4H / 6H-P 6inch SiC wafer Zero MPD Icyiciro cy'umusaruro Icyiciro cya Dummy
4H / 6H-P Ubwoko bwa SiC Igizwe na Substrates Imbonerahamwe isanzwe
6 santimetero ya diametre Silicon Carbide (SiC) Substrate Ibisobanuro
| Icyiciro | Umusaruro wa MPD ZeruIcyiciro (Z. Icyiciro) | Umusaruro usanzweIcyiciro (P. Icyiciro) | Dummy Grade (D Icyiciro) | ||
| Diameter | 145.5 mm ~ 150.0 mm | ||||
| Umubyimba | 350 mm ± 25 mm | ||||
| Icyerekezo cya Wafer | -Offumurongo: 2.0 ° -4.0 ° werekeza kuri [1120] ± 0.5 ° kuri 4H / 6H-P, Ku murongo: 〈111〉 ± 0.5 ° kuri 3C-N | ||||
| Ubucucike bwa Micropipe | 0 cm-2 | ||||
| Kurwanya | p-ubwoko bwa 4H / 6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| n-ubwoko bwa 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Icyerekezo Cyibanze | 4H / 6H-P | -1010} ± 5.0 ° | |||
| 3C-N | -{110} ± 5.0 ° | ||||
| Uburebure bwibanze | 32,5 mm ± 2,2 mm | ||||
| Uburebure bwa kabiri | 18.0 mm ± 2,2 mm | ||||
| Icyerekezo cya kabiri cya Flat | Silicon ireba hejuru: 90 ° CW. kuva hasi ya mbere ± 5.0 ° | ||||
| Guhezwa | Mm 3 | Mm 6 | |||
| LTV / TTV / Umuheto / Intambara | ≤2.5 μ m / ≤5 μ m / ≤15 μ m / ≤30 mm | ≤10 μ m / ≤15 μ m / ≤25 μ m / ≤40 mm | |||
| Ubugome | Igipolonye Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Impande Zimenetse Kumucyo mwinshi | Nta na kimwe | Uburebure bwa mm 10 mm, uburebure bumwe mm2 mm | |||
| Isahani ya Hex Kumucyo mwinshi | Agace kegeranye ≤0.05% | Agace kegeranye ≤0.1% | |||
| Uturere twa Polytype Kumucyo mwinshi | Nta na kimwe | Agace kegeranye ≤3% | |||
| Amashusho ya Carbone | Agace kegeranye ≤0.05% | Agace kegeranye ≤3% | |||
| Igishushanyo cya Silicon Igishushanyo Cyinshi Cyumucyo | Nta na kimwe | Uburebure bwuzuye≤1 × wafer diameter | |||
| Imipira yo ku mpande hejuru yumucyo mwinshi | Ntanumwe wemerewe ≥0.2mm y'ubugari n'uburebure | 5 byemewe, mm1 mm imwe imwe | |||
| Ubuso bwa Silicon Yanduye Kubwinshi | Nta na kimwe | ||||
| Gupakira | Multi-wafer Cassette cyangwa Igikoresho kimwe cya Wafer | ||||
Inyandiko:
Limits Imipaka ntarengwa ikoreshwa kuri wafer yose usibye agace kegeranye. # Igishushanyo kigomba kugenzurwa kuri Si face o
Ubwoko bwa 4H / 6H-P bwa 6-santimetero ya SiC wafer hamwe na Zero MPD amanota kandi umusaruro cyangwa dummy urwego rukoreshwa cyane mubikoresho bya elegitoroniki bigezweho. Ubushuhe buhebuje bwumuriro, imbaraga nyinshi zo kumeneka, hamwe no kurwanya ibidukikije bikaze bituma biba byiza kuri electronics power, nka voltage nini cyane na inverter. Urwego MPD ya Zeru itanga inenge nkeya, ingenzi kubikoresho byizewe cyane. Umusaruro wo mu rwego rwa waferi ukoreshwa mubikorwa binini byo gukora ibikoresho byamashanyarazi hamwe na RF, aho imikorere nibisobanuro ari ngombwa. Ku rundi ruhande, waferi yo mu rwego rwa Dummy, ikoreshwa muguhindura gahunda, kugerageza ibikoresho, hamwe na prototyping, bigafasha kugenzura ubuziranenge buhoraho mubicuruzwa bitanga umusaruro.
Ibyiza bya N-bwoko bwa SiC igizwe na substrate zirimo
- Ubushyuhe bwo hejuru: Wafer ya 4H / 6H-P SiC ikwirakwiza neza ubushyuhe, bigatuma ikwiranye nubushyuhe bwo hejuru kandi bukoresha ingufu za elegitoronike.
- Umuvuduko mwinshi wo kumeneka: Ubushobozi bwayo bwo gukoresha voltage ndende nta gutsindwa bituma biba byiza kuri electronics power na voltage ihinduranya porogaramu.
- Zero MPD (Micro Pipe Defect) Icyiciro: Ubucucike buke butuma kwizerwa no gukora cyane, bikenewe kubikoresho bya elegitoroniki.
- Umusaruro-Urwego rwo Gukora Misa: Birakwiriye kubyara umusaruro munini wibikoresho byifashishwa bya semiconductor hamwe nubuziranenge bukomeye.
- Dummy-Grade yo Kwipimisha no Guhindura: Gushoboza uburyo bwiza bwo gukora, kugerageza ibikoresho, hamwe na prototyping udakoresheje ibicuruzwa bihenze cyane.
Muri rusange, 4H / 6H-P 6-inimero ya SiC ya Wafers hamwe na Zero MPD ya Zero, amanota yumusaruro, hamwe na dummy urwego rutanga inyungu zingenzi mugutezimbere ibikoresho bya elegitoroniki bikora neza. Iyi wafer ifite akamaro kanini mubisabwa bisaba ubushyuhe bwo hejuru, gukora cyane, no guhindura imbaraga neza. Urwego rwa Zeru MPD rwemeza inenge nkeya kubikorwa byizewe kandi bihamye, mugihe waferi yo mu rwego rwo hejuru ishyigikira inganda nini hamwe n’ubugenzuzi bukomeye. Wafers yo mu rwego rwa Dummy itanga igisubizo cyigiciro cyogutezimbere inzira hamwe nogusubiramo ibikoresho, bigatuma biba ingirakamaro muburyo bwo guhimba semiconductor bihanitse.
Igishushanyo kirambuye
