Ingot 6 za Silicon Carbide 4H-SiC Semi-Insulation, Dummy Grade

Ingot 6 za Silicon Carbide 4H-SiC Semi-Insulation, Ishusho y'inyuguti ya Dummy

Ibisobanuro bigufi:

Silicon Carbide (SiC) irimo guhindura imikorere y’inganda za semiconductor, cyane cyane mu gukoresha ingufu nyinshi, inshuro nyinshi, no kwirinda imirasire. Ingot ya santimetero 6 ya 4H-SiC ikoreshwa mu buryo bwa "semi-insulation", itangwa mu rwego rwo gupima, ni ingenzi mu gukora ibishushanyo mbonera, ubushakashatsi, no gupima. Ifite icyuho kinini, ubushobozi bwiza bwo gutwara ubushyuhe, no gukomera kwa mekanike, iyi ngot ikora nk'amahitamo meza yo gupima no kunoza imikorere hatabayeho kwangiza ubwiza bw'ibanze bukenewe kugira ngo habeho iterambere rigezweho. Iki gicuruzwa gikoreshwa mu buryo butandukanye, harimo ibikoresho by'ikoranabuhanga bikoresha ingufu, ibikoresho bya radiyo (RF), na optoelectronics, bigatuma kiba igikoresho cy'agaciro ku nganda n'ibigo by'ubushakashatsi.

Ohereza imeri kuri twe

Ibiranga

Imitungo

1. Imiterere y'imiterere n'imiterere
●Ubwoko bw'ibikoresho: Karubide ya Silicone (SiC)
●Polytype: 4H-SiC, imiterere ya kristu ifite impande esheshatu
●Ubugari: santimetero 150 (150 mm)
●Ubunini: Ishobora guhindurwa (5-15 mm isanzwe ku gipimo cy'indorerwamo)
●Icyerekezo cya Crystal:
oIcyiciro cya mbere: [0001] (C-plane)
oAmahitamo ya kabiri: Off-axis 4° kugirango ikure neza mu gice cya epitaxial
●Icyerekezo cy'ibanze cy'ubugari: (10-10) ± 5°
●Icyerekezo cy'Icyumba ...

2. Imiterere y'amashanyarazi
●Ubushobozi bwo guhangana n'ibintu:
o Irinda ubushyuhe (>106^66 Ω·cm), ni nziza cyane mu kugabanya ubushobozi bwa parasite.
●Ubwoko bwo gukoresha imiti igabanya ubukana bw'ibiyobyabwenge:
oIkoreshwa mu buryo butagambiriwe, bigatuma amashanyarazi adakomera kandi agakomera mu bihe bitandukanye by'imikorere.

3. Imiterere y'ubushyuhe
●Ubushyuhe butwara umuriro: 3.5-4.9 W/cm·K, butuma ubushyuhe bukwirakwira neza mu buryo bukoresha ingufu nyinshi.
●Ingano y'ubushyuhe: 4.2×10−64.2 \inshuro 10^{-6}4.2×10−6/K, bishimangira ko urwego rw'ubushyuhe rudahinduka mu gihe cyo gutunganya ubushyuhe bwinshi.

4. Imiterere y'Itara ry'Ijisho
●Umupaka: Umupaka munini wa 3.26 eV, wemerera gukora munsi y'amashanyarazi n'ubushyuhe bwinshi.
●Gukorera mu mucyo: Gukorera mu mucyo mwinshi kuri UV n'uburebure bw'umuraba bugaragara, ingirakamaro mu gupima optoelectronic.

5. Imiterere ya mekanike
●Ubukomere: Igipimo cya Mohs ni 9, cya kabiri nyuma ya diyama, bigatuma iramba mu gihe cyo kuyitunganya.
●Ubucucike bw'inenge:
o Igenzurwa ku bushobozi buke bwo gukoresha porogaramu, igenzura ubuziranenge buhagije ku buryo idakoresha izindi porogaramu.
●Ubugari: Ubugari bufite aho bugarukira

Igipimo	Ibisobanuro birambuye	Ishami
Icyiciro	Impamyabumenyi y'ikinyoma
Ingano	150.0 ± 0.5	mm
Icyerekezo cya Wafer	Kuri axis: <0001> ± 0.5°	impamyabumenyi
Ubushobozi bwo guhangana n'amashanyarazi	> 1E5	Ω·cm
Icyerekezo cy'ibanze cy'ubugari	{10-10} ± 5.0°	impamyabumenyi
Uburebure bw'ibanze bw'ikiraro	Notch
Uduce (Igenzura ry'urumuri rwinshi)	< 3 mm mu gipimo cy'umurambararo	mm
Amasahani ya Hex (Igenzura ry'urumuri rwinshi)	Agace k'ikusanyirizo ≤ 5%	%
Uduce twa Polytype (Isuzuma ry'urumuri rwinshi)	Agace k'ikusanyirizo ≤ 10%	%
Ubucucike bw'imiyoboro mito	< 50	cm−2^-2−2
Gukata inkombe	3 byemewe, buri kimwe gifite ≤ 3 mm	mm
Icyitonderwa	Ubugari bwa wafer yo gukata < mm 1, > 70% (usibye impera ebyiri) byujuje ibisabwa byavuzwe haruguru

Porogaramu

1. Gukora ibishushanyo n'ubushakashatsi
Ingot y'indorerwamo ya santimetero 6 ya 4H-SiC ni ibikoresho byiza cyane byo gukora ibishushanyo mbonera n'ubushakashatsi, yemerera abakora na laboratwari gukora ibi bikurikira:
●Gerageza ibipimo by'imikorere mu Gutemba umwuka w'ubushyuhe mu binyabutabire (CVD) cyangwa Gutemba umwuka w'ubushyuhe mu buryo bw'umubiri (PVD).
● Tegura kandi unoze uburyo bwo gukata, gusiga irangi, no gukata wafer.
●Suzuma imiterere mishya y'ibikoresho mbere yo guhindura ukajya ku bikoresho byo mu rwego rwo hejuru.

