8inch LNOI (LiNbO3 kuri Insulator) Wafer ya Optical Modulator Moderi Waveguides Yuzuzanya
Igishushanyo kirambuye
Intangiriro
Litiyumu Niobate kuri Wafers ya Insulator (LNOI) ni ibikoresho bigezweho bikoreshwa muburyo butandukanye bwa optique na elegitoroniki. Iyi wafers ikorwa no kwimura urwego ruto rwa lithium niobate (LiNbO₃) kuri substrate insuline, ubusanzwe silikoni cyangwa ikindi kintu kibereye, ukoresheje tekinoroji ihanitse nko gutera ion no guhuza wafer. Ikoranabuhanga rya LNOI risangiye byinshi na Silicon kuri tekinoroji ya Wafer ya Insulator (SOI) ariko ikoresha inyungu zidasanzwe za optique ya lithium niobate, ibikoresho bizwiho kuranga piezoelectric, pyroelectric, na optique ya optique.
Wafer ya LNOI yitabiriwe cyane mubice nka optique ihuriweho, itumanaho, hamwe na comptabilite bitewe nibikorwa byabo byiza murwego rwo hejuru kandi rwihuta. Wafers ikorwa hifashishijwe "Smart-cut" tekinike, ituma igenzura neza kubyimbye bya firime ya lithium niobate yoroheje, ikemeza ko wafer yujuje ibyangombwa bisabwa mubisabwa bitandukanye.
Ihame
Inzira yo gukora wafers ya LNOI itangirana na litiro nyinshi niobate kristal. Crystal ikorerwa ion, aho ion nyinshi zifite ingufu nyinshi zinjizwa mubuso bwa lithium niobate kristal. Izi ion zinjira muri kirisiti kugeza ubujyakuzimu bwihariye kandi bigahagarika imiterere ya kirisiti, bigakora indege yoroshye ishobora gukoreshwa nyuma yo gutandukanya kristu mubice bito. Ingufu zihariye za helium ion zigenzura ubujyakuzimu bwo gutera, bigira ingaruka ku buryo butaziguye ubunini bwa lithium niobate ya nyuma.
Nyuma yo guterwa ion, lithium niobate kristal ihujwe na substrate ikoresheje tekinike yitwa wafer bonding. Uburyo bwo guhuza busanzwe bukoresha uburyo bwo guhuza butaziguye, aho ubuso bubiri (ion-yatewe na lithium niobate kristal na substrate) bikanda hamwe munsi yubushyuhe bwinshi nigitutu kugirango habeho ubumwe bukomeye. Rimwe na rimwe, ibikoresho bifata nka benzocyclobutene (BCB) birashobora gukoreshwa mubufasha bwinyongera.
Nyuma yo guhuza, wafer ikora inzira ya annealing kugirango isane ibyangiritse byatewe no guterwa ion no kongera umubano hagati yabyo. Igikorwa cya annealing kandi gifasha urwego ruto rwa lithium niobate gutandukana na kristu yumwimerere, hasigara inyuma yoroheje, yujuje ubuziranenge bwa lithium niobate ishobora gukoreshwa muguhimba ibikoresho.
Ibisobanuro
LNOI wafers irangwa nibintu byinshi byingenzi byerekana neza ko bikwiranye na progaramu-yimikorere myinshi. Muri byo harimo:
Ibisobanuro?
| ?Ibikoresho? | ?Ibisobanuro? |
| Ibikoresho | Abahuje ibitsina: LiNbO3 |
| Ubwiza bw'ibikoresho | Ibibyimba cyangwa ibiyirimo <100μm |
| Icyerekezo | Y-gukata ± 0.2 ° |
| Ubucucike | 4.65 g / cm³ |
| Ubushyuhe bwa Curie | 1142 ± 1 ° C. |
| Gukorera mu mucyo | > 95% muri 450-700 nm intera (uburebure bwa mm 10) |
Ibikorwa byo gukora?
