Agasanduku k'ibumba ka SiC gakoreshwa mu gutwara Wafer gafite ubushyuhe bwinshi
Agasanduku k'ikirahuri ka silikoni (agasanduku ka SiC)
Igice cy’ibumba gifite imikorere myiza gishingiye ku bikoresho bya silikoni karubide (SiC), cyakorewe mu nganda zigezweho nko gukora semiconductor no gukora LED. Imirimo yacyo y’ingenzi irimo gukora nk'icyuma gitwara wafer, urubuga rwo gushushanya, cyangwa inkunga y'ubushyuhe bwinshi, gukoresha amashanyarazi adasanzwe, kudahangana n'ubushyuhe bwinshi, no kudahungabana mu bushyuhe kugira ngo habeho uburyo bumwe bwo gukora no gutanga umusaruro.
Ibiranga by'ingenzi
1. Imikorere y'ubushyuhe
- Ubushobozi bwo gutwara ubushyuhe bwinshi: 140–300 W/m·K, buruta cyane grafiti gakondo (85 W/m·K), butuma ubushyuhe bushira vuba kandi bukagabanya umuvuduko w’ubushyuhe.
- Koreji yo Kwagura Ubushyuhe Buke: 4.0×10⁻⁶/℃ (25–1000℃), silikoni ihuye neza (2.6×10⁻⁶/℃), bigabanya ibyago byo kwangirika k'ubushyuhe.
2. Imiterere ya mekanike
- Ingufu nyinshi: Ingufu zo koroha ≥320 MPa (20℃), zirwanya gukandamizwa no gukubitwa.
- Ubukomere Bunini: Ubukomere bwa Mohs 9.5, bukurikira diyama gusa, butanga ubushobozi bwo kudashira neza.
3. Guhagarara kw'ibinyabutabire
- Ubudahangarwa bwa ruswa: Irwanya aside zikomeye (urugero, HF, H₂SO₄), ikwiriye ahantu hakorerwa isesengura ry'imiterere y'ibimera.
- Ntirikoresha Magnetike: Ingufu zo mu mutima zituma ingufu za magneti zigabanuka <1×10⁻⁶ emu/g, zirinda kubangamira ibikoresho by'ikoranabuhanga.
4. Kwihanganira ibidukikije cyane
- Kuramba mu bushyuhe bwinshi: Ubushyuhe bw'igihe kirekire bugera kuri 1600–1900℃; ubushyuhe bw'igihe gito bugera kuri 2200℃ (ibidukikije bidafite ogisijeni).
- Ubudahangarwa n'ihindagurika ry'ubushyuhe: Ihangana n'impinduka z'ubushyuhe (ΔT >1000℃) idacitse.
Porogaramu
| Ahantu ho Gusaba | Ibintu byihariye | Agaciro ka tekiniki |
| Gukora ibikoresho bya semiconductor | Gushushanya Wafer (ICP), gushyiramo icyuma gito (MOCVD), gusiga CMP polishing | Ubushobozi bwo gutwara ubushyuhe bwinshi butuma ahantu hashyuha hangana; ubushyuhe buke bugabanya ubushyuhe bwa wafer. |
| Umusaruro wa LED | Gukura kwa Epitaxial (urugero, GaN), gukata wafer, gupakira | Igabanya ubusembwa bw'ubwoko bwinshi, yongera imikorere myiza y'urumuri rwa LED n'igihe kirekire. |
| Inganda zikora ku zubaka umuriro w'amashanyarazi | Amatanura ya silikoni, ibikoresho bya PECVD | Ubudahangarwa bw'ubushyuhe bwinshi n'ubushyuhe byongera igihe cyo kubaho cy'ibikoresho. |
| Laser na Optique | Ibikoresho byo gukonjesha bya laser bifite imbaraga nyinshi, bishyigikira sisitemu y'urumuri | Ubushyuhe bwinshi butuma ubushyuhe bushira vuba, bugatuma ibice by'urumuri biguma neza. |
| Ibikoresho byo gusesengura | Ibikoresho by'icyitegererezo bya TGA/DSC | Ubushobozi buke bw'ubushyuhe n'uburyo ubushyuhe bwihuta birushaho kunoza uburyo bwo gupima. |
Ibyiza by'umusaruro
- Imikorere yuzuye: Ubushobozi bwo gutwara ubushyuhe, imbaraga, no kurwanya ingese biruta cyane alumina na silicon nitride ceramics, bihaza ibyifuzo bikomeye by'imikorere.
- Igishushanyo cyoroheje: Ubucucike bwa 3.1–3.2 g/cm³ (40% by'icyuma), bigabanya umutwaro udafite ingufu kandi byongera ubwiza bw'ingendo.
