4H-N / 6H-N SiC Wafer Yongeye gushakisha umusaruro Dummy urwego Dia150mm Silicon karbide substrate
Uburebure bwa santimetero 6 silicon karbide (SiC) substrate ibisobanuro
Icyiciro | Zeru MPD | Umusaruro | Icyiciro cy'ubushakashatsi | Dummy Grade |
Diameter | 150.0mm ± 0,25mm | |||
Umubyimba | 4H-N | 350um ± 25um | ||
4H-SI | 500um ± 25um | |||
Icyerekezo cya Wafer | Ku murongo: <0001> ± 0.5 ° kuri 4H-SI | |||
Inzu y'ibanze | {10-10} ± 5.0 ° | |||
Uburebure bwibanze | 47.5mm ± 2.5mm | |||
Kwirengagiza impande | 3mm | |||
TTV / Umuheto / Intambara | ≤15um / ≤40um / ≤60um | |||
Ubucucike bwa Micropipe | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
Kurwanya 4H-N 4H-SI | 0.015 ~ 0.028Ω! Cm | |||
≥1E5Ω! Cm | ||||
Ubugome | Igipolonye Ra ≤1nm CMP Ra≤0.5nm | |||
#Ibice byumucyo mwinshi | Nta na kimwe | 1 byemewe, ≤2mm | Uburebure bwuzuye ≤10mm, uburebure bumwe≤2mm | |
* Isahani ya hex n'umucyo mwinshi | Agace kegeranye ≤1% | Agace kegeranye ≤ 2% | Agace kegeranye ≤ 5% | |
* Agace ka polytype ukoresheje urumuri rwinshi | Nta na kimwe | Agace kegeranye ≤ 2% | Agace kegeranye ≤ 5% | |
* & Igishushanyo ukoresheje urumuri rwinshi | Igishushanyo 3 kuri 1 x wafer diameter cumulative uburebure | Igishushanyo 5 kuri 1 x wafer diameter cumulative uburebure | 5ibishushanyo kuri 1 x wafer diameter cumulative uburebure | |
Chip | Nta na kimwe | 3 byemewe, ≤0.5mm buri umwe | 5 biremewe, mm1mm buri umwe | |
Kwanduzwa n'umucyo mwinshi | Nta na kimwe
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Igurisha & Serivisi zabakiriya
Kugura ibikoresho
Ishami rishinzwe kugura ibikoresho rishinzwe gukusanya ibikoresho byose bikenewe kugirango ubyare umusaruro. Gukurikirana neza ibicuruzwa nibikoresho byose, harimo imiti nubushakashatsi bwumubiri burahari.
Ubwiza
Mugihe na nyuma yo gukora cyangwa gutunganya ibicuruzwa byawe, ishami rishinzwe kugenzura ubuziranenge rifite uruhare mukureba neza ko ibikoresho byose hamwe n’ubworoherane byujuje cyangwa birenze ibyo wasobanuye.
Serivisi
Turishimye kuba dufite abakozi bashinzwe kugurisha bafite uburambe bwimyaka irenga 5 munganda za semiconductor. Baratojwe gusubiza ibibazo bya tekiniki kimwe no gutanga amagambo yatanzwe mugihe ukeneye.
turi iruhande rwawe igihe icyo aricyo cyose mugihe ufite ikibazo, ukagikemura mumasaha 10.