SiC Ceramic Fork Arm / End Effector - Gukoresha neza neza Gukora Semiconductor

SiC Ceramic Fork Arm / End Effector - Gukora neza neza kubikorwa bya Semiconductor Gukora Ishusho Yihariye

Ibisobanuro bigufi:

SiC Ceramic Fork Arm, bakunze kwita Ceramic End Effector, nikintu cyiza cyane cyo gukora neza cyakozwe muburyo bwihariye bwo gutwara wafer, guhuza, no guhagarara mubikorwa byubuhanga buhanitse, cyane cyane mubikorwa bya semiconductor hamwe n’umusaruro w’amafoto. Ibihimbano ukoresheje silicon karbide ceramics nziza cyane, iki gice gihuza imbaraga zidasanzwe za mashini, kwaguka kwinshi cyane, hamwe no kurwanya ihungabana ryumuriro no kwangirika.

Ohereza imeri kuri twe

Ibiranga

Igishushanyo kirambuye

Incamake y'ibicuruzwa

Bitandukanye nibikorwa gakondo byanyuma bikozwe muri aluminium, ibyuma bitagira umwanda, cyangwa na quartz, SiC ceramic end end itanga imikorere itagereranywa mubyumba bya vacuum, ubwiherero, hamwe n’ibidukikije bitunganyirizwa bikabije, bigatuma biba igice cyingenzi cyibisekuruza bizaza bikora. Hamwe no gukenera gukenera umusaruro udafite umwanda no kwihanganira ubukana mu gukora chip, gukoresha imashanyarazi ya ceramic iragenda ihinduka urwego rwinganda.

Ihame ryo gukora

Ibihimbano byaSiC Ceramic Iherezo Ryizaikubiyemo urukurikirane rwibisobanuro bihanitse, byuzuye-byera byerekana imikorere nigihe kirekire. Inzira ebyiri nyamukuru zikoreshwa:

Carbide ya Silicon (RB-SiC)

Muri ubu buryo, preform ikozwe mu ifu ya karubide ya silicon na binder yinjizwemo na silikoni yashongeshejwe ku bushyuhe bwinshi (~ 1500 ° C), ifata hamwe na karubone isigaye kugira ngo ikore ibintu byinshi kandi bikomeye bya SiC-Si. Ubu buryo butanga uburyo bwiza bwo kugenzura kandi buhendutse kubyara umusaruro munini.

Carbide ya Silicon Yumuvuduko (SSiC)

SSiC ikorwa no gucumura ifu ya ultra-nziza, yuzuye-ifu ya SiC yubushyuhe bwinshi cyane (> 2000 ° C) idakoresheje inyongeramusaruro cyangwa icyiciro gihuza. Ibi bivamo ibicuruzwa bifite ubucucike hafi 100% hamwe nubukanishi bwo hejuru nubushyuhe buboneka mubikoresho bya SiC. Nibyiza kuri ultra-critical wafer ikoresha porogaramu.

Nyuma yo gutunganywa

Imashini itomoye ya CNC: Kugera ku buringanire buringaniye no kubangikanya.
Kurangiza Ubuso: Amashanyarazi ya diyama agabanya ubukana bwa <0.02 µm.
Kugenzura: Optical interferometrie, CMM, hamwe no kwipimisha bidasenya bikoreshwa mukugenzura buri gice.

Izi ntambwe zemeza koImikorere ya SiCItanga icyerekezo cya wafer gihamye neza, planarite nziza, hamwe nuduce duto duto.

Ibyingenzi byingenzi ninyungu

Ikiranga	Ibisobanuro
Ubukure bukabije	Vickers gukomera> 2500 HV, kurwanya kwambara no gukata.
Kwiyongera k'ubushyuhe buke	CTE ~ 4.5 × 10⁻⁶ / K, ituma ituze rinini mu gusiganwa ku magare.
Ubusembwa bwa Shimi	Kurwanya HF, HCl, imyuka ya plasma, nibindi bintu byangiza.
Kurwanya Ubushyuhe Bwiza	Bikwiranye no gushyushya byihuse / gukonjesha muri sisitemu ya vacuum nitanura.
Ubukomezi bukomeye n'imbaraga	Shyigikira amaboko maremare ya cantilevered ntagahunda.
Kurengana	Nibyiza kuri ultra-high vacuum (UHV) ibidukikije.
ISO Icyiciro cya 1 Isuku Yiteguye	Igikorwa kitarimo ibice byemeza ubunyangamugayo bwa wafer.

