Wafer ya Safiro ya santimetero 12 C-Plane SSP/DSP
Ishusho irambuye
Intangiriro ya Safiro
Safiro wafer ni ibikoresho bya substrate bya kristale imwe bikozwe muri aluminium oxyde (Al₂O₃) ifite isuku nyinshi. Amakristu manini ya safiro ahingwa hakoreshejwe uburyo bugezweho nka Kyropoulos (KY) cyangwa Ubushyuhe bwo Guhinduranya (HEM), hanyuma agatunganywa binyuze mu gukata, kwerekeza, gusya no gutunganya neza. Bitewe n'imiterere yayo idasanzwe, iy'izuba, n'iya chimique, safiro wafer igira uruhare rudasimburwa mu bijyanye na semiconductors, optoelectronics, n'ibikoresho by'ikoranabuhanga bigezweho.
Uburyo Bukuru bwo Gutunganya Sapphire
| Uburyo | Ihame | Ibyiza | Porogaramu z'ingenzi |
|---|---|---|---|
| Uburyo bwa Verneuil(Guhuza Umuriro) | Ifu ya Al₂O₃ isukuye cyane ishongeshwa mu muriro wa ogisijeni, ibitonyanga bikomera ku rundi ruhande ku rundi ku rundi ruhande ku mbuto. | Igiciro gito, imikorere myiza cyane, inzira yoroshye | Amabuye y'agaciro ya safiro, ibikoresho bya kera by'urumuri |
| Uburyo bwa Czochralski (CZ) | Al₂O₃ ishongeshwa mu cyuma gishongesha, hanyuma kristu y'imbuto irakururwa buhoro buhoro kugira ngo ikure kristu | Itanga kristu nini cyane kandi ifite ubuziranenge bwiza | Amadirishya ya laser, amadirishya y'urumuri |
| Uburyo bwa Kyropoulos (KY) | Gukonjesha buhoro buhoro bigenzurwa bituma kristu ikura buhoro buhoro imbere mu cyuma gikonjesha | Ishobora gukura kristu nini kandi zidakoresha imbaraga nyinshi (ibiro icumi cyangwa birenga) | Ibikoresho bya LED, ecran za terefone zigendanwa, ibice by'urumuri |
| Uburyo bwa HEM(Ihererekanya ry'ubushyuhe) | Gukonjesha bitangirana n'igice cyo hejuru cy'urusenda, uduce duto dukura duturutse ku mbuto | Ikora kristu nini cyane (kugeza ku bilo amagana) ifite ubuziranenge bumwe | Amadirishya manini y'urumuri, indege, ibyuma bya gisirikare by'urumuri |
Icyerekezo cya kristu
| Icyerekezo / Indege | Urutonde rwa Miller | Ibiranga | Porogaramu z'ingenzi |
|---|---|---|---|
| Indege ya C | (0001) | Igororotse ku mpande z'umurongo wa c, ubuso bw'impande, atome zitondetse neza | LED, diode za laser, substrates za GaN epitaxial (zikoreshwa cyane) |
| Indege | (11-20) | Bijyanye n'ubuso butari polari, burimo imiterere ya c-axis, birinda ingaruka za polarization | Ibikoresho bya GaN epitaxy bitari polar, optoelectronics |
| Indege ya M | (10-10) | Bijyanye n'umurongo wa c, utari uwa polar, kandi ufite uburinganire buri hejuru | Ibikoresho bya GaN epitaxy bikora neza cyane, ibikoresho bya optoelectronic |
| Indege ya R | (1-102) | Ifite imiterere myiza cyane y'urumuri, ishingiye ku murongo wa c | Amadirishya y'urumuri, ibikoresho bipima infrared, ibice bya laser |
Ibisobanuro bya Wafer ya Safiro (Ishobora guhindurwa)
| Ikintu | Wafers za Safiro za santimetero 1 (0001) 430μm | |
| Ibikoresho bya kristu | 99.999%, Ubuziranenge Buhanitse, Al2O3 y'umutuku wijimye | |
| Icyiciro | Prime, Iteguye Epi | |
| Icyerekezo cy'ubuso | C-indege (0001) | |
| Igipimo cya C-plane kidakora neza kijya ku murongo wa M 0.2 +/- 0.1° | ||
| Ingano | 25.4 mm +/- 0.1 mm | |
| Ubunini | 430 μm +/- 25 μm | |
