Uburyo bwa TVG kuri wafer ya quartz ya safiro BF33 Gupfunyika wafer y'ikirahure

Ibyiza bya TGV (By Through Glass Via) bigaragarira cyane cyane muri ibi bikurikira:

1) Imiterere myiza y'amashanyarazi ifite frequency yo hejuru. Ibikoresho by'ikirahure ni ibikoresho bikingira, imiterere ya dielectric ni hafi 1/3 cy'ibikoresho bya silikoni, igihombo kiri munsi y'ibice 2-3 by'ubunini bw'ibikoresho bya silikoni, bigatuma igihombo cya substrate n'ingaruka za parasitiki bigabanuka cyane kugira ngo ikimenyetso cyoherezwa kibe cyiza;

(2) Ikirahuri kinini kandi gito cyane biroroshye kugikoresha. Dushobora gutanga Safira, Quartz, Corning, na SCHOTT kandi abandi bakora ibirahuri bashobora gutanga ibirahuri binini cyane (>2m × 2m) n'ibirahuri bito cyane (<50µm) hamwe n'ibikoresho by'ibirahuri byoroshye cyane.

3) Igiciro gito. Wungukira ku kubona byoroshye ikirahuri kinini kandi gito cyane, kandi ntibisaba gushyiramo ibice bikingira, ikiguzi cyo gukora plaque ya adaptateri y'ikirahure ni hafi 1/8 cy'plaque ya adaptateri ishingiye kuri silicon;

4) Uburyo bworoshye. Nta mpamvu yo gushyira urwego rwo gukingira ku buso bw'ubutaka n'urukuta rw'imbere rwa TGV (Byrold ​​Via), kandi nta gukata icyuma gikenewe mu gice cy'icyuma gifunganye cyane;

(5) Gukomera cyane mu buryo bwa mekanike. Nubwo ubunini bwa plaque ya adaptateri buri munsi ya 100µm, warpage iba ikiri nto;

6) Uburyo bwinshi bwo gukoresha. Uretse uburyo bwiza bwo gukoresha mu bijyanye no gukoresha ikoranabuhanga rigezweho, nk'ibikoresho bibonerana, bishobora no gukoreshwa mu bijyanye no guhuza sisitemu y'ikoranabuhanga, ubushobozi bwo guhumeka neza no kurwanya ingese, bituma ikirahure kiri mu rwego rwa MEMS encapsulation gifite ubushobozi bunini.

Kuri ubu, isosiyete yacu itanga ikoranabuhanga rya TGV (Byroth Glass Via) ry'ibirahure binyura mu mwobo, ishobora gutegura uburyo ibikoresho byinjira bitunganywa kandi igatanga ibicuruzwa mu buryo butaziguye. Dushobora gutanga Safiro, Quartz, Corning, na SCHOTT, BF33 n'izindi ndabyo. Niba ukeneye ubufasha, ushobora kuduhamagara igihe icyo ari cyo cyose! Ikaze!