8inch SiC Umusaruro urwego wafer 4H-N SiC substrate

Ibisobanuro bigufi:

Ububiko bwa santimetero 8 za SiC zikoreshwa mubikoresho bya elegitoroniki bifite ingufu nyinshi, nk'imbaraga MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), Diode ya Schottky nibindi bikoresho bya semiconductor.

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

Imbonerahamwe ikurikira irerekana ibisobanuro bya wafers yacu ya 8inch SiC ：

8inch N-Ubwoko bwa SiC DSP
Umubare	Ingingo	Igice	Umusaruro	Ubushakashatsi	Dummy
1: ibipimo
1.1	polytype	--	4H	4H	4H
1.2	Icyerekezo	°	<11-20> 4 ± 0.5	<11-20> 4 ± 0.5	<11-20> 4 ± 0.5
2: Ibikoresho by'amashanyarazi
2.1	dopant	--	Ubwoko bwa Azote	Ubwoko bwa Azote	Ubwoko bwa Azote
2.2	Kurwanya	ohm · cm	0.015 ~ 0.025	0.01 ~ 0.03	NA
3: Ibikoresho bya mashini
3.1	diameter	mm	200 ± 0.2	200 ± 0.2	200 ± 0.2
3.2	ubunini	μm	500 ± 25	500 ± 25	500 ± 25
3.3	Icyerekezo	°	[1- 100] ± 5	[1- 100] ± 5	[1- 100] ± 5
3.4	Uburebure bwimbitse	mm	1 ~ 1.5	1 ~ 1.5	1 ~ 1.5
3.5	LTV	μm	≤5 (10mm * 10mm)	≤5 (10mm * 10mm)	≤10 (10mm * 10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Umuheto	μm	-25 ~ 25	-45 ~ 45	-65 ~ 65
3.8	Intambara	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4: Imiterere
4.1	Ubucucike bwa micropipe	ea / cm2	≤2	≤10	≤50
4.2	ibyuma	atom / cm2	≤1E11	≤1E11	NA
4.3	TSD	ea / cm2	00500	0001000	NA
4.4	BPD	ea / cm2	0002000	0005000	NA
4.5	TED	ea / cm2	0007000	0010000	NA
5.Hura ubuziranenge
5.1	imbere	--	Si	Si	Si
5.2	Kurangiza	--	Si-face CMP	Si-face CMP	Si-face CMP
5.3	agace	ea / wafer	≤100 (ubunini≥0.3μm)	NA	NA
5.4	gushushanya	ea / wafer	≤5, Uburebure bwose200mm	NA	NA
5.5	Impande chips / indents / ibice / ikizinga / kwanduza	--	Nta na kimwe	Nta na kimwe	NA
5.6	Agace ka polytype	--	Nta na kimwe	Ubuso ≤10%	Ubuso ≤30%
5.7	Ikimenyetso cy'imbere	--	Nta na kimwe	Nta na kimwe	Nta na kimwe
6: Ubwiza bwinyuma
6.1	inyuma kurangiza	--	Umudepite	Umudepite	Umudepite
6.2	gushushanya	mm	NA	NA	NA
6.3	Inyuma yinyuma chip / indents	--	Nta na kimwe	Nta na kimwe	NA
6.4	Inyuma yinyuma	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Ikimenyetso cyinyuma	--	Ikimenyetso	Ikimenyetso	Ikimenyetso
7: inkombe
7.1	inkombe	--	Chamfer	Chamfer	Chamfer
8: Amapaki
8.1	gupakira	--	Epi-yiteguye hamwe na vacuum gupakira	Epi-yiteguye hamwe na vacuum gupakira	Epi-yiteguye hamwe na vacuum gupakira
8.2	gupakira	--	Multi-wafer gupakira	Multi-wafer gupakira	Multi-wafer gupakira