| Irangijwe ku ruhande rumwe | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ubuso bw'inyuma | Ifu nziza, Ra = 0.8 μm kugeza 1.2 μm |
| Ifite irangi ku mpande ebyiri | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ubuso bw'inyuma | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| Televiziyo ya TV | < 5 μm | |
| UMUHETO | < 5 μm | |
| WARP | < 5 μm | |
| Gusukura / Gupfunyika | Ishuri rya 100 ryo gusukura no gupakira ibikoresho byo mu nzu bisukuye, | |
| Ibice 25 mu ipaki imwe ya kaseti cyangwa ipaki imwe. | ||
| Ikintu | Wafers za Safiro za santimetero 2 (0001) 430μm | |
| Ibikoresho bya kristu | 99.999%, Ubuziranenge Buhanitse, Al2O3 y'umutuku wijimye | |
| Icyiciro | Prime, Iteguye Epi | |
| Icyerekezo cy'ubuso | C-indege (0001) | |
| Igipimo cya C-plane kidakora neza kijya ku murongo wa M 0.2 +/- 0.1° | ||
| Ingano | 50.8 mm +/- 0.1 mm | |
| Ubunini | 430 μm +/- 25 μm | |
| Icyerekezo cy'ibanze cy'ubugari | Indege ya A (11-20) +/- 0.2° | |
| Uburebure bw'ibanze bw'ikiraro | 16.0 mm +/- 1.0 mm | |
| Irangijwe ku ruhande rumwe | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ubuso bw'inyuma | Ifu nziza, Ra = 0.8 μm kugeza 1.2 μm |
| Ifite irangi ku mpande ebyiri | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ubuso bw'inyuma | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| Televiziyo ya TV | < 10 μm | |
| UMUHETO | < 10 μm | |
| WARP | < 10 μm | |
| Gusukura / Gupfunyika | Ishuri rya 100 ryo gusukura no gupakira ibikoresho byo mu nzu bisukuye, | |
| Ibice 25 mu ipaki imwe ya kaseti cyangwa ipaki imwe. | ||
| Ikintu | Wafers za Safiro za santimetero 3 (0001) 500μm | |
| Ibikoresho bya kristu | 99.999%, Ubuziranenge Buhanitse, Al2O3 y'umutuku wijimye | |
| Icyiciro | Prime, Iteguye Epi | |
| Icyerekezo cy'ubuso | C-indege (0001) | |
| Igipimo cya C-plane kidakora neza kijya ku murongo wa M 0.2 +/- 0.1° | ||
| Ingano | 76.2 mm +/- 0.1 mm | |
| Ubunini | 500 μm +/- 25 μm | |
| Icyerekezo cy'ibanze cy'ubugari | Indege ya A (11-20) +/- 0.2° | |
| Uburebure bw'ibanze bw'ikiraro | 22.0 mm +/- 1.0 mm | |
| Irangijwe ku ruhande rumwe | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ubuso bw'inyuma | Ifu nziza, Ra = 0.8 μm kugeza 1.2 μm |
| Ifite irangi ku mpande ebyiri | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ubuso bw'inyuma | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| Televiziyo ya TV | < 15 μm | |
| UMUHETO | < 15 μm | |
| WARP | < 15 μm | |
| Gusukura / Gupfunyika | Ishuri rya 100 ryo gusukura no gupakira ibikoresho byo mu nzu bisukuye, | |
| Ibice 25 mu ipaki imwe ya kaseti cyangwa ipaki imwe. | ||
| Ikintu | Wafers za Safiro za santimetero 4 (0001) 650μm | |
| Ibikoresho bya kristu | 99.999%, Ubuziranenge Buhanitse, Al2O3 y'umutuku wijimye | |
| Icyiciro | Prime, Iteguye Epi | |
| Icyerekezo cy'ubuso | C-indege (0001) | |
| Igipimo cya C-plane kidakora neza kijya ku murongo wa M 0.2 +/- 0.1° | ||
| Ingano | 100.0 mm +/- 0.1 mm | |
| Ubunini | 650 μm +/- 25 μm | |
| Icyerekezo cy'ibanze cy'ubugari | Indege ya A (11-20) +/- 0.2° | |
| Uburebure bw'ibanze bw'ikiraro | 30.0 mm +/- 1.0 mm | |
