LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6inch Orientaiton Y-42°/36°/108° Ubunini 250-500um
Ibipimo bya tekiniki
| Izina | LiTaO3 yo mu rwego rwo hejuru | Urwego rw'amajwi LiTaO3 |
| Axial | Z yaciwe + / - 0.2 ° | 36 ° Y igabanyije / 42 ° Y igabanyije / X igabanyije(+ / - 0.2 °) |
| Ingano | 76.2mm + / - 0.3mm/100±0.2mm | 76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm |
| Indege y'amadatum | 22mm + / - 2mm | 22mm + /-2mm32mm + /-2mm |
| Ubunini | 500um + /-5mm1000um + /-5mm | 500um + /-20mm350um + /-20mm |
| Televiziyo ya TV | ≤ 10um | ≤ 10um |
| Ubushyuhe bwa Curie | 605 °C + / - 0.7 °C (uburyo bwa DTA) | 605 °C + / -3 °C (uburyo bwa DTA |
| Ubwiza bw'ubuso | Gusukura impande ebyiri | Gusukura impande ebyiri |
| Impande zifite imigozi | kuzenguruka impande | kuzenguruka impande |
Ibiranga by'ingenzi
1. Imiterere ya Crystal n'imikorere y'amashanyarazi
· Guhagarara neza kwa Crystallographic: 100% 4H-SiC polytype dominance, nta na kimwe gikozwe muri crystalline inclusions (urugero, 6H/15R), hamwe na XRD rocking curve yuzuye ubugari kuri kimwe cya kabiri ntarengwa (FWHM) ≤32.7 arcsec.
· Uburyo bwo gutwara ibintu bwinshi: Uburyo bwo kugenda bwa electron bwa cm² 5,400/V·s (4H-SiC) n'uburyo bwo kugenda bw'umwobo bwa cm² 380/V·s, bituma ibikoresho bikoreshwa mu buryo bwo hejuru bishyirwaho.
·Ubukomere bw'imirasire: Ihangana n'imirasire ya neutron ya MeV 1 ifite urwego rwo kwangirika kwa displacement rwa 1×10¹⁵ n/cm², ikaba ari nziza cyane mu bikoresho by'indege n'ibikoresho bya kirimbuzi.
2. Imiterere y'ubushyuhe n'iy'imashini
· Ubushobozi budasanzwe bwo gutwara ubushyuhe: 4.9 W/cm·K (4H-SiC), inshuro eshatu kurusha silicon, ishyigikira imikorere iri hejuru ya 200°C.
· Koreji yo Kwagura Ubushyuhe Buke: CTE ya 4.0×10⁻⁶/K (25–1000°C), igenzura ko ihuye n'ibipfunyika bishingiye kuri silikoni kandi ikagabanya umuvuduko w'ubushyuhe.
3. Kugenzura no gutunganya neza inenge
Ese?
· Ubucucike bwa micropipe: <0.3 cm⁻² (wafers za santimetero 8), ubucucike bwa dislocation <1,000 cm⁻² (byemejwe binyuze mu gushushanya KOH).
· Ubwiza bw'ubuso: CMP-yahinduwe kugeza kuri Ra <0.2 nm, yujuje ibisabwa ku buryo bwo kugorora bwa EUV.
Porogaramu z'ingenzi
| Urubuga | Ingero z'ikoreshwa | Ibyiza bya tekiniki |
| Itumanaho ry'amajwi | module za laser za 100G/400G, silicon photonics hybrid modules | InP seed substrates ituma habaho direct bandgap (1.34 eV) na Si-based heteroepitaxy, bigabanya igihombo cyo guhuza optical. |
| Imodoka nshya zikoresha ingufu | Inverters za 800V zifite voltage nyinshi, chargers ziri mu bwato (OBC) | Ibyuma bya 4H-SiC bihangana na >1.200 V, bigabanya igihombo cyo gutwara umuvuduko ku kigero cya 50% n'ingano ya sisitemu ku kigero cya 40%. |
| Itumanaho rya 5G | Ibikoresho bya RF bya millimeter-wave (PA/LNA), amplifier y'amashanyarazi ya sitasiyo y'ibanze | Uduce duto twa SiC dukingira umuriro (resistivity >10⁵ Ω·cm) dutuma habaho integration ya passive ya frequency yo hejuru (60 GHz+). |
| Ibikoresho by'inganda | Ibikoresho bipima ubushyuhe bwinshi, transformateur z'amashanyarazi, moniteur za nucleus | InSb seed substrates (0.17 eV bandgap) itanga ubushobozi bwo kugaragaza imbaraga za rukuruzi kugeza kuri 300% @ 10 T. |
LiTaO₃ Wafers - Ibiranga by'ingenzi
1. Imikorere myiza ya Piezoelectric
· Ibipimo by'amashanyarazi bya piezoelectric byinshi (d₃₃~8-10 pC/N, K²~0.5%) bifasha ibikoresho bya SAW/BAW bifite frequency yo hejuru hamwe n'igihombo cyo gushyiramo <1.5dB kuri filters za 5G RF
· Guhuza neza cyane hakoreshejwe ikoranabuhanga rigezweho bishyigikira imiterere ya filter ya bandwidth nini (≥5%) kuri porogaramu za sub-6GHz na mmWave
2. Imiterere y'Ishusho
· Gutanga urumuri rw'umuyoboro wa interineti (>70% by'itumanaho kuva kuri 400-5000nm) ku bayobora amashanyarazi bagera kuri bandwidth ya 40GHz
· Uburyo bukomeye bwo gupima nonlinear optical (χ⁽²⁾~30pm/V) bworohereza gukora neza kwa kabiri kwa harmonic (SHG) muri sisitemu ya laser.
