Icyiciro cyo gutwara umwuka cya SiC gitanga umusaruro udasanzwe

Ishusho yagaragaye ku rwego rwo hejuru rw'ikirere gitanga umwuka wa SiC

Ibisobanuro bigufi:

Bitewe n’iterambere rikomeje mu nganda za semiconductor, ibikoresho byo gutunganya no kugenzura bisaba imikorere myiza cyane. Dushingiye ku buhanga bwinshi mu kugenzura ingendo no gushyira ibintu ku rwego rwa nanometer, twakoze urwego rwa H-type dual-axis ultra-precision air-bearing stage.

Ohereza imeri kuri twe

Ibiranga

Ishusho irambuye

Incamake

Ikozwe mu buryo bwa silicon carbide (SiC) ifite imiterere ya keramike ikozwe mu buryo bwa finite-element-optimized Element hamwe n'ikoranabuhanga rijyanye n'umwuka, iyi stage itanga ubunyangamugayo budasanzwe, gukomera, no gusubiza ibintu mu buryo buhindagurika. Ikwiriye cyane:

Gutunganya no kugenzura ibikoresho bya semiconductor
Gukora micro/nano na metrology
Gukata no gusiga isazi ku gipimo cya nanometero
Gusuzuma neza cyane ku muvuduko wo hejuru

Ibiranga by'ingenzi

Inzira iyobora SiC ifite umwukaku buryo bukabije kandi bunoze cyane
Imiterere ikomeye: umuvuduko ugera kuri 1 m/s, kwihuta ugera kuri 4 g, gutuza vuba
Umurongo wa Y uyobora ikigo cy'imodoka ebyiribitanga ubushobozi bwinshi bwo gutwara imizigo no kudahungabana
Amahitamo yo gukodesha: imashini ikoresha ikoranabuhanga rya optique cyangwa interferometer ya laser
Uburyo bwo gushyiramo amakuru neza: ± 0.15 μm;gusubirwamo: ± 75 nm
Uburyo bwo gukoresha insinga bwakozwe nezakugira ngo igishushanyo mbonera gisukuye kandi kibe cyizerwa igihe kirekire
Imiterere ishobora guhindurwaku bikenewe byihariye mu gusaba

Igishushanyo mbonera cya Ultra-Precision & Direct-Drive, Imiterere idahuza n'abandi

Udukingirizo twa Ceramic twa SiC: ~5 × gukomera kwa aluminiyumu na ~5 × kwaguka k'ubushyuhe kugabanuka, biha umutekano w'umuvuduko mwinshi n'ubushyuhe buhamye.
Ifite ikirere cyishyurwa: Imiterere y'umutungo yongera ubukana, ubushobozi bwo gutwara ibintu, no kudahungabana mu ngendo.
Imikorere Ihinduka: Ishyigikira umuvuduko wa 1 m/s na 4 g yihuta, ikaba ari nziza cyane mu mikorere y’umuvuduko mwinshi.
Guhuza mu buryo butagira umuvuduko: Ikorana na sisitemu zo gutandukanya ibintu n'imitingito, ibyiciro bizunguruka, module zitindika, n'ibikoresho byo gufata wafer.
Gucunga insinga: Ubwinshi bw'umurambararo bugenzurwa bugabanya umuvuduko mu gihe kirekire cyo gukora.

Moteri y'umurongo idafite coreless: Ingendo yoroshye nta mbaraga zo gufunga.
Imodoka nyinshi: Gushyira moteri mu ndege itwara imizigo bituma igororotse, igorofa, kandi ikagira ubuziranenge bw'inguni.
Gutandukanya ubushyuheMoteri zitandukanyijwe n'imiterere y'ikibuga; zishobora gukonjeshwa n'umwuka cyangwa amazi kugira ngo zikoreshwe mu buryo bukomeye.

