Inyuguti ya SiC ceramic effector ikoreshwa mu gufata wafer

Ishusho y'ishusho ya SiC ceramic effector ikoreshwa mu gutwara wafer

Ibisobanuro bigufi:

LiNbO₃ Wafers zigaragaza urugero rwa zahabu mu buhanga bwa fotoniki n'ubuhanga bwo gutanga amajwi, zitanga imikorere idasanzwe muri sisitemu zigezweho za optoelectronic. Nk'inganda zikomeye, twanogeje ubuhanga bwo gukora izi substrates zakozwe hifashishijwe tekiniki zigezweho zo gutwara umwuka, tugera ku buhanga buhebuje bwa crystalline bufite ubucucike buri munsi ya cm² 50.

Ubushobozi bwo gukora XKH buri hagati ya mm 75 na mm 150, hamwe n'uburyo bwo kugenzura neza icyerekezo (X/Y/Z-cut ±0.3°) hamwe n'uburyo bwihariye bwo gukoresha doping harimo ibintu bidasanzwe by'ubutaka. Uruvange rwihariye rw'imiterere ya LiNbO₃ Wafers - harimo coefficient yazo itangaje ya r₃₃ (32±2 pm/V) hamwe n'ubumuri bwagutse kuva hafi ya UV kugeza hagati ya IR - bituma ziba ngombwa cyane ku miyoboro ya fotonike y'iki gihe gitaha n'ibikoresho by'amajwi bikoresha frequency yo hejuru.

Ohereza imeri kuri twe

Ibiranga

Incamake y'ingaruka za keramik ya SiC

Imashini ya SiC (Silicon Carbide) ni ingenzi cyane mu buryo bwo gufata neza imashini za wafer zikoreshwa mu nganda za semiconductor no mu nganda zigezweho. Yakozwe kugira ngo ihuze n'ibikenewe cyane mu nyubako zisukuye cyane, zishyushye cyane kandi zihamye, iyi mashini yihariye ituma imashini za wafer zitwara neza kandi zidafite umwanda mu gihe cy'intambwe z'ingenzi zo gukora nka lithography, etching, no gushyiramo.

Ikoresheje imiterere myiza y’ibikoresho bya silikoni karubide—nk’ubushyuhe bwinshi, ubukana bukabije, ubushyuhe budakora neza, no kwaguka guke k’ubushyuhe—iki gikoresho cya SiC ceramic gitanga ubukana budasanzwe bwa mekanike n’ubudahangarwa bw’ibipimo ndetse no mu gihe cy’ubushyuhe bwihuta cyangwa mu byumba bikoresha imiti yangiza. Imiterere yacyo yo gukora uduce duto n’ubudahangarwa bwa plasma bituma kiberanye cyane no mu isuku no gutunganya isuku, aho kubungabunga ubusugire bw’ubuso bwa wafer no kugabanya ubwandu bw’uduce ari ingenzi cyane.

Porogaramu y'ibikoresho bya SiC ceramic end effector

1. Uburyo bwo gucunga Wafer ya Semiconductor

Udukoresho twa SiC ceramic end effectors dukoreshwa cyane mu nganda za semiconductor mu gufata wafers za silicon mu gihe cyo gukora mu buryo bwikora. Udukoresho twa SiC effectors dukunze gushyirwa ku maboko ya roboti cyangwa sisitemu yo kohereza vacuum kandi twagenewe kwakira wafers z'ingano zitandukanye nka 200mm na 300mm. Ni ingenzi mu bikorwa birimo Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), etching, no gukwirakwiza—aho ubushyuhe bwinshi, imiterere ya vacuum, n'imyuka yangiza ari ibintu bisanzwe. Kuba SiC ifite ubushobozi bwo kwihanganira ubushyuhe budasanzwe n'ubudahangarwa mu bya shimi bituma iba ibikoresho byiza byo kwihanganira ibidukikije nk'ibi bikaze bidasenyuka.

