Ishusho ya Sapphire Substrate PSS 2inch 4inch 6inch ICP dry etching irashobora gukoreshwa kuri chips za LED
Ibiranga ingenzi
1. Ibiranga ibikoresho: Ibikoresho bya substrate ni safiro imwe (Al₂O₃), ifite ubukana bwinshi, irwanya ubushyuhe bwinshi kandi ikagira ubudahinduka.
2. Imiterere y'ubuso: Ubuso bukorwa na fotolithography no gushushanya mu miterere ya micro-nano, nka cones, piramide cyangwa hexagonal arrays.
3. Imikorere y'urumuri: Binyuze mu miterere y'ubuso, urumuri rwose rugaragara ku rubuga rugabanuka, kandi imikorere yo gukuramo urumuri irushaho kuba myiza.
4. Imikorere y'ubushyuhe: Ibuye rya safiro rifite ubushobozi bwo gutwara ubushyuhe bwinshi, rikwiriye gukoreshwa mu gukoresha LED ifite ingufu nyinshi.
5. Ibipimo by'ingano: Ingano zisanzwe ni santimetero 50.8, santimetero 100 na santimetero 150.
Ahantu hakuru hakoreshwa
1. Gukora LED:
Kongera ubushobozi bwo gukuramo urumuri: PSS igabanya igihombo cy'urumuri binyuze mu gushushanya ibishushanyo, ikongera cyane urumuri rwa LED n'ubushobozi bwo kurumurisha.
Ubwiza bw'imikurire ya epitaxial burushijeho kuba bwiza: Imiterere y'imiterere itanga ishingiro ryiza ry'imikurire ya GaN epitaxial layers kandi ikongera imikorere ya LED.
2. Diode ya Laser (LD):
Lazeri zikoresha imbaraga nyinshi: Uburyo bwo gutwara ubushyuhe bwinshi n'ubudahangarwa bwa PSS bikwiranye na diode za lazeri zikoresha imbaraga nyinshi, bikongera imikorere yo gukwirakwiza ubushyuhe no kwizerana.
Umuriro wo hasi: Kongera ikura rya epitaxial, kugabanya umuriro wo hagati wa laser diode, no kunoza imikorere.
3. Igikoresho cyo gupima foto:
Ubushobozi bwo gupima urumuri rwinshi: Uburyo bwo kohereza urumuri rwinshi n'ubucucike buke bwa PSS byongera ubushobozi bwo gupima no gusubiza umuvuduko wa fotodetector.
Igisubizo cya wide spectral: kibereye gupima amashanyarazi mu rumuri rwa ultraviolet kugeza ku rugero rugaragara.
4. Ibyuma by'ikoranabuhanga bikoresha ingufu:
Ubudahangarwa bw'amashanyarazi menshi: Ubushyuhe bwinshi bwa Sapphire n'ubudahangarwa bw'ubushyuhe birakwiriye ibikoresho by'amashanyarazi menshi.
Gukwirakwiza ubushyuhe neza: Ubushyuhe bwinshi butuma ibikoresho by'amashanyarazi bikora neza kandi bikongera igihe cyo kubikoresha.
5. Ibikoresho bya Rf:
Imikorere ya frequency nyinshi: Igihombo gito cya dielectric hamwe no kudahungabana k'ubushyuhe bwinshi bya PSS birakwiriye ibikoresho bya RF bifite frequency nyinshi.
Urusaku ruto: Ubugari bwinshi n'ubucucike buke bigabanya urusaku rw'igikoresho kandi bikanoza ubwiza bw'ikimenyetso.
6. Ibikoresho by'ingirabuzimafatizo:
Gupima ubushobozi bwo gupima urumuri rwinshi: Uburyo bwo kohereza urumuri rwinshi n'uburyo bwo guhagarara neza mu mikorere ya PSS birakwiriye ku bikoresho bipima ubushobozi bwo gupima urumuri rwinshi.