Ibisobanuro

Icyitegererezo	400-400	500-500	600-600
Amashoka	X (guskana) / Y (intambwe)	X (guskana) / Y (intambwe)	X (guskana) / Y (intambwe)
Ingendo (mm)	400 / 400	500 / 500	600 / 600
Uburinganire (μm)	± 0.15	± 0.2	± 0.2
Gusubiramo (nm)	± 75	± 100	± 100
Umwanzuro (nm)	0.3	0.3	0.3
Umuvuduko ntarengwa (m/s)	1	1	1
Kwihutisha (g)	4	4	4
Ubugororangingo (μm)	± 0.2	± 0.3	± 0.4
Ituze (nm)	± 5	± 5	± 5
Umutwaro ntarengwa (kg)	20	20	20
Umuvuduko/Umuzingo/Umuvuduko (arc-sec)	± 1	± 1	± 1

Ibisabwa mu isuzuma:

Ingufu zitangwa n'umwuka: isukuye, yumye; ikime ≤ 0°F; kuyungurura uduce ≤ 0.25 μm; cyangwa azote 99.99%.
Ubuziranenge bwapimwe kuri mm 25 hejuru y'aho hagati mu gice cy'igorofa kuri 20±1 °C, 40–60% RH.

Porogaramu

Gupima, kugenzura no gucunga wafer hakoreshejwe semiconductor
Gukora micro/nano no gupima neza
Gukora optique yo mu rwego rwo hejuru no gukoresha interferometry
Ubushakashatsi mu by'ikirere n'ubushakashatsi bwa siyansi buhanitse

Ibibazo Bikunze Kubazwa - Icyiciro cyo Gutwara Umwotsi cya Silicon Carbide

1. Icyiciro cyo kujyana umwuka ni iki?

Icyiciro gifite umwuka gikoresha agace gato k'umwuka uri hagati y'ikibuga n'inzira kugira ngo gitangenta gushwanyagurika, nta kwambara, kandi nta kugenda neza cyaneBitandukanye n'ibyuma bisanzwe bikoreshwa mu gupima, bikuraho gucika intege, bigatanga ubuziranenge ku rwego rwa nanometero, kandi bigashyigikira ukwizerwa igihe kirekire.

2. Kuki hakoreshwa silicon carbide (SiC) mu miterere y'urubyiniro?

Ubukana bwinshi: ~5× y'icyuma cya aluminiyumu, bigabanya impinduka mu gihe cy'ihindagurika ry'ikirere.
Kwaguka guke k'ubushyuhe: ~5× munsi ya aluminiyumu, bikomeza kuba byiza mu gihe ubushyuhe buhindagurika.
Yoroheje: Ubucucike buke ugereranije n'icyuma, bigatuma imikorere yihuta cyane kandi yihuta cyane.
Ubwirinzi bwiza cyane: Gufata neza cyane no gukomera kugira ngo ushyireho neza cyane.

3. Ese ikibuga gisaba amavuta cyangwa kubungabunga?

Nta mavuta gakondo akenewe kuko harinta gukoranaho na mekanike. Isuzuma risabwa rikubiyemo:

Gutangaumwuka mwiza kandi wumye cyangwa azote
Igenzura rya buri gihe ry'ibikoresho byumisha ibyuma n'ibyuma byumisha ibyuma
Insinga zo kugenzura n'uburyo bwo gukonjesha

4. Ni ibihe bisabwa ku bijyanye n'umwuka?

Aho ikime gishyuha: ≤ 0 °F (≈ –18 °C)
Gutunganya uduce duto: ≤ 0.25 μm
Umwuka mwiza kandi wumye cyangwa azote yuzuye 99.99%
Igitutu gihamye kandi kidahindagurika cyane

Ku bijyanye natwe

XKH yihariye mu iterambere, gukora, no kugurisha ikirahure cyihariye cya optique n'ibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho by'ikoranabuhanga bya optique, ibikoresho by'ikoranabuhanga bikoreshwa n'abantu, n'ibya gisirikare. Dutanga ibikoresho bya optique bya Safira, ibifuniko bya lens za telefoni zigendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, na semiconductor crystal wafers. Dufite ubuhanga n'ibikoresho bigezweho, turakora neza mu gutunganya ibicuruzwa bitari iby'ubuziranenge, tugamije kuba ikigo gikomeye mu ikoranabuhanga rigezweho mu bikoresho bya optoelectronic.