Imashini ya Ion Beam Imashini ya safiro SiC Si

Ibisobanuro bigufi:

Imashini ya Ion Igereranya na Polishing Imashini ishingiye ku ihame ryaion. Imbere mucyumba kinini-vacuum, isoko ya ion itanga plasma, yihuta mumashanyarazi menshi. Iyi beam itera hejuru yikintu cya optique, ikuraho ibikoresho kurwego rwa atome kugirango igere kuri ultra-precité ikosora kandi irangire.

Ohereza imeri kuri twe

Ibiranga

Igishushanyo kirambuye

Ibicuruzwa Incamake ya Ion Beam Imashini

Imashini ya Ion Beam Igishushanyo na Polishing Imashini ishingiye ku ihame ryo gusohora ion. Imbere mucyumba kinini-vacuum, isoko ya ion itanga plasma, yihuta mumashanyarazi menshi. Iyi beam itera hejuru yikintu cya optique, ikuraho ibikoresho kurwego rwa atome kugirango igere kuri ultra-precité ikosora kandi irangire.

Nkuburyo budahuza, ion beam polishing ikuraho imihangayiko kandi ikirinda kwangirika kwisi, bigatuma biba byiza mugukora optique ihanitse ikoreshwa muri astronomie, icyogajuru, semiconductor, hamwe nubushakashatsi buhanitse.

Ihame ryakazi ryimashini ya Ion Beam

Ion Igisekuru
Gazi ya inert (urugero, argon) yinjizwa mucyumba cya vacuum kandi ionisiye binyuze mumashanyarazi kugirango ikore plasma.

Kwihuta & Imiterere
Iyoni yihuta kugera kuri volt magana cyangwa ibihumbi ya elegitoronike (eV) hanyuma igahinduka ahantu hahamye, hibandwa cyane.

Gukuraho Ibikoresho
Iyoni urumuri rusohora atome hejuru yubutaka idatangije imiti.

Kumenya Ikosa & Gutegura Inzira
Gutandukana kwimiterere yubuso bipimwa na interferometrie. Imikorere yo gukuraho ikoreshwa kugirango hamenyekane ibihe byo guturamo no kubyara ibikoresho byiza.

Gufunga-Gukosora
Iterative cycle yo gutunganya no gupima irakomeza kugeza intego za RMS / PV zagerwaho.

Ibyingenzi byingenzi byimashini ya Ion Beam

Isura rusange- Inzira itunganijwe, igaragara, ifatika, kandi yubusa

Igipimo cyo gukuraho Ultra-Stable- Gushoboza sub-nanometero ishusho yo gukosora

Gutunganya ibyangiritse- Nta nenge yo munsi y'ubutaka cyangwa impinduka zubatswe

Imikorere ihoraho- Kora neza kimwe kubikoresho byo gukomera bitandukanye

Gukosora Umuvuduko muto / Hagati- Kurandura amakosa utabyaye hagati / hejuru-yumurongo-mwinshi

Ibisabwa Kubungabunga bike- Ibikorwa birebire bikomeza hamwe nigihe gito cyo hasi

Ibyingenzi bya tekinike Ibisobanuro bya Ion Beam Imashini

Ingingo	Ibisobanuro
Uburyo bwo gutunganya	Ion iranyerera mubidukikije-vacuum
Ubwoko bwo gutunganya	Kudahuza isura igaragara & polishing
Ingano yakazi	Φ4000 mm
Imipira yimuka	3-axis / 5-axis
Gukuraho	≥95%
Ubuso bwuzuye	PV <10 nm; RMS ≤ 0.5 nm (bisanzwe RMS <1 nm; PV <15 nm)
Ubushobozi bwo gukosora inshuro	Kuraho amakosa make-yo hagati yamakosa atabanje kumenyekanisha amakosa yo hagati
Gukomeza Gukora	Ibyumweru 3-5 nta kubungabunga vacuum
Igiciro cyo Kubungabunga	Hasi

Ubushobozi bwo Gutunganya Imashini ya Ion Beam

Gushyigikirwa Ubuso Ubwoko

Byoroshye: Flat, spherical, prism

Urusobekerane: Symmetric / asimmetric asphere, off-axis asphere, silindrical

Umwihariko: Ultra-thin optics, slat optique, optique ya optique, optique ihuza, plaque ya fase, isura yubusa

Ibikoresho Bishyigikiwe

Ikirahure cyiza: Quartz, microcrystalline, K9, nibindi

Ibikoresho bitagira ingano: Silicon, germanium, nibindi.

