LNOI Wafer (Lithium Niobate kuri Insulator) Itumanaho Ryumva Electro-Optic
Igishushanyo kirambuye
Incamake
Imbere mu gasanduku ka wafer hari ibishushanyo bisa, ibipimo byacyo birasa neza kugirango bishyigikire impande zombi za wafer. Agasanduku ka kristu muri rusange gakozwe mubintu bya pulasitiki bya PP byoroshye birwanya ubushyuhe, kwambara n'amashanyarazi ahamye. Amabara atandukanye yinyongera akoreshwa mugutandukanya ibice byicyuma mubikorwa bya semiconductor. Bitewe nubunini buto bwingenzi bwa semiconductor, imiterere yubucucike, hamwe nubunini bukomeye bwibisabwa mu musaruro, agasanduku ka wafer kagomba kwemezwa ko hasukuye ibidukikije kugira ngo uhuze na microen ibidukikije agasanduku kerekana imashini zitandukanye.
Uburyo bwo guhimba
Guhimba wafer ya LNOI igizwe n'intambwe nyinshi zuzuye:
Intambwe ya 1: Kwimura Helium IonHelium ion yinjizwa mubice byinshi bya LN kristal ukoresheje ion yatewe. Izi ion ziba mubwimbitse bwihariye, zikora indege yacitse intege amaherezo izorohereza itsinda rya firime.
Intambwe ya 2: Ishingiro ryibanzeSilicon itandukanye cyangwa LN wafer ihindurwamo okiside cyangwa igashyirwa hamwe na SiO2 ukoresheje PECVD cyangwa okiside yumuriro. Ubuso bwacyo bwo hejuru buteganijwe guhuza neza.
Intambwe ya 3: Guhuza LN Kuri SubstrateIyoni-yashizwemo LN kristu irahindurwa kandi ifatanye na wafer fatizo ukoresheje wafer ihuza. Mugihe cyubushakashatsi, benzocyclobutene (BCB) irashobora gukoreshwa nkigiti cyoroshya guhuza ibintu mubihe bitoroshye.
Intambwe ya 4: Kuvura Ubushyuhe no Gutandukanya FilmAnnealing ituma ibibyimba byimbitse byatewe, bigafasha gutandukanya firime yoroheje (layer LN layer) nubwinshi. Imbaraga za mashini zikoreshwa mukurangiza exfolisiyoneri.
Intambwe ya 5: Kuringaniza UbusoImashini ikora imashini (CMP) ikoreshwa muguhuza hejuru ya LN hejuru, kuzamura ubwiza bwa optique hamwe numusaruro wibikoresho.
Ibipimo bya tekiniki
| Ibikoresho | Ibyiza Icyiciro LiNbO3 wafes (Umweru or Umukara) | |
| Curie Ubushuhe | 1142 ± 0.7 ℃ | |
| Gukata Inguni | X / Y / Z n'ibindi | |
| Diameter / ubunini | 2 ”/ 3” / 4 ”± 0.03mm | |
| Tol (±) | <0,20 mm ± 0.005mm | |
| Umubyimba | 0.18 ～ 0.5mm cyangwa irenga | |
| Ibanze Flat | 16mm / 22mm / 32mm | |
| TTV | <3 mm | |
| Umuheto | -30 | |
| Intambara | <40 mm | |
| Icyerekezo Flat | Byose birahari | |
| Ubuso Andika | Uruhande rumwe rusize (SSP) / Impande ebyiri Zogejwe (DSP) | |
| Yasizwe ruhande Ra | <0.5nm | |
| S / D. | 20/10 | |
| Impande Ibipimo | R = 0.2mm Ubwoko bwa C. or Bullnose | |
| Ubwiza | Ubuntu of gucamo (bubbles na inclusion) | |
| Ibyiza yandukuwe | Mg / Fe / Zn / MgO n'ibindi Kuri optique amanota LN wafers kuri byasabwe | |
| Wafer Ubuso Ibipimo | Ironderero | Oya = 2.2878 / Ne = 2.2033 @ 632nm uburebure bwumurongo / uburyo bwa prism. |
| Umwanda, | Nta na kimwe | |
| Ibice c> 0.3μ m | <= 30 | |
| Shushanya, Gukata | Nta na kimwe | |
| Ntibisanzwe | Nta mpande zacitse, gushushanya, ibimenyetso byabonye, ikizinga | |
| Gupakira | Qty / Wafer agasanduku | 25pc kuri buri gasanduku |
Koresha Imanza
Bitewe nuburyo bwinshi n'imikorere, LNOI ikoreshwa mubikorwa byinshi:
Amafoto:Modulatrice yoroheje, multiplexer, hamwe na sisitemu ya fotonike.
RF / Acoustics:Acousto-optique modulator, RF muyunguruzi.
Kubara Quantum:Imirongo idafite umurongo ivanga hamwe na generator ya foton.
Ingabo zirwanira mu kirere:Gito-igihombo cyiza optiki giros, ibikoresho-bihinduranya ibikoresho.
Ibikoresho byo kwa muganga:Biosensor optique hamwe nibimenyetso byinshi-byerekana ibimenyetso.
Ibibazo
Ikibazo: Kuki LNOI ikunzwe kuruta SOI muri sisitemu ya optique?
A:LNOI igaragaramo coefficient nziza ya electro-optique hamwe nurwego rwagutse rwagutse, ituma imikorere iruta iyindi mumashanyarazi.
Ikibazo: Ese CMP ni itegeko nyuma yo gutandukana?
A:Yego. Ubuso bwa LN bugaragara burakomeye nyuma yo gukata ion kandi bugomba guhanagurwa kugirango buhuze optique-urwego rwihariye.
Ikibazo: Ni ubuhe bunini bwa wafer buboneka?
A:Ubucuruzi bwa LNOI ubucuruzi ni 3 "na 4", nubwo abatanga isoko barimo gukora 6 "variants.
Ikibazo: Ese urwego rwa LN rushobora kongera gukoreshwa nyuma yo gutandukana?
A:Intangiriro ya kirisiti irashobora kongera gusukurwa no gukoreshwa inshuro nyinshi, nubwo ubuziranenge bushobora kwangirika nyuma yizunguruka nyinshi.
Ikibazo: Ese wafer ya LNOI ijyanye no gutunganya CMOS?
A:Nibyo, byashizweho kugirango bihuze nuburyo busanzwe bwo guhimba semiconductor, cyane cyane iyo hakoreshejwe silicon substrate.
