LNOI Wafer (Lithium Niobate kuri Insulator) Itumanaho Rishobora Gupima Electro-Optic Ikomeye
Ishusho irambuye
Incamake
Imbere mu gasanduku ka wafer hari imiyoboro ingana, ingano zayo zikaba zihuye neza kugira ngo zishyigikire impande zombi za wafer. Agasanduku ka kristu muri rusange gakozwe mu bikoresho bya PP bya pulasitiki ibonerana, birwanya ubushyuhe, kwangirika n'amashanyarazi adahindagurika. Amabara atandukanye y'inyongera akoreshwa mu gutandukanya ibice by'icyuma mu gukora semiconductor. Bitewe n'ingano ntoya ya semiconductors, imiterere miremire, hamwe n'ibisabwa bikomeye mu gukora, agasanduku ka wafer kagomba kwemezwa ko gafite ibidukikije bisukuye kugira ngo gahuzwe n'aho imashini zitandukanye zikorera.
Uburyo bwo gukora
Gukora wafer za LNOI bigizwe n'intambwe nyinshi zisobanutse neza:
Intambwe ya 1: Gutera Ion ya HeliumIyoni za Heliyumu zishyirwa mu cyuma kinini cya LN hakoreshejwe icyuma gitera iyoni. Izi iyoni zitura ku bujyakuzimu bwihariye, zigakora urwego rudakomeye ruzatuma amaherezo firime itandukana.
Intambwe ya 2: Gutunganya igice cy'ibanzeAgace ka silikoni cyangwa LN gashyirwamo ogisijeni cyangwa gashyirwamo SiO2 hakoreshejwe PECVD cyangwa ogisijeni y'ubushyuhe. Ubuso bwayo bwo hejuru bukozwe mu buryo butunganye kugira ngo bufatanye neza.
Intambwe ya 3: Guhuza LN na SubstrateAgakoresho ka LN gaterwamo iyoni gashyirwa ku gakoresho gasanzwe gakoresheje uburyo bwo guhuza bwa wafer. Mu bushakashatsi, benzocyclobutene (BCB) ishobora gukoreshwa nk'ubukorikori kugira ngo yorohereze guhuza mu gihe ibintu bidakomeye.
Intambwe ya 4: Gukoresha ubushyuhe no gutandukanya firimeGushyiramo ibinure bitera imbaraga mu gukora ibinure ku burebure bwatewe, bigatuma agahu gato (urwego rwo hejuru rwa LN) gatandukana n'agace k'ibinure. Imbaraga za mekanike zikoreshwa mu kurangiza gusohora ibinure.
Intambwe ya 5: Gusukura ubusoGutunganya hakoreshejwe uburyo bwa Chemical Mechanical Polishing (CMP) bikoreshwa mu koroshya ubuso bwa LN bwo hejuru, bikongera ubwiza bw'urumuri n'ubushobozi bw'ibikoresho.
Ibipimo bya tekiniki
| Ibikoresho | Ikoranabuhanga Icyiciro LiNbO3 wafes (Yera or Umukara) | |
| Curie Ubushyuhe | 1142±0.7℃ | |
| Gukata Inguni | X/Y/Z n'ibindi | |
| Ingano/umurambararo | 2”/3”/4” ± 0.03mm | |
| Tol(±) | <0.20 mm ± 0.005mm | |
| Ubunini | 0.18～0.5mm cyangwa irenga | |
| Iy'ibanze Igorofa | 16mm/22mm/32mm | |
| Televiziyo ya TV | <3μm | |
| Umuheto | -30 | |
| Ifuro | <40μm | |
| Icyerekezo Igorofa | Byose birahari | |
| Ubuso Ubwoko | Impande imwe irabagirana (SSP) / Impande ebyiri irabagirana (DSP) | |
| Irasenyewe uruhande Ra | <0.5nm | |
| S/D | 20/10 | |
| Inkombe Ibipimo ngenderwaho | R=0.2mm Ubwoko bwa C or Izuru ry'inka | |
| Ireme | Ubuntu of umunyu (udupira na ibikubiye mu nyandiko) | |
| Ikoranabuhanga yakoreshejwe | Mg/Fe/Zn/MgO n'ibindi kuri itara ry'amaso urwego LN uduce duto twa wafer kuri buri byasabwe | |
| Waferi Ubuso Ibipimo ngenderwaho | Igipimo cy'ikirahure | No=2.2878/Ne=2.2033 @632nm uburyo bwo guhuza uburebure/prism. |
| Kwanduza, | Nta na kimwe | |
| Uduce duto c>0.3μ m | <=30 | |
| Gushwanyaguza, Gukata | Nta na kimwe | |
| Inenge | Nta mikurire, imivune, ibisebe, cyangwa ibizinga | |
| Gupfunyika | Ingano/agasanduku k'ifunguro rya wafer | Ibice 25 kuri buri gasanduku |
Ibikoresho byo Gukoresha
Bitewe n'ubushobozi bwayo bwo gukora ibintu byinshi bitandukanye, LNOI ikoreshwa mu nganda nyinshi:
Amafoto:Udukoresho duto two gupima, udukoresho duto two gupima, n'udukoresho duto two gupima.
RF/Amajwi:Utwuma dukoresha acousto-optic, filters za RF.
Kwandika Kwamunikasiyo:Imashini zivanga amajwi zidafite umurongo umwe n'imashini zitanga amashanyarazi zikoresha fotoni.
Kwirwanaho n'Ibyerekeye Ikiremba:Gyros y'amaso idatakaza cyane, ibikoresho byo guhindura frequency.
Ibikoresho byo kwa muganga:Ibyuma bipima ubuzima bw'umuntu n'ibipimo by'amajwi bifite umurongo wo hejuru.
Ibibazo Bikunze Kubazwa
Q: Kuki LNOI ikundwa kurusha SOI muri sisitemu z'amatara?
A:LNOI ifite coefficients nziza za electro-optique n'uruhererekane rwagutse rw'ubumurika, bigatuma habaho imikorere myiza mu miyoboro ya fotoni.
Q: Ese CMP ni itegeko nyuma yo gucikamo ibice?
A:Yego. Ubuso bwa LN bugaragara buba bugoye nyuma yo gukata iyoni kandi bugomba gukozwa kugira ngo buhuze n'ibipimo by'ikoranabuhanga.
Q: Ni ingano ntarengwa ya wafer iboneka?
A:Wafer za LNOI zicuruzwa ahanini ni 3” na 4”, nubwo bamwe mu batanga serivisi barimo gukora ubwoko bwa 6”.
Q: Ese urwego rwa LN rushobora kongera gukoreshwa nyuma yo kugabanyamo ibice?
A:Ikirahure cy'ibanze gishobora kongera gusigwa no kongera gukoreshwa inshuro nyinshi, nubwo ubwiza bwacyo bushobora kwangirika nyuma y'amasaha menshi.
Q: Ese wafer za LNOI zijyanye no gutunganya CMOS?
A:Yego, byagenewe guhuza n'ibikorwa bisanzwe byo gukora semiconductor, cyane cyane iyo hakoreshwa substrates za silicon.
