8inch SiC Umusaruro urwego wafer 4H-N SiC substrate
Imbonerahamwe ikurikira irerekana ibisobanuro bya wafers yacu 8inch SiC ：
| 8inch N-Ubwoko bwa SiC DSP | |||||
| Umubare | Ingingo | Igice | Umusaruro | Ubushakashatsi | Dummy |
| 1: ibipimo | |||||
| 1.1 | polytype | -- | 4H | 4H | 4H |
| 1.2 | Icyerekezo | ° | <11-20> 4 ± 0.5 | <11-20> 4 ± 0.5 | <11-20> 4 ± 0.5 |
| 2: Ibikoresho by'amashanyarazi | |||||
| 2.1 | dopant | -- | Ubwoko bwa Azote | Ubwoko bwa Azote | Ubwoko bwa Azote |
| 2.2 | Kurwanya | ohm · cm | 0.015 ~ 0.025 | 0.01 ~ 0.03 | NA |
| 3: Ibikoresho bya mashini | |||||
| 3.1 | diameter | mm | 200 ± 0.2 | 200 ± 0.2 | 200 ± 0.2 |
| 3.2 | ubunini | μm | 500 ± 25 | 500 ± 25 | 500 ± 25 |
| 3.3 | Icyerekezo | ° | [1- 100] ± 5 | [1- 100] ± 5 | [1- 100] ± 5 |
| 3.4 | Uburebure bwimbitse | mm | 1 ~ 1.5 | 1 ~ 1.5 | 1 ~ 1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Umuheto | μm | -25 ~ 25 | -45 ~ 45 | -65 ~ 65 |
| 3.8 | Intambara | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Imiterere | |||||
| 4.1 | Ubucucike bwa micropipe | ea / cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | ibyuma | atom / cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ea / cm2 | 00500 | 0001000 | NA |
| 4.4 | BPD | ea / cm2 | 0002000 | 0005000 | NA |
| 4.5 | TED | ea / cm2 | 0007000 | 0010000 | NA |
| 5.Hura ubuziranenge | |||||
| 5.1 | imbere | -- | Si | Si | Si |
| 5.2 | Kurangiza | -- | Si-face CMP | Si-face CMP | Si-face CMP |
| 5.3 | agace | ea / wafer | ≤100 (ubunini≥0.3μm) | NA | NA |
| 5.4 | gushushanya | ea / wafer | ≤5, Uburebure bwose200mm | NA | NA |
| 5.5 | Impande chips / indents / ibice / ikizinga / kwanduza | -- | Nta na kimwe | Nta na kimwe | NA |
| 5.6 | Agace ka polytype | -- | Nta na kimwe | Ubuso ≤10% | Ubuso ≤30% |
| 5.7 | Ikimenyetso cy'imbere | -- | Nta na kimwe | Nta na kimwe | Nta na kimwe |
| 6: Ubwiza bwinyuma | |||||
| 6.1 | inyuma kurangiza | -- | Umudepite | Umudepite | Umudepite |
| 6.2 | gushushanya | mm | NA | NA | NA |
| 6.3 | Inyuma yinyuma chip / indents | -- | Nta na kimwe | Nta na kimwe | NA |
| 6.4 | Inyuma yinyuma | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Ikimenyetso cyinyuma | -- | Ikimenyetso | Ikimenyetso | Ikimenyetso |
| 7: inkombe | |||||
| 7.1 | inkombe | -- | Chamfer | Chamfer | Chamfer |
| 8: Amapaki | |||||
| 8.1 | gupakira | -- | Epi-yiteguye hamwe na vacuum gupakira | Epi-yiteguye hamwe na vacuum gupakira | Epi-yiteguye hamwe na vacuum gupakira |
| 8.2 | gupakira | -- | Multi-wafer gupakira | Multi-wafer gupakira | Multi-wafer gupakira |
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