Umuyoboro wa keramike wa silicon carbide Silicon carbide itanga uburyo bwo gutunganya ibintu mu buryo bwihariye

Igikoresho cyo gucukura icyuma cya silicon carbide ceramic tube ya silicon itanga uburyo bwo gutunganya ibintu mu buryo bushyushye cyane. Ishusho yagaragaye

Ibisobanuro bigufi:

Agasanduku k'ikaramu ka silicon carbide n'agasanduku k'ikaramu ka silicon carbide ni ibikoresho by'ingenzi bifite imikorere myiza mu nganda za semiconductor. Agasanduku k'ikaramu ka silicon carbide gakoreshwa cyane mu gutunganya wafer gahamye kandi gafite ubwiza, kugira ngo habeho umutekano mu buryo buhamye; Agasanduku k'ikaramu ka silicon carbide gakoreshwa cyane mu dusanduku tw'ikaramu dufite ubushyuhe bwinshi, udusanduku tw'ikaramu tunyuramo n'ibindi bintu kugira ngo bihangane n'ibidukikije bidasanzwe kandi bikomeze gucunga neza ubushyuhe. Byombi bishingiye kuri silicon carbide nk'ibikoresho by'ingenzi, byahindutse igice cy'ingenzi mu nganda za semiconductor bitewe n'imiterere yabyo myiza ya fiziki na shimi.

Ohereza imeri kuri twe

Ibiranga

Ibiranga by'ingenzi:

1. Isahani ya silicon carbide ceramic
- Ubukomere bwinshi no kudashira: ubukomere buri hafi ya diyama, kandi bushobora kwihanganira kwangirika kwa mashini mu gutunganya wafer igihe kirekire.
- Ubushobozi bwo gutwara ubushyuhe bwinshi n'ubushobozi buke bwo kwaguka k'ubushyuhe: gushonga vuba k'ubushyuhe no kudahinduka mu buryo bungana, birinda guhinduka guterwa n'imbaraga z'ubushyuhe.
- Ubuso bunini kandi bungana: Ubuso bungana kugeza ku rwego rwa micron, bigatuma habaho gukorana neza hagati ya wafer na disiki, bigabanya umwanda no kwangirika.
Ubudahangarwa bw'imiti: Ubudahangarwa bukomeye bwo kwangirika, bukwiriye gusukurwa no gucibwa mu buryo butose mu nganda zikora ibikoresho bya semiconductor.
2. Umuyoboro wa keramike wa silikoni
- Irwanya ubushyuhe bwinshi: Ishobora gukora ahantu hari ubushyuhe bwinshi buri hejuru ya 1600°C igihe kirekire, ikwiriye gukoreshwa mu bushyuhe bwinshi bwa semiconductor.
Irwanya ingese neza cyane: irwanya aside, alkali n'ibindi bintu bitandukanye bya shimi, ikwiriye ahantu hakomeye.
- Ubukana bwinshi no kudashira: kurwanya isuri y'udukoko no kwangirika kwa mashini, kongera igihe cyo kuyikoresha.
- Ubushobozi bwo gutwara ubushyuhe bwinshi n'ubushobozi buke bwo kwaguka k'ubushyuhe: gutwara ubushyuhe vuba no kudahindagurika mu buryo bungana, kugabanya guhinduka cyangwa kwangirika guterwa n'ubushyuhe.

Ibipimo by'ibicuruzwa:

Ibipimo by'agasanduku k'ibumba ka silikoni karibide:

