Grafiti ya SiC ceramic plate ifite CVD SiC coating ku bikoresho
Ibumba rya silicon carbide ntirikoreshwa gusa mu cyiciro cyo gushyiramo filime nto, nka epitaxy cyangwa MOCVD, cyangwa mu gutunganya wafer, aho utwuma dutwara wafer twa MOCVD tuba twabanje gushyirwa mu bidukikije, bityo tukaba turwanya cyane ubushyuhe n'ingese. Utwuma dufata SiC dufite kandi ubushobozi bwo gutwara ubushyuhe bwinshi n'ubushobozi bwiza bwo gukwirakwiza ubushyuhe.
Ibyuma bya Silicon Carbide (CVD SiC) byo gutwara imvange y'amazi bikoreshwa mu gutunganya imvange y'amazi mu bushyuhe bwinshi (MOCVD).
Udukoresho twa CVD SiC twa wafer tworoshye turaruta cyane utw’udukoresho dusanzwe twa wafer dukoreshwa muri ubu buryo, ari two graphite kandi dusizweho urwego rwa CVD SiC. Udukoresho twa graphite dukozwe muri graphite ntidushobora kwihanganira ubushyuhe bwinshi (dogere selisiyusi 1100 kugeza 1200) bukenewe kugira ngo GaN ishyiremo urumuri rwinshi rw’ubururu n’umweru muri iki gihe. Ubushyuhe bwinshi butuma irangi rikora utwobo duto duto dutuma imiti ikoreshwa mu gutunganya graphite isesagura graphite iri munsi. Uduce twa graphite duhita ducika maze tukanduza GaN, bigatuma irangi rikozwe muri wafer risimburwa.
CVD SiC ifite ubuziranenge bwa 99.999% cyangwa irenga kandi ifite ubushobozi bwo gutwara ubushyuhe bwinshi n'ubudahangarwa bw'ubushyuhe. Kubwibyo, ishobora kwihanganira ubushyuhe bwinshi n'ibidukikije bikomeye byo mu nganda za LED zifite urumuri rwinshi. Ni ibikoresho bikomeye bya monolithic bigera ku bucucike bw'ibitekerezo, bigatanga uduce duto, kandi bikagira ubushobozi bwo kurwanya ingese n'isuri cyane. Ibikoresho bishobora guhindura uburyo bwo kudahita no gutwara ibintu hatabayeho imyanda y'icyuma. Ibikoresho bitwara wafers akenshi bifite umurambararo wa santimetero 17 kandi bishobora gutwara wafers zigera kuri santimetero 40 za santimetero 2-4.
Ishusho irambuye


