Silicon carbide ceramic tray sucker Silicon carbide ceramic tube itanga ubushyuhe bwo hejuru bwo gucumura ibicuruzwa

Ibisobanuro bigufi:

Silicon carbide ceramic tray hamwe na silicon carbide ceramic tubes nibikoresho byingenzi byingirakamaro cyane mubikorwa bya semiconductor. Silicon carbide ceramic tray ikoreshwa cyane mugutunganya wafer itunganijwe kandi ikabyara, kugirango habeho ituze ryibikorwa bihanitse; Silicon carbide ceramic tubes ikoreshwa cyane mumatara yubushyuhe bwo hejuru, itanura rya feri hamwe nibindi bintu kugirango bihangane nibidukikije bikabije kandi bikomeze gucunga neza ubushyuhe. Byombi bishingiye kuri karubide ya silicon nkibikoresho byingenzi, byahindutse igice cyingenzi mu nganda ziciriritse bitewe n’imiterere myiza y’umubiri n’imiti.

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Ibicuruzwa birambuye

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Ibyingenzi byingenzi:

1. Silicon carbide ceramic tray
- Gukomera cyane no kwambara birwanya: ubukana buri hafi ya diyama, kandi burashobora kwihanganira imyenda ya mashini mugutunganya wafer igihe kirekire.
- Ubushyuhe bukabije bwumuriro hamwe nubushobozi buke bwo kwagura ubushyuhe: kugabanuka kwubushyuhe bwihuse hamwe no guhagarara neza, kwirinda ihinduka ryatewe nubushyuhe bwumuriro.
- Uburinganire buringaniye hamwe nubuso burangirira: Ubuso buringaniye bugera kurwego rwa micron, byemeza guhuza byuzuye hagati ya wafer na disiki, kugabanya kwanduza no kwangirika.
Imiti itajegajega: Kurwanya ruswa ikomeye, ikwiranye nogusukura amazi no gutobora mubikorwa bya semiconductor.
2. Silicon carbide ceramic tube
- Kurwanya ubushyuhe bwinshi: Irashobora gukora mubushyuhe bwo hejuru hejuru ya 1600 ° C mugihe kirekire, ikwiranye nubushyuhe bwo hejuru bwa semiconductor.
Kurwanya ruswa nziza cyane: irwanya aside, alkalis hamwe nudukoko twinshi twa chimique, ibereye ibidukikije bikabije.
- Gukomera cyane no kwambara birwanya: kurwanya isuri no kwambara kwa mashini, kwagura ubuzima bwa serivisi.
- Ubushyuhe bukabije bwumuriro hamwe na coefficient nkeya yo kwaguka kwubushyuhe: gutwara vuba ubushyuhe nuburinganire buringaniye, kugabanya guhindagurika cyangwa gucika biterwa nubushyuhe bwumuriro.

Ibipimo by'ibicuruzwa ：

Silicon carbide ceramic tray parameter:

(Umutungo w'ibikoresho)		(Igice)	(ssic)
(Ibirimo SiC)		(Wt)%	> 99
(Impuzandengo y'ingano)		micron	4-10
(Ubucucike)		kg / dm3	> 3.14
(Ikigaragara ni uko)		Vo1%	<0.5
(Gukomera kwa Vickers)	HV 0.5	GPa	28
* () Imbaraga zoroshye * (ingingo eshatu)	20ºC	MPa	450
(Imbaraga zo guhonyora)	20ºC	MPa	3900
(Moderi ya Elastike)	20ºC	GPa	420
(Gukomera kuvunika)		MPa / m '%	3.5
(Ubushyuhe bwa Thermal)	20 ° ºC	W / (m * K)	160
(Kurwanya)	20 ° ºC	Ohm.cm	106-108
(Coefficient yo kwagura ubushyuhe)	a (RT ** ... 80ºC)	K-1 * 10-6	4.3
(Ubushyuhe ntarengwa bwo gukora)		oºC	1700

Silicon carbide ceramic tube parameter:

Ibintu	Ironderero
α-SIC	99% min
Ikigaragara	16% max
Ubucucike bwinshi	2.7g / cm3 min
Imbaraga Zunamye ku bushyuhe bwo hejuru	100 Mpa min
Coefficient yo Kwagura Ubushyuhe	K-1 4.7x10 -6
Coefficient yubushyuhe bwumuriro (1400ºC)	24 W / mk
Icyiza. Ubushyuhe bwo gukora	1650ºC

Porogaramu nyamukuru:

1. Isahani ya silicon karbide
- Gukata Wafer no gusya: ikora nk'urubuga rwo gutwara kugirango habeho neza kandi neza mugihe cyo gukata no gusya.
- Uburyo bwa Lithographie: Wafer yashyizwe mumashini ya lithographie kugirango ihagarare neza neza mugihe cyo kwerekana.
- Imashini ya mashini ya mashini (CMP): ikora nk'urubuga rushyigikira amashanyarazi, rutanga igitutu kimwe no gukwirakwiza ubushyuhe.
2. Silicon carbide ceramic tube
- Itanura ryubushyuhe bwo hejuru: rikoreshwa mubikoresho byubushyuhe bwo hejuru nkitanura rya diffusion hamwe nitanura rya okiside kugirango bitware wafer kugirango bivure ubushyuhe bwinshi.
- Inzira ya CVD / PVD: Nka tariyeri itwara icyumba cya reaction, irwanya ubushyuhe bwinshi na gaze yangirika.
- Ibikoresho bya Semiconductor ibikoresho: kubihinduranya ubushyuhe, imiyoboro ya gaze, nibindi, kugirango tunoze imikorere yubushyuhe bwibikoresho.
XKH itanga serivisi zuzuye kubikorwa bya silicon karbide ceramic tray, ibikombe byo guswera hamwe na silicon carbide ceramic tubes. Silicon carbide ceramic tray hamwe nigikombe cyokunywa, XKH irashobora guhindurwa ukurikije ibyo umukiriya asabwa mubunini butandukanye, imiterere nubuso butandukanye, kandi agashyigikira uburyo bwihariye bwo kuvura, kongera imbaraga zo kurwanya no kwangirika; Kuri silicon carbide ceramic tubes, XKH irashobora gutandukanya diameter zitandukanye zimbere, diameter yinyuma, uburebure nuburyo bugoye (nkumuyoboro wubatswe cyangwa umuyoboro wuzuye), kandi bigatanga polishing, anti-okiside hamwe nubundi buryo bwo kuvura hejuru. X.