| Irangijwe ku ruhande rumwe | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ubuso bw'inyuma | Ifu nziza, Ra = 0.8 μm kugeza 1.2 μm |
| Ifite irangi ku mpande ebyiri | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ubuso bw'inyuma | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| Televiziyo ya TV | < 20 μm | |
| UMUHETO | < 20 μm | |
| WARP | < 20 μm | |
| Gusukura / Gupfunyika | Ishuri rya 100 ryo gusukura no gupakira ibikoresho byo mu nzu bisukuye, | |
| Ibice 25 mu ipaki imwe ya kaseti cyangwa ipaki imwe. | ||
| Ikintu | Wafers za Safiro za santimetero 6 (0001) 1300μm | |
| Ibikoresho bya kristu | 99.999%, Ubuziranenge Buhanitse, Al2O3 y'umutuku wijimye | |
| Icyiciro | Prime, Iteguye Epi | |
| Icyerekezo cy'ubuso | C-indege (0001) | |
| Igipimo cya C-plane kidakora neza kijya ku murongo wa M 0.2 +/- 0.1° | ||
| Ingano | 150.0 mm +/- 0.2 mm | |
| Ubunini | 1300 μm +/- 25 μm | |
| Icyerekezo cy'ibanze cy'ubugari | Indege ya A (11-20) +/- 0.2° | |
| Uburebure bw'ibanze bw'ikiraro | 47.0 mm +/- 1.0 mm | |
| Irangijwe ku ruhande rumwe | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ubuso bw'inyuma | Ifu nziza, Ra = 0.8 μm kugeza 1.2 μm |
| Ifite irangi ku mpande ebyiri | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ubuso bw'inyuma | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| Televiziyo ya TV | < 25 μm | |
| UMUHETO | < 25 μm | |
| WARP | < 25 μm | |
| Gusukura / Gupfunyika | Ishuri rya 100 ryo gusukura no gupakira ibikoresho byo mu nzu bisukuye, | |
| Ibice 25 mu ipaki imwe ya kaseti cyangwa ipaki imwe. | ||
| Ikintu | Wafers za Safiro za santimetero 8 (0001) 1300μm | |
| Ibikoresho bya kristu | 99.999%, Ubuziranenge Buhanitse, Al2O3 y'umutuku wijimye | |
| Icyiciro | Prime, Iteguye Epi | |
| Icyerekezo cy'ubuso | C-indege (0001) | |
| Igipimo cya C-plane kidakora neza kijya ku murongo wa M 0.2 +/- 0.1° | ||
| Ingano | 200.0 mm +/- 0.2 mm | |
| Ubunini | 1300 μm +/- 25 μm | |
| Irangijwe ku ruhande rumwe | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ubuso bw'inyuma | Ifu nziza, Ra = 0.8 μm kugeza 1.2 μm |
| Ifite irangi ku mpande ebyiri | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ubuso bw'inyuma | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| Televiziyo ya TV | < 30 μm | |
| UMUHETO | < 30 μm | |
| WARP | < 30 μm | |
| Gusukura / Gupfunyika | Ishuri rya 100 ryo gusukura no gupakira ibikoresho byo mu nzu bisukuye, | |
| Gupfunyika igice kimwe. | ||
| Ikintu | Wafers za Safiro za santimetero 12 (0001) 1300μm | |
| Ibikoresho bya kristu | 99.999%, Ubuziranenge Buhanitse, Al2O3 y'umutuku wijimye | |
| Icyiciro | Prime, Iteguye Epi | |
| Icyerekezo cy'ubuso | C-indege (0001) | |
| Igipimo cya C-plane kidakora neza kijya ku murongo wa M 0.2 +/- 0.1° | ||
| Ingano | 300.0 mm +/- 0.2 mm | |
| Ubunini | 3000 μm +/- 25 μm | |
| Irangijwe ku ruhande rumwe | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ubuso bw'inyuma | Ifu nziza, Ra = 0.8 μm kugeza 1.2 μm |
| Ifite irangi ku mpande ebyiri | Ubuso bw'imbere | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ubuso bw'inyuma | Irangi rya Epi-polished, Ra < 0.2 nm (na AFM) |
