Wafers za Quartz Zivanzemo Isuku Nyinshi zo Gukoresha Semiconductor, Porogaramu za Photonics Optical 2″4″6″8″12″

Ibishushanyo bya Quartz byakozwe mu buryo bwa High-Purity Fused Wafers bya Semiconductor, Photonics Optical Applications 2″4″6″8″12″ Ishusho yagaragaye

Ibisobanuro bigufi:

Quartz ivanze—azwi kandi nkaSilika ivanze—ni ubwoko bwa silicon dioxide (SiO₂) butarimo kristali (amorphous). Bitandukanye na borosilicate cyangwa izindi ndabyo zo mu nganda, quartz ivanze nta bintu biyirimo cyangwa ibindi biyikomokaho, itanga imiterere ya SiO₂ idafite shimi. Izwiho kohereza urumuri mu buryo budasanzwe haba kuri ultraviolet (UV) na infrared (IR), iruta ibikoresho bisanzwe by'ikirahure.

Ohereza imeri kuri twe

Ibiranga

Ishusho irambuye

Wafers za Silika na Quartz zo mu bwoko bwa Optical Glass Wafers-2

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Incamake y'ikirahure cya Quartz

Udupira twa Quartz ni inkingi y'ibikoresho byinshi bigezweho biyobora isi ya none y'ikoranabuhanga. Kuva ku gukoresha telefoni yawe kugeza ku nkunga ya sitasiyo za 5G, quartz itanga ituze, isuku, n'ubuziranenge bukenewe mu bikoresho by'ikoranabuhanga bigezweho na fotoniki. Byaba ari ugushyigikira imikorere yoroshye, gukoresha sensor za MEMS, cyangwa kuba ishingiro rya quantum computing, imiterere yihariye ya quartz ituma iba ingenzi cyane mu nganda zitandukanye.

“Fused Silica” cyangwa “Fused Quartz” ari na yo quartz idafite imiterere isanzwe (SiO2). Iyo itandukanyijwe n'ikirahure cya borosilicate, silica ivanze nta nyongera igira; bityo ikaba iboneka mu ishusho yayo nziza, SiO2. Silica ivanze ifite ubushobozi bwo kohereza ibintu byinshi muri infrared na ultraviolet spectrum ugereranije n'ikirahure gisanzwe. Silica ivanze ikorwa no gushonga no kongera gukomera SiO2 isukuye cyane. Ku rundi ruhande, silica ivanze ikozwe mu bintu bya silicon bikungahaye kuri gazi nka SiCl4 bigashyirwa mu kirere cya H2 + O2. Umukungugu wa SiO2 ukorwa muri iki gihe uvangwa na silica ku gice cy'ubutaka. Uduce twa silica duvanze ducibwamo wafers hanyuma wafers zigaseswa.

Wafers za Silika na Quartz zo mu bwoko bwa Optical Glass

Ibintu by'ingenzi n'akamaro ka Quartz Glass Wafer

Ubuziranenge Buhanitse Cyane (≥99.99% SiO2)
Ni byiza cyane mu gukora isuku ya semiconductor na photonics aho umwanda w'ibintu ugomba kugabanuka.
Ingano nini y'ubushyuhe
Igumana ubuziranenge bw'imiterere kuva ku bushyuhe bukabije kugeza ku bushyuhe burenze 1100°C idahindagurika cyangwa ngo ivunike.
Ubushobozi bwo kohereza UV na IR mu buryo budasanzwe
Itanga urumuri rwiza cyane rw'urumuri rwa ultraviolet rwijimye (DUV) binyuze muri near-infrared (NIR), ishyigikira uburyo bwo gukoresha neza urumuri rwa ultraviolet.
Igipimo cyo kwagura ubushyuhe buke
Yongera ubushobozi bwo kudahungabana mu gihe cy'ihindagurika ry'ubushyuhe, ikagabanya umuvuduko no kunoza uburyo bwo gukora ibintu bwizewe.
Ubudahangarwa bw'ibinyabutabire ku rwego rwo hejuru
Ntiyinjira muri aside nyinshi, alkali, n'ibintu bishongesha umubiri—ibi bituma ikwiriye ahantu harangwa n'ubukana bw'ibinyabutabire.
Guhindura imiterere y'ubuso
Iboneka ifite irangi risesuye cyane, ry’uruhande rumwe cyangwa irya kabiri, rijyanye n’ibisabwa na fotoniki na MEMS.