Porogaramu

SiC Ceramic Fork Arm / End Effector ikoreshwa cyane munganda zisaba ubwitonzi bukabije, isuku, hamwe n’imiti irwanya imiti. Ibyingenzi byingenzi bisabwa birimo:

Gukora Semiconductor

Wafer gupakira / gupakurura mububiko (CVD, PVD), kurira (RIE, DRIE), hamwe na sisitemu yo gukora isuku.
Ubwikorezi bwa robot wafer hagati ya FOUPs, cassettes, nibikoresho byo gutunganya.
Gukoresha ubushyuhe bwo hejuru mugihe cyo gutunganya ubushyuhe cyangwa annealing.

Umusemburo wa Photovoltaic

Ubwikorezi bworoshye bwa wafer ya silicon yoroshye cyangwa izuba ryizuba mumirongo yikora.

Flat Panel Yerekana (FPD) Inganda

Kwimura ibirahuri binini cyangwa substrate mubidukikije bya OLED / LCD.

Igice cya Semiconductor / MEMS

Ikoreshwa muri GaN, SiC, na MEMS imirongo yo guhimba aho kugenzura kwanduza no kumenya neza aho bihagaze.

Uruhare rwayo rwanyuma ni ingenzi cyane cyane mugukemura ibibazo bidafite inenge, bikora neza mugihe cyibikorwa byoroshye.

Ubushobozi bwo Kwihitiramo

Dutanga ibicuruzwa byinshi kugirango byuzuze ibikoresho bitandukanye nibisabwa:

Igishushanyo mbonera: Ibice bibiri, urutoki rwinshi, cyangwa ibice-bitandukanijwe.
Ingano ya Wafer Guhuza: Kuva kuri 2 ”kugeza 12” wafer.
Kwimuka: Bihujwe nintwaro za robo za OEM.
Umubyimba & Ubuso bwo kwihanganira: Micron-urwego ruringaniye hamwe no kuzenguruka kuboneka.
Ibirwanya Kurwanya: Ubuso buteganijwe cyangwa ibifuniko byo gufata neza wafer.

Buri kimweceramic iherezoni Ifatanyabikorwa hamwe nabakiriya kugirango barebe neza neza ibikoresho bike byahinduwe.

Ibibazo Bikunze Kubazwa (Ibibazo)

Q1: Nigute SiC iruta quartz kugirango porogaramu irangire?
A1:Mugihe quartz ikoreshwa muburyo bwera, ibura ubukanishi kandi ikunda gucika munsi yumutwaro cyangwa ubushyuhe. SiC itanga imbaraga zisumba izindi, kwambara birwanya, hamwe nubushyuhe bwumuriro, bigabanya cyane ibyago byo gutinda no kwangirika kwa wafer.

Q2: Uku kuboko kwamabuye ya ceramic guhuye nabakoresha robotic bose?
A2:Nibyo, amaherezo ya ceramic amaherezo yacu arahuza na sisitemu nini yo gutunganya wafer kandi irashobora guhuzwa na moderi yawe yihariye ya robo ifite ibishushanyo mbonera.

Q3: Irashobora gukora waferi 300 mm itarinze?
A3:Rwose. Ubukomezi bukabije bwa SiC butuma ndetse amaboko manini, maremare maremare afata waferi 300 mm neza nta kugabanuka cyangwa gutandukana mugihe cyo kugenda.

Q4: Ni ubuhe buzima busanzwe bwa serivisi ya SiC ceramic end effektor?
A4:Hamwe nimikoreshereze ikwiye, imikorere ya SiC irashobora kumara inshuro 5 kugeza 10 kurenza moderi ya quartz cyangwa aluminiyumu, bitewe nuburyo bwiza bwo guhangana nubushyuhe nubushyuhe.

Q5: Utanga abasimbura cyangwa serivisi yihuse ya prototyping?
A5:Nibyo, dushyigikire umusaruro wihuse kandi dutanga serivise zo gusimbuza zishingiye ku gishushanyo cya CAD cyangwa ibice byahinduwe bivuye mubikoresho bihari.

Ibyerekeye Twebwe

XKH kabuhariwe mu iterambere ry’ikoranabuhanga rikomeye, gukora, no kugurisha ibirahuri bidasanzwe bya optique hamwe nibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho bya elegitoroniki, ibikoresho bya elegitoroniki, n'abasirikare. Dutanga ibice bya optique ya optique, igifuniko cya terefone igendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, hamwe na semiconductor kristal wafers. Hamwe n'ubuhanga buhanga hamwe nibikoresho bigezweho, turi indashyikirwa mugutunganya ibicuruzwa bitari bisanzwe, tugamije kuba ibikoresho bya optoelectronic ibikoresho byubuhanga buhanitse.