4inch SiC Epi wafer ya MOS cyangwa SBD

Ibisobanuro bigufi:

SiCC ifite umurongo wuzuye wa SiC (Silicon Carbide) wafer substrate yumusaruro, uhuza imikurire ya kristu, gutunganya wafer, guhimba wafer, gusiga, gusukura no kugerageza. Kugeza ubu, turashobora gutanga axial cyangwa off-axis igice cya insulasiyo na kimwe cya kabiri cya 4H na 6H SiC wafers ifite ubunini bwa 5x5mm2, 10x10mm2, 2 ″, 3 ″, 4 ″ na 6 ″, tukanyura mukurwanya inenge, gutunganya imbuto za kirisiti no gukura byihuse nibindi Byacishije mu ikoranabuhanga ryingenzi nko guhagarika inenge, gutunganya imbuto za kristu no gukura byihuse, kandi biteza imbere ubushakashatsi bwibanze niterambere rya silicon karbide epitaxy, ibikoresho nubushakashatsi bwibanze bujyanye nabyo.

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Ibicuruzwa birambuye

Ibicuruzwa

Epitaxy bivuga imikurire yikintu cyiza cyo hejuru cya kirisiti hejuru ya silicon karbide substrate. Muri byo, imikurire ya gallium nitride epitaxial layer kumurongo wa insuline ya silicon karbide substrate yitwa epitaxy ya heterogeneous; imikurire ya silicon karbide epitaxial layer hejuru yubutaka bwa silicon karbide substrate yitwa epitaxy ya homogeneous.

Epitaxial ijyanye nigishushanyo mbonera cyibikoresho bisabwa kugirango imikurire yurwego nyamukuru rukora, igena ahanini imikorere ya chip nigikoresho, igiciro cya 23%. Uburyo bukuru bwa epitaxy ya SiC yoroheje muriki cyiciro harimo: kubika imyuka ya chimique (CVD), epitaxy ya molekile beam (MBE), epitaxy ya fase epitaxy (LPE), hamwe na laser pulse na sublimation (PLD).

Epitaxy ni ihuriro rikomeye mu nganda zose. Mugukuza ibice bya epitaxial ya GaN kumasemburo ya silicon karbide substrate, wafers ya GaN epitaxial ishingiye kuri karbide ya silicon, ishobora kurushaho gukorwa mubikoresho bya GaN RF nka transistor nini ya electronique (HEMTs);

Mugukuza silicon karbide epitaxial layer kuri substrate yayobora kugirango ibone wafer ya silicon karbide epitaxial wafer, no murwego rwa epitaxial ku gukora diode ya Schottky, transistor ya zahabu-ogisijeni igice cyumurima, transistor ikingira amarembo hamwe nibindi bikoresho byamashanyarazi, bityo ubwiza bwa epitaxial kumikorere yigikoresho ningaruka zikomeye kumajyambere yinganda nayo igira uruhare runini.