TGV Ikirahure substrate 12inch wafer Ikirahure

TGV Ikirahure substrates 12inch wafer Ikirahure gikubita Ishusho Yerekanwe

Ibisobanuro bigufi:

Ibirahuri by'ibirahure bifite ubuso bworoshye kuruta plastike, kandi umubare wa vias ni munini cyane mukarere kamwe kuruta ibikoresho kama. Bavuga ko intera iri hagati yu mwobo uri mu kirahure cy’ibirahure ishobora kuba munsi ya microne 100, ibyo bikaba byongera mu buryo butaziguye ubucucike bw’imikoranire hagati ya wafer ku kigero cya 10. Ubwiyongere bw’imikoranire bwiyongera bushobora kwakira umubare munini wa tristoriste, bigatuma habaho ibintu byinshi bigoye gushushanya no gukoresha neza umwanya.

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

Ibirahuri byerekana ibirahure bikora neza mubijyanye nubushyuhe bwumuriro, ituze ryumubiri, kandi birwanya ubushyuhe bwinshi kandi ntibikunze guhura nibibazo byo kurwara cyangwa guhindura ibintu kubera ubushyuhe bwinshi;

Byongeye kandi, ibintu bidasanzwe byamashanyarazi yibirahuri byemerera igihombo cya dielectric nkeya, bikemerera ibimenyetso bisobanutse no kohereza amashanyarazi. Nkigisubizo, gutakaza ingufu mugihe cyo kohereza ibimenyetso biragabanuka kandi muri rusange imikorere ya chip irazamurwa. Ubunini bwikirahuri cyibirahure birashobora kugabanukaho hafi kimwe cya kabiri ugereranije na plastike ya ABF, kandi kunanura bizamura umuvuduko wo kohereza ibimenyetso no gukora neza.

Ubuhanga bwo gukora umwobo wa TGV:

Uburyo bwa Laser bwatewe no gukoreshwa bukoreshwa muguteza akarere gahoraho binyuze mumashanyarazi, hanyuma ikirahure cya lazeri gishyirwa mumashanyarazi ya hydrofluoric kugirango ikorwe. Igipimo cyo gutobora ikirahuri cya zone ya denaturation muri acide hydrofluoric irihuta kuruta ikirahuri kidahagije kugirango kibeho binyuze mu mwobo.

TGV yuzuza:

Ubwa mbere, TGV ibyobo bihumye bikozwe. Icya kabiri, urwego rwimbuto rwashyizwe imbere mu mwobo wa TGV uhumye no guhumeka umwuka (PVD). Icya gatatu, hasi-hejuru amashanyarazi agera kuri TGV yuzuye; Hanyuma, binyuze muguhuza by'agateganyo, gusya inyuma, gusya imiti ya mashini (CMP) kwerekana umuringa, kudahuza, gukora icyapa cya TGV cyuzuye icyapa.