SiC ceramic tray plate grafite hamwe na CVD SiC itwikiriye ibikoresho

Ceramics ya silicon karbide ntabwo ikoreshwa gusa murwego rwo kubika firime yoroheje, nka epitaxy cyangwa MOCVD, cyangwa mugutunganya wafer, kumutima wogutwara wafer ya MOCVD yabanje gukorerwa ibidukikije, bityo rero bikaba birwanya cyane ubushyuhe nubushuhe.

Imyuka Yumuti Yumuti Yumuti Silicon Carbide (CVD SiC) itwara wafer kubushyuhe bwo hejuru Metal Organic Chemical Vapor Deposition (MOCVD) itunganya.

Abatwara wafer ya CVD SiC basumba cyane abatwara wafer isanzwe ikoreshwa muriki gikorwa, ni grafite kandi igashyirwa hamwe na CVD SiC. ibyo bitwikiriye grafitike itwikiriye ntibishobora kwihanganira ubushyuhe bwo hejuru (dogere selisiyusi 1100 kugeza 1200) zisabwa kugirango GaN yerekane urumuri rwinshi rwubururu n'umweru byayobowe. Ubushyuhe bwo hejuru butera igipfundikizo gukura utuntu duto duto dukoresha imiti yangiza grafite munsi. Uduce duto twa grafite noneho turazimya kandi twanduza GaN, bigatuma umutwaro wa wafer utwikiriye usimburwa.

CVD SiC ifite ubuziranenge bwa 99,999% cyangwa irenga kandi ifite ubushyuhe bwinshi nubushyuhe bwo guhangana nubushyuhe. Kubwibyo, irashobora kwihanganira ubushyuhe bwo hejuru hamwe nibidukikije bikaze byumucyo mwinshi LED ikora. Nibintu bikomeye bya monolithic bigera ku bucucike bwa theoretical, bitanga uduce duto duto, kandi bikerekana ruswa nyinshi kandi irwanya isuri. Ibikoresho birashobora guhindura umwijima no kutitwara neza bitinjije umwanda wibyuma. Abatwara Wafer mubusanzwe bafite santimetero 17 z'umurambararo kandi barashobora gufata wafer ya 40 2-4.