| Televiziyo ya TV | < 30 μm | |
| UMUHETO | < 30 μm | |
| WARP | < 30 μm | |
Uburyo bwo gukora Wafer ya Safiro
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Gukura kwa kristu
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Hinga imigozi ya safiro (100–400 kg) ukoresheje uburyo bwa Kyropoulos (KY) mu itanura ryabugenewe ryo gukuramo kristu.
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Gucukura no Gushushanya Ingot
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Koresha umuyoboro wo gucukura kugira ngo utunganye umuyoboro mo ibice bifite umurambararo wa santimetero 2-6 n'uburebure bwa mm 50-200.
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Annealing ya mbere
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Suzuma neza ibisate by'ingote kugira ngo urebe niba hari inenge hanyuma ukore imashini ya mbere ikora imashini ishyushye cyane kugira ngo igabanye umuvuduko w'imbere mu gitereko.
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Icyerekezo cya kristu
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Menya neza icyerekezo cy'ibuye rya safiro (urugero, C-plane, A-plane, R-plane) ukoresheje ibikoresho byo kuriyobora.
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Gukata Insinga nyinshi
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Kata ingot mo uduce duto duto ukurikije ubunini bukenewe ukoresheje ibikoresho byo gukata insinga nyinshi.
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Isuzuma rya mbere n'isuzuma rya kabiri
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Suzuma uduce twaciwe (ubugari, ubugari, inenge zo hejuru).
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Ongera ukoreshe annealing niba bibaye ngombwa kugira ngo wongere ubwiza bwa kristale.
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Gusya, Gusya no Gusukura CMP
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Kora chamfering, gusya ubuso, no gusiga irangi ry'imiti (CMP) ukoresheje ibikoresho byihariye kugira ngo ubone ubuso bungana n'indorerwamo.
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Isuku
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Sukura neza uduce twa wafer ukoresheje amazi meza cyane n'imiti mu cyumba gisukuye kugira ngo ukureho uduce duto n'ibindi byanduza.
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Igenzura ry'amaso n'umubiri
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Gukora uburyo bwo gupima no kwandika amakuru y'ikoranabuhanga.
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Pima ibipimo bya wafer birimo TTV (Ubunini bwose), Umuheto, Ubugari, icyerekezo cy'aho ibintu biherereye, n'ubugari bw'ubuso.
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Gusiga irangi (Ntabwo ari ngombwa)
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Shyiraho irangi (urugero, irangi rya AR, irangi ririnda) hakurikijwe ibisabwa n'umukiriya.
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Igenzura rya nyuma n'ibipfunyika
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Kora igenzura ry’ubuziranenge 100% mu cyumba cy’isuku.
