Ipaddle ya Silikoni Carbide Cantilever (Ipaddle ya SiC Cantilever)

Ishusho y'ifoto ya Silicon Carbide Cantilever Paddle (SiC Cantilever Paddle)

Ibisobanuro bigufi:

Ohereza imeri kuri twe

Ibiranga

Ishusho irambuye

Incamake y'ibicuruzwa

Imashini ya silikoni ya cantilever paddle, ikozwe muri silikoni ya silikoni ifite ubushobozi bwo gukora neza cyane (RBSiC), ni igice cy'ingenzi gikoreshwa muri sisitemu yo gupakira no gutwara wafer mu bikorwa bya semiconductor na photovoltaic.
Ugereranyije n'udupira twa quartz cyangwa grafiti gakondo, udupira twa SiC cantilever dutanga imbaraga zikomeye za mekanike, ubukana bwinshi, kwaguka gake k'ubushyuhe, no kudakomera cyane mu miterere y'ibimera. Dukomeza kugira imiterere myiza mu gihe cy'ubushyuhe bwinshi, twujuje ibisabwa bikomeye bya wafer nini, igihe kirekire cyo gukora, kandi tukaba twanduye gake cyane.

Bitewe n’iterambere rihoraho ry’imikorere ya semiconductor rigana ku bunini bwa wafer, umusaruro mwinshi, n’ahantu ho gutunganya ibintu neza, SiC cantilever paddles yagiye isimbuza buhoro buhoro ibikoresho bisanzwe, iba amahitamo meza ku ziko zikwirakwiza, LPCVD, n’ibindi bikoresho bifitanye isano n’ubushyuhe bwinshi.

Ibiranga Ibicuruzwa

Gukomera cyane mu bushyuhe buri hejuru
- Ikora neza kuri 1000–1300℃ nta guhindagurika.
- Ubushyuhe ntarengwa bwa serivisi bugera kuri 1380℃.
Ubushobozi bwo gutwara imizigo myinshi
- Ingufu zo kunama kugeza kuri 250–280 MPa, ziruta cyane amapine ya quartz.
- Ishobora gufata uduce duto tw’umurambararo munini (300 mm no hejuru).
Igihe kirekire cyo gutanga serivisi no kuyibungabunga bidahagije
- Igipimo cyo kwaguka k'ubushyuhe gito (4.5 × 10⁻⁶ K⁻¹), gihuye neza n'ibikoresho byo gusiga LPCVD.
- Bigabanya imiyoboro iterwa n'imihangayiko no gukurura, bikongera cyane ibihe byo gusukura no kubungabunga.
Ubudahangarwa bw'Ingese n'Ubuziranenge
- Ubudahangarwa bwiza cyane kuri aside na alkali.
- Imiterere mito y’uturemangingo ifite imyenge ifunguye <0.1%, bigabanya gukora kw’uduce duto no gusohora imyanda.
Igishushanyo mbonera gihuye n'ubwikorezi
- Imiterere ihamye y'ibice byambukiranya imiterere kandi ifite ubuziranenge bwo hejuru.
- Ikorana neza na sisitemu zo gupakira no gupakurura za roboti, bigatuma ikorwa ryikora ku buryo bwikora.

Imiterere y'umubiri n'imiti

Ikintu	Ishami	Amakuru
Ubushyuhe ntarengwa bwa serivisi	℃	1380
Ubucucike	g/cm³	3.04 – 3.08
Imboro ifunguye	%	< 0.1
Imbaraga zo kunama	MPa	250 (20℃), 280 (1200℃)
Modulus ya Elasticity	GPa	330 (20℃), 300 (1200℃)
Ubushobozi bwo gutwara ubushyuhe	W/m·K	45 (1200℃)
Igipimo cyo kwagura ubushyuhe	K⁻¹×10⁻⁶	4.5
Ubukomere bwa Vickers	HV2	≥ 2100
Ubudahangarwa bw'aside/Alkali	-	Byiza cyane

Uburebure busanzwe:mm 2378, mm 2550, mm 2660
Ibipimo byihariye biraboneka iyo ubisabye

Porogaramu

Inganda zikora ibikoresho bya semiconductor
- LPCVD (Gushyira umwuka mu kirere mu gitutu gito)
- Uburyo bwo gukwirakwiza (fosforu, boroni, nibindi)
- Ogisijeni y'ubushyuhe
Inganda zikora ku zuba
- Gukwirakwiza no gusiga polysilicone na monocrystalline wafer
- Gufunga no gufunga mu bushyuhe bwinshi
Izindi Nzego
- Ahantu hashyuha cyane hangiza ikirere
- Uburyo bwo gufata neza wafer busaba igihe kirekire kandi budahumanya ikirere

Inyungu z'abakiriya

Ibiciro byo gukora byagabanijwe– Igihe kirekire ugereranije n'amapine ya quartz, bigabanya igihe cyo kuruhuka n'inshuro zo gusimbuza.
Umusaruro mwinshi– Umwanda muke cyane utuma ubuso bw'ibishishwa busukurwa kandi bigabanya ubusembwa.
Ibimenyetso by'ejo hazaza- Ihuye n'ingano nini za wafer hamwe n'imikorere ya semiconductor y'ikinyejana gitaha.
Umusaruro urushijeho kuba mwiza- Ikorana neza na sisitemu za roboti zikora, zishyigikira gukora ibikoresho byinshi.

Ibibazo Bikunze Kubazwa - Silicon Carbide Cantilever Paddle

Q1: Igitambaro cya silikoni carbide cantilever ni iki?
A: Ni igice gishyigikira kandi gifata ibikoresho cya wafer gikozwe muri karubide ya silikoni iboshywe (RBSiC). Ikoreshwa cyane mu itanura rikwirakwiza, LPCVD, n'izindi nzira za semiconductor zikoresha ubushyuhe bwinshi na photovoltaic.

Q2: Kuki wahitamo SiC kuruta quartz paddles?
A: Ugereranije n'udupira twa quartz, udupira twa SiC dutanga:

Imbaraga nyinshi za mekanike n'ubushobozi bwo gutwara imizigo
Ubushyuhe burushaho gukomera ku bushyuhe bugera kuri 1380℃
Igihe cyo gukora kiramba cyane kandi kikagabanuka igihe cyo kubungabunga
Ingaruka zo kugabanya ikorwa ry'udukoko n'ibyago byo kwandura
Ihuye n'ingano nini ya wafer (300 mm no hejuru yayo)

Q3: Ni ingano zingana iki za wafer zishobora gushyigikirwa na SiC cantilever paddle?
A: Hari udupira dusanzwe dukoreshwa mu gutwika amatanura twa mm 2378, mm 2550, na mm 2660. Ingano zagenwe zirahari kugira ngo zishyigikire utugati twa wafers tugera kuri mm 300 no hejuru yatwo.

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.