Ibyuma: Aluminium, ibyuma bidafite ingese, titanium, nibindi.

Crystal: YAG, kariside imwe ya kirisiti ya kariside, nibindi

Ibikoresho bikomeye / byoroshye: Carbide ya Silicon, nibindi.

Ubuso Bwiza / Ubusobanuro

PV <10 nm

RMS ≤ 0.5 nm

Gutunganya Ikibazo Cyubushakashatsi bwa Ion Beam Imashini

Urubanza 1 - Indorerwamo isanzwe

Igikorwa: D630 mm ya quartz igorofa

Igisubizo: PV 46.4 nm; RMS 4.63 nm

Urubanza 2 - Indorerwamo X-ray

Igikorwa: 150 × 30 mm silicon iringaniye

Igisubizo: PV 8.3 nm; RMS 0.379 nm; Umusozi 0.13 µrad

Urubanza 3 - Indorerwamo ya Axis

Igikorwa: D326 mm off-axis indorerwamo

Igisubizo: PV 35.9 nm; RMS 3.9 nm

Ibibazo by'ikirahure cya Quartz

Ibibazo - Imashini ya Ion Beam

Q1: Gukonjesha ion ni iki?
A1:Ion beam polishinge ni inzira idahuza ikoresha urumuri rwibanze rwa ion (nka argon ion) kugirango ukure ibikoresho hejuru yumurimo. Iyoni yihuta kandi yerekeza ku buso, itera gukuraho urwego rwa atome, bivamo ultra-yoroshye kurangiza. Ubu buryo bukuraho imihangayiko no kwangirika kwubutaka, bigatuma biba byiza muburyo bwiza bwa optique.

Q2: Ni ubuhe bwoko bw'imiterere ishobora gutunganyirizwa imashini ya Ion Beam?
A2:UwitekaImashini ya Ion BeamIrashobora gutunganya ibintu bitandukanye, harimo ibice byoroshye bya optique nkaamagorofa, imirima, hamwe na prism, kimwe na geometrike igoye nkaaspheres, hanze-axis, naUbusa. Ifite akamaro cyane kubikoresho nk'ikirahure cya optique, infragre optique, ibyuma, nibikoresho bikomeye / byoroshye.

Q3: Nibihe bikoresho Ion Beam Polishing Machine ishobora gukorana nayo?
A3:UwitekaImashini ya Ion BeamIrashobora gutunganya ibintu byinshi, harimo:

Ikirahure cyiza: Quartz, microcrystalline, K9, nibindi.
Ibikoresho bitagira ingano: Silicon, germanium, nibindi.
Ibyuma: Aluminium, ibyuma bidafite ingese, titanium, nibindi.
Ibikoresho bya kirisiti: YAG, karbide imwe ya kirisiti ya kariside, nibindi.
Ibindi bikoresho bikomeye / byoroshye: Carbide ya Silicon, nibindi

Ibyerekeye Twebwe

XKH kabuhariwe mu iterambere ry’ikoranabuhanga rikomeye, gukora, no kugurisha ibirahuri bidasanzwe bya optique hamwe nibikoresho bishya bya kristu. Ibicuruzwa byacu bitanga ibikoresho bya elegitoroniki, ibikoresho bya elegitoroniki, n'abasirikare. Dutanga ibice bya optique ya optique, igifuniko cya terefone igendanwa, Ceramics, LT, Silicon Carbide SIC, Quartz, hamwe na semiconductor kristal wafers. Hamwe n'ubuhanga buhanga hamwe nibikoresho bigezweho, turi indashyikirwa mugutunganya ibicuruzwa bitari bisanzwe, tugamije kuba ibikoresho bya optoelectronic ibikoresho byubuhanga buhanitse.