3. Gutuza ibidukikije
· Ubushyuhe bwinshi bwa Curie (600°C) butuma habaho uburyo bwo gusubiza piezoelectric mu bidukikije by’imodoka (-40°C kugeza 150°C)
· Ubudakora neza bw'ibinyabutabire mu kurwanya aside/alkali (pH1-13) butuma habaho ubwizerwe mu gukoresha sensor mu nganda.
4. Ubushobozi bwo guhindura ibintu
· Ubwubatsi bw'icyerekezo: X-cut (51°), Y-cut (0°), Z-cut (36°) kugira ngo habeho ibisubizo bya piezoelectric byagenewe
· Amahitamo yo gukoresha imiti igabanya ubukana bw'ingufu: Mg-doped (ubudahangarwa bw'ingufu z'amaso), Zn-doped (d₃₃ yongerewe)
· Gutunganya ubuso: Gusukura Epitaxial-ready polishing (Ra<0.5nm), ITO/Au metallization
LiTaO₃ Wafers - Porogaramu z'ibanze
1. Module za RF Front-End
· Filters za 5G NR SAW (Umurongo n77/n79) zifite ingano y'ubushyuhe (TCF) <|-15ppm/°C|
· Resonateur za BAW za Ultra-wideband kuri WiFi 6E/7 (5.925-7.125GHz)
2. Fotoniki zihujwe
· Modulators za Mach-Zehnder zihuta cyane (>100Gbps) zo gutumanaho kw'amajwi bihuza neza
· Ibikoresho bipima infrared bya QWIP bifite uburebure bw'uburebure bushobora guhindurwa kuva kuri 3-14μm
3. Ibyuma by'ikoranabuhanga by'imodoka
· Ibyuma bipima imodoka bikoresha ikoranabuhanga rya Ultrasonic bifite umurongo ngenderwaho w'imikorere >200kHz
· Transducer za TPMS piezoelectric zigumana ubushyuhe buri hagati ya -40°C na 125°C
4. Sisitemu zo Kwirinda
· Imashini ziyungurura za EW zifite >60dB zitarakira neza
· Amadirishya yo gushakisha missile IR atanga imirasire ya MWIR ya 3-5μm
5. Ikoranabuhanga Rikiri Gushya
· Imashini zihindura imiterere ya optomechanical quantum zikoreshwa mu guhindura ikoranabuhanga rya microwave kuva kuri optique
· Imiterere ya PMUT yo gufata amashusho ya ultrasound mu buvuzi (>20MHz resolution)
LiTaO₃ Wafers - Serivisi za XKH
1. Imicungire y'Uruhererekane rw'Ibicuruzwa
· Gutunganya boule-to-wafer hamwe n'igihe cy'ibyumweru 4 cyo kwitegura ibipimo bisanzwe
· Umusaruro mwiza uhenze utanga inyungu ku giciro cya 10-15% ugereranije n'abanywanyi
2. Ibisubizo byihariye
· Uburyo bwo gupima icyerekezo: 36°±0.5° Y-cut kugira ngo SAW ikore neza
· Imiterere ya doped: MgO (5mol%) doping yo gukoresha mu ikoranabuhanga ry'amaso
Serivisi zo gutunganya ibyuma: Cr/Au (100/1000Å) electrode pattern
3. Inkunga ya tekiniki
· Imiterere y'ibikoresho: XRD rocking curves (FWHM<0.01°), AFM surface analysis
· Gukoresha igikoresho: Gushushanya FEM kugira ngo hakorwe neza imiterere ya SAW filter
Umwanzuro
Udupira twa LiTaO₃ dukomeje gutuma habaho iterambere mu ikoranabuhanga mu itumanaho rya RF, ikoranabuhanga rya fotoniki rihuriweho, n'ibikoresho bipima ibidukikije bikomeye. Ubuhanga bwa XKH mu bikoresho, ubuhanga mu gukora ibintu neza, n'ubufasha mu buhanga mu gukoresha porogaramu bifasha abakiriya guhangana n'ibibazo byo gushushanya muri sisitemu z'ikoranabuhanga zo mu gisekuru gitaha.









