ibikoresho by'amashanyarazi bigezweho ndetse n'ibikoresho bishya byo mu bwoko bwa wafer mu gace kanini.

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Ishusho irambuye

Wafer ya santimetero 12 ifite uburebure bwa 4H-SiC

Incamake

Kugira ngo harebwe ibisabwa mu nganda zose kukugabanya ibiciro no kunoza umusaruro, ihinduka kuva ku ihame ry'ibanzeSiC ya santimetero 6–8 to SiC ya santimetero 12substrates izwi cyane nk'inzira y'ingenzi. Wafer ya santimetero 12 itanga ubuso bunini bukoreshwa kurusha imiterere mito, bigatuma umusaruro wa die uzamuka kuri wafer imwe, ikoreshwa neza, kandi igagabanya igihombo cy'inyongera—bityo bigafasha mu kunoza ibiciro by'inganda mu ruhererekane rw'ibicuruzwa.

Uburyo bwo Gukura no Gukora Inzira ya Crystal Growth

Iyi substrate ya santimetero 12 ikora 4H-SiC binyuze mu gutwikira urunigi rwuzuye.Kwaguka kw'imbuto, gukura kw'ikirahure kimwe, gukaraba, gukata no gusya, hakurikijwe uburyo busanzwe bwo gukora ibikoresho bya semiconductor:

Kwagura imbuto hakoreshejwe uburyo bwo gutwara umwuka ushyushye (PVT):
Santimetero 124H-SiC imbuto kristuiboneka binyuze mu kwagura umurambararo hakoreshejwe uburyo bwa PVT, bigatuma habaho kwiyongera kwa boule za santimetero 12 zitwara amashanyarazi za 4H-SiC.
Gukura kwa kristu imwe ya 4H-SiC itwara umwuka:
Iyoboran⁺ 4H-SiCGukura kwa kristale imwe bigerwaho binyuze mu kwinjiza azote mu gihingwa gikura kugira ngo habeho uburyo bwo kugenzura ikoreshwa ry’ibinyabutabire.
Gukora Wafer (gutunganya ibikoresho bya semiconductor bisanzwe):
Nyuma yo gushushanya boule, wafers zikorwa binyuze mugukata hakoreshejwe laser, ikurikirwa nagukata, gusiga irangi (harimo no kurangiza ku rwego rwa CMP), no gusukura.
Ubugari bwa substrate buvamo ni560 μm.

Ubu buryo buhuriweho bwagenewe gushyigikira gukura guhamye ku murambararo munini cyane mu gihe bukomeza ubuziranenge bwa kristalografiya n'imiterere y'amashanyarazi ihoraho.

Kugira ngo harebwe isuzuma ry’ubuziranenge risesuye, substrate irangwa hakoreshejwe ibikoresho bihuza imiterere, iy’amatara, iy’amashanyarazi, n’iy’igenzura ry’ibise:

Raman spectroscopy (ikarita y'agace):kugenzura uburinganire bwa polytype kuri wafer
Mikorosikopu y'amatara yuzuye yikora (ikarita y'amabara ya wafer):gupima no gusuzuma imibare y'imiyoboro mito
Igipimo cy’ubudahangarwa bw’ingufu (gupima ikarita y’ingufu):ikwirakwizwa ry'ubudahangarwa bw'ikirere ahantu henshi ho gupimisha
Umucyo wo hejuru wa X-ray (HRXRD):isuzuma ry'ubuziranenge bwa kristale binyuze mu gupima curve ihindagurika
Igenzura ry'aho ibara riherereye (nyuma yo gukata neza):isuzuma ry'ubucucike bw'aho ibintu biherereye n'imiterere yabyo (hashyirwa imbere uburyo ibintu bihinduka ku mpande zombi)

agace gato k'umugati 10

Ibisubizo by'ingenzi by'imikorere (Uhagarariye abandi)

Ibisubizo by'imiterere bigaragaza ko substrate ya santimetero 12 itwara amashanyarazi ya 4H-SiC igaragaza ubwiza bukomeye bw'ibikoresho mu bipimo by'ingenzi:

(1) Ubuziranenge n'ubuziranenge bwa polytype

Ibishushanyo mbonera by'agace ka Raman bigaragazaUburinzi bwa polipe ya 4H-SiC 100%hirya no hino ku butaka.
Nta zindi polytypes zigaragara (urugero, 6H cyangwa 15R), bigaragaza uburyo bwiza bwo kugenzura polytypes ku gipimo cya santimetero 12.

(2) Ubucucike bw'imiyoboro mito (MPD)

Ikarita ya mikoroskopi y'ingano ya wafer igaragazaUbucucike bw'imiyoboro mito < 0.01 cm⁻², bigaragaza uburyo bwo gukumira neza iki cyiciro cy’ubusembwa bugabanya igikoresho.

(3) Gukomera kw'amashanyarazi no kuba ahujwe

Ikarita yo kwirinda gukorana n'ibintu (ibipimo bya 361-point) igaragaza:
- Ingano y'ubudahangarwa:20.5–23.6 mΩ·cm
- Impuzandengo yo guhangana n'ingufu:22.8 mΩ·cm
- Kudahuza:< 2%
  Ibi bisubizo bigaragaza ko ikoreshwa ry’inyongera rihagaze neza kandi ko amashanyarazi akoreshwa mu buryo bwa wafer ari meza.

