8inch SiC Production grade wafer 4H-N SiC substrate
Imbonerahamwe ikurikira igaragaza ibipimo bya wafer zacu za SiC za santimetero 8:
| Ibisobanuro bya SiC DSP yo mu bwoko bwa 8inch N | |||||
| Nimero | Ikintu | Ishami | Umusaruro | Ubushakashatsi | Igishuko |
| 1: ibipimo | |||||
| 1.1 | ubwoko bwa polikopi | -- | 4H | 4H | 4H |
| 1.2 | icyerekezo cy'ubuso | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Ibipimo by'amashanyarazi | |||||
| 2.1 | umukoresha | -- | Azote yo mu bwoko bwa n | Azote yo mu bwoko bwa n | Azote yo mu bwoko bwa n |
| 2.2 | ubushobozi bwo guhangana n'ibiza | ohm ·cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Ibipimo bya tekiniki | |||||
| 3.1 | uburebure | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | ubunini | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Icyerekezo cy'urukiramende | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Ubujyakuzimu bw'Inoti | mm | 1 ~ 1.5 | 1 ~ 1.5 | 1 ~ 1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | Televiziyo ya TV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Umuheto | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Ifuro | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Imiterere | |||||
| 4.1 | ubucucike bw'imiyoboro mito | buri kimwe/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | ibikubiye mu byuma | atome/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | buri kimwe/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | Umuti utera indwara ya BPD | buri kimwe/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | buri kimwe/cm2 | ≤7000 | ≤10000 | NA |
| 5. Ubwiza bw'imbere | |||||
| 5.1 | imbere | -- | Si | Si | Si |
| 5.2 | irangi ry'ubuso | -- | Si-face CMP | Si-face CMP | Si-face CMP |
| 5.3 | agace gato | buri kimwe/igikoni | ≤100 (ingano≥0.3μm) | NA | NA |
| 5.4 | gushwanyaguza | buri kimwe/igikoni | ≤5, Uburebure bwose ≤200mm | NA | NA |
| 5.5 | Inkombe uduce/uduce/uduce/udusebe/ubwandu | -- | Nta na kimwe | Nta na kimwe | NA |
| 5.6 | Uduce twa polytype | -- | Nta na kimwe | Akarere ≤10% | Akarere ≤30% |
| 5.7 | ikimenyetso cy'imbere | -- | Nta na kimwe | Nta na kimwe | Nta na kimwe |
| 6: Ubwiza bw'inyuma | |||||
| 6.1 | kurangiza inyuma | -- | MP wa C-face | MP wa C-face | MP wa C-face |
| 6.2 | gushwanyaguza | mm | NA | NA | NA |
| 6.3 | Inkombe y'inyuma ifite inenge uduce duto/uduce duto | -- | Nta na kimwe | Nta na kimwe | NA |
| 6.4 | Umugongo ugoramye | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Inyuguti z'inyuma | -- | Notch | Notch | Notch |
| 7: impande | |||||
| 7.1 | impande | -- | Chamfer | Chamfer | Chamfer |
| 8: Paki | |||||
| 8.1 | gupfunyika | -- | Iteguye gushyuha hamwe n'umwuka udafite umwuka gupfunyika | Iteguye gushyuha hamwe n'umwuka udafite umwuka gupfunyika | Iteguye gushyuha hamwe n'umwuka udafite umwuka gupfunyika |
| 8.2 | gupfunyika | -- | Ifuru nyinshi gupakira kaseti | Ifuru nyinshi gupakira kaseti | Ifuru nyinshi gupakira kaseti |
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