Ibikoresho byo gukura bya safiro Ingot Czochralski CZ Uburyo bwo kubyara 2inch-12inch Wafers

Ibikoresho byo gukura bya safiro Ingot Czochralski CZ Uburyo bwo gukora 2inch-12inch Wafers Wafers Yerekanwe

Ibisobanuro bigufi:

Ibikoresho byo gukura bya safiro Ingot (Uburyo bwa Czochralski) ni uburyo bugezweho bwagenewe kwera cyane, kutagira inenge nkeya ya safiro imwe yo gukura. Uburyo bwa Czochralski (CZ) butuma igenzura neza ryimbuto ikurura umuvuduko (0,5-5 mm / h), igipimo cyizunguruka (5-30 rpm), hamwe nubushyuhe bwubushyuhe muri iridium ikomeye, itanga kristu ya axisymmetric igera kuri santimetero 12 (300 mm) za diameter. Ibi bikoresho bifasha C / A-indege ya kirisiti yerekana icyerekezo, igafasha gukura kurwego rwa optique, urwego rwa elegitoroniki, hamwe na safiro (urugero, Cr³⁺ ruby, Ti³⁺ inyenyeri ya safi).

XKH itanga ibisubizo byanyuma-bikarangira, harimo ibikoresho byabigenewe (umusaruro wa waferi wa santimetero 12-12), gutezimbere uburyo bwiza (ubucucike bwinenge <100 / cm²), hamwe namahugurwa ya tekiniki, hamwe nibisohoka buri kwezi bya 5.000+ wafer kubisabwa nka LED substrate, epitaxy ya GaN, hamwe nububiko bwa semiconductor.

Ohereza imeri kuri twe

Ibiranga

Ihame ry'akazi

Uburyo bwa CZ bukora binyuze mu ntambwe zikurikira:
1.
2.
3. Gukora ibitugu no gukura kwinshi: Umuvuduko wo gukurura wagabanutse kugera kuri 0.2-1 mm / h, buhoro buhoro wagura diameter ya kirisiti kugeza kuntego (urugero, santimetero 4-12).
4. Gufata no gukonjesha: Kirisiti ikonjeshwa kuri 0.1-0.5 ° C / min kugirango igabanye ubushyuhe buterwa nubushyuhe.
5. Ubwoko bwa Crystal Ihuza:
Icyiciro cya elegitoroniki: Semiconductor substrates (TTV <5 μm)
Icyiciro cyiza: Windows ya laser ya Windows (transmitance> 90% @ 200 nm)
Doped variants: Ruby (Cr³⁺ concentration 0.01–0.5 wt.%), Ubururu bwa safiro

Ibice bigize sisitemu

Sisitemu yo gushonga
Iridium Crucible: Irwanya 2300 ° C, irwanya ruswa, ihujwe no gushonga (kg 100-400).
Itanura rishyushya Induction: Multi-zone yigenga yubushyuhe bwigenga (± 0.5 ° C), amashanyarazi meza.

2. Gukurura no Kuzunguruka Sisitemu
Motor-Precision Servo Moteri: Gukurura ibyemezo 0.01 mm / h, kwibanda kumurongo <0.01 mm.
Ikimenyetso cya Magnetic Fluid Ikimenyetso: Kudakwirakwiza kwanduza bikomeje (> amasaha 72).

3. Sisitemu yo kugenzura ubushyuhe
PID Ifunze-Ifunguye Igenzura: Igihe nyacyo cyo guhindura imbaraga (50-200 kW) kugirango uhagarike umurima wubushyuhe.
Kurinda gazi ya Inert: Ar / N₂ ivanze (99,999% byera) kugirango wirinde okiside.

4. Gukoresha no gukurikirana
Kugenzura Diameter ya CCD: Ibitekerezo nyabyo (byukuri ± 0.01 mm).
Ubushuhe bwa Thermography: Ikurikirana ibintu bikomeye-byimbere ya morphologie.

Kugereranya CZ na KY Uburyo bwo kugereranya

Parameter	Uburyo bwa CZ	Uburyo bwa KY
Icyiza. Ingano ya Crystal	Santimetero 12 (300 mm)	Mm 400 (ingot imeze nk'amapera)
Ubucucike bwuzuye	<100 / cm²	<50 / cm²
Igipimo cyo gukura	0,5-5 mm / h	0.1-2 mm / h
Gukoresha Ingufu	50-80 kWt / kg	80-120 kWt / kg
Porogaramu	LED substrate, GaN epitaxy	Windows nziza, ingoti nini
Igiciro	Guciriritse (gushora ibikoresho bihanitse)	Hejuru (inzira igoye)

Ibyingenzi

1. Inganda zikoresha inganda
GaN Epitaxial Substrates: Wafers ya santimetero 2-8 (TTV <10 μ m) kuri Micro-LEDs na diode ya laser.
SOI Wafers: Ubuso bwubuso <0.2 nm kuri chip-3D.

2. Amashanyarazi
UV Laser Windows: Ihangane 200 W / cm² yubucucike bwa optique ya lithographie.
Ibikoresho bitagira ingano: Coefficient ya Absorption <10⁻³ cm⁻¹ yo gushushanya amashusho.

3. Ibikoresho bya elegitoroniki
Igikoresho cya Smartphone Kamera: Mohs gukomera 9, 10 × kunanirwa kurwanya.
Isaha ya Smartwatch Yerekana: Ubunini bwa 0.3–0.5 mm, kohereza> 92%.

4. Ingabo zo mu kirere
Windows ya reaction ya kirimbuzi Windows: Kwihanganira imirasire igera kuri 10¹⁶ n / cm².
Indorerwamo Zirenze-Laser Indorerwamo: Guhindura ubushyuhe <λ / 20 @ 1064 nm.

Serivisi za XKH

1. Guhindura ibikoresho
Igishushanyo mbonera cy'Urugereko: Φ200-400 mm iboneza rya wafer ya santimetero 2-12.
Guhindura Doping: Gushyigikira bidasanzwe-isi (Er / Yb) hamwe ninzibacyuho-icyuma (Ti / Cr) doping kubintu byihariye bya optoelectronic.

2. Inkunga iherezo-iherezo
Gukoresha uburyo bwiza: Byabanje kwemezwa (50+) kubikoresho bya LED, ibikoresho bya RF, hamwe nibice bikomye.
Umuyoboro wa Global Service: 24/7 kwisuzumisha kure no kubungabunga kurubuga hamwe na garanti yamezi 24.

3. Gutunganya Hasi
Ibihimbano bya Wafer: Gukata, gusya, no gusya kuri waferi ya santimetero 12-12 (C / A-indege).
Ibicuruzwa byongerewe agaciro:
Ibikoresho byiza: Windows ya UV / IR (uburebure bwa 0,5-50 mm).
Ibikoresho bya Grade-Grade: Cr³⁺ ruby (Yemejwe na GIA), Ti³⁺ inyenyeri safi.

4. Ubuyobozi bwa tekinike
Impamyabumenyi: Wafers yubahiriza EMI.
Patent: Ipente yibanze muburyo bwa CZ guhanga udushya.

Umwanzuro

Ibikoresho byuburyo bwa CZ bitanga ubwuzuzanye bunini, igipimo cyinshi cyinenge, hamwe nibikorwa bihamye, bigatuma biba igipimo cyinganda kuri LED, igice cya kabiri, hamwe na porogaramu zo kwirwanaho. X.