Uburyo bwo gukora Quartz Glass Wafer

Uduce twa quartz twakozwe hakoreshejwe intambwe zikurikiranye kandi zigenzurwa:

Guhitamo ibikoresho fatizo
Guhitamo quartz karemano ifite isuku nyinshi cyangwa amasoko ya sintetike ya SiO₂.
Gushonga no Guhuza
Quartz ishongeshwa kuri ~2000°C mu itanura ry'amashanyarazi munsi y'ikirere gicungwa kugira ngo hakurweho ibintu byose birimo n'uduheri.
Gukora bloki
Silika ishongeshejwe ikonjeshwa ikamera nk'udusimba cyangwa uduce duto.
Gukata Wafer
Imashini zitunganya diyama cyangwa insinga zikoreshwa mu gukata ingots mo uduce duto tw’imashini.
Guteranya no Gusukura
Ubuso bwombi burahanagurika kandi bugasenwa kugira ngo buhuze neza n'imiterere y'urumuri, ubugari, n'ubugari.
Isuku n'igenzura
Amacupa asukurwa mu byumba byo gusukura bya ISO Class 100/1000 kandi agenzurwa neza kugira ngo harebwe niba hari inenge cyangwa imiterere y’ibipimo.

Imiterere ya Quartz Glass wafer

umwihariko	ishami	4"	6"	8"	10"	12"
Ingano / ingano (cyangwa kare)	mm	100	150	200	250	300
Ukwihanganirana (±)	mm	0.2	0.2	0.2	0.2	0.2
Ubunini	mm	0.10 cyangwa irenga	0.30 cyangwa irenga	0.40 cyangwa irenga	0.50 cyangwa irenga	0.50 cyangwa irenga
Inzu y'ibanze y'icyitegererezo	mm	32.5	57.5	Igice cy'inyuma	Igice cy'inyuma	Igice cy'inyuma
LTV (5mm×5mm)	μm	< 0.5	< 0.5	< 0.5	< 0.5	< 0.5
Televiziyo ya TV	μm	< 2	< 3	< 3	< 5	< 5
Umuheto	μm	± 20	± 30	± 40	± 40	± 40
Ifuro	μm	≤ 30	≤ 40	≤ 50	≤ 50	≤ 50
PLTV (5mm×5mm) < 0.4μm	%	≥95%	≥95%	≥95%	≥95%	≥95%
Kuzenguruka impande	mm	Ikurikiza ibipimo ngenderwaho bya SEMI M1.2 / reba IEC62276
Ubwoko bw'ubuso		Impande zombi zikozwe mu buryo bwa "Right Polished" / "Double Double Polished"
Uruhande rwa Ra rusekuye	nm	≤1	≤1	≤1	≤1	≤1
Ibipimo ngenderwaho by'inyuma	μm	rusange 0.2-0.7 cyangwa byahinduwe

Quartz vs. Ibindi bikoresho bibonerana

Umutungo	Ikirahure cya Quartz	Ikirahure cya Borosilicate	Safiro	Ikirahure Gisanzwe
Ubushyuhe Bunini bwo Gukora	~1100°C	~500°C	~2000°C	~200°C
Kohereza UV	Nibyiza cyane (JGS1)	Umukene	Byiza	Bike cyane
Ubudahangarwa bw'ibinyabutabire	Byiza cyane	Iringaniye	Byiza cyane	Umukene
Ubwiza	Hejuru cyane	Hasi kugeza ku gipimo	Hejuru	Hasi
Kwaguka k'ubushyuhe	Hasi cyane	Iringaniye	Hasi	Hejuru
Ikiguzi	Hagati kugeza hejuru	Hasi	Hejuru	Hasi cyane

Ibibazo Bikunze Kubazwa ku birebana n'ifunguro rya Quartz Glass Wafer

Q1: Ni irihe tandukaniro riri hagati ya quartz ivanze na silica ivanze?
Nubwo byombi ari ubwoko bwa SiO₂ budafite imiterere ihamye, quartz ivanze ubusanzwe ikomoka ku masoko karemano ya quartz, mu gihe silika ivanze ikorwa mu buryo bw'ubuhanga. Mu mikorere yayo, itanga imikorere isa, ariko silika ivanze ishobora kugira ubuziranenge n'ubumwe buri hejuru gato.

Ikibazo cya 2: Ese wafer za quartz zivanze zishobora gukoreshwa ahantu hari umwuka mwinshi?
Yego. Bitewe n'ubushobozi bwazo bwo gusohora imyuka mike no kudashyuha cyane, wafer za quartz zivanze ni nziza cyane mu bikoresho byo mu kirere no mu bikoresho by'indege.

Q3: Ese izi wafer zikwiriye gukoreshwa muri laser ya deep-UV?
Yego rwose. Quartz ivanze ifite ubushobozi bwo kohereza amakuru menshi kugeza kuri ~185 nm, bigatuma iba nziza cyane kuri DUV optics, masks ya lithography, na sisitemu za laser za excimer.

Q4: Ese ushyigikira gukora wafer yihariye?
Yego. Dutanga uburyo bwo guhindura ibintu mu buryo bwuzuye harimo umurambararo, ubunini, ubwiza bw'ubuso, imitako igororotse, n'ibishushanyo bya laser, hashingiwe ku byo ukeneye mu buryo bwihariye bwo gukoresha.

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.

Ifu ya Safiro Idafite Ifu Ikomeye Ikoreshwa mu Gutunganya Safiro 5