SiC ceramic tray plate grafite hamwe na CVD SiC itwikiriye ibikoresho

Ibisobanuro bigufi:

Shanghai Xinkehui New Materials Co., Ltd. ikora Φ380mm - 00600mm ya semiconductor etching disiki, wafer itwara disiki, carbide tray, SIC tray, silicon karbide tray, ICP etching tray, etching tray, silicon carbide isuku> 99.9%, SIC tray service ubuzima ni inshuro enye za grafite ishingiye kuri CVD tray, gukoresha igihe kirekire nta guhindura, Kurwanya aside FH, yibanze kuri H2So4.

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

Ceramics ya karibide ya silicon ntabwo ikoreshwa gusa murwego rwo kubika firime yoroheje, nka epitaxy cyangwa MOCVD, cyangwa mugutunganya wafer, hagati yumutwara wafer wa MOCVD ubanza gukorerwa ibidukikije, bityo bikaba birwanya cyane ubushyuhe no kwangirika. Abatwara siyC batwikiriye kandi bafite ubushyuhe bwinshi kandi bukwirakwiza ibintu byiza.

Imyuka Yumuti Yumuti Yumuti Silicon Carbide (CVD SiC) itwara wafer kubushyuhe bwo hejuru Metal Organic Chemical Vapor Deposition (MOCVD) itunganya.

Abatwara wafer ya CVD SiC basumba cyane abatwara wafer isanzwe ikoreshwa muriki gikorwa, ni grafite kandi igashyirwa hamwe na CVD SiC. ibyo bitwikiriye grafitike itwikiriye ntibishobora kwihanganira ubushyuhe bwo hejuru (dogere selisiyusi 1100 kugeza 1200) zisabwa kugirango GaN yerekane urumuri rwinshi rwubururu n'umweru byayobowe. Ubushyuhe bwo hejuru butera igipfundikizo gukura utuntu duto duto dukoresha imiti yangiza grafite munsi. Uduce duto twa grafite noneho turazimya kandi twanduza GaN, bigatuma umutwaro wa wafer utwikiriye usimburwa.

CVD SiC ifite ubuziranenge bwa 99,999% cyangwa irenga kandi ifite ubushyuhe bwinshi nubushyuhe bwo guhangana nubushyuhe. Kubwibyo, irashobora kwihanganira ubushyuhe bwo hejuru hamwe nibidukikije bikaze byumucyo mwinshi LED ikora. Nibintu bikomeye bya monolithic bigera ku bucucike bwa theoretical, bitanga uduce duto duto, kandi bikerekana ruswa nyinshi kandi irwanya isuri. Ibikoresho birashobora guhindura umwijima no kutitwara neza bitinjije umwanda wibyuma. Abatwara Wafer mubusanzwe bafite santimetero 17 z'umurambararo kandi barashobora gufata waferi igera kuri 40 2-4.