4H-N/6H-N SiC Wafer Research production Dummy grade Dia150mm Silicon carbide substrate
Ibisobanuro bya substrate ya silikoni karubide (SiC) ifite umurambararo wa santimetero 6
| Icyiciro | MPD ntarengwa | Umusaruro | Icyiciro cy'ubushakashatsi | Impamyabumenyi y'ikinyoma |
| Ingano | 150.0mm±0.25mm | |||
| Ubunini | 4H-N | 350um±25um | ||
| 4H-SI | 500um ± 25um | |||
| Icyerekezo cya Wafer | Kuri axis :<0001>±0.5° kuri 4H-SI | |||
| Inzu y'ibanze | {10-10}±5.0° | |||
| Uburebure bw'ibanze bw'ikiraro | 47.5mm±2.5mm | |||
| Kurekurwa ku ruhande | mm 3 | |||
| TTV/Umuheto/Umupfundo | ≤15um/≤40um/≤60um | |||
| Ubucucike bw'imiyoboro mito | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
| Ubushobozi bwo guhangana n'ingufu 4H-N 4H-SI | cm 0.015~0.028! | |||
| cm ≥1E5Ω! | ||||
| Ubukana | Igipimo cya Polonye Ra ≤1nm CMP Ra≤0.5nm | |||
| #Imisokoro iterwa n'urumuri rwinshi | Nta na kimwe | 1 yemerewe , ≤2mm | Uburebure buhuriweho ≤10mm, uburebure bumwe ≤2mm | |
| *Amasahani ya Hex akozwe mu rumuri rwinshi | Agace k'ikusanyirizo ≤1% | Agace k'ikusanyirizo ≤ 2% | Agace k'ikusanyirizo ≤ 5% | |
| *Uduce twa polytype dukoresheje urumuri rwinshi | Nta na kimwe | Agace k'ikusanyirizo ≤ 2% | Agace k'ikusanyirizo ≤ 5% | |
| *&Irashwanyagurika bitewe n'urumuri rwinshi | Imigozi 3 kugeza kuri 1 x uburebure bw'umurambararo wa wafer | Imigozi 5 kugeza kuri 1 x uburebure bw'umurambararo wa wafer | Imikufi 5 kugeza kuri 1 x uburebure bw'umurambararo wa wafer | |
| Chipu y'inkombe | Nta na kimwe | 3 byemewe, ≤0.5mm buri kimwe | 5 byemewe, ≤1mm buri kimwe | |
| Kwanduzwa n'urumuri rwinshi | Nta na kimwe
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Kugurisha na Serivisi ku Bakiriya
Kugura ibikoresho
Ishami rishinzwe kugura ibikoresho rifite inshingano zo gukusanya ibikoresho fatizo byose bikenewe kugira ngo ibicuruzwa byawe bikorwe. Gukurikirana neza ibicuruzwa byose n'ibikoresho, harimo n'isesengura ry'imiti n'ibinyabutabire birahari buri gihe.
Ireme
Mu gihe cyo gukora cyangwa gukora ibicuruzwa byawe na nyuma yabyo, ishami rishinzwe kugenzura ubuziranenge rigira uruhare mu kugenzura ko ibikoresho byose n'ubushobozi bwo kubikoresha byujuje cyangwa birenze ibyo wabigennye.
Serivisi
Twishimira kugira abakozi b’ubuhanga mu by’ubucuruzi bafite uburambe bw’imyaka irenga 5 mu nganda za semiconductor. Bahuguwe gusubiza ibibazo bya tekiniki ndetse no gutanga ibiciro ku gihe bihuye n’ibyo ukeneye.
Turi iruhande rwawe igihe icyo ari cyo cyose ugize ikibazo, kandi tuzagikemura mu masaha 10.
Ishusho irambuye