| ?Parameter? | ?Ibisobanuro? |
| Diameter | Mm 150 ± 0.2 mm |
| Umubyimba | 350 mm ± 10 mm |
| Kubeshya | <1.3 mm |
| Gutandukana kwinshi (TTV) | Intambara <70 μm @ 150 mm wafer |
| Guhindura Ubunini bwaho (LTV) | <70 μm @ 150 mm wafer |
| Ubugome | Rq ≤0.5 nm (agaciro ka AFM RMS) |
| Ubwiza bw'ubuso | 40-20 |
| Ibice (Ntibikurwaho) | 100-200 μm ≤3 ibice |
| Chips | <300 μ m (wafer yuzuye, nta karere kahezwa) |
| Ibice | Nta gucamo (wafer yuzuye) |
| Kwanduza | Nta kirangantego kidashobora gukurwaho (wafer yuzuye) |
| Kubangikanya | <30 arcseconds |
| Icyerekezo Cyerekezo Indege (X-axis) | 47 ± 2 mm |
Porogaramu
Wafer ya LNOI ikoreshwa muburyo butandukanye bwa porogaramu bitewe n'imiterere yihariye, cyane cyane mubijyanye na fotonike, itumanaho, hamwe na tekinoroji ya kwant. Bimwe mubyingenzi byingenzi birimo:
Amashanyarazi akomatanyije:Wafer ya LNOI ikoreshwa cyane muburyo bwa optique ya optique, aho ituma ibikoresho bya fotonike bikora cyane nka modulator, umurongo wogukoresha, na resonator. Ibikoresho byo hejuru bidafite umurongo wa lithium niobate bituma ihitamo neza kubisabwa bisaba gukoresha urumuri neza.
Itumanaho:Wafer ya LNOI ikoreshwa muri modulator optique, nibintu byingenzi muri sisitemu yitumanaho ryihuse, harimo imiyoboro ya fibre optique. Ubushobozi bwo guhindura urumuri kuri radiyo nyinshi bituma LNOI wafers iba nziza kuri sisitemu yitumanaho rigezweho.
Kubara Quantum:Muri tekinoroji ya kwant, wafers ya LNOI ikoreshwa muguhimba ibice bya mudasobwa ya kwant na sisitemu yo gutumanaho kwant. Ibintu bidafite umurongo wa optique ya LNOI ikoreshwa kugirango habeho gufotora bifatanye, bifite akamaro kanini yo gukwirakwiza no kwifata.
Sensors:Wafer ya LNOI ikoreshwa muburyo butandukanye bwo kumva, harimo optique na acoustic sensor. Ubushobozi bwabo bwo gukorana numucyo nijwi bituma bahinduka muburyo butandukanye bwa tekinoroji yo kumva.
Ibibazo
Q:Ikoranabuhanga rya LNOI ni iki?
Igisubizo: Ikoranabuhanga rya LNOI ririmo ihererekanyabubasha rya firime ya lithium niobate yoroheje kuri insimburangingo, mubisanzwe silicon. Iri koranabuhanga ryifashisha imiterere yihariye ya lithium niobate, nkibiranga optique idasanzwe ya optique, piezoelectricity, na pyroelectricity, bigatuma biba byiza kuri optique hamwe nitumanaho.
Q:Ni irihe tandukaniro riri hagati ya wafer ya LNOI na SOI?
Igisubizo: Wafer zombi za LNOI na SOI zirasa kuko zigizwe nigice gito cyibikoresho bihujwe na substrate. Nyamara, wafer ya LNOI ikoresha lithium niobate nkibikoresho bya firime yoroheje, mugihe waI wa SOI ikoresha silicon. Itandukaniro ryibanze riri mumiterere yibikoresho bya firime yoroheje, hamwe na LNOI itanga ibikoresho byiza bya optique na piezoelectric.
Q:Ni izihe nyungu zo gukoresha wafer ya LNOI?
Igisubizo: Ibyiza byingenzi bya wafers ya LNOI harimo ibyiza bya optique byiza, nka coefficient zo hejuru zidafite umurongo, hamwe nimbaraga zabo. Ibiranga bituma wafers ya LNOI ikwiriye gukoreshwa muburyo bwihuse, bwihuta cyane, hamwe na kwant.
Q:Wafer ya LNOI irashobora gukoreshwa mukumwanya wa kwant?
Igisubizo: Yego, wafers ya LNOI ikoreshwa cyane muri tekinoroji ya kwant bitewe nubushobozi bwabo bwo kubyara foton ifatanye kandi ihuza na fotonike ihuriweho. Iyi miterere ningirakamaro mubisabwa muri comptabilite, itumanaho, hamwe na kriptografiya.
Q:Ubunini busanzwe bwa firime ya LNOI ni ubuhe?
Igisubizo: LNOI firime mubusanzwe iri hagati ya nanometero magana na micrometero nyinshi mubyimbye, bitewe nibisabwa byihariye. Umubyimba ugenzurwa mugihe cyo gutera ion.
