6inch SiC Epitaxiy wafer N/P yo mu bwoko bwa N/P yemerwa mu buryo bwihariye

Uburyo bwo gutegura wafer ya silicon carbide epitaxial ni uburyo bukoresha ikoranabuhanga rya Chemical Vapor Deposition (CVD). Amahame ya tekiniki n'intambwe zo gutegura ni aya akurikira:

Ihame rya tekiniki:

Gushyira umwuka mu kirere: Hakoreshejwe umwuka mu buryo bwihariye, iyo umwuka uva mu kirere urimo uhinduka, urabora ugashyirwa ku gice cy'ubutaka kugira ngo habeho agahu gato gakenewe.

Uburyo bwo gukora ibyuka bihumanya ikirere: Binyuze mu gukora ibyuka bihumanya ikirere cyangwa gucikagurika, imyuka itandukanye y’ibikoresho fatizo mu cyiciro cya gazi ihinduka mu buryo bwa shimi mu cyumba cy’ibyuka bihumanya ikirere.

Intambwe zo gutegura:

Gutunganya substrate: Substrate isukurwa no gusukurwa mbere kugira ngo hamenyekane ubwiza n'ubuziranenge bw'agace ka epitaxial wafer.

Gukosora ikibazo cy'icyumba cy'ibiza: hindura ubushyuhe, umuvuduko n'umuvuduko w'icyumba cy'ibiza n'ibindi bipimo kugira ngo urebe ko imiterere y'ibiza ihamye kandi ikagenzurwa.

Gutanga ibikoresho fatizo: gutanga ibikoresho fatizo bya gazi bikenewe mu cyumba cy’ibisubizo, kuvanga no kugenzura umuvuduko w’amazi uko bikenewe.

Uburyo bwo gukora: Mu gushyushya icyumba cy’imyitozo, imyuka itera ihinduka ry’ibinyabutabire mu cyumba kugira ngo itange umusaruro wifuza, ni ukuvuga filime ya silikoni karubide.

Gukonjesha no gupakurura: Mu mpera y'ihinduka, ubushyuhe buragabanuka buhoro buhoro kugira ngo bukonje kandi bukomeze ibisigazwa biri mu cyumba cy'ihinduka.

Gutera no gutunganya wafer ya Epitaxial: wafer ya epitaxial yashyizwemo iratunganywa kandi igatunganywa nyuma kugira ngo inoze imiterere yayo y'amashanyarazi n'iy'urumuri.

Intambwe n'imiterere byihariye by'uburyo bwo gutegura wafer ya silicon carbide epitaxial bishobora gutandukana bitewe n'ibikoresho byihariye n'ibisabwa. Ibivuzwe haruguru ni umurongo ngenderwaho w'imikorere rusange, imikorere yihariye igomba guhindurwa no kunozwa hakurikijwe uko ibintu bimeze koko.