Udupira twa SiC twa santimetero 4, udupira twa 6H dukingira uduce duto, dukozwe mu bushakashatsi, kandi dufite imiterere y'agace gato.

Ibishushanyo bya SiC bya santimetero 4 bya SiC bya 6H bikingira buhoro buhoro, ubushakashatsi, n'ubuhanga bw'ibishushanyo mbonera. Ishusho yagaragaye

Ibisobanuro bigufi:

Substrate ya silikoni ya karubide ikozwe hakoreshejwe gukata, gusya, gusiga, gusukura no gukoresha ubundi buryo bwo gutunganya nyuma yo gukura kwa selikoni ya karubide ikozwe muri crystal. Urwego rw'icyiciro cyangwa urwego rw'icyiciro cya kristu ruhingwa ku gice cy'icyiciro cyujuje ibisabwa nk'ikirahure, hanyuma igikoresho cya microwave RF kigakorwa hifashishijwe imiterere n'ipaki. Iboneka nk'inganda, ubushakashatsi n'igerageza, substrate ya silikoni ya karubide imwe ifite kristu ya ...

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Ibisobanuro by'ibicuruzwa

Icyiciro			Ingano y'umusaruro wa MPD ntarengwa (Ingano ya Z)			Icyiciro Gisanzwe cy'Umusaruro (Icyiciro cya P)		Icyiciro cy'indorerwamo (Icyiciro cya D)
Ingano			99.5 mm ~ 100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Icyerekezo cya Wafer			Umurongo utari hagati y'umurongo: 4.0° ugana <1120 > ±0.5° kuri 4H-N, Umurongo utari hagati y'umurongo: <0001>±0.5° kuri 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Icyerekezo cy'ibanze cy'ubugari		{10-10} ±5.0°
Uburebure bw'ibanze bw'ikiraro		mm 32.5±2.0 mm
Uburebure bwa kabiri bw'ikiraro		18.0 mm±2.0 mm
Icyerekezo cya kabiri cy'icyitegererezo		Silicon ireba hejuru: 90° CW. uvuye kuri Prime flat ±5.0°
Kutagaragaza Edge		mm 3
LTV/TTV/Umuheto /Umupfundo		≤3 μ m / ≤5 μ m / ≤15 μ m / ≤30 mm						≤10 μ m / ≤15 μ m / ≤25 μ m / ≤40 mm
Ubukana			Isura ya C				Igipolonye		Ra≤1 nm
			Isura ya Si	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Imyanya y'inkombe iterwa n'urumuri rwinshi		Nta na kimwe						Uburebure bw'umubare ≤ mm 10, imwe uburebure ≤2 mm
Amasahani ya Hex ashingiye ku rumuri rwinshi		Agace k'ikusanyirizo ≤0.05%						Agace k'ikusanyirizo ≤0.1%
Uduce twa Polytype dukoresheje urumuri rwinshi		Nta na kimwe						Agace k'ikusanyirizo ≤3%
Ibikubiye muri karuboni igaragara		Agace k'ikusanyirizo ≤0.05%						Agace k'ikusanyirizo ≤3%
Imiterere y'ubuso bwa Silicone iterwa n'urumuri rwinshi		Nta na kimwe						Uburebure buhuriweho ≤1 * umurambararo w'umugati
Umucyo w'ubushyuhe bwinshi n'ubukana		Nta na kimwe cyemewe ubugari n'ubujyakuzimu bwa ≥0.2 mm						5 byemewe, ≤1 mm buri kimwe
Kwanduzwa n'ubuso bwa silicon bitewe n'ubukana bwinshi		Nta na kimwe
Gupfunyika		Kaseti ya wafer nyinshi cyangwa icupa rimwe rya wafer