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Shyira wafer mu dusanduku twa kaseti mu buryo bworoshye bwa Class-100 hanyuma utwikingire mu cyuma gifunga mbere yo kohereza.
Imikoreshereze ya Wafers za Sapphire
Udupira twa safiro, dufite ubukana budasanzwe, ubushobozi bwo kohereza amakuru mu buryo butangaje, ubushobozi bwo gushyuha cyane, ndetse n'uburyo bwo gukingira amashanyarazi, dukoreshwa cyane mu nganda nyinshi. Ntabwo dukoreshwa gusa mu nganda zisanzwe za LED na optoelectronic ahubwo turimo kwaguka no mu nganda zikora ibikoresho bya semiconductor, ibikoresho by'ikoranabuhanga bikoreshwa n'abaguzi, ndetse n'ibigo bigezweho byo mu kirere no mu by'ubwirinzi.
1. Semiconductors na Optoelectronics
Ibice bya LED
Uduce twa safiro ni two duce tw’ibanze two gukura kwa gallium nitride (GaN) epitaxial, dukoreshwa cyane mu matara y’ubururu, amatara y’umweru, n’ikoranabuhanga rya Mini/Micro LED.
Diode za Laser (LDs)
Nk'ibikoresho bya GaN-based laser diodes, wafers za safiro zifasha iterambere ry'ibikoresho bya laser bikoresha imbaraga nyinshi kandi bimara igihe kirekire.
Amafoto
Mu bikoresho bipima urumuri rwa ultraviolet na infrared, utubuto twa safiro dukunze gukoreshwa nk'amadirishya abonerana n'ibikoresho bikingira ubushyuhe.
2. Ibikoresho bya semiconductor
RFIC (Imiyoboro Ihuriweho ya Radio Frequency)
Kubera ko zifite amashanyarazi meza cyane, za wafer za safiro ni ibikoresho byiza cyane byo gukoresha mu mikoroonde zikoresha amashanyarazi menshi kandi zikoresha ingufu nyinshi.
Ikoranabuhanga rya Silicon-on-Sapphire (SoS)
Gukoresha ikoranabuhanga rya SoS, ubushobozi bwa parasite bushobora kugabanuka cyane, bigatuma imikorere ya circuit irushaho kuba myiza. Ibi bikoreshwa cyane mu itumanaho rya RF no mu bikoresho by'ikoranabuhanga byo mu kirere.
3. Porogaramu zo gukoresha urumuri
Amadirishya ya Infrared Optical
Kubera ko urumuri rufite ubushobozi bwo kohereza amakuru menshi mu rugero rw'uburebure bwa 200 nm–5000 nm, safiro ikoreshwa cyane mu bikoresho bipima infrared na sisitemu zo kuyobora infrared.
Amadirishya ya Laser afite imbaraga nyinshi
Ubukana n'ubushyuhe bya safiro bituma iba ibikoresho byiza cyane byo kurinda amadirishya n'ama-lenses muri sisitemu za laser zikomeye.
4. Ibyuma by'ikoranabuhanga bikoreshwa n'abaguzi
Ibipfukisho bya kamera
Ubukana bwinshi bwa safiro butuma habaho kudakora neza kw'amabara kuri terefone zigendanwa na kamera.
Utumenyetso tw'urutoki
Udupfundikizo twa safiro dushobora gukoreshwa nk'ibipfundikizo biramba kandi bibonerana binongera ubuhanga n'ubuziranenge mu kumenya ibikumwe.
Amasaha y'ubwenge n'amashusho meza cyane
Ecran za safiro zihuza ubudahangarwa bw'imikurire n'ubuhanga buhanitse bw'urumuri, bigatuma zikundwa cyane mu bikoresho by'ikoranabuhanga bigezweho.
5. Ibyerekeye iby'indege n'ubwirinzi
Inzu za Missile Infrared
Amadirishya ya safiro agumana urumuri kandi ahamye mu gihe cy'ubushyuhe bwinshi n'umuvuduko mwinshi.