(4) Ubwiza bwa kristale (HRXRD)

Ibipimo by'umugozi wo kuzunguruka wa HRXRD ku(004) kuzirikana, byafashwe kuriamanota atanumu cyerekezo cya wafer, garagaza:
- Imitwe imwe, hafi ya yose idafite imyitwarire yo kuzamuka cyane, bigaragaza ko nta mipaka y'ingano iri hasi ihari.
- Impuzandengo ya FWHM:20.8 arcsec (″), bigaragaza ubwiza buri hejuru bwa kristali.

(5) Ubucucike bw'ingufu zisohoka mu buryo bwa screw (TSD)

Nyuma yo gusesengura neza no gusesengura mu buryo bwikora,ubucucike bw'ihindagurika ry'utuzurubipimirwa kuri2 cm⁻², igaragaza TSD yo hasi ku gipimo cya santimetero 12.

Umwanzuro uvuye mu bisubizo byavuzwe haruguru:
Icyuma cy'ibumba kigaragazaubuziranenge bwiza bwa 4H polytype, ubucucike bwa micropipe buri hasi cyane, ubushobozi buke bwo guhangana n'ingufu buhamye kandi bungana, ubwiza bukomeye bwa crystalline, n'ubucucike buke bwo gusimbuka kw'imigozi, ishyigikira uburyo ikoreshwa mu gukora ibikoresho bigezweho.

Agaciro n'Ibyiza by'Igicuruzwa

Ifasha kwimuka kw'inganda za SiC za santimetero 12
Itanga urubuga rwiza rwo hejuru rujyanye n'ingamba z'inganda zigana ku gukora SiC wafer ya santimetero 12.
Ubucucike buke bw'ibikoresho kugira ngo birusheho gutanga umusaruro no kwizerwa.
Ubucucike bw'imiyoboro mito iciriritse cyane hamwe n'ubucucike buke bwo gucika kw'imiyoboro bifasha kugabanya uburyo bwo gutakaza umusaruro bukabije kandi bungana.
Uburyo bwiza cyane bwo guhuza amashanyarazi kugira ngo ibikorwa bikomeze kuba byiza
Gukwirakwiza ubushobozi bwo gupima neza bifasha imikorere myiza y'igikoresho cya wafer kuva kuri wafer kugera kuri wafer ndetse n'uburyo gikoreshwa muri wafer.
Ubwiza bwo hejuru bwa crystalline bushyigikira epitaxy no gutunganya ibikoresho
Ibisubizo bya HRXRD no kutagira ibimenyetso by'umupaka w'ingano nto bigaragaza ubwiza bw'ibikoresho mu gukura no gukora ibikoresho.

Porogaramu zigamije

Substrate ya santimetero 12 ikoresha amashanyarazi ya 4H-SiC ikoreshwa kuri:

Ibikoresho by'amashanyarazi bya SiC:MOSFET, Schottky barrier diodes (SBD), n'imiterere bifitanye isano
Imodoka zikoresha amashanyarazi:inverters nini zitwara umuvuduko, chargers ziri mu bwato (OBC), na converters za DC-DC
Ingufu zisubira n'urusobe rw'amashanyarazi:inverters za photovoltaic, sisitemu zo kubika ingufu, na modules za smart grid
Ingufu z'amashanyarazi mu nganda:amashanyarazi akoresha ingufu nyinshi, moteri, na converters zifite ingufu nyinshi
Ibisabwa ku ifunguro rya wafer rigaragara mu gace kanini:gupakira bigezweho n'ibindi bikorwa bya semiconductor bihuye na santimetero 12

Ibibazo Bikunze Kubazwa - Substrate ya 4H-SiC ifite amashanyarazi ya santimetero 12

Q1. Ni ubuhe bwoko bwa substrate ya SiC?

A:
Iki gicuruzwa niIngufu zitwara amashanyarazi za santimetero 12 (n⁺-type) za 4H-SiC zifite kristale imwe, yahinzwe hakoreshejwe uburyo bwa Physical Vapor Transport (PVT) kandi igatunganywa hakoreshejwe tekiniki zisanzwe za semiconductor wafering.

Ikibazo cya 2. Kuki 4H-SiC yatoranijwe nk'ubwoko bwa polytype?

A:
4H-SiC itanga uruvange rwiza cyane rwakugenda cyane kwa electron, icyuho kinini, imbaraga nyinshi zo kwangirika, n'uburyo ubushyuhe butwaramuri polytype za SiC zijyanye n'ubucuruzi. Ni polytype yiganje ikoreshwa muriibikoresho bya SiC bifite voltage nyinshi n'imbaraga nyinshi, nka MOSFET na Schottky diodes.

Q3. Ni izihe nyungu zo kuva kuri substrates za SiC za santimetero 8 ukagera kuri santimetero 12?

A:
Agapapuro ka SiC ka santimetero 12 gatanga:

Mu buryo bufatikaubuso bunini bushobora gukoreshwa
Umusaruro mwinshi w'ifu kuri buri wafer
Igipimo cyo hasi cy'igihombo ku ruhande
Guhuza neza naimiyoboro igezweho yo gukora semiconductor ya santimetero 12

Ibi bintu bigira uruhare rutaziguye muigiciro gito kuri buri gikoreshon'imikorere myiza mu nganda.

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.