2. Gupima no Gupima Ibikoresho
Imiterere y’ubushyuhe buciriritse ituma iyi ngot itagira umumaro kuri:
●Gusuzuma no gupima imiterere y'amashanyarazi y'ibikoresho bifite ingufu nyinshi n'ibikoresha amashanyarazi menshi.
●Gushushanya imiterere y'imikorere ya MOSFET, IGBT, cyangwa diode mu bipimo.
●Ikoreshwa nk'igisimbura cyoroheje cyane cy'ibice by'isuku nyinshi mu gihe cyo gukura mu ntangiriro.

3. Ibyuma by'ikoranabuhanga bikoresha ingufu
Ubushobozi bwo gutwara ubushyuhe bwinshi hamwe n'imiterere yagutse ya 4H-SiC ituma imikorere myiza mu bikoresho by'ikoranabuhanga bikoresha ingufu, harimo:
●Ingufu zikoresha ingufu nyinshi.
●Inverters z'amashanyarazi (EV).
●Sisitemu z'ingufu zivugururwa, nka inverters z'izuba na turbine z'umuyaga.

4. Porogaramu za Radio Frequency (RF)
Kubura kwa dielectric kwa 4H-SiC no kugenda cyane kwa electron bituma ikoreshwa neza kuri:
●Amplifiers za RF na transistors mu bikorwa remezo by'itumanaho.
●Sisitemu za radar zikoresha ikirere kinini zikoreshwa mu bijyanye n'indege n'ubwirinzi.
●Ibice by'umuyoboro udafite insinga by'ikoranabuhanga rishya rya 5G.

5. Ibikoresho birwanya imirasire
Bitewe n'uko irwanya inenge ziterwa n'imirasire, 4H-SiC ifite ubushobozi bwo gukingira imirasire ni nziza kuri:
●Ibikoresho byo gushakisha ikirere, harimo ibikoresho by'ikoranabuhanga bya satelite n'amashanyarazi.
●Ibintu by'ikoranabuhanga byakomejwe n'imirasire kugira ngo bigenzurwe kandi bigenzurwe.
●Ibikorwa byo kwirwanaho bisaba imbaraga mu bidukikije bikomeye.

6. Ikoranabuhanga rya Optoelectronics
Umucyo w'urumuri n'icyuho kinini cya 4H-SiC bituma ikoreshwa muri:
●Imashini zipima urumuri rwa UV n'amatara ya LED afite imbaraga nyinshi.
●Gupima irangi ry'amaso n'uburyo bwo kuvura ubuso.
●Gupima ibice by'urumuri bya elegitoroniki ku byuma bigezweho byo mu bwoko bwa sensor.

Ibyiza by'ibikoresho byo mu rwego rwa Dummy

Uburyo bwo gukoresha neza ikiguzi:
Ingano y'ibitari ngombwa ni ubundi buryo buhendutse bwo gusimbura ubushakashatsi cyangwa ibikoresho byo mu rwego rwo gukora, bigatuma biba byiza mu isuzuma risanzwe no kunoza imikorere.

Uburyo bwo guhindura ibintu:
Ibipimo bishyirwaho hamwe n'icyerekezo cya kristu bitanga uburenganzira bwo guhuza n'uburyo butandukanye bwo gukoresha.

Uburyo bwo kwaguka:
Ubugari bwa santimetero 6 bujyanye n'amahame ngenderwaho y'inganda, bigatuma habaho uburinganire buhamye mu mikorere y'urwego rw'umusaruro.

Ubudahangarwa:
Ingufu nyinshi za mekanike n'ubushyuhe burambye bituma ingot iramba kandi yizewe mu bihe bitandukanye byo kugerageza.

Ubushobozi bwo guhindura ibintu:
Bikwiriye inganda nyinshi, kuva kuri sisitemu z'ingufu kugeza ku itumanaho na optoelectronics.

Umwanzuro

Ingot ya Silicon Carbide (4H-SiC) ifite santimetero 6, ifite ubushobozi bwo gukingira, itanga urubuga rwizewe kandi rukoreshwa mu bushakashatsi, gushushanya no gupima mu nzego z’ikoranabuhanga rigezweho. Imiterere yayo idasanzwe y’ubushyuhe, amashanyarazi, na mekanike, hamwe no kugurwa no guhindurwa, bituma iba ibikoresho by’ingenzi haba mu mashuri makuru no mu nganda. Kuva ku bikoresho by’ikoranabuhanga kugeza kuri sisitemu za RF n’ibikoresho bikomeye, iyi ngot ishyigikira udushya muri buri cyiciro cy’iterambere.
Kugira ngo ubone ibisobanuro birambuye cyangwa gusaba ibiciro, twandikire utaziguye. Itsinda ryacu rya tekiniki ryiteguye kugufasha mu gutanga ibisubizo byihariye kugira ngo bihuze n'ibyo ukeneye.