Ibikoresho bya TGV Glass wafer ya santimetero 12 Gupfunyika ikirahure

Ibyuma by'ikirahure bikora neza mu bijyanye n'imiterere y'ubushyuhe, ubushobozi bwo kuguma mu buryo buhamye, kandi birwanya ubushyuhe kandi ntibikunze kugorama cyangwa ngo bihinduke bitewe n'ubushyuhe bwinshi;

Byongeye kandi, imiterere yihariye y'amashanyarazi y'ikirahure ituma habaho igihombo gito cya dielectric, bigatuma ikimenyetso cyumvikana neza n'ihererekanya ry'amashanyarazi. Kubera iyo mpamvu, igihombo cy'amashanyarazi mu gihe cyo kohereza ikimenyetso kiragabanuka kandi imikorere rusange ya chip irushaho kwiyongera mu buryo busanzwe. Ubunini bw'ifatizo ry'ikirahure bushobora kugabanukaho kimwe cya kabiri ugereranije na pulasitiki ya ABF, kandi gukata birushaho kunoza umuvuduko wo kohereza ikimenyetso n'imikorere myiza y'amashanyarazi.

Ikoranabuhanga ryo gukora imyobo rya TGV:

Uburyo bwo gukata buterwa na laser bukoreshwa mu gutuma ahantu hadahinduka hakoreshejwe laser ikoresha pulsed, hanyuma ikirahure cyavuwe na laser gishyirwa mu gisubizo cya aside hydrofluoric kugira ngo gikate. Igipimo cyo gukata ikirahure cy’ahantu hadahinduka muri aside hydrofluoric kirihuta kurusha icy’ikirahure kidahinduka kugira ngo kinyure mu myobo.

Ukuzuza TGV:

Ubwa mbere, hakorwa imyobo ya TGV idakingiye. Ubwa kabiri, urwego rw'imbuto rwashyizwe mu mwobo wa TGV udakingiye hakoreshejwe uburyo bwa PVD. Icya gatatu, gukoresha amashanyarazi kuva hasi ujya hejuru bituma TGV yuzura neza; Amaherezo, binyuze mu gufatana by'agateganyo, gusya inyuma, gukoresha icyuma gisukura (CMP), gukuraho umugozi, bigatuma habaho icyuma cyuzuyemo TGV.