- Kuramba no Kwizerwa: Igihe cyo gukora kirenga imyaka 5 kuri 1600℃, bigabanya igihe cyo gukora kandi bigagabanya ikiguzi cyo gukora ho 30%.
- Guhindura: Ishyigikira imiterere y’ijimetero (urugero: ibikombe byo gukurura bifite imyenge, amasahani y’ibice byinshi) ifite ikosa ryo kugorama <15 μm kugira ngo ikoreshwe neza.
Ibisobanuro bya tekiniki
| Icyiciro cy'ibipimo | Ikimenyetso |
| Imiterere y'umubiri | |
| Ubucucike | ≥3.10 g/cm³ |
| Imbaraga zo Kongera Ubushyuhe (20℃) | 320–410 MPa |
| Ubushobozi bwo gutwara ubushyuhe (20℃) | 140–300 W/(m·K) |
| Igipimo cyo kwagura ubushyuhe (25–1000℃) | 4.0×10⁻⁶/℃ |
| Imiterere y'ibinyabutabire | |
| Ubudahangarwa bwa aside (HF/H₂SO₄) | Nta kwangirika nyuma yo kwibiza mu mazi amasaha 24 |
| Uburyo bwo gukora imashini neza | |
| Ubugari | ≤15 μm (300×300 mm) |
| Ubukana bw'ubuso (Ra) | ≤0.4 μm |
Serivisi za XKH
XKH itanga ibisubizo byuzuye by’inganda bikubiyemo iterambere ry’ibikoresho byihariye, imashini zitunganya neza, no kugenzura ubuziranenge mu buryo bukomeye. Ku bijyanye no guteza imbere imashini zitunganya, itanga ibisubizo by’ibikoresho bifite isuku yo hejuru (>99.999%) n’imyenge (30–50%), hamwe n’imashini zitunganya imiterere ya 3D na simulation kugira ngo yoroshye ubuhanga bw’ijimetero ku bikorwa nka semiconductors n’indege. Imashini zitunganya neza zikurikiza inzira yoroshye: gutunganya ifu → gukanda isostatic/dry → 2200°C sintering → CNC/diamond grinding → igenzura, kugenzura ko isuku yo ku rwego rwa nanometer ikorwa kandi igakomeza kwihanganira ±0.01 mm. Igenzura ry’ubuziranenge rikubiyemo isuzuma ryuzuye (imiterere ya XRD, SEM microstructure, 3-point bend) n’ubufasha bwa tekiniki (gutunganya imashini, inama amasaha 24/24, gutanga ingero amasaha 48), gutanga ibice byizewe kandi bikora neza ku bikenewe mu nganda zigezweho.
Ibibazo Bikunze Kubazwa (Ibibazo Bikunze Kubazwa)
1. Q: Ni izihe nganda zikoresha ibyuma bya silikoni bya karuboni?
A: Ikoreshwa cyane mu gukora semiconductors (gukoresha wafer), ingufu zikomoka ku mirasire y'izuba (imikorere ya PECVD), ibikoresho by'ubuvuzi (ibice bya MRI), no mu kirere(ibice bishyuha cyane) bitewe n'ubushyuhe bwabyo bukabije kandi bugatuma imiti idahindagurika.
2. Q: Ni gute karubide ya silikoni irusha imigati ya quartz/ikirahure?
A: Ubudahangarwa bwinshi bw'ubushyuhe (kugeza kuri 1800°C ugereranije na quartz ya 1100°C), nta kwivanga kwa magnetic, kandi igihe kirekire (imyaka 5+ ugereranije na quartz ya 6-12).
3. Q: Ese udupaki twa silikoni karubide dushobora guhangana n’ibidukikije birimo aside?
A: Yego. Irwanya HF, H2SO4, na NaOH hamwe na <0.01mm yangiritse/umwaka, bigatuma iba nziza cyane mu gukata no gusukura wafer.
4. Q: Ese udupaki twa silikoni karubide duhuye n’imikorere y’ikoranabuhanga?
A: Yego. Yagenewe gukurura imashini ikoresha umwuka udafite ubushyuhe no kuyikoresha mu buryo bwa roboti, ifite ubuso bungana na mm 0.01 kugira ngo hirindwe kwanduzwa n'udukoko mu bikoresho byikora.
5. Q: Ni iyihe gereranya ry'ikiguzi ugereranije n'ibikoresho gakondo?
A: Igiciro cyo hejuru mbere y'igihe (quartz 3-5x) ariko TCO iri hasi kuri 30-50% bitewe n'igihe kirekire cyo kumara, igihe gito cyo kuruhuka, no kuzigama ingufu bitewe n'ubushobozi buhanitse bwo gutwara ubushyuhe.