(Umutungo w'ibikoresho)		(Igice)	(ssic)
(Ibikubiye muri SiC)		(Uburemere)%	>99
(Ingano y'ingano isanzwe)		mikoroni	4-10
(Ubucucike)		kg/dm3	>3.14
(Uburebure bugaragara)		Vo1%	<0.5
(Ubukomere bwa Vickers)	Ubushobozi bwo gupima ikirere 0.5	GPa	28
() Imbaraga zo koroha (amanota atatu)	20ºC	MPa	450
(Imbaraga zo gukanda)	20ºC	MPa	3900
(Modulus irashya)	20ºC	GPa	420
(Ubukomere bw'imvune)		MPa/m'%	3.5
(Ubushyuhe butwara amashanyarazi)	20°ºC	Ubuso/(m*K)	160
(Guhangana n'ingaruka)	20°ºC	Ohm.cm	106-108
(Ingano yo kwagura ubushyuhe)	a(RT**...80ºC)	K-1*10-6	4.3
(Ubushyuhe ntarengwa bwo gukora)		oºC	1700

Ibipimo by'umuyoboro wa keramik wa silikoni:

Ibintu	Urutonde
α-SIC	Iminota 99%
Isura Igaragara	16% ntarengwa
Ubucucike bw'umubyimba	2.7g/cm3 umunota
Imbaraga zo Kugonda ku Bushyuhe Bukabije	Iminota 100 ya Mpa
Igipimo cy'ubwiyongere bw'ubushyuhe	K-1 4.7x10 -6
Igipimo cy'ubushyuhe (1400ºC)	24 W/mk
Ubushyuhe ntarengwa bwo gukora	1650ºC

Porogaramu z'ingenzi:

1. Isahani ya keramik ya silikoni
- Gukata no gusiga irangi rya Wafer: bikora nk'urubuga rwo gufata irangi kugira ngo bigerweho neza kandi bihamye mu gihe cyo gukata no gusiga irangi.
- Uburyo bwo gushushanya: Agace k'umugati gashyirwa mu mashini ikoresha uburyo bwa lithography kugira ngo kamenye neza aho gashyirwa mu mwanya wabyo mu gihe cyo gushyiramo ibintu.
- Gusukura hakoreshejwe uburyo bwa Chemical Mechanical Polishing (CMP): bikora nk'urubuga rwo gushyigikira polishing pads, bigatanga umuvuduko umwe n'ubushyuhe bukwirakwira.
2. Umuyoboro wa keramike wa silikoni
- Umuyoboro w'itanura rishyushye cyane: ukoreshwa mu bikoresho bishyushye cyane nk'itanura rikwirakwira n'itanura rishyushye cyane kugira ngo utware wafers zo gutunganya ubushyuhe bwinshi.
- Uburyo bwa CVD/PVD: Nk'umuyoboro w'amashanyarazi mu cyumba cy'imyitozo, urwanya ubushyuhe bwinshi n'imyuka yangiza.
- Ibikoresho bya semiconductor: ku byuma bihindura ubushyuhe, imiyoboro ya gazi, nibindi, kugira ngo hongerwe imikorere myiza mu gucunga ubushyuhe bw'ibikoresho.
XKH itanga serivisi zitandukanye zihariye ku masahani ya silicon carbide ceramic, ibikombe byo gukurura n'imiyoboro ya silicon carbide ceramic. Amasahani ya silicon carbide ceramic n'ibikombe byo gukurura, XKH ishobora guhindurwa hakurikijwe ibyo abakiriya bakeneye mu bunini butandukanye, imiterere n'ubukana bw'ubuso, kandi igashyigikira uburyo bwihariye bwo gusiga, kongera ubushobozi bwo kwangirika no kurwanya ingese; Ku miyoboro ya silicon carbide ceramic, XKH ishobora guhindura ubwoko butandukanye bw'umurambararo w'imbere, umurambararo w'inyuma, uburebure n'imiterere igoye (nk'umuyoboro ufite ishusho cyangwa umuyoboro ufite imyenge), kandi igatanga uburyo bwo gusiga, kurwanya oxidation n'izindi nzira zo gutunganya ubuso. XKH igenzura ko abakiriya bashobora kungukirwa byimazeyo n'inyungu z'imikorere y'ibicuruzwa bya silicon carbide ceramic kugira ngo bihuze n'ibikenewe cyane mu nganda zikora ibikoresho byo mu rwego rwo hejuru nka semiconductors, LEDs na photovoltaics.