2. Guhuza isuku n'ibikoresho byo mu bwoko bwa vacuum

Mu byumba byo gusukura no mu byuma bisukura, aho ubwandu bw'uduce bugomba kugabanuka, SiC ceramics itanga inyungu zikomeye. Ubuso bw'ibikoresho bunini kandi bworoshye burwanya ikorwa ry'uduce, bigafasha mu kubungabunga ubuziranenge bwa wafer mu gihe cyo gutwara. Ibi bituma SiC effectors ikwiriye cyane ibikorwa by'ingenzi nka Extreme Ultraviolet Lithography (EUV) na Atomic Layer Deposition (ALD), aho isuku ari ingenzi cyane. Byongeye kandi, SiC itakaza umwuka mwinshi no kudakoresha plasma nyinshi bitanga umusaruro mwiza mu byumba bisukura, bikongera igihe cyo kubaho kw'ibikoresho no kugabanya inshuro zo kubibungabunga.

3. Sisitemu zo Gushyiramo Ibintu mu Buryo Bukomeye

Uburyo bwo gukora neza no guhagarara neza ni ingenzi mu buryo bugezweho bwo gufata wafer, cyane cyane mu gupima, kugenzura no guhuza ibikoresho. SiC ceramics ifite coefficient nto cyane yo kwaguka k'ubushyuhe n'ubukonje bwinshi, ibyo bigatuma icyuma gikomeza kuba cyiza mu miterere yacyo ndetse no mu gihe cy'ubushyuhe cyangwa umutwaro wa mechanical. Ibi bituma wafers ziguma zigororotse mu gihe cyo gutwara, bigabanya ibyago byo gushwanyagurika, kugorana, cyangwa amakosa yo gupima—ibintu birushaho kuba ingenzi ku bice bya sub-5nm process nodes.

Imiterere y'ibikoresho bya SiC ceramic end effect

1. Ingufu nyinshi za mekanike n'ubukomere

SiC ceramics zifite imbaraga zidasanzwe za mekanike, zifite imbaraga zo kuzunguruka akenshi zirenga 400 MPa na Vickers ubukana buri hejuru ya 2000 HV. Ibi bituma zirwanya cyane imbaraga za mekanike, ingaruka, no kwangirika, ndetse no nyuma yo gukoreshwa igihe kirekire. Ubukana bwinshi bwa SiC bugabanya kandi guhindagurika mu gihe cyo kohereza wafer yihuta cyane, bigatuma ishyirwa mu mwanya wayo neza kandi ikongera gusubirwamo.

2. Gukomera cyane mu bushyuhe

Imwe mu miterere y'agaciro kanini ya SiC ceramics ni ubushobozi bwazo bwo kwihanganira ubushyuhe bwinshi cyane—akenshi na kenshi kugeza kuri 1600°C mu kirere kidakora neza—ntizitakaze ubuziranenge bwa mekanike. Ingano nto y'ubushyuhe bwazo (~4.0 x 10⁻⁶ /K) ituma ziguma neza mu gihe cy'ubushyuhe, bigatuma ziba nziza cyane mu bikorwa nka CVD, PVD, no gushyushya ubushyuhe bwinshi.

Ibibazo n'Ibisubizo ku birebana n'ingaruka za SiC ceramic

Q: Ni ibihe bikoresho bikoreshwa mu gupima ikoreshwa rya wafer?

A:Ibikoresho bya Wafer bikunze gukorwa mu bikoresho bitanga imbaraga nyinshi, ubushyuhe budahindagurika, kandi bigatanga uduce duto. Muri ibyo, Silicon Carbide (SiC) ceramic ni kimwe mu bikoresho bigezweho kandi bikunzwe cyane. SiC ceramic ni ingenzi cyane, ihindagurika mu bushyuhe, idafite imiti, kandi idashobora kwangirika, bigatuma iba nziza mu gufata wafers za silicon nziza mu cyumba gisukuye no mu bidukikije bidafite umwuka. Ugereranyije na quartz cyangwa ibyuma bitwikiriwe, SiC itanga ubuziranenge buhanitse mu bushyuhe bwinshi kandi ntikuraho uduce duto, ibyo bifasha mu gukumira ubwandu.