4 inch SiC Wafers 6H Semi-Insulating SiC Substrates prime, ubushakashatsi, na dummy

Ibisobanuro bigufi:

Semi-insulike ya silicon karbide substrate ikorwa mugukata, gusya, gusya, gukora isuku nubundi buryo bwo gutunganya nyuma yo gukura kwa kariside ya silicon karbide.Igice cyangwa ibice byinshi bya kirisiti ikura kuri substrate yujuje ibyangombwa bisabwa nka epitaxy, hanyuma microwave RF igikoresho gikozwe muguhuza ibizunguruka no gupakira.Iraboneka nka 2inch 3inch 4incgh 6inch 8 santimetero yinganda, ubushakashatsi nicyiciro cya kabiri cyigizwe na silicon karbide karbide imwe ya kristu.

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

Kugaragaza ibicuruzwa

Icyiciro			Impamyabumenyi ya Zeru MPD (Z Grade)			Icyiciro cy'umusaruro usanzwe (P Grade)		Icyiciro cya Dummy (D Grade)
Diameter			99,5 mm ~ 100.0 mm
	4H-SI		500 μ m ± 20 mm			500 μm ± 25 mm
Icyerekezo cya Wafer			Off axis: 4.0 ° yerekeza kuri <1120> ± 0.5 ° kuri 4H-N, Ku murongo: <0001> ± 0.5 ° kuri 4H-SI
	4H-SI		≤1cm^-2			Cm5 cm^-2		Cm15 cm^-2
	4H-SI		≥1E9 Ω · cm					≥1E5 Ω · cm
Icyerekezo Cyibanze		{10-10} ± 5.0 °
Uburebure bwibanze		32,5 mm ± 2,2 mm
Uburebure bwa kabiri		18.0 mm ± 2,2 mm
Icyerekezo cya kabiri cya Flat		Silicon ireba hejuru: 90 ° CW.kuva kuri Prime igororotse ± 5.0 °
Guhezwa		Mm 3
LTV / TTV / Umuheto / Intambara		≤3 μ m / ≤5 μ m / ≤15 μ m / ≤30 mm						≤10 μ m / ≤15 μ m / ≤25 μ m / ≤40 mm
Ubugome			C mu maso				Igipolonye		Ra≤1 nm
			Si face	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Impande Zimenetse Kumucyo mwinshi		Nta na kimwe						Uburebure bwa mm 10 mm, ingaragu uburebure bwa mm2
Isahani ya Hex Kumucyo mwinshi		Agace kegeranye ≤0.05%						Agace kegeranye ≤0.1%
Uturere twa Polytype Kumucyo mwinshi		Nta na kimwe						Agace kegeranye ≤3%
Amashusho ya Carbone		Agace kegeranye ≤0.05%						Agace kegeranye ≤3%
Igishushanyo cya Silicon Igishushanyo Cyinshi Cyumucyo		Nta na kimwe						Uburebure bwuzuye ≤1 ＊ wafer diameter
Imipira yo ku mpande hejuru yumucyo mwinshi		Nta numwe wemereye ≥0.2 mm z'ubugari n'uburebure						5 byemewe, mm1 mm imwe imwe
Ubuso bwa Silicon Yanduye Kubwinshi		Nta na kimwe
Gupakira		Cassette ya Multi-wafer Cyangwa Igikoresho kimwe cya Wafer