Kuba ibimera bihuye n'ibinyabuzima: Kuba ibimera bihuye n'ibinyabuzima bya safiro bituma biba byiza mu buvuzi no mu gusuzuma ibimera.
Ishusho ya safiro (PSS) ifite ibikoresho bya GaN epitaxial:
Substrate ya safiro ifite ibishushanyo (PSS) ni substrate nziza yo gukura kwa epitaxial ya GaN (gallium nitride). Ingufu za safiro zegeranye na GaN, bishobora kugabanya kudahuza kwa lattice n'inenge mu gukura kwa epitaxial. Imiterere ya micro-nano y'ubuso bwa PSS ntiyongera gusa imikorere myiza yo gukuramo urumuri, ahubwo inanongera ubwiza bwa kristale ya GaN epitaxial layer, bityo bikanongera imikorere n'ubwizerwe bwa LED.
Ibipimo bya tekiniki
| Ikintu | Igice cy'icyuma cya Safiro gifite ishusho (2 ~ 6inch) | ||
| Ingano | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Ubunini | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Icyerekezo cy'ubuso | Igipimo cya C (0001) kitari ku ruhande rwerekeza ku murongo wa M (10-10) 0.2 ± 0.1° | ||
| Igipimo cya C (0001) kidakora neza kijya ku murongo wa A (11-20) 0 ± 0.1° | |||
| Icyerekezo cy'ibanze cy'ubugari | Indege ya A (11-20) ± 1.0° | ||
| Uburebure bw'ibanze bw'ikiraro | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Plane | Saa cyenda z'umugoroba | ||
| Isozwa ry'imbere | Ifite ibishushanyo | ||
| Irangizwa ry'inyuma | SSP: Ifite ibara ryiza, Ra=0.8-1.2um; DSP: Ifite ibara rya Epi, Ra<0.3nm | ||
| Ikimenyetso cya Laser | Uruhande rw'inyuma | ||
| Televiziyo ya TV | ≤8μm | ≤10μm | ≤20μm |
| UMUHETO | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Kutagaragaza Edge | ≤2 mm | ||
| Ibisobanuro by'icyitegererezo | Imiterere y'Ishusho | Igisenge, Inzu, Piramidi | |
| Uburebure bw'Icyitegererezo | 1.6~1.8μm | ||
| Ingano y'ishusho | 2.75~2.85μm | ||
| Umwanya w'Imbonerahamwe | 0.1 ~ 0.3μm | ||
XKH yihariye mu gutanga ibikoresho bya safiro byiza kandi byihariye (PSS) hamwe n'ubufasha bwa tekiniki na serivisi nyuma yo kugurisha kugira ngo ifashe abakiriya kugera ku guhanga udushya mu rwego rwa LED, ecran na optoelectronics.
1. Isoko rya PSS ry’ubuziranenge: Ibishushanyo bya safiro bifite imiterere itandukanye mu bunini butandukanye (2 ", 4 ", 6 ") kugira ngo bihuze n’ibikenewe bya LED, ecran na optoelectronic.
2. Igishushanyo mbonera cyihariye: Hindura imiterere y'ubuso bwa micro-nano (nk'ibuye ry'agaciro, piramide cyangwa inkingi ya hexagonal) hakurikijwe ibyo abakiriya bakeneye kugira ngo wongere imikorere myiza yo gukuramo urumuri.
3. Inkunga ya tekiniki: Gutanga igishushanyo mbonera cya porogaramu ya PSS, kunoza imikorere n'ubujyanama bwa tekiniki kugira ngo bifashe abakiriya kunoza imikorere y'ibicuruzwa.
4. Inkunga yo gukura kwa Epitaxial: PSS ihujwe n'ibikoresho bya GaN epitaxial iratangwa kugira ngo habeho gukura kw'urwego rwa epitaxial rufite ireme.
5. Gupima no kwemeza: Gutanga raporo y'igenzura ry'ubuziranenge bwa PSS kugira ngo harebwe ko ibicuruzwa byujuje ibisabwa mu nganda.
Ishusho irambuye