Sisitemu z'Ikoranabuhanga mu by'Indege
Bikoreshwa mu madirishya akomeye y'urumuri n'ibikoresho byo kureba byagenewe ibidukikije bikomeye.
Ibindi bicuruzwa bisanzwe bya safiro
Ibikoresho by'urumuri
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Amadirishya ya Safiro y'urumuri
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Ikoreshwa muri laser, spectrometer, sisitemu zo gufata amashusho ya infrared, n'amadirishya apima.
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Ingano yo kohereza:UV kuva kuri nm 150 kugeza hagati ya IR 5.5 μm.
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Lenseri za safiro
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Ikoreshwa muri sisitemu za laser zikomeye cyane no mu byuma bipima ikirere.
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Ishobora gukorwa nk'indorerwamo zijimye, zijimye cyangwa zimeze nk'uruziga.
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Prisme za Safiro
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Ikoreshwa mu bikoresho byo gupima amashusho no mu buryo bwo gufata amashusho neza.
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Gupfunyika ibicuruzwa
Ku bijyanye na XINKEHUI
Shanghai Xinkehui New Material Co., Ltd. ni imwe muriuruganda runini rw'ibikoresho by'ikoranabuhanga bya optique & semiconductor mu Bushinwa, yashinzwe mu 2002. XKH yakozwe kugira ngo ihe abashakashatsi b’abahanga wafers n’ibindi bikoresho na serivisi bya siyansi bijyanye na semiconductor. Ibikoresho bya semiconductor ni ikigo cyacu cy’ingenzi, itsinda ryacu rishingiye ku ikoranabuhanga, kuva yashingwa, XKH igira uruhare runini mu bushakashatsi no guteza imbere ibikoresho bya elegitoroniki bigezweho, cyane cyane mu bijyanye na wafers / substrate zitandukanye.
Abafatanyabikorwa
Kubera ikoranabuhanga ryayo ryiza cyane ry’ibikoresho bya semiconductor, Shanghai Zhimingxin yabaye umufatanyabikorwa wizewe w’ibigo bikomeye ku isi n’ibigo by’amashuri bizwi cyane. Kubera gukomeza guhanga udushya no kuba indashyikirwa, Zhimingxin yashinze umubano wimbitse n’abayobozi b’inganda nka Schott Glass, Corning, na Seoul Semiconductor. Ubu bufatanye ntibwazamuye urwego rwa tekiniki rw’ibicuruzwa byacu gusa, ahubwo bwanateje imbere iterambere ry’ikoranabuhanga mu bijyanye n’ibikoresho by’amashanyarazi, ibikoresho bya optoelectronic, n’ibikoresho bya semiconductor.
Uretse ubufatanye n'ibigo bizwi cyane, Zhimingxin yanashyizeho umubano w'igihe kirekire mu bufatanye mu bushakashatsi na za kaminuza zikomeye ku isi nka Kaminuza ya Harvard, Kaminuza ya London (UCL), na Kaminuza ya Houston. Binyuze muri ubu bufatanye, Zhimingxin ntabwo itanga gusa inkunga ya tekiniki ku mishinga y'ubushakashatsi bwa siyansi mu mashuri makuru, ahubwo inagira uruhare mu iterambere ry'ibikoresho bishya n'udushya mu ikoranabuhanga, ishimangira ko duhora turi ku isonga mu nganda za semiconductor.
Binyuze mu bufatanye bwa hafi n'izi kompanyi zizwi ku isi n'ibigo by'amashuri makuru, Shanghai Zhimingxin ikomeje guteza imbere udushya n'iterambere ry'ikoranabuhanga, itanga ibicuruzwa n'ibisubizo byo ku rwego rw'isi kugira ngo ihuze n'ibikenewe ku isoko ry'isi.




